Laser-driven white light source device

Abstract

This invention relates to the field of laser special light source technology, and provides a laser-driven white light source device, which includes a laser source, an optical system, a gas-loaded structure, and a high-voltage driving component. The laser source is suitable for providing a laser beam; the optical system is suitable for focusing the laser beam; the gas-loaded structure is located on the side of the optical system away from the laser source, and the center of the gas-loaded structure corresponds to the focusing area of ​​the laser beam; the high-voltage driving component is suitable for igniting plasma within the gas in the gas-loaded structure; wherein, the gas-loaded structure has a gas carrier incident surface and a gas carrier exit surface arranged opposite each other along the propagation path, and the curvature of the gas carrier incident surface and the gas carrier exit surface is constant in the direction perpendicular to the propagation path. This application can reduce the generation of aberrations, thereby reducing the size of the emitting point and resulting in better consistency of the emitting point; at the same time, the uniformity of white light output and the spectral radiance are also better.

Description

Technical Field

[0001] This invention relates to the field of laser special light source technology, and in particular to a laser-driven white light source device. Background Technology

[0002] Metrology testing is an indispensable part of the integrated circuit manufacturing process. Metrology testing equipment can monitor, identify, locate, and analyze process defects during production, playing a crucial role in enabling wafer fabs to promptly identify problems, improve processes, and increase yield. As integrated circuits continue to become more multilayered and complex, the importance of metrology testing equipment is becoming increasingly prominent. Optical metrology testing equipment accounts for 70% of the market share, and the light source is one of its key core components, determining the final testing performance of the equipment. Light sources are mainly divided into single-wavelength and broadband light sources. Single-wavelength mainly refers to laser-type light sources, while broadband light sources currently mainly include LEDs, xenon lamps, and LSP (Laser Sustained Plasma) light sources. Among them, LSP light sources have important applications in the field of metrology testing due to their advantages such as high radiance, long lifespan, and wide spectral coverage.

[0003] The working principle of LSP (Liquid Spherical Photonics) light sources is to discharge gas using high voltage to form plasma, and then focus a laser onto the plasma to maintain its luminescence, thus achieving a wide spectrum output. However, in current LSP systems, the surface shapes of the laser incident surface and the white light emitting surface of the gas carrier cannot be precisely manufactured, resulting in certain aberrations. This leads to an excessively large luminous point size and low radiant brightness due to the final laser focusing. Summary of the Invention

[0004] This invention provides a laser-driven white light source device to solve the defects in the prior art LSP system where there are certain aberrations between the laser incident surface and the white light emitting surface of the gas carrier, resulting in an excessively large size of the laser-focused emitting point and low radiance. This application can reduce the generation of aberrations, thereby reducing the size of the emitting point and making the emitting point more consistent; at the same time, the uniformity of white light emission and the spectral radiance are also better.

[0005] This invention provides a laser-driven white light source device, comprising: A laser source, wherein the laser source is adapted to provide a laser beam; An optical system is disposed in the propagation path of the laser beam, and the optical system is adapted to focus the laser beam; A gas-loaded structure is disposed on the side of the optical system away from the laser source, and the center position of the gas-loaded structure corresponds to the focusing area of ​​the laser beam; A high-pressure drive assembly, the high-pressure drive assembly being adapted to ignite plasma within the gas in the gas-loaded structure; The gas loading structure has a gas carrier incident surface and a gas carrier exit surface arranged opposite to each other along the propagation path, and the curvature of the gas carrier incident surface and the gas carrier exit surface is constant in the direction perpendicular to the propagation path.

[0006] According to the present invention, in a laser-driven white light source device, the curvature of the gas carrier incident surface and the gas carrier exit surface along the incident plane of the laser beam is constant.

[0007] According to the present invention, the incident surface of the gas carrier and the exit surface of the gas carrier are either cylindrical or planar.

[0008] According to the present invention, a laser-driven white light source device is provided, wherein the gas loading structure is either cylindrical or cubic.

[0009] According to a laser-driven white light source device provided by the present invention, the optical system has an optical incident surface and an optical exit surface disposed opposite to each other along the propagation path. The optical incident surface is adapted to collimate the laser beam incident on the optical system, and the optical exit surface is adapted to focus the laser beam collimated by the optical incident surface.

[0010] According to the present invention, a laser-driven white light source device is provided, wherein the optical incident surface and the optical exit surface are either cylindrical lenses or spherical lenses.

[0011] According to a laser-driven white light source device provided by the present invention, the optical system further includes a wedge mirror group disposed between the optical incident surface and the optical exit surface, the wedge mirror group being adapted to compensate for aberrations when the laser beam is introduced into the optical incident surface.

[0012] According to the present invention, a laser-driven white light source device is provided, wherein the laser source includes any one of a semiconductor laser, a gas laser, or a fiber laser.

[0013] According to the present invention, a laser-driven white light source device is provided, wherein the optical system includes at least one of a prism reflecting element, a DOE diffraction element, or an MLA array lens.

[0014] According to the present invention, a laser-driven white light source device is provided, wherein the gas loading structure includes at least one of a mixture of one or more rare gases.

[0015] This application modifies the gas carrier incident surface and the gas carrier incident surface exit surface in the gas loading structure to have constant curvature in the direction perpendicular to the propagation path. This allows for more precise control of the production variables of the gas carrier incident surface and the gas carrier incident surface, resulting in an optical surface that is easy to process with precision and has better uniformity. This reduces the generation of aberrations, thereby reducing the size of the light-emitting point and making the consistency of the light-emitting point better. At the same time, the uniformity of white light output is also better and the spectral radiance is also higher. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of an embodiment of the laser-driven white light source device provided by the present invention.

[0018] Figure 2 This is a schematic diagram of an embodiment of the gas loading structure provided by the present invention.

[0019] Figure 3 This is a schematic diagram of another embodiment of the laser-driven white light source device provided by the present invention.

[0020] Figure 4 This is a schematic diagram of another embodiment of the gas loading structure provided by the present invention.

[0021] Figure 5 This is a schematic diagram of another embodiment of the laser-driven white light source device provided by the present invention.

[0022] Figure 6 This is a schematic diagram of yet another embodiment of the laser-driven white light source device provided by the present invention.

[0023] Figure 7 (a) is the contour map of the light spot before improvement; (b) is the lateral distribution map of the light intensity before improvement; (c) is the contour map of the light spot after improvement; and (d) is the lateral distribution map of the light intensity after improvement.

[0024] Figure 8 In the diagram, (e) represents the size of the light-emitting point before improvement; (f) represents the size of the light-emitting point after improvement.

[0025] Figure 9 (g) shows the size comparison of the light-emitting point in the X direction before and after the improvement; (h) shows the size comparison of the light-emitting point in the Y direction before and after the improvement.

[0026] Figure label: 10. Laser-driven white light source device; 100. Laser source; 110. Laser beam; 200. Optical system; 210. Optical incident surface; 220. Optical exit surface; 230. Cylindrical lens; 240. Spherical lens; 250. Wedge lens group; 300. Gas loading structure; 310. Gas carrier incident surface; 320. Gas carrier exit surface; 400. High-voltage drive assembly; 410. High-voltage discharge module; 420. Electrode assembly; 500, luminous point. Detailed Implementation

[0027] The embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of the invention.

[0028] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0030] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0031] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0032] The following is combined with Figures 1 to 9 The laser-driven white light source device provided in this invention will be described in detail through specific embodiments and application scenarios.

[0033] In embodiments of the present invention, such as Figures 1 to 6 As shown, a laser-driven white light source device 10 is provided, which includes a laser source 100, an optical system 200, a gas loading structure 300, and a high-voltage driving component 400. The laser source 100 is suitable for providing a laser beam 110; the optical system 200 is disposed on the propagation path of the laser beam 110 and is suitable for focusing the laser beam 110; the gas loading structure 300 is disposed on the side of the optical system 200 away from the laser source 100, and the center position of the gas loading structure 300 corresponds to the focusing area of ​​the laser beam 110; the high-voltage driving component 400 is suitable for igniting plasma in the gas in the gas loading structure 300; wherein, the gas loading structure 300 has a gas carrier incident surface 310 and a gas carrier exit surface 320 disposed opposite to each other along the propagation path, and the curvature of the gas carrier incident surface 310 and the gas carrier exit surface 320 is constant in the direction perpendicular to the propagation path.

[0034] The laser source 100 serves as the energy input source for the entire system, responsible for generating a high-intensity laser beam 110. The laser beam 110 possesses high monochromaticity and directionality, forming the basis for subsequent optical processing and energy conversion.

[0035] The optical system 200 is positioned along the propagation path of the laser beam 110, and its main function is to precisely focus the laser beam 110. By combining components such as optical lenses or mirrors, the laser beam 110 can be focused onto a very small focal point. This focal area is where the laser energy is most concentrated, which is the light-emitting point 500.

[0036] The gas loading structure 300 is located on the side of the optical system 200 away from the laser source 100, and its center position precisely corresponds to the focusing area of ​​the laser beam 110. The main function of the gas loading structure 300 is to provide a closed or semi-closed space to contain and confine a certain amount of gas (such as inert gas, mixed gas, etc.) so that the subsequent high-pressure drive component 400 can excite plasma within this space.

[0037] The gas carrier incident surface 310 and the gas carrier exit surface 320 are located at opposite ends of the gas loading structure 300 and are positioned relative to each other along the propagation path of the laser beam 110. They have constant curvature in the direction perpendicular to the propagation path, which helps to ensure that the laser beam 110 reduces the aberrations caused by the surface shape errors of the gas carrier incident surface 310 and the gas carrier exit surface 320 when passing through them, thereby reducing the size of the LSP emitting point 500 and also facilitating the effective transfer and conversion of energy after the laser beam 110 is focused.

[0038] The high-voltage drive assembly 400 is suitable for achieving plasma excitation. When the laser beam 110 is focused on the gas within the gas-loaded structure 300, the high-voltage drive assembly 400 applies a momentary high-voltage pulse, ionizing the atoms or molecules in the gas to form plasma. The formation of plasma is accompanied by intense radiation, including visible light, ultraviolet light, and infrared light, with the visible light portion constituting the white light source.

[0039] This application modifies the gas carrier incident surface 310 and the gas carrier incident surface 310 exit surface in the gas loading structure 300 to have constant curvature in the direction perpendicular to the propagation path. This allows for more precise control of the production variables of the gas carrier incident surface 310 and the gas carrier incident surface 310, resulting in an optical surface that is easy to precision process and has good uniformity. This reduces the generation of aberrations, thereby reducing the size of the light emission point 500 and making the uniformity of the light emission point 500 better. At the same time, the uniformity of white light emission and the spectral radiance are also better.

[0040] Specifically, refer to Figures 7 to 9 After the improvements made in this application, the uniformity of light emission in the LDLS (Laser-Driven White Light Source) is significantly enhanced. Furthermore, the uniformity of the light spot distribution is improved, with no peaks in the lateral intensity distribution, resulting in an overall flat distribution. Simultaneously, the size of the LDLS emission point is improved, with the vertical interface size reduced by nearly 20µm, significantly compensating for the increased emission point size caused by the Rayleigh spot and improving the overall radiant brightness of the light source. Moreover, the uniformity of the LDLS emission point is significantly improved, ensuring consistency in both the X and Y directions.

[0041] Reference Figures 1 to 4 In some embodiments, the curvature of the gas carrier incident surface 310 and the gas carrier exit surface 320 along the incident plane of the laser beam 110 is constant.

[0042] It is understandable that constant curvature means that the curvature of the gas carrier incident surface 310 and the gas carrier exit surface 320 is uniform and consistent in the direction perpendicular to the incident plane of the laser beam 110. This facilitates obtaining this surface shape during manufacturing, and also helps ensure that the propagation direction and shape of the laser beam 110 do not undergo unnecessary distortion or warping as it passes through the gas carrier incident surface 310 and the gas carrier exit surface 320. In other words, it reduces optical aberrations that may be introduced by surface irregularities. By reducing aberrations, wavefront distortion of the beam is suppressed, and beam quality is improved.

[0043] Reference Figure 2 and Figure 4 In some embodiments, the gas carrier incident surface 310 and the gas carrier exit surface 320 are either cylindrical or planar surfaces.

[0044] It is understandable that, compared to other surfaces with irregular curvature, cylindrical or flat surfaces allow for better control of the uniformity of overall changes during production and processing, precise control of surface errors, and improved consistency and uniformity of the luminous points 500.

[0045] Meanwhile, the cylindrical surface has a continuous curved surface, which can provide a more uniform gas flow path, reduce the formation of turbulence and eddies, and reduce the impact of gas non-uniformity on the focusing of the 500-point light source. The planar structure is easy to process and install, and can be easily connected and integrated with other planar components.

[0046] Reference Figure 2 and Figure 4 In some embodiments, the gas loading structure 300 is either cylindrical or cubic in shape.

[0047] Understandably, the cylindrical gas loading structure 300 has an outer surface with a constant or uniformly varying curvature along its axis or circumference, which can better reduce the influence of surface shape on aberrations. Simultaneously, the cylindrical gas loading structure 300 can better confine the gas and is easier to manufacture and assemble, helping to reduce aberrations, improve the consistency and uniformity of the emitting points 500, and facilitate the focusing of the laser beam 110 and the stable formation of plasma.

[0048] The cubic gas loading structure 300 can better and more uniformly confine gas in three-dimensional space, and its simple structure makes it easy to manufacture and assemble. The cubic gas loading structure 300 includes both cuboid and cube-shaped gas loading structures 300.

[0049] Of course, in other embodiments, the gas carrier incident surface 310 and the gas carrier exit surface 320 can also be other irregular shapes, as long as the gas carrier incident surface 310 and the gas carrier exit surface 320 are either cylindrical or planar.

[0050] Reference Figures 1 to 6 In some embodiments, the optical system 200 has an optical incident surface 210 and an optical exit surface 220 disposed opposite to each other along the propagation path. The optical incident surface 210 is adapted to collimate the laser beam 110 incident on the optical system 200, and the optical exit surface 220 is adapted to focus the laser beam 110 collimated by the optical incident surface 210.

[0051] Understandably, the optical incident surface 210 is used to collimate the laser beam 110 incident on the optical system 200. During propagation, the laser beam 110 may be affected by various factors (such as air turbulence, mirror misalignment, etc.), causing the beam to diverge or deviate from its predetermined path. By designing a properly sized optical incident surface 210, optical elements such as lenses and mirrors can be used to correct and collimate the beam, ensuring it propagates along a predetermined path while maintaining high parallelism and energy density.

[0052] After the laser beam 110 is collimated by the optical incident surface 210, the optical exit surface 220 is used to further focus the beam onto the target area. By designing appropriate focal length and lens shape, beams that are originally parallel or nearly parallel can be converged into a point or a small area, thereby achieving high energy density output.

[0053] Reference Figure 3 and Figure 5 In some embodiments, the optical incident surface 210 and the optical exit surface 220 are either a cylindrical lens 230 or a spherical lens 240.

[0054] It is understood that the optical incident surface 210 in this embodiment can be either a cylindrical lens 230 or a spherical lens 240, and the optical exit surface 220 can also be either a cylindrical lens 230 or a spherical lens 240, without any special limitation. The cylindrical lens 230 has focusing capability in one direction, while maintaining the parallelism of the light beam in the opposite direction. The cylindrical lens 230 can be used as both the optical incident surface 210 and the optical exit surface 220 as needed. Similarly, the spherical lens 240 in this embodiment has focusing capability in one direction, converging the light beam to a single point to form a focal point, while maintaining the parallelism of the light beam in the opposite direction. The cylindrical lens 230 can be used as both the optical incident surface 210 and the optical exit surface 220 as needed.

[0055] Reference Figure 5 In some embodiments, the optical system 200 further includes a wedge mirror assembly 250, which is disposed between the optical incident surface 210 and the optical exit surface 220. The wedge mirror assembly 250 is adapted to compensate for aberrations when the laser beam 110 is introduced into the optical incident surface 210.

[0056] Understandably, in this embodiment, a wedge mirror assembly 250 is provided between the optical incident surface 210 and the optical exit surface 220 of the optical system 200 to compensate for aberrations introduced into the laser beam 110 by the optical incident surface 210, thereby improving the focusing accuracy of the laser beam 110. The wedge mirror assembly 250 is located at a position where the incident light rays are relatively parallel, and the system is matched with a collimating and focusing device to achieve laser energy convergence. By adjusting the angle of the wedge mirror to compensate for aberrations, it is ensured that the laser beam 110 can be focused more accurately.

[0057] In some embodiments, the laser source 100 includes any one of a semiconductor laser, a gas laser, or a fiber laser.

[0058] As is understood, a semiconductor laser is a device that generates laser light using stimulated emission from semiconductor materials. It possesses advantages such as small size, light weight, high efficiency, long lifespan, ease of modulation, and direct electrical pumping. In optical systems 200, semiconductor lasers can serve as compact and efficient light sources, particularly suitable for applications requiring miniaturization and integration.

[0059] Gas lasers use gas as the working medium to generate laser light. They have high output power and good beam quality.

[0060] Fiber lasers utilize optical fibers as the laser gain medium. Stimulated emission is generated within the fiber by pump light, thus producing laser light. Fiber lasers possess excellent beam quality, high conversion efficiency, good heat dissipation, and flexible output characteristics.

[0061] When selecting a laser source 100, the choice should be based on specific needs. For example, factors such as cost, reliability, maintenance difficulty, and environmental requirements should be considered when choosing a suitable laser source 100; no specific limitations are imposed here.

[0062] In some embodiments, the optical system 200 includes at least one of a prism reflector, a DOE (Diffractive Optical Elements) diffractive element, or an MLA (Diffractive Optical Elements) array lens.

[0063] Understandably, prism reflectors utilize the refraction and reflection properties of prisms to change the direction of light propagation. In optical systems 200, prism reflectors are often used in compact designs to reduce system size and weight while maintaining or improving optical performance.

[0064] A DOE (Diffractive Optical Element) is an optical element that utilizes the principle of light diffraction to achieve specific optical functions. In optical systems, DOEs are commonly used in beam shaping, wavefront correction, spectral analysis, and imaging optimization.

[0065] MLA (Microlens Array) is an optical element consisting of multiple tiny lenses arranged in a specific pattern.

[0066] In some embodiments, the optical system 200 integrates at least one of a prism reflecting element, a DOE diffraction element, and an MLA array lens, depending on specific requirements. This allows for full utilization of the advantages of various optical elements, enabling more complex and efficient optical functions. For example, combining a prism reflecting element and a DOE diffraction element can achieve a compact and high-performance beam shaping and wavefront correction system; while introducing an MLA array lens can further improve the system's imaging quality and resolution. No particular limitations are imposed here, and the configuration can be tailored to specific needs.

[0067] In some embodiments, the gas loading structure 300 includes at least one of a mixture of one or more rare gases.

[0068] It is understood that rare gases include helium, neon, argon, krypton, xenon, radon, nitrogen, etc. The gas loading structure 300 in this embodiment may include, but is not limited to, helium, neon, argon, krypton, xenon, radon, nitrogen, etc., as well as mixtures of various gases.

[0069] Reference Figure 6In some embodiments, the high-voltage drive assembly 400 includes a high-voltage discharge module 410 and an electrode group 420, with the electrode group 420 partially disposed opposite to the gas loading structure 300, and the electrode group 420 electrically connected to the high-voltage discharge module 410.

[0070] Understandably, the high-voltage discharge module 410 is suitable for converting low-voltage DC or AC power into high-voltage electrical energy and outputting it to the electrode group 420.

[0071] Electrode group 420 is the direct actuator for high-voltage discharge and can consist of two or more electrode groups 420, with the electrode portions positioned opposite each other inside the gas loading structure 300. Under the action of the high-voltage electric field, the gas molecules between the electrodes are ionized, forming a conductive channel, i.e., a discharge channel.

[0072] Electrical energy is transmitted between the electrode group 420 and the high-voltage discharge module 410 through an electrical connection.

[0073] In one embodiment, the steps for using the laser-driven white light source device 10 of this application are as follows: First, turn on the laser source 100 so that the laser beam 110 is focused on the light source 500; Then, the high-voltage discharge module 410 is turned on, and the electrode group 420 is driven by high voltage, so that electrons escape from the electrode group 420. Furthermore, the emitted electrons collide with gas molecules in the gas-loaded structure 300, generating plasma; Finally, the high-voltage discharge module 410 is turned off, and plasma luminescence can continue to be maintained at the laser focal point.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A laser-driven white light source device (10), characterized in that, include: A laser source (100) is adapted to provide a laser beam (110). An optical system (200) is disposed in the propagation path of the laser beam (110), and the optical system (200) is adapted to focus the laser beam (110); A gas loading structure (300) is provided on the side of the optical system (200) away from the laser source (100), and the center position of the gas loading structure (300) corresponds to the focusing area of ​​the laser beam (110); A high-pressure drive assembly (400) is adapted to ignite plasma within the gas in the gas-loaded structure (300); The gas loading structure (300) has a gas carrier incident surface (310) and a gas carrier exit surface (320) arranged opposite to each other along the propagation path, and the curvature of the gas carrier incident surface (310) and the gas carrier exit surface (320) is constant in the direction perpendicular to the propagation path.

2. The laser-driven white light source device (10) according to claim 1, characterized in that, The curvature of the gas carrier incident surface (310) and the gas carrier exit surface (320) along the incident plane of the laser beam (110) is constant.

3. The laser-driven white light source device (10) according to claim 1, characterized in that, The gas carrier incident surface (310) and the gas carrier exit surface (320) can be either a cylindrical surface or a plane.

4. The laser-driven white light source device (10) according to claim 3, characterized in that, The gas loading structure (300) can be either cylindrical or cubic.

5. The laser-driven white light source device (10) according to any one of claims 1-4, characterized in that, The optical system (200) has an optical incident surface (210) and an optical exit surface (220) arranged opposite to each other along the propagation path. The optical incident surface (210) is adapted to collimate the laser beam (110) incident on the optical system (200), and the optical exit surface (220) is adapted to focus the laser beam (110) collimated by the optical incident surface (210).

6. The laser-driven white light source device (10) according to claim 5, characterized in that, The optical incident surface (210) and the optical exit surface (220) are either cylindrical lenses (230) or spherical lenses (240).

7. The laser-driven white light source device (10) according to claim 6, characterized in that, The optical system (200) further includes a wedge mirror assembly (250) disposed between the optical incident surface (210) and the optical exit surface (220), and the wedge mirror assembly (250) is adapted to compensate for aberrations when the optical incident surface (210) introduces the laser beam (110).

8. The laser-driven white light source device (10) according to any one of claims 1-4, characterized in that, The laser source (100) includes any one of a semiconductor laser, a gas laser, or a fiber laser.

9. The laser-driven white light source device (10) according to any one of claims 1-4, characterized in that, The optical system (200) includes at least one of a prism reflector, a DOE diffraction element, or an MLA array lens.

10. The laser-driven white light source device (10) according to any one of claims 1-4, characterized in that, The gas loading structure (300) includes at least one of a mixture of one or more rare gases.

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