Treatment process for recycling gallium antimonide seed crystals

By employing mechanical polishing, ultrasonic hydrolysis, and a two-step chemical passivation process, the problem of unusable gallium antimonide seed crystals has been solved, achieving efficient recycling and low-cost crystal growth.

CN122279760APending Publication Date: 2026-06-26GUANGDONG JINGZHI OPTOELECTRONICS TECH CO LTD
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Patent Information

Application Number
CN202610307468.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-13
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

After the growth of gallium antimonide seed crystals is completed, compound and oxide layers appear due to the influence of liquid sealant, making them unusable. Furthermore, conventional treatment with strong acid corrosive solutions can cause dimensional changes, affecting clamping and thermal contact, resulting in resource waste and high costs.

Method used

The process employs mechanical grinding, ultrasonic hydrolysis, two-step chemical passivation, and selective etching. Grinding removes surface contaminants, ultrasonic cleaning removes salt residues, the first etching solution forms a white passivation layer, and the second etching solution removes the passivation layer, ensuring the geometric stability of the seed crystal.

Benefits of technology

This technology enables the reuse of gallium antimonide seed crystals while maintaining their original size, reduces manufacturing costs, ensures the stability and quality of crystal growth, and achieves near-zero loss for repeated use.

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Abstract

The invention belongs to the field of semiconductor materials, and discloses a treatment process for recycling gallium antimonide seed crystals. The treatment process comprises the following steps: polishing and cleaning the gallium antimonide seed crystal, then soaking the gallium antimonide seed crystal in a first corrosive liquid and a second corrosive liquid in sequence, and then cleaning and drying the gallium antimonide seed crystal. Through the synergistic process of mechanical polishing, ultrasonic hydrolysis, chemical passivation and selective corrosion, pollutants are thoroughly removed, and meanwhile, a seed crystal body is protected.
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