A dual linkage designed wafer boat box transfer apparatus

Abstract

The application relates to the technical field of semiconductor automatic transmission equipment, in particular to a dual-linkage designed wafer boat box conveying equipment which comprises a rack, an SMIF module and a table module. The SMIF module is internally provided with a dual-screw linkage mechanism, differential strokes are formed by relying on two screws with different pitches, and the wafer boat box is sunk to make way; the table module is configured with a dual-belt linkage mechanism, the middle plate and the wrist assembly are synchronously moved, and the horizontal conveying of the wafer boat box is completed. The Z-axis lifting unit of the table module adopts an electromagnetic controllable sliding table with a vacuum exhaust closed sliding rail. The dual-mechanical linkage structure is used to simplify the equipment layout, and the equipment assembly process, operation stability and cleanliness are considered by matching sensing detection, shock absorption and buffering, sealing and dust prevention, rudder-driven locking piece mechanisms and rotary key mechanisms; meanwhile, the transmission beat is optimized by using the middle standby station, the overall efficiency of wafer transmission is effectively improved, and the use demand of the semiconductor automatic production line is adapted.

Description

Technical Field

[0001] This invention relates to the field of semiconductor automated transport equipment technology, and in particular to a wafer carrier transport equipment with a dual-linkage design. Specifically, it relates to a wafer carrier transport equipment with a dual-linkage design that combines dual lead screw linkage and dual belt linkage, used to complete the efficient, clean, and stable transport of wafer carriers between OHT (Overhead Hoist Transport) and back-end process equipment. Background Technology

[0002] With the rapid development of the semiconductor industry, integrated circuit manufacturing processes are constantly evolving towards smaller linewidths and higher integration levels, and wafer sizes are gradually transitioning from the early 6-inch and 8-inch sizes to 12-inch and even larger sizes. Under this trend, semiconductor manufacturing plants have increasingly stringent performance requirements for wafer transport systems, especially in terms of cleanliness control, transport efficiency, space utilization, and system reliability. Traditional design solutions have gradually revealed many shortcomings.

[0003] In a typical semiconductor wafer manufacturing process, wafers are loaded into standardized wafer carriers, which are then encapsulated in wafer transfer boxes for cross-regional and cross-device transport. The OHT (Out-of-House Transport) crane system is responsible for moving wafer transfer boxes from one process unit to another, while the semiconductor wafer transfer equipment, acting as an intermediate buffer node between the OHT and the process units, undertakes critical tasks such as receiving wafer transfer boxes, removing wafer carriers, temporarily storing and distributing wafer carriers. The performance of the internal transfer equipment within the semiconductor wafer transfer equipment directly determines the wafer turnover efficiency and yield of the entire production line.

[0004] The internal transmission devices of existing semiconductor wafer transport equipment generally have the following design problems.

[0005] 1. In the SMIF module, the loading and unloading of the crystal boat box typically relies on multiple independent drive sources. Taking a typical SMIF internal structure as an example, the lifting platform that holds the crystal boat box is controlled by one drive source, while the swing claw that assists in supporting or transferring the crystal boat box from the side is controlled by another drive source. During the loading and unloading process, the two drive sources need to act sequentially according to a strict timing sequence: first, the swing claw extends to hold the crystal boat box, then the lifting platform rises to receive it, and finally the swing claw retracts to make way. This step-by-step serial control method results in a long loading and unloading cycle, and the coordinated control of the two drive sources requires complex program logic. Once the timing is deviated, it is very easy to cause the crystal boat box to fall or collide. At the same time, the configuration of multiple drive sources also means higher hardware costs and larger installation space requirements.

[0006] 2. In the platform module, the horizontal transport of the crystal boat box faces similar challenges. The middle plate, as the main load-bearing component of the crystal boat box, needs to move horizontally, while the wrist assembly fixed to the middle plate needs to cooperate in the transfer process. In conventional designs, the middle plate and the wrist assembly are often driven by two separate drive mechanisms. This not only increases the number of transmission components and complicates the structure, but also may lead to asynchronous movement between the middle plate and the wrist assembly, causing the crystal boat box to shift or sway during transport, affecting transmission accuracy and safety.

[0007] 3. Cleanliness is a core consideration that cannot be avoided in semiconductor equipment design. In existing conveying equipment, the Z-axis lifting mechanism often uses open-type ball screws or ordinary linear guides. During long-term high-speed reciprocating motion, friction between the guide and the slider inevitably generates particulate contaminants such as metal dust and lubricating grease volatiles. Once these particles escape into the wafer transport area and adhere to the wafer surface, they can lead to serious quality problems such as pattern defects, short circuits, or open circuits. Although some existing solutions add simple dust covers to the outside of the guide rails, the lack of an active dust removal mechanism allows particles to accumulate in the enclosed space, eventually becoming a secondary source of contamination.

[0008] 4. Insufficient system-level cycle time optimization. Traditional platform modules are typically positioned at one end of the conveying stroke. When a request from an external robotic arm at the other end is needed, the platform module must move from one end to the other, resulting in a long travel distance and significant time consumption, thus limiting the overall machine response speed. Furthermore, in existing solutions, the coordination of actions between modules relies primarily on software timing scheduling by the host controller, lacking hardware-level linkage design, making it difficult to fundamentally overcome the cycle time bottleneck.

[0009] In summary, how to achieve mechanical linkage for the picking and placing of the wafer carrier within the SMIF module and for the horizontal transport of the wafer carrier within the stage module, while simultaneously taking into account high cleanliness requirements and system-level cycle time optimization, constitutes a technical challenge that urgently needs to be addressed in this field, specifically for the unique application scenarios of semiconductor wafer transport equipment. Summary of the Invention

[0010] This invention aims to overcome the aforementioned deficiencies of existing technologies and provide a crystal boat box conveying device with a dual-linkage design. The invention employs a two-level mechanical linkage design, with a dual-screw linkage mechanism inside the SMIF module and a dual-belt linkage mechanism inside the platform module, simplifying the overall mechanical structure and improving transmission stability. Simultaneously, it incorporates a sealed dustproof, vacuum exhaust, and shock-absorbing structure to meet the high cleanliness requirements of semiconductor production. Modular design optimizes the assembly process, and the workstation layout optimizes the system's transmission cycle time, ultimately achieving a comprehensive goal of simple equipment structure, convenient assembly, stable operation, high cleanliness, and high transmission efficiency.

[0011] To achieve the above objectives, the present invention adopts the following technical solution: a dual-linkage design wafer carrier transfer device, applied to a semiconductor wafer transfer device supporting intermediate transfer and temporary storage of multiple wafer carriers, including a rack, and further including: an SMIF module and a stage module; the SMIF module is connected to the OHT overhead crane unloading station and is connected to the stage module, the SMIF module is provided with a dual-screw linkage mechanism, the dual-screw linkage mechanism including a first drive source, a first screw and a second screw, the first screw is connected to a lifting platform for supporting the wafer carrier, the second screw is connected to a swing claw for transferring the wafer carrier, the lead of the first screw is twice the lead of the second screw, the first... The drive source synchronously drives the first and second lead screws, enabling the lifting platform and the swing claw to form a fixed differentiated linkage stroke, realizing the coordinated action of the crystal boat box sinking and making way; the platform module is equipped with a double belt linkage mechanism, which includes a second drive source, a drive belt and a reversing belt. The drive belt is connected to the middle plate for horizontally conveying the crystal boat box, and the reversing belt is connected to the drive belt and the wrist assembly on the middle plate respectively. The second drive source drives the middle plate and the wrist assembly to move synchronously with the same stroke, realizing the linkage of horizontal conveying of the crystal boat box; the platform module is equipped with a Z-axis lifting unit, which is an electromagnetically controllable slide table equipped with a vacuum exhaust closed slide rail.

[0012] Furthermore, the dual lead screw linkage mechanism also includes a synchronous transmission component and a guide rod. The first drive source simultaneously transmits the first lead screw and the second lead screw through the synchronous transmission component to achieve synchronous power transmission. The guide rod guides the movement of the lifting platform to ensure the smooth operation of the lifting platform.

[0013] Furthermore, the swing claw is movably hinged to the slider of the second lead screw, and the slider is provided with a second drive servo. The output end of the second drive servo is connected to the swing claw, driving the swing claw to switch between the swing-out state of supporting the crystal boat box and the retracted state of avoiding the lifting platform. The swing claws are symmetrically arranged, with the centers of the two swing claws aligned with the central axis of the crystal boat box, and the initial assembly position of the swing claws is lower than the bottom surface of the crystal boat box by a distance of one second lead screw pitch.

[0014] Furthermore, the dual-belt linkage mechanism also includes a first belt clamp, a second belt clamp, and a third belt clamp. The forward side of the drive belt is fixed to the middle plate via the first belt clamp, and the backward side of the drive belt is connected to one end of the reversing belt via the second belt clamp. The other end of the reversing belt is fixed to the wrist assembly via the third belt clamp. The wrist assembly is provided with a positioning base and an adjustable positioning pin to horizontally limit the crystal boat box and prevent deviation during transportation.

[0015] Furthermore, the SMIF module also includes a servo-driven locking mechanism for locking / unlocking the OHT crane's wafer transport box and a rotary key mechanism for unlocking the wafer transport box base.

[0016] Furthermore, the SMIF module is equipped with a first photoelectric switch along the lifting path of the crystal boat box, which is used to detect the position of the lifting platform. When the lifting platform descends to a preset position, the first photoelectric switch is triggered to trigger the claw action and the first drive source to stop. The SMIF module also integrates a crystal boat box position sensor and a wafer transfer box position sensor, which are used to detect the position status of the crystal boat box and the wafer transfer box, respectively. The platform module is equipped with a second photoelectric switch, which is used to detect the position of the middle plate to determine the end point of the horizontal transport of the crystal boat box.

[0017] Furthermore, the output end of the electromagnetically controllable slide is connected to a dual-belt linkage mechanism, and the electromagnetically controllable slide is equipped with a miniature oil rod, which provides shock absorption and buffering when the Z-axis lifting unit lifts up to receive the crystal boat box.

[0018] Furthermore, the vacuum exhaust enclosed slide rail is provided with an air extraction port, which is connected to the vacuum exhaust system of the semiconductor wafer transfer equipment to discharge particulate matter generated inside the vacuum exhaust enclosed slide rail; the vacuum exhaust enclosed slide rail is also covered with a full-coverage dust cover, which covers the movement area of ​​the electromagnetically controllable slide table.

[0019] Furthermore, the horizontal conveying stroke of the platform module is divided into a crystal boat box placement station and a middle standby station. The middle standby station is located between the crystal boat box placement station and the external robot handover station, and is located at the geometric midpoint of the horizontal conveying stroke of the platform module. The equipment normally stops at the middle standby station to shorten the handover cycle with the external robot hand.

[0020] Furthermore, when the lifting platform completes the full stroke L, the corresponding stroke of the swing claw is 1 / 2L.

[0021] Compared with the prior art, the crystal boat box conveying device with dual linkage design provided by the present invention has the following significant advantages.

[0022] 1. Dual-screw linkage design for coordinated crystal carrier loading and unloading within the SMIF module using a single drive source. This invention incorporates a dual-screw linkage mechanism within the SMIF module, consisting of a first screw and a second screw. Utilizing a lead difference design where the first screw's lead is twice that of the second screw, the lifting platform and the swing claw achieve synchronized yet differentiated motion strokes under the single power output of the first drive source. This design integrates the traditional sequence of actions requiring two independent drive sources to execute step-by-step into a coordinated motion process that can be automatically completed with a single continuous operation of a single drive source. This mechanically solves the problem of motion synchronization, significantly shortens the single crystal carrier loading and unloading cycle of the SMIF module, substantially improves loading and unloading efficiency, and simultaneously reduces the number of drive sources, lowering the hardware cost and control complexity of the equipment.

[0023] 2. A dual-belt linkage design enables synchronous, same-stroke transport of the middle plate and wrist assembly within the platform module using a single drive source. This invention incorporates a dual-belt linkage mechanism within the platform module, consisting of a drive belt and a reversing belt. Utilizing the opposite motion directions of the drive belt's forward and backward sides, the reversing belt reverses the backward motion direction, ensuring the wrist assembly moves in the same direction and at the same speed as the middle plate. This design allows a single drive source to synchronously drive the middle plate and wrist assembly for horizontal transport. While maintaining the synchronicity of the crystal boat box transport, it simplifies the transmission structure, avoids motion deviations that may arise from independent control of multiple drive sources, and improves the synchronization accuracy and operational stability of the crystal boat box's horizontal transport.

[0024] 3. Dual cleanliness protection through a vacuum-exhausted enclosed slide rail and a fully enclosed dust cover controls particulate contamination at its source. This invention employs a vacuum-exhausted enclosed slide rail in the Z-axis lifting unit. The slide rail is connected to the equipment's vacuum exhaust system via an extraction port, actively and continuously expelling particles generated by friction during internal movement. Simultaneously, a fully enclosed dust cover covers the outside of the slide rail, establishing a second physical barrier between the slide rail and the external environment. This prevents external dust intrusion and also prevents the outward diffusion of any leaked microparticles. This dual cleanliness protection system enables the equipment to meet the stringent requirements of semiconductor manufacturing for a high-cleanliness environment.

[0025] 4. Miniature hydraulic rods provide shock absorption and buffering to ensure safe wafer transport. A miniature hydraulic rod is configured at the output end of the electromagnetically controllable slide to provide hydraulic damping and buffering at the moment the Z-axis lifting unit rises to receive the wafer carrier. This transforms rigid impact into flexible, gradual contact, effectively preventing impact vibration from being transmitted to the wafer inside the wafer carrier, reducing the risk of wafer breakage and displacement, and improving the equipment's ability to protect the wafer.

[0026] 5. Mid-position standby strategy, optimizing the overall machine transmission cycle time at the system level. This invention creatively sets the non-working standby position of the platform module at the geometric midpoint of the horizontal conveying stroke, ensuring that the platform module's movement distance is always half of the full stroke, regardless of whether a conveying request needs to be responded to from the SMIF module direction or the external robot direction. This design optimizes the unbalanced response mode of the traditional solution, which involves "full-length movement in one direction and zero-length movement in the other," into a balanced response mode of "half-length movement in both directions," effectively compressing the average response time and optimizing the overall machine transmission cycle time at the system level.

[0027] 6. Multi-sensor collaborative detection constructs a closed-loop safety control system. The first photoelectric switch detects the descent position of the lifting platform to trigger the claw action and drive source shutdown. The second photoelectric switch detects the horizontal positioning of the middle plate to determine the conveying endpoint. The wafer carrier box positioning sensor and the wafer transfer box positioning sensor provide real-time feedback on material positioning status. Multiple sensors are electrically connected to the equipment control unit, forming a complete closed-loop detection and control chain. This ensures that every action step of the equipment is executed only after confirming the correct completion of the previous step, fundamentally guaranteeing operational safety and reliability.

[0028] 7. Strong spatial adaptability and good versatility. The SMIF module features a compact layout of servo-driven locking mechanism and dual-screw linkage mechanism, and a small electromagnetically controllable slide structure, making full use of the limited internal space of semiconductor wafer transfer equipment. This solves the problems of limited space in traditional loader mechanisms and poor spatial adaptability of OHT systems. Attached Figure Description

[0029] The accompanying drawings, which are provided to further illustrate this application and form part of this application, illustrate exemplary embodiments of this application and are used to explain this application, but do not constitute an undue limitation of this application.

[0030] Figure 1 This is a schematic diagram of the overall composition of the device of the present invention.

[0031] Figure 2 This is a block diagram showing the overall motion logic and workstation distribution of the equipment in this invention.

[0032] Figure 3 This is a schematic diagram of the servo drive locking plate mechanism and the rotary key mechanism of the present invention.

[0033] Figure 4 This is a schematic diagram of the structure of the double lead screw linkage mechanism of the present invention.

[0034] Figure 5 This is a schematic diagram of the second drive servo and the pawl assembly of the present invention.

[0035] Figure 6This is a schematic diagram of the stroke relationship of the dual lead screw linkage mechanism of the present invention.

[0036] Figure 7 This is a schematic diagram of the overall structure of the platform module of the present invention.

[0037] Figure 8 This is a schematic diagram of the structure of the double belt linkage mechanism of the present invention.

[0038] Figure 9 This is a schematic diagram of the upper part of the electromagnetically controllable slide of the present invention.

[0039] Figure 10 This is a schematic diagram of the internal structure of the electromagnetically controllable slide table of the present invention.

[0040] Reference numerals: 1-Frame, 2-Equipment control unit, 3-SMIF module, 4-Platform module, 5-Crystal boat box, 6-Wafer transfer box, 7-OHT unloading station, 8-First photoelectric switch, 9-Crystal boat box lifting station, 10-Crystal boat box sinking completion station, 11-Crystal boat box placement station, 12-Mid-position standby station, 13-Horizontal conveying stroke of crystal boat box inside platform module, 14-Middle plate, 15-Wrist assembly, 16-Total vertical lifting stroke of crystal boat box inside SMIF module, 17-Crystal boat box positioning sensor, 18-Wafer transfer box positioning sensor, 19-Rotating key mechanism, 20-Servo drive locking mechanism, 21-Locking plate, 22-First drive servo, 23-Lifting platform, 24-First... 25-First lead screw, 26-Second lead screw, 27-Guide rod, 28-First drive source, 29-Synchronous transmission assembly, 30-Swing claw, 31-Slider, 32-Bottom surface of crystal boat box, 33-Initial assembly position of swing claw, 34-Second drive source, 35-Z-axis lifting unit, 36-Crystal boat box bearing platform position, 37-Drive wheel, 38-Vacuum exhaust enclosed slide rail, 39-Drive belt, 40-Reversing belt, 41-First belt clamp, 42-Second belt clamp, 43-Third belt clamp, 44-Rigid connection bracket, 45-Fully enclosed dust cover, 46-Electromagnetically controllable slide table, 47-Electromagnetic coil, 48-Magnet, 49-Spring, 50-Miniature oil rod, 51-Wire harness hole. Detailed Implementation

[0041] The technical solutions of the embodiments of the present invention will be clearly, completely, and in detail described below with reference to the accompanying drawings. The described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0042] It should be noted that in the description of this invention, the terms "upper," "lower," "left," "right," "front," "back," "horizontal," "vertical," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are all based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the technical solution of this invention and simplifying the descriptive language, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this invention.

[0043] Furthermore, in the description of this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixing," "assembly," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific implementation.

[0044] This invention provides a dual-linkage design for a wafer carrier transfer device, which is used in conjunction with a semiconductor wafer transfer device supporting intermediate transfer and storage of multiple wafer carriers. It interfaces with an upstream OHT overhead crane unloading system and a downstream wafer robot and vertical furnace process equipment to achieve fully automated operation of wafer carrier 5 and wafer transfer box 6 loading, wafer transfer box 6 unlocking, wafer carrier 5 lowering for positioning, wafer carrier 5 transfer, and standby avoidance. The device is based on a frame 1 and consists of two main functional modules: an SMIF module 3 and a platform module 4. These two modules are sequentially connected and rely on two core linkage structures—dual lead screw linkage and dual belt linkage—to coordinate actions. It also integrates auxiliary structures such as sensors, locking / unlocking mechanisms, shock absorption, and vacuum dust prevention to form a complete automated wafer carrier 5 transfer system.

[0045] like Figure 1 As shown, the dual-linkage crystal boat box conveying device of this embodiment includes a frame 1 as a load-bearing skeleton, and SMIF modules 3 and platform modules 4, both mounted and fixed on the frame 1. From the spatial layout of this embodiment, it can be seen that the SMIF module 3 occupies the upper area of ​​the device, and the platform module 4 occupies the lower area of ​​the device. The two are stacked vertically, with the bottom outlet of the SMIF module 3 facing the working area of ​​the platform module 4. The crystal boat box 5 is transferred between them through vertical material exchange.

[0046] The top entrance of SMIF module 3 connects to the OHT crane unloading station to receive the wafer transfer box 6 transported by the OHT crane from the overhead track. One side of the stage module 4 (i.e., the end of the horizontal transport stroke) connects to the external robot handover station to deliver the wafer boat box 5 to the external robot for subsequent process equipment, or to receive the wafer boat box 5 that has completed process processing from the external robot.

[0047] like Figure 4 and Figure 5 As shown, the core transmission device inside the SMIF module 3 is a double lead screw linkage mechanism. The double lead screw linkage mechanism consists of a first drive source 28, a first lead screw 25, a second lead screw 26, a lifting platform 23, a swing claw 30, a synchronous transmission assembly 29, and a guide rod 27.

[0048] The first drive source 28 is a servo motor, preferably an AC servo motor with an incremental or absolute encoder, capable of providing precise speed control, position control, and torque output. The first drive source 28 is fixedly mounted on the mounting base plate of the SMIF module 3, with its output shaft extending vertically upwards.

[0049] Both the first lead screw 25 and the second lead screw 26 are precision ball screws, arranged parallel to each other and spaced apart on both sides of the SMIF module 3. The lead of the first lead screw 25 is denoted as P, and the lead of the second lead screw 26 is denoted as P'. In this invention, P and P' satisfy the mathematical relationship P=2P', meaning the lead of the first lead screw 25 is twice the lead of the second lead screw 26. For example, in a specific embodiment, the lead of the first lead screw 25 is 20mm, and the lead of the second lead screw 26 is 10mm; or the lead of the first lead screw 25 is 10mm, and the lead of the second lead screw 26 is 5mm. The specific values ​​can be selected according to the overall size of the equipment and the stroke requirements, but the two-fold relationship must be strictly adhered to.

[0050] A lifting platform 23 is fixedly mounted on the screw nut of the first lead screw 25. The lifting platform 23 is a horizontally positioned plate-like component, the upper surface of which serves as the support surface for the crystal boat box 5, and its area is sufficient to cover the bottom projection area of ​​the crystal boat box 5. Driven by the screw nut of the first lead screw 25, the lifting platform 23 moves vertically up and down, realizing the lifting and lowering of the crystal boat box 5.

[0051] A slider 31 is fixedly mounted on the screw nut of the second lead screw 26, and a swing claw 30 is movably mounted on the slider 31 via a hinge shaft. The free end (i.e., the claw tip) of the swing claw 30 extends into the bottom of the crystal boat box 5 during operation to complete the transfer operation.

[0052] Synchronous transmission assembly 29 is used to synchronously transmit the rotational power of the first drive source 28 to the first lead screw 25 and the second lead screw 26. In a preferred example, synchronous transmission assembly 29 is a closed triangular synchronous belt drive system. Specifically, a driving synchronous pulley is fixedly mounted on the output shaft of the first drive source 28, a first driven synchronous pulley is fixedly mounted on the end of the first lead screw 25, and a second driven synchronous pulley is fixedly mounted on the end of the second lead screw 26. A closed synchronous belt is fitted around the outer edge of the three pulleys in a triangular path. The internal teeth of the synchronous belt mesh with the external teeth of the pulleys to ensure no slippage or lag during transmission, and the first lead screw 25 and the second lead screw 26 maintain strictly synchronous rotation at any time.

[0053] The guide rod 27 is an optical axis, parallel to the first lead screw 25, and its two ends are fixed to the mounting frame of the SMIF module 3. The lifting platform 23 is equipped with linear bearings that slide in cooperation with the guide rod 27. The guide rod 27 guides the lifting movement of the lifting platform 23 and constrains it to translate only in the vertical direction.

[0054] The working principle of the dual-screw linkage mechanism is as follows: When the first drive source 28 is energized and rotates, it simultaneously drives the first screw 25 and the second screw 26 to rotate at the same angular velocity ω through the synchronous transmission component 29. Since the lead P of the first screw 25 and the lead P' of the second screw 26 satisfy P=2P', according to the basic formula of screw transmission (linear velocity = lead × rotational speed), the lifting speed V1 of the lifting platform 23 is V1=P×ω, and the lifting speed V2 of the pawl 30 is V2=P'×ω=(P / 2)×ω=V1 / 2. Within the same time period, the displacement S1 of the lifting platform 23 is S1=P×n (n is the number of revolutions), and the displacement S2 of the pawl 30 is S2=P'×n=(P / 2)×n=S1 / 2. Therefore, under the unified drive of the first drive source 28, the lifting platform 23 and the pawl 30 naturally form a differentiated linkage relationship in which the stroke of the lifting platform 23 is always twice the stroke of the pawl 30.

[0055] The material support area formed by the coordinated operation of the lifting platform 23 and the swing claw 30 is the crystal boat box lifting station 9 (e.g. Figure 2 As shown), the crystal boat box lifting station 9 is the positioning area where the crystal boat box 5 is temporarily supported inside the SMIF module 3.

[0056] like Figure 5As shown, the specific structure of the swing claw 30 and its assembly relationship with the slider 31 are as follows: The swing claw 30 is movably mounted on the slider 31 via a hinge shaft. The axis of the hinge shaft is horizontally set, allowing the swing claw 30 to swing around the hinge shaft in a vertical plane. A second drive servo motor 24 is fixedly mounted on the slider 31. The output shaft of the second drive servo motor 24 is coaxially connected to the hinge shaft of the swing claw 30 or connected via a small gear pair. The second drive servo motor 24 receives instructions from the equipment control unit 2 and precisely drives the swing claw 30 to switch between the extended state of supporting the crystal boat box 5 and the retracted state of avoiding the lifting platform 23.

[0057] Outward swing state: The second drive servo 24 drives the pawl 30 to swing outward to a predetermined holding angle (for example, the upper surface of the pawl 30 is in a horizontal or slightly upturned position). At this time, the claw tip area of ​​the pawl 30 covers a part of the bottom surface 32 of the crystal boat box, and can provide an upward holding force from both sides of the bottom surface of the crystal boat box 5.

[0058] Retracted state: The second drive servo 24 drives the pawl 30 to swing inward to a predetermined avoidance angle (for example, the pawl 30 retracts to a position close to the slider 31). At this time, the claw tip of the pawl 30 completely exits the projection area directly below the bottom surface 32 of the crystal boat box and has no contact with the crystal boat box 5, making room for the lifting platform 23 to freely lift and lower the crystal boat box 5.

[0059] The swing claws 30 are arranged symmetrically, with two mirror-shaped swing claws 30 mounted on the sliders 31 of the two second lead screws 26, respectively, located on the left and right sides of the crystal boat box 5. The line connecting the geometric centers of the two swing claws 30 passes exactly through the central axis of the crystal boat box 5. This symmetrical design ensures that the forces on the left and right sides are completely balanced when supporting the crystal boat box 5.

[0060] like Figure 6As shown, P is the first lead screw lead, P' is the second lead screw lead, L is the total lifting stroke of the lifting platform 23, and 1 / 2L is the corresponding running stroke of the swing claw 30. The design of the initial assembly position 33 of the swing claw is the key to the coordinated action of the double lead screw linkage mechanism. Specifically, in the initial state after the equipment is powered on and reset to zero, the height of the upper surface of the claw tip of the swing claw 30 is set to be one second lead screw 26 lead P' lower than the bottom surface 32 of the crystal boat box. This initial height difference setting has important mechanical significance: when the first drive source 28 is started and the lead screw rotates, when the swing claw 30 rises from the initial position by one lead P', the claw tip of the swing claw 30 just reaches the height of the bottom surface 32 of the crystal boat box. At the same time, the lifting platform 23, because its lead is P=2P', has risen 2P' in the same time period, and its lifting surface is just flush with the upper surface of the claw tip of the swing claw 30. At this time, the two contact and support the bottom surface of the crystal boat box 5. As the first drive source 28 continues to operate, the lifting platform 23 continues to rise at twice the speed of the swing claw 30. The weight of the crystal boat box 5 is gradually transferred to the lifting platform 23, while the swing claw 30 descends relatively. During the movement, the two automatically complete the smooth transfer of the support of the crystal boat box 5.

[0061] like Figure 7 and Figure 8 As shown, the core transmission device inside the platform module 4 is a double-belt linkage mechanism. The double-belt linkage mechanism consists of a second drive source 34, a drive belt 39, a reversing belt 40, a middle plate 14, and a wrist assembly 15.

[0062] The second drive source 34 is a servo motor, preferably an AC servo motor with an encoder, which is fixedly installed on the mounting base of the platform module 4, and the output end is equipped with a drive wheel 37.

[0063] The drive belt 39 is a closed-loop synchronous belt, wound between the driving pulley 37 fixed on the output shaft of the second drive source 34 and the driven pulley mounted on the other end of the frame of the platform module 4. When the drive belt 39 is running, it forms two running sections: the upper running section is the forward running side and the lower running section is the backward running side (these can also be interchanged according to the actual winding direction). The forward running side and the backward running side move in opposite directions and at the same speed.

[0064] The specific connection relationship between the drive belt 39, the middle plate 14, and the reversing belt 40 is as follows: The forward side of the drive belt 39 is fixedly connected to the bottom or side of the middle plate 14 via a first belt clamp 41. The first belt clamp 41 is a clamp-type structure, which clamps the belt body of the drive belt 39 by bolt fastening, and its body is fixed to the middle plate 14 by screws. When the second drive source 34 is running, the belt segment on the forward side directly drags the middle plate 14 to move synchronously in the horizontal direction via the first belt clamp 41.

[0065] The rearward side of the drive belt 39 is connected to one end of the rigid connecting bracket 44 via the second belt clamp 42, and the other end of the rigid connecting bracket 44 is connected to the reversing belt 40. The reversing belt 40 is an independent closed synchronous belt, which is wound around two reversing pulleys installed at both ends of the middle plate 14. The axes of the two reversing pulleys are vertically arranged (or horizontally arranged, depending on the specific spatial layout), so that the reversing belt 40 forms two belt segments with opposite directions of movement: a lower segment closer to the drive belt 39 and an upper segment farther away from the drive belt 39.

[0066] The upper section of the reversing belt 40 is fixedly connected to the wrist assembly 15 via a third belt clamp 43. The third belt clamp 43 holds the upper section of the reversing belt 40, and its body is fixed to the bottom of the wrist assembly 15.

[0067] The motion transmission logic of the dual-belt linkage mechanism: The second drive source 34 drives the drive belt 39 to rotate, and the forward side drags the middle plate 14 to the right (assuming the direction of movement). The backward side transmits power through the rigid connecting bracket 44 and the reversing belt 40 flips the direction of movement, which synchronously drives the wrist component 15 to move to the right at the same speed and with the same stroke. Finally, the middle plate 14 and the wrist component 15 move to the right in the same direction at a speed V, and the stroke is completely consistent, so as to realize the synchronous linkage between the middle plate 14 carrying the crystal boat box 5 and the wrist component 15 limiting the crystal boat box 5.

[0068] The platform module 4 is mounted on the Z-axis lifting unit 35, which drives the platform module 4 to move up and down in the vertical direction.

[0069] like Figure 9 and Figure 10As shown, the platform module 4 is equipped with a Z-axis lifting unit 35, which uses an electromagnetically controllable slide 46. This electromagnetically controllable slide 46 achieves lifting action based on electromagnetic principles. It integrates electromagnetic drive components such as an electromagnetic coil 47, a magnet 48, and a spring 49. At the same time, the electromagnetically controllable slide 46 has a reserved wire harness hole 51 in the middle for laying the connection line of the wrist component 15. The overall structure is compact and can be adapted to the narrow installation space inside the semiconductor wafer transfer equipment, improving the problem of the traditional lifting mechanism being too large and having insufficient space utilization. The output end of the electromagnetically controllable slide 46 is fixedly connected to the bottom of the double belt linkage mechanism. When the electromagnetically controllable slide 46 lifts, it can drive the entire double belt linkage mechanism to lift synchronously, so that the double belt linkage mechanism rises to the crystal boat box sinking completion station 10 to receive the crystal boat box 5 held by the swing claw 30, and then descends and resets to transport the crystal boat box 5 to the crystal boat box placement station 11, completing the cross-module transfer and handover operation of the crystal boat box 5. The electromagnetic controllable slide table 46 is equipped with a miniature hydraulic rod 50, which is a hydraulic shock-absorbing and damping structure. During the process of the Z-axis lifting unit 35 being raised and supporting the crystal boat box 5, it can absorb mechanical impact and play a buffering and shock-absorbing role. This not only protects the internal precision components of the electromagnetic controllable slide table 46, but also avoids impact damage to the wafer and the crystal boat box 5, effectively improving the stability of equipment operation and the safety of material conveying.

[0070] The SMIF module 3 is equipped with a servo motor driven locking mechanism 20 and a rotary key mechanism 19 at the top entrance of the OHT crane unloading station.

[0071] like Figure 3 As shown, the servo-driven locking mechanism 20 includes locking plates 21 installed on both sides of the entrance frame, and a first drive servo motor 22 that drives the locking plates 21 to rotate. After the OHT crane lowers the wafer transfer box 6 and places it on the positioning surface of the SMIF entrance, the wafer transfer box positioning sensor 18 sends a signal, and the equipment control unit 2 instructs the first drive servo motor 22 to drive the locking plates 21 to rotate approximately 90 degrees, so that the locking tongue of the locking plates 21 engages in the pre-set locking groove on the side of the wafer transfer box 6 housing, firmly locking the wafer transfer box 6 onto the SMIF module 3, preventing the wafer transfer box 6 from loosening or shifting during subsequent opening and unloading operations.

[0072] A rotary key mechanism 19 is located below the base of the wafer transfer box 6. The rotary key mechanism 19 includes a rotary key that can be moved up and down by a lifting cylinder, and a rotary drive device that drives the rotary key to rotate around a vertical axis. After the wafer transfer box 6 is locked by the servo-driven locking mechanism 20, the lifting cylinder of the rotary key mechanism 19 pushes the rotary key upward, causing its end to insert into the keyhole of the wafer transfer box 6 base. Then, the rotary drive device drives the rotary key to rotate a preset angle, releasing the mechanical engagement between the wafer transfer box 6 base cover and the wafer transfer box 6 body. This allows the bottom cover of the wafer transfer box 6 to be opened in subsequent operations, exposing the wafer boat box 5 inside the SMIF module 3 for loading and unloading by the dual-screw linkage mechanism.

[0073] The device of this invention has multiple sets of sensors arranged at key nodes in the transmission path of the crystal boat box 5. All sensors are electrically connected to the device control unit 2, forming a detection system with real-time feedback and closed-loop control.

[0074] On one side of the SMIF module 3, one or more first photoelectric switches 8 are arranged along the lifting path of the crystal boat box 5 (e.g., Figure 2 As shown, 16 represents the total vertical lifting stroke of the crystal boat box inside the SMIF module. The first photoelectric switch 8 is a through-beam or reflective photoelectric sensor, whose detection optical axis horizontally traverses the lifting channel of the crystal boat box 5. The installation height of the first photoelectric switch 8 is precisely adjusted to correspond to the preset position where the lifting platform 23 should stop during the removal of the crystal boat box 5. When the lifting platform 23 descends to this height, its edge or the light-blocking plate installed on it blocks the light path of the first photoelectric switch 8, and the output state of the photoelectric switch flips. After the equipment control unit 2 detects this signal, it executes two control actions: first, it sends a command to the second drive servo motor 24 to drive the swing claw 30 to move (swing out to hold during the removal process, and retracting to make way during the loading process); second, it sends a stop command to the first drive source 28 to make the lifting platform 23 stop precisely at the preset height.

[0075] like Figure 3 As shown, the SMIF module 3 also integrates a wafer carrier position sensor 17 and a wafer transfer box position sensor 18. The wafer carrier position sensor 17 is mounted on the lifting platform 23 or the side wall of the SMIF module 3 to detect whether the wafer carrier 5 is located on the lifting platform 23 or the swing claw 30; the wafer transfer box position sensor 18 is mounted at the SMIF entrance to detect whether the wafer transfer box 6 has been correctly positioned on the entrance positioning surface. Both sensors are typically implemented using proximity switches, microswitches, or photoelectric sensors.

[0076] A second photoelectric switch is provided on one side of the platform module 4. The second photoelectric switch is installed at the end position of the horizontal conveying stroke (the handover position of the external robot arm, or a similar sensor can be added at the crystal boat box placement station 11) to detect whether the middle plate 14 has carried the crystal boat box 5 to the target position. When the middle plate 14 arrives at the target position, the second photoelectric switch is triggered, and the equipment control unit 2 determines that the horizontal conveying action has been completed, and then controls the second drive source 34 to stop.

[0077] On the horizontal conveying path of the platform module 4, two workstation nodes are clearly divided according to function: crystal boat box placement station 11 and intermediate standby station 12 (e.g., Figure 2 As shown, 13 represents the horizontal transport stroke of the crystal boat box inside the platform module.

[0078] The crystal boat box placement station 11 is located at one end of the horizontal conveying stroke, close to the SMIF module 3 directly below it. It is the fixed station where the platform module 4 receives the crystal boat box 5 from the SMIF module 3.

[0079] The external robot handover station is located at the other end of the horizontal conveying stroke. It is a fixed station for the handover of the crystal boat box 5 between the platform module 4 and the external robot.

[0080] The intermediate standby station 12 is the docking position of the platform module 4 when it is not in a task-free state. Its specific location is set at the geometric midpoint between the crystal boat placement station 11 and the external robot handover position. Specifically, the horizontal distance from the intermediate standby station 12 to the crystal boat placement station 11 is equal to the horizontal distance from the intermediate standby station 12 to the external robot handover position, both being half the total horizontal transport distance of the platform module 4. Furthermore, a position sensor can be installed at the intermediate standby station 12, and the second drive source 34 will stop upon receiving a position sensor signal.

[0081] The cycle time optimization principle of the mid-position standby strategy is as follows: When the SMIF module 3 completes the crystal boat box 5 removal operation and the platform module 4 needs to go to the crystal boat box placement station 11 to receive the material, the platform module 4 can reach the station by moving half a stroke to the right from the mid-position standby station 12; when the external robot completes the process and the platform module 4 needs to go to the external robot handover station to feed or receive material, the platform module 4 can reach the station by moving half a stroke to the left from the mid-position standby station 12. Regardless of which side's request is being responded to, the positioning stroke is minimized, avoiding the inefficiency of the traditional end-position standby strategy where the entire movement is required to respond to remote requests. As a result, the average response time of the platform module 4 is significantly shortened, and the overall machine transmission cycle time is effectively optimized.

[0082] The following combination Figure 2 The complete operation process of the device of the present invention receiving a crystal boat box 5 from the OHT crane is described in detail.

[0083] Phase 1: Wafer Transfer Box 6 - Reception and Locking. The OHT crane travels along the overhead track to a position directly above the SMIF module 3, lowering the wafer transfer box 6 and placing it at the OHT unloading station 7 at the top entrance of the SMIF module 3. Once the wafer transfer box positioning sensor 18 detects that the wafer transfer box 6 has reached its position, it sends a positioning signal to the equipment control unit 2. The equipment control unit 2 then instructs the first drive servo 22 of the servo-driven locking mechanism 20 to drive the locking plate 21 to rotate to the locked position, thus securing the wafer transfer box 6 to the SMIF module 3.

[0084] Phase Two: Unlocking and Opening the Wafer Transfer Box 6. After the wafer transfer box 6 is locked, the equipment control unit 2 instructs the lifting cylinder of the rotary key mechanism 19 to push the rotary key upward and insert it into the keyhole of the wafer transfer box 6 base. Subsequently, the rotary drive device drives the rotary key to rotate, releasing the lock between the wafer transfer box 6 base cover and the wafer transfer box 6 body. The wafer transfer box 6 base cover opens under the action of gravity or auxiliary mechanism, exposing the bottom of the wafer boat box 5 to the internal working space of the SMIF module 3.

[0085] Phase Three: Dual-screw linkage for material handling. The equipment control unit 2 commands the first drive source 28 to start, simultaneously driving the first lead screw 25 and the second lead screw 26 to rotate at the same speed via the synchronous transmission assembly 29. The lifting platform 23 rises at speed V1, and the swing claw 30 rises at speed V2. Based on the initial position of the swing claw 30 being one lead of the second lead screw 26 below the bottom surface 32 of the crystal boat box, when the first drive source 28 drives the second lead screw 26 to rotate until the swing claw 30 just rises P', the claw tip of the swing claw 30 reaches the height of the bottom surface 32 of the crystal boat box. After the lifting platform 23 rises 2P', its supporting surface is flush with the claw tip of the swing claw 30, and both contact the bottom surface 32 of the crystal boat box. As the first lead screw 25 continues to rotate, the lifting platform 23 continues to rise at twice the speed, gradually pushing the crystal boat box 5 upward away from the base of the wafer transfer box 6, while the relative position of the swing claw 30 decreases, and the weight of the crystal boat box 5 is gradually transferred to the lifting platform 23. When the lifting platform 23 descends to the trigger height of the first photoelectric switch 8, the first photoelectric switch 8 is triggered. The equipment control unit 2 controls the second drive servo motor 24 to drive the swing claw 30 to swing outward, supporting the crystal boat box 5 from both sides. At the same time, the first drive source 28 is stopped. At this point, the crystal boat box 5 has been successfully removed from the wafer transfer box 6 and is under the auxiliary support of the swing claw 30. Afterward, the first drive source 28 runs in reverse at a low speed, causing the lifting platform 23 and the swing claw 30 to descend in coordination, smoothly transporting the crystal boat box 5 to the bottom outlet of the SMIF module 3.

[0086] Phase Four: Platform module 4 receives crystal boat box 5. Simultaneously or immediately after the SMIF module 3 performs the material handling action, the platform module 4 starts from the intermediate standby station 12. The second drive source 34 drives the double belt linkage mechanism, and the middle plate 14 and the wrist assembly 15 move synchronously and with the same stroke to the crystal boat box placement station 11. The electromagnetically controllable slide 46 of the Z-axis lifting unit 35 drives the platform module 4 to rise to the receiving height. At the end of the rise, the micro hydraulic rod 50 provides buffer damping, so that the middle plate 14 gently contacts the bottom surface 32 of the crystal boat box. The lifting platform 23 descends in coordination, and smoothly places the crystal boat box 5 on the middle plate 14.

[0087] Phase 5: Horizontal transfer to the handover point. After the Z-axis lifting unit 35 descends to the normal conveying height, the platform module 4, driven by the second drive source 34, horizontally conveys the crystal boat box 5 from the central standby station 12 to the external robot handover position. When the second photoelectric switch detects that the middle plate 14 has arrived, the equipment control unit 2 controls the second drive source 34 to stop, and the platform module 4 remains stationary at the handover position.

[0088] Phase 6: External robotic arm handles material handling. An external robotic arm extends into the working area of ​​the stage module 4, grasps the crystal boat box 5 from the wrist assembly 15, removes it, and sends it to the back-end process equipment. After completing this transport task, the stage module 4 returns to the intermediate standby station 12 to await the next instruction.

[0089] This concludes a complete process of receiving and transporting the crystal boat box 5. The sequence of actions for the crystal boat box 5 delivery process (receiving the crystal boat box 5 from the external robotic arm and loading it into the wafer transfer box 6 for removal by the OHT) is basically symmetrical to the above process. The action of loading the crystal boat box 5 into the wafer transfer box 6 can be coordinated by the reverse rotation of the dual lead screw linkage mechanism, which will not be described in detail here.

[0090] Throughout the operation of the equipment, the vacuum exhaust system continuously evacuates and removes dust from the inside of the vacuum exhaust enclosed slide rail 38 through the air extraction interface. The fully enclosed dust cover 45 is always in a sealed protective state, ensuring that the cleanliness of the wafer transfer area always meets the stringent standards of semiconductor manufacturing.

[0091] The above description, in conjunction with specific embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such deductions or substitutions should be considered within the scope of protection of the present invention.

Claims

1. A dual-linkage design wafer carrier transport device, applied to semiconductor wafer transport equipment supporting intermediate transport and temporary storage in multiple wafer carriers, comprising a rack, characterized in that, It also includes the SMIF module and the platform module; The SMIF module is connected to the OHT crane unloading station and the platform module. The SMIF module is equipped with a dual-screw linkage mechanism, which includes a first drive source, a first screw, and a second screw. The first screw is connected to a lifting platform for supporting the crystal boat box, and the second screw is connected to a swing claw for transferring the crystal boat box. The lead of the first screw is twice the lead of the second screw. The first drive source synchronously drives the first screw and the second screw, so that the lifting platform and the swing claw form a fixed differentiated linkage stroke, realizing the coordinated action of the crystal boat box sinking and making way. The platform module is equipped with a dual-belt linkage mechanism, which includes a second drive source, a drive belt, and a reversing belt. The drive belt is connected to a middle plate for horizontally conveying the crystal boat box, and the reversing belt is connected to the drive belt and the wrist assembly on the middle plate. The second drive source drives the middle plate and the wrist assembly to move synchronously and with the same stroke, thereby realizing the horizontal conveying linkage of the crystal boat box. The platform module is equipped with a Z-axis lifting unit, which is an electromagnetically controllable slide table with a vacuum-exhausted enclosed slide rail.

2. The crystal boat box conveying device with dual linkage design according to claim 1, characterized in that, The dual lead screw linkage mechanism also includes a synchronous transmission component and a guide rod. The first drive source simultaneously transmits the first lead screw and the second lead screw through the synchronous transmission component to achieve synchronous power transmission. The guide rod guides the movement of the lifting platform to ensure the smooth operation of the lifting platform.

3. The crystal boat box conveying device with dual linkage design according to claim 1, characterized in that, The swing claw is hinged to the slider of the second lead screw. The slider is equipped with a second drive servo motor. The output end of the second drive servo motor is connected to the swing claw, driving the swing claw to switch between the swing-out state of supporting the crystal boat box and the retracted state of avoiding the lifting platform. The swing claws are arranged symmetrically, with the centers of the two swing claws aligned with the central axis of the crystal boat box, and the initial assembly position of the swing claws is lower than the bottom surface of the crystal boat box by a distance equal to one second lead screw stroke.

4. The crystal boat box conveying device with dual linkage design according to claim 1, characterized in that, The dual-belt linkage mechanism further includes a first belt clamp, a second belt clamp, and a third belt clamp. The forward side of the drive belt is fixed to the middle plate via the first belt clamp, the backward side of the drive belt is connected to one end of the reversing belt via the second belt clamp, and the other end of the reversing belt is fixed to the wrist assembly via the third belt clamp.

5. The crystal boat box conveying device with dual linkage design according to claim 1, characterized in that, The SMIF module also includes a servo-driven locking mechanism for locking / unlocking the OHT crane's wafer transport box and a rotary key mechanism for unlocking the wafer transport box base.

6. The crystal boat box conveying device with dual linkage design according to claim 1, characterized in that, The SMIF module is equipped with a first photoelectric switch along the lifting path of the crystal boat box, which is used to detect the position of the lifting platform. When the lifting platform descends to a preset position, the first photoelectric switch is triggered to trigger the swing claw action and the first drive source to stop. The SMIF module also integrates a crystal boat box position sensor and a wafer transfer box position sensor, which are used to detect the position status of the crystal boat box and the wafer transfer box, respectively. The platform module is equipped with a second photoelectric switch, which is used to detect the position of the middle plate to determine the end point of the horizontal transport of the crystal boat box.

7. The crystal boat box conveying device with dual linkage design according to claim 1, characterized in that, The output end of the electromagnetically controllable slide is connected to a dual-belt linkage mechanism. The electromagnetically controllable slide is equipped with a miniature oil rod, which provides shock absorption and buffering when the Z-axis lifting unit lifts up to receive the crystal boat box.

8. The crystal boat box conveying device with dual linkage design according to claim 1, characterized in that, The vacuum exhaust enclosed slide rail is equipped with an air extraction port, which is connected to the vacuum exhaust system of the semiconductor wafer transfer equipment to remove particulate matter generated inside the vacuum exhaust enclosed slide rail. The vacuum exhaust enclosed slide rail is also covered with a full-coverage dust cover, which covers the movement area of ​​the electromagnetically controllable slide table.

9. The crystal boat box conveying device with dual linkage design according to claim 1, characterized in that, The horizontal conveying stroke of the platform module is divided into a crystal boat box placement station and a middle standby station. The middle standby station is located between the crystal boat box placement station and the external robot handover station, and is located at the geometric midpoint of the horizontal conveying stroke of the platform module. Under normal circumstances, the equipment stops at the middle standby station to shorten the handover cycle with the external robot handover station.

10. A crystal boat box conveying device with a dual-linkage design according to claim 1, characterized in that, When the lifting platform completes its full stroke L, the corresponding stroke of the pawl is 1 / 2L.

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