Three-section type water-cooling heat shield with grooves inside
By using a three-stage inner grooved water cooling screen in the production of single crystal silicon, the problem of the crystal rod being too far away from the water cooling screen is solved, the crystal pulling speed and quality are improved, and the heat absorption effect is achieved.
Patent Information
- Application Number
- CN202323417783.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-15
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2033-12-15
AI Technical Summary
In the existing single crystal silicon production technology, the distance between the crystal rods is far from the water-cooled screen, resulting in slow crystal pulling speed and poor crystal pulling quality.
Adopt a three-stage inner water cooling screen with grooves, including the upper cone, the middle cone, the lower cone and the groove. The grooves are set up in a pyramid-like projection and are connected inclinedly, increasing the area of the water-cooled cone, reducing the The distance between the crystal rod and the water-cooled screen is smaller, improving the heat absorption effect.
By setting up a three-stage inner water cooling and cooling screen with grooves, the crystal pulling speed of the single crystal furnace is significantly improved, the crystal pulling quality is improved, and the heat absorption effect is enhanced.
Smart Images
Figure CN222139346U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon production, in particular to a three-section water-cooled heat shield with inner grooves. Background Art
[0002] Single crystal silicon usually refers to a material formed by an arrangement of silicon atoms. Silicon is the most common and widely used semiconductor material. When molten silicon solidifies, silicon atoms are arranged in a diamond lattice to form crystal nuclei, which grow into grains with the same crystal plane orientation to form single crystal silicon. During the production process, water-cooled heat shields are required.
[0003] In the related art, for example, there is a single crystal furnace with a large housing and a small water-cooled heat shield as disclosed in announcement number CN 216614930. However, the distance between the crystal rod and the water-cooled shield is relatively far, the crystal pulling speed of the single crystal furnace is slow, and the crystal pulling quality is poor. Utility Model Content
[0004] In order to overcome the shortcomings of the prior art, one of the purposes of the utility model is to provide a three-section water-cooled heat shield with internal grooves. By arranging the upper cone cylinder, the middle cone cylinder, the lower cone cylinder and the grooves, the crystal rod is closer to the water-cooled shield, the heat absorption effect is better, the crystal pulling speed of the single crystal furnace is increased, and the crystal pulling quality is improved.
[0005] One of the purposes of the utility model is achieved by the following technical solution: a three-stage water-cooled heat shield with inner grooves, including a water-cooled cone, the water-cooled cone is composed of an upper cone, a middle cone, a lower cone and grooves arranged on the inner wall, the upper cone, the middle cone and the lower cone are connected to each other, the grooves are arranged in a pyramid-like protrusion, the upper cone, the middle cone and the lower cone are all arranged at an angle, one side of the upper part of the water-cooled cone is fixedly connected to water pipe 1, the other side of the upper part of the water-cooled cone is fixedly connected to water pipe 2, the end of water pipe 1 is provided with a water inlet, and the end of water pipe 2 is provided with a water outlet. By setting the upper cone, the middle cone, the lower cone and the grooves, the distance between the crystal rod and the water-cooled shield is closer, the heat absorption effect is better, the crystal pulling speed of the single crystal furnace is increased, and the crystal pulling quality is improved.
[0006] According to the three-section water-cooled heat shield with inner grooves, the length and width of the grooves are 4 mm, and the depth is 2 mm.
[0007] According to the three-section water-cooled heat shield with inner grooves, the outer surfaces of the water inlet and the water outlet are both provided with external threads.
[0008] Beneficial Effects
[0009] Compared with the prior art, the utility model arranges the upper cone cylinder, the middle cone cylinder, the lower cone cylinder and the groove, so that the distance between the crystal rod and the water cooling screen is closer, the heat absorption effect is better, the crystal pulling speed of the single crystal furnace is increased, and the crystal pulling quality is improved.
[0010] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] The utility model is further described below in conjunction with the accompanying drawings and embodiments;
[0012] Figure 1 This is a schematic diagram of the structure of a three-stage water-cooled heat shield with internal grooves of the utility model;
[0013] Figure 2 The utility model is a schematic diagram of the structure of the grooves of the three-stage water-cooled heat shield with inner grooves.
[0014] Legend:
[0015] 1. Water inlet; 2. Water pipe 1; 3. Upper cone; 4. Middle cone; 5. Lower cone; 6. Water-cooled cone; 7. Groove; 8. Water pipe 2; 9. Water outlet. DETAILED DESCRIPTION
[0016] This section will describe in detail the specific embodiments of the utility model. The preferred embodiments of the utility model are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the utility model, but it cannot be understood as a limitation on the protection scope of the utility model.
[0017] Reference Figure 1-2 The utility model embodiment of the three-stage inner groove water-cooled heat shield includes a water-cooling cone 6, which is composed of an upper cone 3, a middle cone 4, a lower cone 5 and grooves 7 arranged on the inner wall in a criss-cross pattern. The length and width of the groove 7 are 4 mm, and the depth is 2 mm. The upper cone 3, the middle cone 4 and the lower cone 5 are interconnected, and the groove 7 is arranged in a pyramid-like protrusion. The upper cone 3, the middle cone 4 and the lower cone 5 are all inclined. One side of the upper part of the water-cooling cone 6 is fixedly connected to a water pipe 2, and the other side of the upper part of the water-cooling cone 6 is fixedly connected to a water pipe 2 8. The end of the water pipe 2 is provided with a water inlet 1, and the end of the water pipe 2 is provided with a water outlet 9. The outer surfaces of the water inlet 1 and the water outlet 9 are provided with external threads. By arranging the upper cone 3, the middle cone 4, the lower cone 5 and the groove 7, the distance between the crystal rod and the water cooling screen is made closer, the heat absorption effect is better, the crystal pulling speed of the single crystal furnace is increased, and the crystal pulling quality is improved.
[0018] Working principle: Water enters water pipe 1 2 from water inlet 1, cools through grooves 7 on the inner wall of upper cone 3, middle cone 4 and lower cone 5, enters water pipe 2 8, and is discharged from water outlet 9. Through the circulation of internal water channels, the cooling effect of water-cooled heat screen is realized, so that the distance between crystal rod and water-cooled screen is closer, the heat absorption effect is better, the crystal pulling speed of single crystal furnace is increased, and the crystal pulling quality is improved.
[0019] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.
Claims
1. A three-stage water-cooled heat shield with internal grooves, comprising a water-cooled cone (6), characterized in that: The water-cooling cone (6) is composed of an upper cone (3), a middle cone (4), a lower cone (5) and grooves (7) arranged in a crisscross pattern on the inner wall; the upper cone (3), the middle cone (4) and the lower cone (5) are interconnected; the grooves (7) are arranged in a pyramid-like protrusion; the upper cone (3), the middle cone (4) and the lower cone (5) are all arranged in an inclined manner; one side of the upper part of the water-cooling cone (6) is fixedly connected to a water pipe 1 (2); the other side of the upper part of the water-cooling cone (6) is fixedly connected to a water pipe 2 (8); the end of the water pipe 1 (2) is provided with a water inlet (1); the end of the water pipe 2 (8) is provided with a water outlet (9).
2. The three-section water-cooled heat shield with inner grooves according to claim 1 is characterized in that: The length and width of the groove (7) are 4 mm, and the depth is 2 mm.
3. The three-section water-cooled heat shield with inner grooves according to claim 1 is characterized in that: The outer surfaces of the water inlet (1) and the water outlet (9) are both provided with external threads.