A high-purity coolant circulation filtration and microparticle recovery device suitable for semiconductor wafer dicing

Abstract

This invention relates to a high-purity coolant circulation filtration and microparticle recovery device suitable for semiconductor wafer dicing. It includes a filter cylinder, a pre-filter assembly, a fine filter assembly, a drive assembly, a liquid inlet assembly, and a connecting assembly. The liquid inlet assembly is located at one end of the filter cylinder, and the other end of the filter cylinder has a through-hole for disassembling the pre-filter assembly. The pre-filter assembly is nested inside the fine filter assembly, forming an internally coarse and externally fine graded filtration structure. The pre-filter cylinder intercepts large particles, while the fine filter cylinder intercepts microparticles. A collection groove is located at the top of the pre-filter cylinder. The drive assembly drives the fine filter assembly to rotate, and a scraper brushes microparticles from the inner wall of the fine filter cylinder into the collection groove, achieving separate recovery of large and microparticles. The pre-filter assembly and the filter cylinder are detachably connected; during maintenance, only the pre-filter assembly needs to be disassembled, without affecting the fine filter assembly. This device achieves precise graded filtration and separate recovery of impurities, simplifying the maintenance process.

Description

Technical Field

[0001] This invention relates to the field of wafer processing, and in particular to a high-purity coolant circulation filtration and microparticle recovery device suitable for semiconductor wafer dicing. Background Technology

[0002] In semiconductor wafer dicing, the core function of coolant is to cool the dicing tool, lubricate the dicing interface, and promptly flush away the microparticles generated during the dicing process. These microparticles mainly include silicon powder generated during wafer dicing and metal debris generated by tool wear, and the particle size varies considerably.

[0003] Currently, most coolant circulation filtration devices for wafer dicing do not employ a multi-stage filtration structure, relying solely on a single filter screen. This fails to differentiate between microparticles of different sizes, resulting in both large and microparticles being trapped on the same screen. This not only leads to low filtration accuracy and compromises the coolant's cleanliness but also causes rapid clogging of the filter screen, necessitating frequent shutdowns for cleaning and severely impacting production efficiency. While a few devices incorporate multi-stage filtration structures to separate large and microparticles, the primary and secondary filtration components are often fixedly connected or integrated, resulting in complex structures. During maintenance, cleaning the large particles trapped on the primary filtration component requires complete disassembly from the filter cartridge, a time-consuming and labor-intensive process. Furthermore, this disassembly can damage the sealing and rotating structures of the secondary filtration component, reducing the device's lifespan and filtration accuracy. Summary of the Invention

[0004] To address the aforementioned technical problems, this invention provides a high-purity coolant circulation filtration and microparticle recovery device suitable for semiconductor wafer dicing.

[0005] The present invention provides a high-purity coolant circulation filtration and microparticle recovery device suitable for semiconductor wafer dicing, which adopts the following technical solution:

[0006] A high-purity coolant circulation filtration and microparticle recovery device suitable for semiconductor wafer dicing includes a filter cartridge, a primary filtration assembly, a fine filtration assembly, and a drive assembly.

[0007] The fine filtration component is disposed inside the filter cylinder, the primary filtration component is disposed inside the fine filtration component, the primary filtration component is detachably connected to the filter cylinder, one end of the filter cylinder is provided with a liquid inlet component, and coolant is pumped into the primary filtration component through the liquid inlet component, the fine filtration component is rotatably connected to the filter cylinder, and the drive component is used to drive the fine filtration component to rotate.

[0008] A scraper is fixed inside the filter cartridge, and the top of the scraper abuts against the fine filter assembly;

[0009] The fine filtration assembly includes a fine filter cylinder, and the primary filtration assembly includes a primary filter cylinder. The diameter of the fine filter cylinder is larger than that of the primary filter cylinder, and the mesh count of the fine filter cylinder is greater than that of the primary filter cylinder.

[0010] The filter cartridge is provided with a liquid outlet at the bottom.

[0011] Optionally, the top of the primary filter cylinder is integrally formed with a collection groove, and the bottom of the scraper is aligned with the collection groove.

[0012] Optionally, the pre-filter assembly further includes a pressure plate, a connecting plate, and a handle. The pressure plate is located at the end of the pre-filter cylinder, the connecting plate is located on the side of the pressure plate away from the pre-filter cylinder, the handle is located on the connecting plate, and a sealing ring is provided on the pressure plate. A through hole is provided at the end of the filter cylinder away from the liquid inlet assembly, and the pre-filter cylinder is inserted into the filter cylinder through the through hole. The pressure plate abuts against the outer wall of the filter cylinder through the sealing ring.

[0013] Optionally, the fine filtration assembly further includes a first rotating component, a second rotating component, and a toothed ring. The first rotating component is disposed on the outer wall of the fine filter cylinder, and the second rotating component is disposed on the inner wall of the fine filter cylinder. The fine filter cylinder is rotatably connected to the end of the filter cylinder through the first rotating component and the second rotating component. The end of the fine filter cylinder passes through the filter cylinder, and the toothed ring is connected to the part of the fine filter cylinder that extends out of the filter cylinder.

[0014] Optionally, the drive assembly includes a fixed base, a motor, and a gear. The fixed base is mounted on the top of the filter cylinder, the motor is mounted on the fixed base, and the output end of the motor is connected to the gear. The gear meshes with a gear ring to drive the fine filter cylinder to rotate.

[0015] Optionally, the liquid inlet assembly includes a liquid inlet pipe connected to an external water pump. The water pump is used to pump coolant into the liquid inlet pipe. The liquid inlet pipe passes sequentially through a filter cylinder, a fine filter cylinder, and a primary filter cylinder. A bearing is provided on the liquid inlet pipe. The fine filter cylinder is rotatably connected to the liquid inlet pipe via the bearing. The portion of the liquid inlet pipe that enters the primary filter cylinder is provided with a liquid inlet.

[0016] Optionally, the outer wall of the part of the liquid inlet pipe that enters the primary filter cylinder is provided with several limiting grooves, and the inner wall of the primary filter cylinder is provided with a corresponding number of limiting rods. The limiting rods are inserted into the limiting grooves to ensure that the opening of the collection tank faces upward.

[0017] Optionally, a connecting assembly is also included. The connecting assembly includes a concave part and a bolt. The end face of the filter cartridge away from the liquid inlet assembly includes an inner ring plate and an outer ring plate. Rotating part one is connected to the outer ring plate, and rotating part two is connected to the inner ring plate. The two ends of several concave parts are respectively connected to the inner ring plate and the outer ring plate. A countersunk hole is provided on the connecting plate. A threaded hole is provided on the concave part on the inner ring plate. The bolt passes through the countersunk hole and is threadedly connected to the threaded hole to fix the primary filtration assembly and the filter cartridge.

[0018] Optionally, both rotating component one and rotating component two are sealed deep groove bearings.

[0019] Optionally, the scraper is fixedly connected to the inner wall of the filter cylinder, and the scraper is made of polytetrafluoroethylene; both the primary filter cylinder and the fine filter cylinder are made of 316L stainless steel, and the sealing ring is made of perfluoroether rubber.

[0020] In summary, the present invention has at least one of the following beneficial technical effects:

[0021] 1. This device adopts a nested layout of primary filtration and fine filtration components. The primary filter screen intercepts large particulate impurities in the coolant, while the fine filter screen intercepts micro-particles, forming a graded filtration from coarse to fine. This effectively prevents large particulate impurities from entering the fine filtration component and causing blockage. At the same time, it ensures that the cleanliness of the filtered coolant meets the high requirements of semiconductor wafer dicing, reducing problems such as wafer scratches and short circuits caused by coolant impurities. This improves wafer dicing yield and product quality, and solves the pain points of insufficient precision of existing single filters and unreasonable graded filtration logic.

[0022] 2. An integrally formed collection tank is formed at the top of the primary filter cylinder. When the drive component drives the fine filter component to rotate, the scraper brushes the micro particles on the inner wall of the fine filter cylinder into the collection tank, while the primary filter cylinder retains the intercepted large particles. This achieves the classification and collection of micro and large particles and their separate recycling, avoiding the inconvenience of recycling caused by the mixing and accumulation of impurities. The recycled silicon powder, metal shavings and other impurities are reused, reducing resource waste.

[0023] 3. The pre-filter assembly and filter cartridge are detachably connected. When cleaning impurities later, there is no need to completely disassemble the fine filter assembly and other parts. Simply unscrew the bolts and pull out the pre-filter assembly by the handle. This effectively solves the problem that existing graded filtration devices require complete disassembly for maintenance, which is time-consuming and laborious, and easily damages the sealing and rotating structure of the fine filter assembly. This reduces downtime for maintenance and lowers equipment operation and maintenance costs. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the present invention.

[0025] Figure 2 yes Figure 1Partial exploded view.

[0026] Figure 3 This is a partial cross-sectional view of the present invention.

[0027] Figure 4 yes Figure 3 Enlarged view of part A in the middle.

[0028] Figure 5 This is a schematic diagram of the primary filter component.

[0029] Figure 6 This is a schematic diagram of the liquid inlet assembly.

[0030] Explanation of reference numerals in the attached drawings: 1. Filter cylinder; 2. Primary filtration assembly; 21. Primary filter screen cylinder; 22. Pressure plate; 23. Connecting plate; 24. Handle; 25. Collection tank; 26. Limiting rod; 3. Fine filtration assembly; 31. Fine filter screen cylinder; 32. Rotating component one; 33. Rotating component two; 34. Gear ring; 4. Drive assembly; 41. Fixed base; 42. Motor; 43. Gear; 5. Scraper; 6. Liquid inlet assembly; 61. Liquid inlet pipe; 62. Liquid inlet; 63. Limiting groove; 7. Connecting assembly; 71. Concave part; 72. Bolt. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0033] Furthermore, "several" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0034] Reference Figure 1-6The present invention discloses a high-purity coolant circulation filtration and microparticle recovery device suitable for semiconductor wafer cutting, comprising a filter cylinder 1, a primary filtration component 2, a fine filtration component 3, a drive component 4, a liquid inlet component 6, and a connecting component 7.

[0035] The liquid inlet assembly 6 is located on one end face of the filter cylinder 1. The end of the filter cylinder 1 away from the liquid inlet assembly 6 has a through hole for inserting and removing the primary filter assembly 2. The filter cylinder 1 is the main support structure of the device. It has a liquid outlet at the bottom for discharging the filtered clean coolant. The end face of the filter cylinder 1 away from the liquid inlet assembly 6 is also provided with an inner ring plate and an outer ring plate. The inner ring plate and the outer ring plate are fixedly connected by several concave parts 71 to form a stable support structure. A scraper 5 is fixed on the inner wall of the filter cylinder 1. The top of the scraper 5 is in close contact with the fine filter assembly 3 for self-cleaning of the fine filter assembly 3.

[0036] The primary filter assembly 2 is located inside the fine filter assembly 3 and is detachably connected to the filter cylinder 1. It includes a primary filter screen cylinder 21, a pressure plate 22, a connecting plate 23, a handle 24, and a sealing ring. The primary filter screen cylinder 21 is used to intercept large particulate impurities in the coolant. Its mesh size is 100 mesh. The top is integrally formed with a collection groove 25, which is aligned with the bottom of the scraper 5 to collect the micro particles brushed off by the scraper 5. At the same time, large particulate impurities will remain in the primary filter screen cylinder 21, realizing the separate recovery of micro particles and large particles. The pressure plate 22 is located at the end of the primary filter screen cylinder 21 and is equipped with a sealing ring for sealing the primary filter assembly 2 with the outer wall of the filter cylinder 1 to prevent coolant leakage. The connecting plate 23 is located on the side of the pressure plate 22 away from the primary filter screen cylinder 21. The handle 24 is located on the connecting plate 23 to facilitate the operator to disassemble the primary filter assembly 2. The inner wall of the primary filter screen cylinder 21 is provided with several limiting rods 26 for positioning in conjunction with the limiting groove 63 of the liquid inlet pipe 61.

[0037] The fine filter assembly 3 is disposed inside the filter cylinder 1 and is rotatably connected to the filter cylinder 1. It includes a fine filter screen cylinder 31, a first rotating component 32, a second rotating component 33, and a toothed ring 34. The fine filter screen cylinder 31 is used to intercept micro particles in the coolant. Its mesh size is 800 mesh, and its diameter is larger than that of the primary filter screen cylinder 21, so as to achieve graded filtration. The first rotating component 32 is disposed on the outer wall of the fine filter screen cylinder 31, and the second rotating component 33 is disposed on the inner wall of the fine filter screen cylinder 31. The fine filter screen cylinder 31 is rotatably connected to the inner ring plate and the outer ring plate of the filter cylinder 1 through the first rotating component 32 and the second rotating component 33 to ensure rotational stability and sealing. One end of the fine filter screen cylinder 31 passes through the filter cylinder 1, and the toothed ring 34 is connected to the part of the fine filter screen cylinder 31 that passes through the filter cylinder 1, and is used to cooperate with the drive assembly 4 to transmit power.

[0038] The drive assembly 4 is installed on the top of the filter cylinder 1 and includes a fixed base 41, a motor 42 and a gear 43. The fixed base 41 is used to fix the motor 42. The output end of the motor 42 is connected to the gear 43. The gear 43 meshes with the gear ring 34. After the motor 42 is started, the fine filter cylinder 31 is driven to rotate at a constant speed through the meshing transmission of the gear 43 and the gear ring 34. During the rotation, the scraper 5 fixed on the inner wall of the filter cylinder 1 will continuously brush off the micro particles intercepted on the inner wall of the fine filter cylinder 31. The brushed-off micro particles will fall precisely into the collection groove 25 at the top of the primary filter cylinder 21, realizing the collection of micro particles.

[0039] The liquid inlet assembly 6 includes a liquid inlet pipe 61 and a water pump. The liquid inlet pipe 61 passes through the filter cylinder 1, the fine filter cylinder 31, and the primary filter cylinder 21 in sequence, extending into the interior of the primary filter cylinder 21. The part of the liquid inlet pipe 61 that enters the primary filter cylinder 21 is provided with a liquid inlet 62 for uniformly pumping coolant into the primary filter cylinder 21. The liquid inlet pipe 61 is provided with a bearing. The fine filter cylinder 31 is rotatably connected to the liquid inlet pipe 61 through the bearing to ensure that the liquid inlet pipe 61 remains fixed when the fine filter cylinder 31 rotates. The outer wall of the part of the liquid inlet pipe 61 that enters the primary filter cylinder 21 is provided with several limiting grooves 63, which cooperate with the limiting rods 26 on the inner wall of the primary filter cylinder 21 to ensure that the collection tank 25 faces upward after the primary filter assembly 2 is installed. The liquid inlet pipe 61 is connected to a water pump for pressurizing and pumping coolant containing microparticles into the device.

[0040] The connecting component 7 includes a concave part 71 and a bolt 72. The concave part 71 connects the inner ring plate and the outer ring plate of the filter cylinder 1. The bolt 72 passes through the countersunk hole on the connecting plate 23 and is threadedly connected to the threaded hole on the concave part 71, so as to realize the detachable fixing of the primary filter component 2 and the filter cylinder 1. When disassembling, the primary filter component 2 can be pulled out by unscrewing the bolt 72. The rotating part 1 32 and the rotating part 2 33 are both sealed deep groove bearings to ensure the sealing of the fine filter component 3 when rotating. The scraper 5 is made of polytetrafluoroethylene to avoid damaging the fine filter cylinder 31.

[0041] The assembly process in this embodiment needs to be carried out sequentially to ensure that each component is accurately connected and well sealed. First, assemble the fine filter assembly 3. Embed the first rotating part 32 into the outer end of the fine filter cylinder 31 and the second rotating part 33 into the inner end of the fine filter cylinder 31 to complete the assembly of the fine filter assembly 3. Then, put the assembled fine filter assembly 3 into the filter cylinder 1, so that the first rotating part 32 is fixedly connected to the outer ring plate of the filter cylinder 1 and the second rotating part 33 is fixedly connected to the inner ring plate of the filter cylinder 1 to ensure that the fine filter cylinder 31 can rotate stably around the filter cylinder 1 and has good sealing performance with no coolant leakage. Then, fix the scraper 5 to the inner wall of the filter cylinder 1 and adjust the position of the scraper 5 so that the top of the scraper 5 is in close contact with the inner wall of the fine filter cylinder 31, while ensuring that the bottom of the scraper 5 is aligned with the preset position of the collection groove 25 of the primary filter assembly 2. Then, install the liquid inlet assembly 6, the primary filter assembly 2 and the drive assembly 4. Finally, connect the liquid inlet pipe 61 to the water pump and the liquid outlet to the wafer dicing equipment.

[0042] The core functionality achieves graded filtration of the coolant, self-cleaning of the fine filter assembly 3, and separate recovery of micro and large particles, while also ensuring ease of maintenance. After starting the water pump and motor 42, the water pump pressurizes the coolant containing micro particles and pumps it into the inlet pipe 61. The coolant then enters the primary filter cylinder 21 through the inlet 62. The 100-mesh primary filter cylinder 21 intercepts large particles, which remain inside. The pre-filtered coolant then enters the fine filter assembly 3, where the 800-mesh fine filter cylinder 31 intercepts micro particles. The motor 42 drives the fine filter cylinder 31 to rotate via the gear 43 and gear ring 34. The scraper 5 brushes the micro particles on the inner wall of the fine filter cylinder 31 into the collection tank 25, realizing the separate recovery of micro particles and large particles. The clean coolant is returned and reused through the outlet. When the impurities accumulate to a certain amount, the primary filter component 2 can be pulled out by unscrewing the bolt 72 to clean the large particles in the primary filter cylinder 21 and the micro particles in the collection tank 25 respectively. There is no need to disassemble the fine filter component 3, which is convenient to operate and ensures continuous production.

[0043] The working principle of this invention is as follows: Utilizing the nested layout of the pre-filter assembly 2 and the fine filter assembly 3 (with coarse inner and fine outer layers), staged filtration of the coolant is achieved. The pre-filter cylinder 21 intercepts large particles of impurities, while the fine filter cylinder 31 intercepts microparticles, ensuring the cleanliness of the coolant. The drive assembly 4 rotates the fine filter assembly 3, which, in conjunction with the scraper 5 fixed to the inner wall of the filter cylinder 1, achieves online self-cleaning of the fine filter assembly 3, preventing clogging. The detachable connection structure between the pre-filter assembly 2 and the filter cylinder 1 allows for impurity cleaning by simply disassembling the pre-filter assembly 2, eliminating the need for complete disassembly and reducing maintenance difficulty. The limiting structure of the liquid inlet assembly 6 ensures precise positioning of the pre-filter assembly 2, and the sealing structure guarantees no leakage. Ultimately, this achieves coolant recycling and efficient microparticle recovery, addressing the pain points of insufficient filtration accuracy and cumbersome maintenance in existing devices.

[0044] The above are all preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Therefore, all equivalent changes made in accordance with the structure, shape and principle of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A high-purity coolant circulation filtration and microparticle recovery device suitable for semiconductor wafer dicing, characterized in that: It includes a filter cartridge (1), a primary filtration assembly (2), a fine filtration assembly (3), and a drive assembly (4); The fine filtration assembly (3) is installed inside the filter cylinder (1), the primary filtration assembly (2) is installed inside the fine filtration assembly (3), the primary filtration assembly (2) is detachably connected to the filter cylinder (1), one end of the filter cylinder (1) is provided with a liquid inlet assembly (6), and the coolant is pumped into the primary filtration assembly (2) through the liquid inlet assembly (6). The fine filtration assembly (3) is rotatably connected to the filter cylinder (1), and the drive assembly (4) is used to drive the fine filtration assembly (3) to rotate. A scraper (5) is fixed inside the filter cylinder (1), and the top of the scraper (5) abuts against the fine filter assembly (3); The fine filtration assembly (3) includes a fine filter cylinder (31), and the primary filtration assembly (2) includes a primary filter cylinder (21). The diameter of the fine filter cylinder (31) is larger than that of the primary filter cylinder (21), and the mesh count of the fine filter cylinder (31) is greater than that of the primary filter cylinder (21). The filter cylinder (1) has a liquid outlet at its bottom.

2. The high-purity coolant circulation filtration and microparticle recovery device for semiconductor wafer dicing according to claim 1, characterized in that: The top of the primary filter cylinder (21) is integrally formed with a collection groove (25), and the bottom of the scraper (5) is aligned with the collection groove (25).

3. The high-purity coolant circulation filtration and microparticle recovery device for semiconductor wafer dicing according to claim 1, characterized in that: The primary filter assembly (2) further includes a pressure plate (22), a connecting plate (23), and a handle (24). The pressure plate (22) is located at the end of the primary filter cylinder (21). The connecting plate (23) is located on the side of the pressure plate (22) away from the primary filter cylinder (21). The handle (24) is located on the connecting plate (23). A sealing ring is provided on the pressure plate (22). A through hole is provided at the end of the filter cylinder (1) away from the liquid inlet assembly (6). The primary filter cylinder (21) is inserted into the filter cylinder (1) through the through hole. The pressure plate (22) abuts against the outer wall of the filter cylinder (1) through the sealing ring.

4. The high-purity coolant circulation filtration and microparticle recovery device for semiconductor wafer dicing according to claim 1, characterized in that: The fine filter assembly (3) further includes a first rotating component (32), a second rotating component (33), and a toothed ring (34). The first rotating component (32) is disposed on the outer wall of the fine filter cylinder (31), and the second rotating component (33) is disposed on the inner wall of the fine filter cylinder (31). The fine filter cylinder (31) is rotatably connected to the end of the filter cylinder (1) through the first rotating component (32) and the second rotating component (33). The end of the fine filter cylinder (31) passes through the filter cylinder (1), and the toothed ring (34) is connected to the part of the fine filter cylinder (31) that passes through the filter cylinder (1).

5. The high-purity coolant circulation filtration and microparticle recovery device for semiconductor wafer dicing according to claim 1, characterized in that: The drive assembly (4) includes a fixed base (41), a motor (42) and a gear (43). The fixed base (41) is installed on the top of the filter cylinder (1). The motor (42) is installed on the fixed base (41). The output end of the motor (42) is connected to the gear (43). The gear (43) meshes with the gear ring (34) to drive the fine filter cylinder (31) to rotate.

6. The high-purity coolant circulation filtration and microparticle recovery device for semiconductor wafer dicing according to claim 1, characterized in that: The liquid inlet assembly (6) includes a liquid inlet pipe (61), which is connected to a water pump. The water pump is used to pump coolant into the liquid inlet pipe (61). The liquid inlet pipe (61) passes through a filter cylinder (1), a fine filter cylinder (31), and a primary filter cylinder (21) in sequence. A bearing is provided on the liquid inlet pipe (61). The fine filter cylinder (31) is rotatably connected to the liquid inlet pipe (61) through the bearing. The part of the liquid inlet pipe (61) that enters the primary filter cylinder (21) is provided with a liquid inlet (62).

7. The high-purity coolant circulation filtration and microparticle recovery device for semiconductor wafer dicing according to claim 6, characterized in that: The outer wall of the part of the liquid inlet pipe (61) that enters the primary filter cylinder (21) is provided with several limiting grooves (63), and the inner wall of the primary filter cylinder (21) is provided with a corresponding number of limiting rods (26). The limiting rods (26) are inserted into the limiting grooves (63) to ensure that the opening of the collection tank (25) faces upward.

8. The high-purity coolant circulation filtration and microparticle recovery device for semiconductor wafer dicing according to claim 3, characterized in that: It also includes a connecting component (7), which includes a concave part (71) and a bolt (72). The end face of the filter cylinder (1) away from the liquid inlet component (6) includes an inner ring plate and an outer ring plate. The first rotating part (32) is connected to the outer ring plate, and the second rotating part (33) is connected to the inner ring plate. The two ends of several concave parts (71) are respectively connected to the inner ring plate and the outer ring plate. The connecting plate (23) has a countersunk hole, and the concave part (71) on the inner ring plate has a threaded hole. The bolt (72) passes through the countersunk hole and is threadedly connected to the threaded hole to fix the primary filter component (2) and the filter cylinder (1).

9. The high-purity coolant circulation filtration and microparticle recovery device for semiconductor wafer dicing according to claim 4, characterized in that: Both rotating component one (32) and rotating component two (33) are sealed deep groove bearings.

10. The high-purity coolant circulation filtration and microparticle recovery device for semiconductor wafer dicing according to claim 1, characterized in that: The scraper (5) is fixedly connected to the inner wall of the filter cylinder (1), and the scraper (5) is made of polytetrafluoroethylene; the primary filter cylinder (21) and the fine filter cylinder (31) are both made of stainless steel 316L, and the sealing ring is made of perfluoroether rubber.

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