A boat and a method for producing metal powder using the same

Abstract

The present application provides a boat and a method for producing metal powder, and relates to the technical field of powder metallurgy. The boat comprises an upper bearing plate, a lower ventilation plate and a gap forming structure. The upper bearing plate and the lower ventilation plate are arranged in parallel and connected. The gap forming structure is arranged between the upper bearing plate and the lower ventilation plate, and a gas distribution gap is formed between the two. The upper bearing plate is provided with first array holes which are uniformly distributed in a two-dimensional array according to a first rule. The lower ventilation plate is provided with second array holes which are uniformly distributed in a two-dimensional array according to a second rule. In the projection direction perpendicular to the plate surface, the projection center of any one second array hole is located at the geometric center of the polygon formed by the projection centers of the four first array holes corresponding to the second array hole. The boat can realize uniform distribution of gas, effectively improve the mass transfer efficiency, completely eliminate the reaction dead zone, and make it difficult for by-products to accumulate.

Description

Technical Field

[0001] This invention relates to the field of powder metallurgy technology, and in particular to a vessel and a method for producing metal powders therefrom. Background Technology

[0002] In fields such as semiconductors, new energy, powder metallurgy, and advanced ceramic material preparation, boats are commonly used as containers to hold materials, and process gases (such as inert protective gases, reactive gases, and etching gases) are introduced into the reactor for high-temperature treatment. The contact efficiency between the process gases and materials, and the timely removal of reaction byproducts, directly determine the uniformity of the reaction, material quality, and production efficiency.

[0003] Currently, common boat-shaped structures are mainly divided into two categories:

[0004] 1. Solid flat plate or grooved boat: Gas mainly flows over the material from above, and the exchange with the lower surface (contact surface) of the material is extremely limited. This leads to asynchronous reactions on the upper and lower surfaces of the material, a shielding effect, uneven reaction, dead zones at the bottom, and retention of by-products.

[0005] 2. Ordinary porous plates or mesh boats: While this type of structure improves permeability through bottom openings, the gas flow path is too straight. Process gases are injected vertically upwards from the bottom holes and quickly disperse, resulting in short contact time with the material and insufficient mixing. More importantly, waste gases (post-reaction gases and byproducts) generated during the reaction are difficult to efficiently escape downwards from the material layer, easily forming localized accumulations in the material gaps. This interferes with the introduction of subsequent fresh process gases, leading to deterioration of reaction kinetics and a decrease in product purity or membrane uniformity. Summary of the Invention

[0006] The purpose of this invention is to provide a boat-shaped vessel and a method for producing metal powder therefrom, to solve the technical problems existing in the prior art, such as uneven gas distribution, low mass transfer efficiency, difficulty in eliminating reaction dead zones, and easy accumulation of by-products in the boat-shaped vessel structure. The various technical effects of the preferred technical solutions provided by this invention are detailed below.

[0007] To achieve the above objectives, the present invention provides the following technical solution: A vessel includes an upper support plate, a lower vent plate, and a gap forming structure. The upper support plate and the lower vent plate are arranged parallel to each other and connected. The gap forming structure is provided between the upper support plate and the lower vent plate, forming a gas distribution gap between them. The upper support plate has a first array of holes evenly distributed in a two-dimensional array according to a first rule. The lower vent plate has a second array of holes evenly distributed in a two-dimensional array according to a second rule. In the projection direction perpendicular to the plate surface, the projection center of any second array hole is located at the geometric center of the polygon formed by the projection centers of the four adjacent first array holes.

[0008] Preferably, the first regular two-dimensional array is a square array or an equilateral triangle array.

[0009] Preferably, the gap forming structure includes a plurality of adjusting pads located between the upper support plate and the lower vent plate, wherein the upper surface of the adjusting pad is in contact with the lower surface of the upper support plate, and the lower surface of the adjusting pad is in contact with the upper surface of the lower vent plate.

[0010] Preferably, it also includes a fixing structure, wherein the upper support plate and the lower ventilation plate are connected in a separate, detachable manner through the fixing structure.

[0011] Preferably, the fixing structure includes a plurality of fixing bolts, and the upper bearing plate and the lower vent plate are bolted together by the fixing bolts.

[0012] Preferably, the upper support plate and the lower ventilation plate are integrally connected.

[0013] Preferably, it also includes a side panel, which is vertically arranged, and the bottom of the side panel is connected to the outer edge of the lower vent plate.

[0014] Preferably, the diameter of the second array aperture is not greater than the diameter of the first array aperture.

[0015] Preferably, the cross-sectional shape of the first array aperture and the second array aperture is one or a combination of circular, square, elliptical and slit shapes.

[0016] A method for producing metal powder using the above-mentioned boat-shaped dish includes the following steps: S1. Select materials to prepare a boat based on the metal powder to be prepared; S2. Powdered raw materials are laid on top of the upper support plate; S3. Gas is introduced from below the lower vent plate upwards, or gas is introduced from above the powder raw material downwards; S4. When gas is introduced from below the lower vent plate upwards, the gas enters the gas distribution gap through the second array holes, diffuses laterally and mixes evenly inside the gas distribution gap, and then enters the corresponding layer of the powder raw material through the staggered first array holes, contacts the powder raw material and completes the reduction reaction, so that the powder raw material forms the metal powder, and at the same time generates exhaust gas. S5. Part of the exhaust gas generated in step S4 is discharged from the top of the corresponding layer of the powder raw material, and the other part enters the gas distribution gap through the first array hole, is laterally collected inside the gas distribution gap, and is then discharged downward through the misaligned second array hole; S6. When gas is introduced from above the powder raw material from top to bottom, the gas contacts the powder raw material and completes the reduction reaction. The generated exhaust gas enters the gas distribution gap through the first array hole, diffuses laterally and mixes evenly inside the gas distribution gap, and then is discharged downward through the staggered second array hole.

[0017] The beneficial effects of this invention are as follows: Through a unique gas path design, the boat-shaped vessel forces the gas to flow laterally within the gas distribution gap located below the material by using a static structure with the centers of the first and second array holes intersecting. This breaks the traditional unidirectional vertical flow pattern and forms a three-dimensional forced convection, allowing the gas to penetrate into every corner of the material, completely eliminating reaction dead zones, and achieving a uniform and efficient gas-material reaction interface, ultimately improving process quality, efficiency, and economy.

[0018] The gas can contact the lower surface of the material in an inclined and scattered manner, thereby increasing the contact area and turbulence, extending the effective contact time, and significantly improving the contact efficiency between the gas and the material. This makes the reaction more complete and uniform, and can reduce the total consumption of process gas while achieving the same or even better process results.

[0019] The boat-shaped vessel provides a physically separated yet highly efficient independent channel for fresh process gases moving upwards and exhaust gases moving downwards, enabling real-time gas renewal and greatly optimizing the reaction kinetics environment.

[0020] The vessel can remove the reaction exhaust gas from the reaction interface in real time and quickly, avoiding reverse reaction and contamination, and ensuring that the main reaction always proceeds under the dominant concentration gradient, which significantly improves the reaction rate, conversion rate and product purity.

[0021] The lateral flow of gas within the gas distribution gap helps to blow away any fine particles that may fall, preventing them from clogging the holes below and achieving self-cleaning. The separable design of the upper support plate and the lower ventilation plate also facilitates thorough cleaning and maintenance. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a cross-sectional view of the present invention from a frontal perspective; Figure 2 This is a top-view cross-sectional structural diagram of the present invention; In the figure, 1 is the upper support plate; 11 is the first array hole; 2. Lower vent plate; 21. Second array of holes; 3. Gap formation structure; 4. Fixed structure; 5. Side panels; 6. Gas distribution gap. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0025] In the description of this invention, it should be understood that the terms "center," "side," "length," "width," "height," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and "side," etc., indicate the orientation or positional relationship based on the appendix. Figure 1 The orientations or positional relationships shown are for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.

[0026] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0027] Reference Figures 1 to 2 The present invention provides a boat, comprising an upper support plate 1, a lower ventilation plate 2, a gap forming structure 3, and a fixing structure 4.

[0028] The upper support plate 1 and the lower ventilation plate 2 are arranged parallel to each other, and are connected to each other. The upper support plate 1 is used to support materials, and the lower ventilation plate 2 is used to introduce and discharge gas.

[0029] A gap forming structure 3 is provided between the upper support plate 1 and the lower vent plate 2. With the assistance of the gap forming structure 3, a preset distance can be maintained between the upper support plate 1 and the lower vent plate 2, thereby forming a gas distribution gap 6.

[0030] The upper support plate 1 has a first array hole 11 evenly distributed in a two-dimensional array according to a first rule, and the lower ventilation plate 2 has a second array hole 21 evenly distributed in a two-dimensional array according to a second rule.

[0031] In the projection direction perpendicular to the plate surface, the projection center of any second array hole 21 is located at the geometric center of the polygon formed by the projection centers of the four adjacent first array holes 11.

[0032] In this embodiment, the first regular two-dimensional array is preferably a square array or an equilateral triangle array. Taking a square array as an example, when the first array hole 11 is a square array, the polygon formed by the four first array holes 11 adjacent to any second array hole 21 is a square, and the second array hole 21 is located at the geometric center of the square.

[0033] This means that each of the second array holes 21 located in the lower layer can form a "center-corner" correspondence with the four first array holes 11 located in the upper layer, forming a stable topological relationship, which is the basis for generating a specific airflow pattern. Furthermore, the second array holes 21 and the first array holes 11 can be completely offset in any direction and do not overlap.

[0034] In practical applications, the boat-shaped vessel can form a physical guide through the above structure, forcing the gas flow path to change in three-dimensional space.

[0035] Specifically, when the boat is in the air intake mode, the process gas passes vertically from below the boat through the second array hole 21 of the lower vent plate 2. During the movement, the gas is blocked by the solid part of the upper support plate 1, which prevents the gas from rising vertically. Instead, the gas is forced to diffuse laterally inside the gas distribution gap 6 in order to find an outlet to rise. Finally, the gas flows out from the first array hole 11 of the upper support plate 1 located on the periphery at an angle inclined to the vertical direction, thereby acting evenly and dispersedly on the bottom of the material.

[0036] When the vessel is in exhaust mode, the exhaust gas generated by the reaction is more likely to penetrate downward from the material layer through the first array hole 11 with a higher porosity, driven by the concentration difference and the overall airflow. It enters the gas distribution gap 6 through the first array hole 11 of the upper support plate 1. During the movement, the exhaust gas is blocked by the solid part of the lower vent plate 2, causing the exhaust gas to be forced to accumulate laterally inside the gas distribution gap 6, and finally discharged from the system through the second array hole 21 of the lower vent plate 2 which is staggered in position.

[0037] Through a unique gas path design, the boat-shaped vessel uses a static structure with the first array hole 11 and the second array hole 21 intersecting at their centers to force the gas to flow laterally within the gas distribution gap 6 located below the material. This breaks the traditional unidirectional vertical flow pattern and forms a three-dimensional forced convection, allowing the gas to penetrate into every corner of the material, completely eliminating reaction dead zones, and achieving a uniform and efficient gas-material reaction interface. Ultimately, this improves process quality, efficiency, and economy.

[0038] The gas can contact the lower surface of the material in an inclined and scattered manner, thereby increasing the contact area and turbulence, extending the effective contact time, and significantly improving the contact efficiency between the gas and the material. This makes the reaction more complete and uniform, and can reduce the total consumption of process gas while achieving the same or even better process results.

[0039] The boat-shaped vessel provides a physically separated yet highly efficient independent channel for fresh process gases moving upwards and exhaust gases moving downwards, enabling real-time gas renewal and greatly optimizing the reaction kinetics environment.

[0040] The vessel can remove the reaction exhaust gas from the reaction interface in real time and quickly, avoiding reverse reaction and contamination, and ensuring that the main reaction always proceeds under the dominant concentration gradient, which significantly improves the reaction rate, conversion rate and product purity.

[0041] The lateral flow of gas within the gas distribution gap 6 helps to blow away any fine particles that may fall, preventing them from clogging the holes below and achieving self-cleaning. The separable design of the upper support plate 1 and the lower ventilation plate 2 also facilitates thorough cleaning and maintenance.

[0042] The main structure of the vessel can be directly realized through conventional machining, stamping or 3D printing, without the need for complex internal pipes. It has a simple structure, is easy to manufacture, has controllable cost and high reliability.

[0043] As an optional implementation, the gap forming structure 3 includes a plurality of adjusting pads located between the upper support plate 1 and the lower vent plate 2, with the upper surface of the adjusting pads contacting the lower surface of the upper support plate 1 and the lower surface of the adjusting pads contacting the upper surface of the lower vent plate 2.

[0044] The specific number and location of the adjusting pads are not limited. They can be flexibly selected and set as long as the support strength is met. In the attached drawings of this embodiment, a structure with five adjusting pads is preferably shown, with four located at the corners and one at the center.

[0045] In this embodiment, the upper support plate 1 and the lower ventilation plate 2 can be directly connected as an integral unit by a fixed connection, or they can be connected as separate, detachable units. In the actual production process, the choice can be made flexibly according to the actual usage requirements.

[0046] The fixing structure 4 is used for the detachable connection between the upper support plate 1 and the lower ventilation plate 2. The upper support plate 1 and the lower ventilation plate 2 are connected in a separate detachable manner through the fixing structure 4.

[0047] The fixed structure 4 preferably includes multiple fixing bolts, and the upper bearing plate 1 and the lower ventilation plate 2 are bolted together by the fixing bolts.

[0048] The specific number and location of the fixing bolts are not limited here. They can be flexibly selected and set as long as the connection strength is met. In the attached figure of this embodiment, a structure with five fixing bolts is preferably shown, with four located at the corners and one at the center, forming a uniform distribution to make the force more balanced and improve the connection strength and stability.

[0049] As an optional implementation, it also includes a side panel 5, which is vertically arranged. The bottom of the side panel 5 is connected to the outer edge of the lower ventilation plate 2. The connection here is preferably an integral connection, which makes the connection more secure. With the cooperation of the side panel 5, the side panel 5 and the lower ventilation plate 2 can form a cavity for accommodating materials, making it easier to place materials.

[0050] As an optional implementation, the aperture of the second array aperture 21 is not larger than the aperture of the first array aperture 11. With this configuration, the airflow resistance can be initially adjusted through the second array aperture 21, and the actual aperture ratio can be selectively optimized according to the required permeability and mechanical strength of the process.

[0051] As an optional implementation, the cross-sectional shape of the first array hole 11 and the second array hole 21 is one or more combinations of circular, square, elliptical and slit shapes, which can be flexibly selected and used according to actual usage requirements.

[0052] In this embodiment, the gap height of the gas distribution gap 6 is an important parameter, which is usually between 1 mm and 15 mm. Its specific value depends on the gas flow rate, viscosity and the required degree of lateral diffusion.

[0053] In this embodiment, depending on the requirements of the application process (temperature, atmosphere, cleanliness), the boat can be made of materials such as quartz, silicon carbide, alumina, stainless steel or high-temperature alloy. The boat needs to be made of the most suitable material according to the characteristics of the metal powder to be prepared in order to achieve the best reaction effect.

[0054] The boat mentioned in this embodiment is more versatile and is particularly suitable for various heat treatments, chemical vapor deposition (CVD), atomic layer deposition (ALD), oxidation, diffusion, annealing, sintering, and any semiconductor preparation, material synthesis, or heat treatment processes that require a precise gas atmosphere. It is suitable for sheet, granular, and powdered materials.

[0055] The present invention also provides a method for producing metal powder using the above-mentioned boat dish, comprising the following steps: S1. Select materials to make a boat based on the metal powder to be prepared.

[0056] In this step, it is necessary to select the most suitable material based on the characteristics of the metal powder to be prepared, and to produce the corresponding vessel to achieve the best reaction effect.

[0057] S2. Powder material is laid on top of the upper support plate 1.

[0058] In this step, the laying height of the powder material can be flexibly selected and adjusted according to actual needs, and the powder material can be referenced through the side panel 5.

[0059] S3. Gas is introduced from below the lower vent plate 2 upwards, or gas is introduced from above the powder raw material downwards.

[0060] S4. When gas is introduced from below the lower ventilation plate 2 upwards, the gas enters the gas distribution gap 6 through the second array hole 21, diffuses laterally and mixes evenly inside the gas distribution gap 6, and then enters the corresponding layer of the powder raw material through the misaligned first array hole 11, contacts the powder raw material and completes the reduction reaction, so that the powder raw material forms metal powder, and at the same time generates exhaust gas.

[0061] The process gas passes vertically from below the boat through the second array hole 21 of the lower vent plate 2. During the movement, the gas is blocked by the solid part of the upper support plate 1, which prevents the gas from rising vertically. Instead, the gas is forced to diffuse laterally inside the gas distribution gap 6 in order to find an outlet for rising. Finally, the gas flows out from the first array hole 11 of the upper support plate 1 located around the perimeter at an angle inclined to the vertical direction, thus acting evenly and dispersedly on the bottom of the material.

[0062] S5. Part of the exhaust gas generated in step S4 is discharged from the top of the corresponding layer of the powder raw material, and the other part enters the gas distribution gap 6 through the first array hole 11, where it is laterally collected and then discharged downward through the misaligned second array hole 21.

[0063] Driven by the concentration difference and the overall airflow, the exhaust gas generated by the reaction can more easily penetrate downward from the material layer through the first array hole 11 with a higher porosity. It enters the gas distribution gap 6 through the first array hole 11 of the upper support plate 1. During the movement, the exhaust gas is blocked by the solid part of the lower vent plate 2, causing the exhaust gas to be forced to gather laterally inside the gas distribution gap 6, and finally discharged from the system through the second array hole 21 of the lower vent plate 2 which is staggered in position.

[0064] S6. When gas is introduced from above the powder raw material from top to bottom, the gas comes into contact with the powder raw material and completes the reduction reaction. The generated exhaust gas enters the gas distribution gap 6 through the first array hole 11, diffuses laterally and mixes evenly inside the gas distribution gap 6, and then is discharged downward through the staggered second array hole 21.

[0065] Compared to the processes in steps S4 and S5, step S6 provides an alternative process flow, enabling different directions of process gas introduction and enriching the basic functions of the boat.

[0066] In practical applications, the specific direction of process gas introduction can be flexibly selected according to actual usage requirements.

[0067] Example 1 In this embodiment, the metal powder to be produced is molybdenum powder. In the process of preparing molybdenum powder by hydrogen reduction, it is preferable to use a molybdenum-based high-temperature alloy to make the boat.

[0068] The vessel includes an upper support plate 1 and a lower ventilation plate 2, with a 10mm high gas distribution gap 6 between them.

[0069] The upper support plate 1 has a first array hole 11 and the lower ventilation plate 2 has a second array hole 21. The diameter of the first array hole 11 and the second array hole 21 is preferably 0.2 mm and the hole spacing is preferably 2 mm.

[0070] The first regular two-dimensional array of the first array aperture 11 is preferably a square array. The first array aperture 11 and the second array aperture 21 are arranged in a strictly staggered manner, and each second array aperture 21 is located at the geometric center of the square formed by the four adjacent first array apertures 11.

[0071] During the reaction, a 30mm thick layer of molybdenum oxide powder is laid on the upper support plate 1, and high-pressure hydrogen gas is introduced from below the lower ventilation plate 2.

[0072] High-pressure hydrogen first forms multiple high-speed jets through the second array hole 21 and enters the gas distribution gap 6. Strong turbulence and lateral mixing are generated inside the gas distribution gap 6, making the gas pressure and concentration distribution uniform.

[0073] Subsequently, the uniformly mixed gas enters the corresponding layer of molybdenum oxide powder through the misaligned first array holes 11, achieving full contact and reduction reaction with the molybdenum oxide powder.

[0074] The water vapor generated in the reaction is a byproduct exhaust gas. Part of it is discharged upward through the powder layer, and the other part enters the gas distribution gap 6 through the first array hole 11, where it is laterally collected and then discharged downward through the misaligned second array hole 21.

[0075] In this embodiment, the reaction environment at all scales is unified by forced gas lateral diffusion, thereby obtaining molybdenum powder with uniform particle size and consistent quality.

[0076] Example 2 In this embodiment, the metal powder to be produced is iron powder. In the process of preparing iron powder by hydrogen reduction, it is preferable to use 310s stainless steel to make the boat.

[0077] The vessel includes an upper support plate 1 and a lower ventilation plate 2, with a 15mm high gas distribution gap 6 between them.

[0078] The upper support plate 1 has a first array hole 11 and the lower ventilation plate 2 has a second array hole 21. The diameter of the first array hole 11 and the second array hole 21 is preferably 0.2 mm and the hole spacing is preferably 2 mm.

[0079] The first regular two-dimensional array of the first array aperture 11 is preferably a square array. The first array aperture 11 and the second array aperture 21 are arranged in a strictly staggered manner, and each second array aperture 21 is located at the geometric center of the square formed by the four adjacent first array apertures 11.

[0080] During the reaction, a 30mm thick layer of iron oxide powder is laid on the upper support plate 1, and high-pressure hydrogen gas is introduced from below the lower ventilation plate 2 to raise the temperature to 850℃ for reduction.

[0081] High-pressure hydrogen first forms multiple high-speed jets through the second array hole 21 and enters the gas distribution gap 6. Strong turbulence and lateral mixing are generated inside the gas distribution gap 6, making the gas pressure and concentration distribution uniform.

[0082] Subsequently, the uniformly mixed gas enters the corresponding layer of iron oxide powder through the misaligned first array holes 11, achieving full contact and reduction reaction with the iron oxide powder.

[0083] The water vapor generated in the reaction is a byproduct exhaust gas. Part of it is discharged upward through the powder layer, and the other part enters the gas distribution gap 6 through the first array hole 11, where it is laterally collected and then discharged downward through the misaligned second array hole 21.

[0084] In this embodiment, the reaction environment at all scales is unified by forced gas lateral diffusion, thereby obtaining iron powder with uniform particle size and consistent quality.

[0085] Example 3 In this embodiment, the metal powder to be produced is tungsten powder. In the process of preparing tungsten powder by hydrogen reduction, nickel-based high-temperature alloy is preferably used to make the boat.

[0086] The vessel includes an upper support plate 1 and a lower ventilation plate 2, with a 10mm high gas distribution gap 6 between them.

[0087] The upper support plate 1 has a first array hole 11 and the lower ventilation plate 2 has a second array hole 21. The diameter of the first array hole 11 and the second array hole 21 is preferably 0.5 mm and the hole spacing is preferably 2 mm.

[0088] The first regular two-dimensional array of the first array aperture 11 is preferably a square array. The first array aperture 11 and the second array aperture 21 are arranged in a strictly staggered manner, and each second array aperture 21 is located at the geometric center of the square formed by the four adjacent first array apertures 11.

[0089] During the reaction, tungsten oxide powder with a thickness of 30 mm is laid on the upper support plate 1, and high-pressure hydrogen gas is introduced from below the lower ventilation plate 2.

[0090] High-pressure hydrogen first forms multiple high-speed jets through the second array hole 21 and enters the gas distribution gap 6. Strong turbulence and lateral mixing are generated inside the gas distribution gap 6, making the gas pressure and concentration distribution uniform.

[0091] Subsequently, the uniformly mixed gas enters the corresponding layer of tungsten oxide powder through the misaligned first array holes 11, achieving full contact and reduction reaction with the tungsten oxide powder.

[0092] The water vapor generated in the reaction is a byproduct exhaust gas. Part of it is discharged upward through the powder layer, and the other part enters the gas distribution gap 6 through the first array hole 11, where it is laterally collected and then discharged downward through the misaligned second array hole 21.

[0093] In this embodiment, the reaction environment at all scales is unified by forced gas lateral diffusion, thereby obtaining tungsten powder with uniform particle size and consistent quality.

[0094] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A kind of boat-shaped vessel, characterized in that, The device includes an upper support plate (1), a lower vent plate (2), and a gap forming structure (3). The upper support plate (1) and the lower vent plate (2) are arranged parallel to each other and connected. The gap forming structure (3) is provided between the upper support plate (1) and the lower vent plate (2) and a gas distribution gap (6) is formed between them. The upper support plate (1) is provided with a first array hole (11) evenly distributed in a two-dimensional array according to a first rule. The lower vent plate (2) is provided with a second array hole (21) evenly distributed in a two-dimensional array according to a second rule. In the projection direction perpendicular to the plate surface, the projection center of any second array hole (21) is located at the geometric center of the polygon formed by the projection centers of the four first array holes (11) that are adjacent to it.

2. The boat-shaped vessel according to claim 1, characterized in that, The first rule-based two-dimensional array is a square array or an equilateral triangle array.

3. The boat-shaped vessel according to claim 1, characterized in that, The gap forming structure (3) includes a plurality of adjusting pads located between the upper bearing plate (1) and the lower vent plate (2), the upper surface of the adjusting pads being in contact with the lower surface of the upper bearing plate (1), and the lower surface of the adjusting pads being in contact with the upper surface of the lower vent plate (2).

4. The boat-shaped vessel according to claim 1, characterized in that, It also includes a fixing structure (4), wherein the upper bearing plate (1) and the lower ventilation plate (2) are connected in a separate and detachable manner through the fixing structure (4).

5. The boat-shaped vessel according to claim 4, characterized in that, The fixed structure (4) includes multiple fixing bolts, and the upper bearing plate (1) and the lower ventilation plate (2) are bolted together by the fixing bolts.

6. The boat-shaped vessel according to claim 1, characterized in that, The upper support plate (1) and the lower ventilation plate (2) are integrally connected.

7. The boat-shaped vessel according to claim 1, characterized in that, It also includes a side panel (5), which is vertically arranged, and the bottom of the side panel (5) is connected to the outer edge of the lower ventilation plate (2).

8. The boat-shaped vessel according to claim 1, characterized in that, The diameter of the second array hole (21) is not greater than the diameter of the first array hole (11).

9. The boat-shaped vessel according to claim 1, characterized in that, The cross-sectional shape of the first array hole (11) and the second array hole (21) is one or more combinations of circular, square, elliptical and slit shapes.

10. A method for producing metal powder using the boat-shaped vessel according to any one of claims 1-9, characterized in that, Includes the following steps: S1. Select materials to prepare a boat based on the metal powder to be prepared; S2. Powder material is laid on top of the upper support plate (1); S3. Gas is introduced from below the lower vent plate (2) from bottom to top, or gas is introduced from above the powder raw material from top to bottom; S4. When gas is introduced from below the lower ventilation plate (2) from bottom to top, the gas enters the gas distribution gap (6) through the second array hole (21), diffuses laterally and mixes evenly inside the gas distribution gap (6), and then enters the corresponding layer of the powder raw material through the misaligned first array hole (11), contacts the powder raw material and completes the reduction reaction, so that the powder raw material forms the metal powder, and generates exhaust gas at the same time; S5. Part of the exhaust gas generated in step S4 is discharged from the top of the corresponding layer of the powder raw material, and the other part enters the gas distribution gap (6) through the first array hole (11), is laterally collected inside the gas distribution gap (6), and is then discharged downward through the misaligned second array hole (21). S6. When gas is introduced from above the powder raw material from top to bottom, the gas comes into contact with the powder raw material and completes the reduction reaction. The generated exhaust gas enters the gas distribution gap (6) through the first array hole (11), diffuses laterally and mixes evenly inside the gas distribution gap (6), and then is discharged downward through the misaligned second array hole (21).

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