Gas inlet device for waste gas treatment

Abstract

The utility model discloses a gas inlet device for waste gas treatment, which comprises a gas passing unit, the gas passing unit comprises a gas passing cavity, a plurality of first waste gas pipes and a plurality of second waste gas pipes, the first ends of the first waste gas pipes and the first ends of the second waste gas pipes are communicated with the gas passing cavity, and the second ends of the first waste gas pipes comprise first branch pipes and second branch pipes. The first branch pipe is communicated with a waste gas source, and the second end of the second waste gas pipe extends outwards and can be communicated with a second branch pipe in another gas inlet device. The device is reasonable in structure, good in operation safety and low in noise.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas treatment, in particular to an air intake device for waste gas treatment. Background Art

[0002] In the manufacturing of semiconductor industry-related products such as chips, different waste gases are generated at each stage. For example, the thermal oxidation process of the thin film deposition process generates acidic waste gas containing unreacted halogen-containing oxidants, the CVD process generates waste gas containing SiH4, SiCl4, SiH2Cl2, PH3, HF, HCl, NH3, etc., the etching process generates acid, alkali, and organic waste gas, including some gaseous byproducts (such as H2, NO, NH3, etc.), and the doping process generates acidic waste gas containing phosphine and arsine, etc. These waste gases are generally toxic and flammable. Improper handling will cause serious safety accidents, serious economic losses, and serious pollution to the environment.

[0003] Existing semiconductor waste gas treatment equipment is divided into many different types based on different principles, such as combustion exhaust gas treatment equipment, plasma exhaust gas treatment equipment, electric heating exhaust gas treatment equipment, etc. Among them, in order to avoid air pollution, the exhaust gas needs to be treated through a closed pipeline. At the same time, affected by changes in exhaust gas pressure, changes in equipment processing capacity or equipment failure, the equipment is noisy during operation and there is a safety risk of exhaust gas leakage due to increased internal pressure. Utility Model Content

[0004] The utility model discloses an air intake device for waste gas treatment, which solves the technical problems of high noise and leakage safety risk in the waste gas treatment pipeline in the prior art, and has the technical advantages of reasonable structure, good operation safety and low noise. The technical solution adopted is as follows:

[0005] An air intake device for waste gas treatment includes an air passing unit, wherein the air passing unit includes an air passing cavity, a plurality of first exhaust pipes and a second exhaust pipe, wherein the first ends of the first exhaust pipes and the second exhaust pipes are both connected to the air passing cavity, and the second ends of the first exhaust pipes include a first branch pipe and a second branch pipe, wherein the first branch pipe is connected to a waste gas source, and the second end of the second exhaust pipe extends outward and can be connected to a second branch pipe in another air intake device.

[0006] Based on the above technical solution, a first air valve is provided on the first branch pipe to control the on-off of the exhaust gas source, and a second one-way air valve is provided on the second branch pipe, and the second one-way air valve allows gas to pass into the air cavity from the outside to the inside.

[0007] On the basis of the above technical solution, the first ends of the first exhaust pipe and the second exhaust pipe are both connected to the air cavity through a bellows.

[0008] On the basis of the above technical solution, the plurality of first exhaust pipes and the plurality of second exhaust pipes are arranged axially in parallel, and the plurality of first exhaust pipes and the plurality of second exhaust pipes are arranged circumferentially at intervals around the central axis of the air cavity.

[0009] On the basis of the above technical solution, a gas flow meter is provided in each of the first exhaust pipe and the second exhaust pipe. The gas flow meter can be electrically connected to an external controller to monitor the gas flow in the first exhaust pipe and the second exhaust pipe.

[0010] On the basis of the above technical solution, a viewing window is provided on the top of the air cavity, so that the staff can view the situation in the air cavity through the viewing window.

[0011] On the basis of the above technical solution, an air pressure sensor is further provided in the air cavity, and the air pressure sensor can be electrically connected to an external controller to monitor the air pressure in the air cavity.

[0012] On the basis of the above technical solution, the air passage cavity is downwardly connected to the combustion chamber, and the first ends of the first exhaust pipe and the second exhaust pipe extend into the air passage cavity and are arranged downwardly close to the combustion chamber.

[0013] On the basis of the above technical solution, the first branch pipe and the second branch pipe are both arranged vertically, and the second exhaust pipe includes a transverse pipe section, and the transverse pipe section includes a corrugated pipe to reduce the disturbance of the second exhaust pipe caused by airflow changes.

[0014] Beneficial Effects

[0015] The utility model has a reasonable structure. The air intake device can arrange two exhaust gas treatment devices in parallel, and the air cavities of the two exhaust gas treatment devices are connected through multiple second exhaust pipes. In this way, when any exhaust gas treatment device fails and the internal pressure increases rapidly, the pressure can be released to the other exhaust gas treatment component through the second exhaust pipe in time, which can ensure that the air pressure change in the air cavity is small, which is beneficial to reducing noise. In addition, the first exhaust pipe and the first ends of the second exhaust pipe are connected to the air cavity through a bellows, which can effectively absorb the vibration caused by the change of air pressure, reduce the impact on the air cavity and subsequent tail gas treatment unit components, and help to ensure continuous and stable treatment of exhaust gas.

[0016] In addition, the first exhaust pipe and the second exhaust pipe are arranged circumferentially along the central axis of the air chamber and are arranged in sequence at intervals. This can ensure that the exhaust gas is roughly annularly introduced into the air chamber to improve the uniformity of exhaust gas diffusion. On the other hand, it can ensure that when the internal pressure in the air chamber increases, it is released in a timely and efficient manner to achieve a balanced state.

[0017] The utility model is cleverly designed, and the air passage cavities of the two exhaust gas treatment devices are connected, which is conducive to balancing the working loads of the two exhaust gas treatment devices, avoiding the problem of premature wear of one of the exhaust gas treatment components due to uneven loads, and is conducive to matching the service life of the two exhaust gas treatment devices, with good economic benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0019] Figure 1 : A schematic diagram of the three-dimensional structure of the utility model;

[0020] Figure 2 : A schematic diagram of the structure of the utility model in top view;

[0021] Figure 3 : Schematic diagram of the connecting structure of the air intake devices of the two exhaust gas treatment devices;

[0022] Figure 4 : Schematic diagram of the structure in which the gas cavity is connected to the combustion chamber; DETAILED DESCRIPTION

[0023] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.

[0024] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0025] As used herein, the term "plurality" means two or more than two, unless otherwise specified.

[0026] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0027] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.

[0028] like Figures 1 to 4 The exhaust gas treatment air intake device shown in the figure comprises an air passing unit, which comprises an air passing chamber 1, a plurality of first exhaust pipes 2 and a second exhaust pipe 3, the air passing chamber 1 is downwardly connected to the combustion chamber, the first ends of the first exhaust pipe 2 and the second exhaust pipe 3 are both connected to the air passing chamber 1, and the first ends of the first exhaust pipe 2 and the second exhaust pipe 3 are vertically extended into the air passing chamber 1 and are arranged downwardly close to the combustion chamber, such as Figure 4 As shown; the first ends of the first exhaust pipe 2 and the second exhaust pipe 3 are both connected to the air cavity 1 through the bellows 4. The bellows 4 can effectively buffer the vibration of the exhaust pipe caused by the change of air pressure, which is beneficial to reduce noise.

[0029] like Figure 1 and 2 As shown, the second end of the first exhaust pipe 2 includes a first branch pipe 21 and a second branch pipe 22, the first branch pipe 21 and the second branch pipe 22 are both arranged vertically, the first branch pipe 21 is connected to the exhaust gas source, and a first valve is arranged on the first branch pipe 21 to control the on and off of the exhaust gas source; the second end of the second exhaust pipe 3 extends outward and can be connected to the second branch pipe 22 in another intake device, as shown in FIG. Figure 3As shown, a second one-way valve is provided on the second branch pipe 22, and the second one-way valve allows gas to pass from the outside to the inside into the air passage cavity 1. In this embodiment, the second one-way valve allows gas to pass from the second exhaust pipe 3 through the second branch pipe into the air passage cavity 1 of another exhaust treatment device. In addition, the second exhaust pipe 3 includes a transverse pipe section, and the transverse pipe section includes a corrugated pipe to reduce the disturbance of the second exhaust pipe 3 caused by air flow changes.

[0030] In addition, the plurality of first exhaust pipes 2 and the plurality of second exhaust pipes 3 are axially arranged in parallel, and the plurality of first exhaust pipes 2 and the plurality of second exhaust pipes 3 are circumferentially spaced around the central axis of the air cavity 1. This ensures that the exhaust gas is roughly annularly introduced into the air cavity 1, thereby improving the uniformity of exhaust gas diffusion. On the other hand, it ensures that when the internal pressure in the air cavity 1 increases, the pressure is released in a timely and efficient manner to achieve a balanced state.

[0031] A gas flow meter is provided in both the first exhaust pipe 2 and the second exhaust pipe 3. The gas flow meter can be electrically connected to an external controller to monitor the gas flow in the first exhaust pipe 2 and the second exhaust pipe 3, which is helpful to reduce safety accidents.

[0032] A viewing window is provided at the top of the air chamber 1, so that the staff can view the situation in the air chamber 1 through the viewing window. In addition, an air pressure sensor is also provided in the air chamber 1, and the air pressure sensor can be electrically connected to an external controller to monitor the air pressure in the air chamber, which is conducive to realizing automatic control.

[0033] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. An air intake device for exhaust gas treatment, characterized in that: The invention comprises a gas passing unit, wherein the gas passing unit comprises a gas passing cavity (1), a plurality of first exhaust pipes (2) and a second exhaust pipe (3), wherein the first ends of the first exhaust pipes (2) and the second exhaust pipes (3) are both connected to the gas passing cavity (1), the second end of the first exhaust pipe (2) comprises a first branch pipe (21) and a second branch pipe (22), the first branch pipe (21) is connected to an exhaust gas source, and the second end of the second exhaust pipe (3) extends outwardly and can be connected to a second branch pipe (22) in another air intake device.

2. The exhaust gas treatment air intake device according to claim 1, characterized in that: The first branch pipe (21) is provided with a first air valve to control the on and off of the exhaust gas source, and the second branch pipe (22) is provided with a second one-way air valve, which allows gas to pass from the outside to the inside into the air chamber (1).

3. The exhaust gas treatment air intake device according to claim 1, characterized in that: The first ends of the first exhaust pipe (2) and the second exhaust pipe (3) are both connected to the air passage cavity (1) via a bellows (4).

4. The exhaust gas treatment air intake device according to any one of claims 1 to 3, characterized in that: The plurality of first exhaust pipes (2) and the plurality of second exhaust pipes (3) are arranged axially in parallel, and the plurality of first exhaust pipes (2) and the plurality of second exhaust pipes (3) are arranged circumferentially at intervals around the central axis of the air cavity (1).

5. The exhaust gas treatment air intake device according to claim 4, characterized in that: A gas flow meter is provided in each of the first exhaust pipe (2) and the second exhaust pipe (3). The gas flow meter can be electrically connected to an external controller to monitor the gas flow in the first exhaust pipe (2) and the second exhaust pipe (3).

6. The exhaust gas treatment air intake device according to claim 5, characterized in that: A viewing window is provided on the top of the air cavity (1), so that a worker can conveniently view the situation inside the air cavity (1) through the viewing window.

7. The exhaust gas treatment air intake device according to claim 6, characterized in that: An air pressure sensor is also provided in the air cavity (1), and the air pressure sensor can be electrically connected to an external controller to monitor the air pressure in the air cavity.

8. The exhaust gas treatment air intake device according to any one of claims 5 to 7, characterized in that: The air passage cavity (1) is communicated downward with the combustion chamber, and the first ends of the first exhaust pipe (2) and the second exhaust pipe (3) extend into the air passage cavity (1) and are arranged downward close to the combustion chamber.

9. The exhaust gas treatment air intake device according to claim 8, characterized in that: The first branch pipe (21) and the second branch pipe (22) are both arranged vertically, and the second exhaust pipe (3) includes a transverse pipe section, and the transverse pipe section includes a corrugated pipe to reduce disturbance of the second exhaust pipe (3) caused by airflow changes.

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