Scanning system and pole piece scanning system

Abstract

The embodiment of the utility model provides a scanning system and a pole piece scanning system, and relates to the technical field of lithium battery detection. The objective of the utility model is to improve the problem of low sampling rate of a detector assembly and a source box assembly of an Xray measuring instrument. The scanning system comprises a frame assembly, a detector assembly, a source box assembly and a driving assembly, the detector assembly and the source box assembly are movably arranged on the frame assembly in the two parallel directions respectively, and a detection gap capable of penetrating through a base material to be detected is formed between the detector assembly and the source box assembly; the number of the driving assemblies is two, and the two driving assemblies are used for driving the detector assembly and the source box assembly to move synchronously. The pole piece scanning system comprises the scanning system. The detector assembly and the source box assembly are respectively and independently driven by one driving assembly, the influence of inertia on the single driving assembly is reduced, the running speed of the detector assembly and the running speed of the source box assembly can reach 60m / min, and the scanning speed and the sampling rate of the Xray measuring instrument are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of lithium battery detection, in particular to a scanning system and a pole piece scanning system. Background Art

[0002] With the booming development of the lithium battery industry, driven by market demand, high efficiency, high quality and low cost have become the inevitable development trend of the industry. The coating speed of the latest PSL (Prismatic Super Line) lithium battery coating machine has doubled to 120m / min, and the width has doubled to 1600mm. The current screw-driven version of the double-frame X-ray measuring instrument can only reach a maximum scanning speed of 24M / min. There is a problem of too low sampling rate, that is, the coating speed does not match the sampling rate, resulting in low accuracy, affecting the customer's on-site monitoring of the pole piece weight. It is necessary to develop a higher-speed linear motor version of the double-frame X-ray measuring instrument to achieve a scanning speed of 60M / min.

[0003] As the width of the electrode increases, the speed of the coating machine increases, resulting in a significant reduction in the sampling rate. The sampling data per unit time is recorded as MD. Taking the scanning speed of 12m / min as an example:

[0004] 1) When the coating speed is 50m / min and the width of the electrode is 1m, MD 原 =1 / 12*50=4.17m;

[0005] 2) When the coating speed is 100m / min and the width of the electrode is 1.6m, MD 现 =1.6 / 12*100=13.33;

[0006] 3)MD 原 / MD 现 =4.17 / 13.33=31%.

[0007] Through the above calculation, it can be known that the sampling data in the current production environment is only 31% of the original. In addition, the detector assembly and source box assembly of the existing screw-driven double-frame X-ray measuring instrument are set on the same structure, that is, the relative position of the detector assembly and the source box assembly is fixed, and the emission and reception can always keep corresponding, and it is driven by a set of driving mechanisms to move in a straight line; however, setting the detector assembly and the source box assembly in the same structure will cause the overall mass of the structure to be too large, and the driving mechanism needs to overcome greater inertia to drive the structure, which affects the running speed of the linear motion of the structure. Utility Model Content

[0008] The purpose of the utility model includes, for example, providing a scanning system which can improve the problem of low sampling rate of a detector assembly and a source box assembly of an X-ray measuring instrument.

[0009] The utility model also aims to provide a pole piece scanning system, which can improve the problem of low sampling rate of the detector assembly and the source box assembly of the X-ray measuring instrument.

[0010] The embodiments of the present invention can be implemented as follows:

[0011] An embodiment of the utility model provides a scanning system, including a frame assembly, a detector assembly, a source box assembly and a driving assembly, wherein the detector assembly and the source box assembly are movably arranged on the frame assembly along two parallel directions, and a detection gap capable of passing through a substrate to be tested is formed between the detector assembly and the source box assembly; the number of the driving assemblies is two, one of the driving assemblies is connected to the detector assembly, and the other of the driving assemblies is connected to the source box assembly, and the two driving assemblies are used to drive the detector assembly and the source box assembly to move synchronously.

[0012] In addition, the scanning system provided by the embodiment of the utility model may also have the following additional technical features:

[0013] Optionally, the detector assembly and the source box assembly are connected and can have relative displacement, or the detector assembly and the source box assembly are separately and independently arranged.

[0014] Optionally, each of the driving components includes a driving motor and a position detector, and the position detector is electrically connected to the driving motor; the two position detectors are respectively used to detect the real-time positions of the detector component and the source box component, and the two driving motors are respectively connected to the detector component and the source box component, and the two driving motors are respectively used to synchronously drive the movement of the detector component and the source box component according to the real-time positions of the detector component and the source box component.

[0015] Optionally, the driving motor is a flat linear motor; and the position detector is a grating ruler.

[0016] Optionally, the scanning system further includes an anti-misalignment device; the anti-misalignment device is electrically connected to the driving assembly, the anti-misalignment device is arranged on the detector assembly and the source box assembly, the anti-misalignment device is used to detect the misalignment of the detector assembly and the source box assembly, and the driving assembly is used to drive the detector assembly and the source box assembly to move synchronously according to the misalignment.

[0017] Optionally, the anti-misalignment device includes a displacement sensor; the displacement sensor is fixed on the detector assembly or the source box assembly; when the displacement sensor is fixed to the detector assembly, the source box assembly is provided with a corresponding detection hole, or when the displacement sensor is fixed to the source box assembly, the detector assembly is provided with a corresponding detection hole; the detection hole is used to align with the light beam emitted by the displacement sensor when the detector assembly and the source box assembly move synchronously, or the detection hole is used to stagger with the light beam emitted by the displacement sensor when the detector assembly and the source box assembly are misaligned.

[0018] Optionally, the anti-misalignment device includes a beam hole arranged on the detector assembly; the beam hole is used to align with the beam emitted by the source box assembly when the detector assembly and the source box assembly move synchronously, or the beam hole is used to misalign with the beam emitted by the source box assembly when the detector assembly and the source box assembly are misaligned.

[0019] Optionally, the scanning system also includes steel structure side columns and marble beams; the number of the steel structure side columns is two, and the two steel structure side columns are vertically arranged; the number of the marble beams is two, and the two marble beams are laterally arranged at the top and bottom ends of the two steel structure side columns, respectively, and the detector assembly and the source box assembly are movably connected to the two marble beams along two parallel directions.

[0020] Optionally, the frame assembly also includes a first guide rail and a second guide rail; the first guide rail and the second guide rail are respectively fixed on the two marble beams along two parallel directions, the detector assembly and the source box assembly are arranged side by side between the first guide rail and the second guide rail, the detector assembly is slidably connected to the first guide rail, and the source box assembly is slidably connected to the second guide rail.

[0021] The embodiment of the utility model also provides a pole piece scanning system. The pole piece scanning system comprises an unwinding assembly, a winding assembly and a scanning system; the unwinding assembly and the winding assembly are arranged side by side and spaced apart, and a space for the detector assembly and the source box assembly to pass through is formed between the unwinding assembly and the winding assembly, the unwinding assembly is used to unwind the substrate to be tested, and the winding assembly is used to wind up the substrate to be tested.

[0022] The beneficial effects of the scanning system and the pole piece scanning system of the embodiment of the utility model include, for example:

[0023] The scanning system comprises a frame assembly, a detector assembly, a source box assembly and a driving assembly. The detector assembly and the source box assembly are movably arranged on the frame assembly along two parallel directions, and a detection gap capable of passing through a substrate to be tested is formed between the detector assembly and the source box assembly. There are two driving assemblies, one driving assembly is connected to the detector assembly, and the other driving assembly is connected to the source box assembly. The two driving assemblies are used to drive the detector assembly and the source box assembly to move synchronously.

[0024] The detector assembly and the source box assembly are independently driven by a driving assembly respectively, and the influence of inertia on the single driving assembly is reduced. The running speed of the detector assembly and the source box assembly can reach 60m / min, thereby improving the running speed and sampling rate.

[0025] The pole piece scanning system, including the above-mentioned scanning system, can improve the problem of low sampling rate of the detector assembly and the source box assembly of the X-ray measuring instrument. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 A schematic diagram of the overall structure of a pole piece scanning system provided by an embodiment of the utility model;

[0028] Figure 2 A partial structural schematic diagram of a scanning system provided by an embodiment of the utility model;

[0029] Figure 3 A schematic diagram of the structure of a detector assembly and a source box assembly provided in an embodiment of the utility model;

[0030] Figure 4 for Figure 3 A partial enlarged view of middle A.

[0031] Icons: 10- scanning system; 11- pole piece scanning system; 100- frame assembly; 110- steel structure side column; 120- marble beam; 130- first guide rail; 140- second guide rail; 200- detector assembly; 210- source box assembly; 220- detection gap; 300- anti-misalignment device; 310- displacement sensor; 320- detection hole; 400- unwinding assembly; 410- winding assembly. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0035] In the description of the present utility model, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the accompanying drawings, or is the orientation or position relationship in which the utility model product is usually placed when used. It is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present utility model.

[0036] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0037] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0038] Combine the following Figures 1 to 4 The scanning system 10 provided in this embodiment is described in detail.

[0039] Please refer to Figure 1 and Figure 2An embodiment of the utility model provides a scanning system 10, including a frame assembly 100, a detector assembly 200, a source box assembly 210 and a driving assembly. The detector assembly 200 and the source box assembly 210 are movably arranged on the frame assembly 100 along two parallel directions, and a detection gap 220 capable of passing through a substrate to be tested is formed between the detector assembly 200 and the source box assembly 210; there are two driving assemblies, one driving assembly is connected to the detector assembly 200, and the other driving assembly is connected to the source box assembly 210, and the two driving assemblies are used to drive the detector assembly 200 and the source box assembly 210 to move synchronously.

[0040] "Two parallel directions" means that the detector assembly 200 is moved along a first direction, and the source box assembly 210 is moved along a second direction, and the first direction and the second direction are parallel to each other. Specifically, the first direction and the second direction are two parallel directions located at different heights.

[0041] The detector assembly 200 and the source box assembly 210 are independently driven by a driving assembly respectively. Compared with the conventional practice of a single driving group driving the detector assembly 200 and the source box assembly 210 at the same time, the single driving assembly of this embodiment is relatively less affected by inertia. The running speed of the detector assembly 200 and the source box assembly 210 can reach 60m / min, and the measurement repeatability accuracy is maintained within 0.1% at high speed, which is 5 times higher than the conventional movement speed of 12m / min, thereby improving the scanning speed and sampling rate of the Xray measuring instrument, making the sampling rate more matched with the coating speed, and improving the accuracy.

[0042] The detector assembly 200 includes a housing and a high-precision solid detector. The high-precision solid detector shortens the ray conversion time to 0.1 milliseconds, thereby being able to more accurately record the surface density change data of the object being measured.

[0043] The source box assembly 210 includes a radiation-proof housing, an X-ray transmitter, and a ray collimator. After the X-rays penetrate the object to be tested, they are received by the X-ray receiver. The surface density value of the object to be tested is calculated by comparing the intensity of the X-rays from the X-ray transmitter with the intensity of the X-rays received by the high-precision solid detector. A detection gap 220 is formed between the source box assembly 210 and the detector assembly 200 for the substrate to be tested to pass through. During the winding and transportation process of the substrate, it can continue to pass through the detection gap 220 for surface density detection.

[0044] Reference Figure 1 In this embodiment, the detector assembly 200 and the source box assembly 210 are connected and can have relative displacement, or the detector assembly 200 and the source box assembly 210 are separately and independently arranged.

[0045] “The detector assembly 200 and the source box assembly 210 are connected and can have relative displacement” means that a soft connection is adopted between the detector assembly 200 and the source box assembly 210, and the displacement between the detector assembly 200 and the source box assembly 210 can be fine-tuned to achieve alignment.

[0046] “The detector assembly 200 and the source box assembly 210 are separately and independently arranged” means that there is no connection between the detector assembly 200 and the source box assembly 210, and they are independently arranged. The two driving assemblies are also independently arranged, and they independently drive the detector assembly 200 and the source box assembly 210 to move. By adjusting the parameters of the two driving assemblies, the synchronous movement of the detector assembly 200 and the source box assembly 210 can be achieved.

[0047] Reference Figure 1 In this embodiment, the scanning system 10 also includes steel structure side columns 110 and marble beams 120; the number of steel structure side columns 110 is two, and the two steel structure side columns 110 are vertically arranged; the number of marble beams 120 is two, and the two marble beams 120 are laterally arranged at the top and bottom ends of the two steel structure side columns 110, respectively, and the detector assembly 200 and the source box assembly 210 are movably connected to the two marble beams 120 along two parallel directions.

[0048] The frame assembly 100 includes two steel structure side columns 110 and two marble beams 120. The two steel structure side columns 110 are vertically arranged, and the two marble beams 120 are horizontally arranged in parallel. One of the marble beams 120 is located at the top of the two steel structure side columns 110, and the other marble beam 120 is located at the bottom of the two steel structure side columns 110.

[0049] The steel structure side columns 110 have high strength, high elastic modulus, and strong shock resistance, which can support more impacts. Marble does not deform or magnetize, which can ensure the stability of long-term movement and reduce the impact of external changes such as temperature and humidity. The frame assembly 100 composed of the steel structure side columns 110 and the marble beams 120 can effectively reduce the impact of the external environment on the detection process, and greatly improve the surface density detection accuracy of the scanning system 10 of this embodiment.

[0050] Reference Figure 1 and Figure 2In this embodiment, the frame assembly 100 also includes a first guide rail 130 and a second guide rail 140; the first guide rail 130 and the second guide rail 140 are respectively fixed on the corresponding two marble beams 120 along two parallel directions, the first guide rail 130 and the second guide rail 140 are arranged opposite to each other, the detector assembly 200 and the source box assembly 210 are arranged side by side between the first guide rail 130 and the second guide rail 140, the detector assembly 200 is slidably connected to the first guide rail 130, and the source box assembly 210 is slidably connected to the second guide rail 140.

[0051] The first guide rail 130 is disposed along a first direction for guiding the detector assembly 200 to move along the first direction; the second guide rail 140 is disposed along a second direction for guiding the source box assembly 210 to move along the second direction.

[0052] Reference Figure 1 and Figure 2 In this embodiment, each driving assembly includes a driving motor and a position detector, and the position detector is electrically connected to the driving motor; the two position detectors are used to detect the real-time positions of the detector assembly 200 and the source box assembly 210, respectively, and the two driving motors are connected to the detector assembly 200 and the source box assembly 210, respectively, and the two driving motors are used to synchronously drive the movement of the detector assembly 200 and the source box assembly 210 according to the real-time positions of the detector assembly 200 and the source box assembly 210.

[0053] The two position detectors are used to accurately record the moving positions of the detector assembly 200 and the source box assembly 210 respectively. The control system can obtain the positions of the detector assembly 200 and the source box assembly 210 at any time, and then the two drive motors drive the corresponding detector assembly 200 and the source box assembly 210 to perform linear synchronous motion. A single drive motor is only responsible for driving the corresponding component to perform linear motion, thereby reducing the mass of the object to be driven and effectively reducing the impact of inertia on transmission speed and accuracy.

[0054] Reference Figure 1 and Figure 2 In this embodiment, the driving motor is a flat linear motor. The flat linear motor is composed of a motor mover with an iron core and a stator with a permanent magnet. It has a high thrust density and a large thrust coefficient, and can achieve very high acceleration. The mover and the stator are non-contact, and there is no mechanical transmission limitation. Therefore, it has the advantages of high system dynamic performance, stable operating speed and high positioning accuracy, no wear or maintenance, and ultra-long stroke. It can ensure that at a moving speed of 80m / min, the detector assembly 200 and the source box assembly 210 run synchronously, and the relative error is less than 0.1mm. Traditionally, ordinary motors or cylinders are used for driving, and the operating speed is low and the operating accuracy is low.

[0055] The detector assembly 200 and the source box assembly 210 are driven to move by a flat linear motor respectively, and the control system performs synchronous control on the two flat linear motors to ensure that the two independently driven flat linear motors operate in unison.

[0056] Reference Figure 1 and Figure 2 In this embodiment, the position detector is a grating ruler. The grating ruler is used to accurately record the moving position. The control system obtains the position of the detector assembly 200 and the source box assembly 210 at any time, and then the drive motor drives the corresponding detector assembly 200 and the source box assembly 210 to perform linear synchronous motion, which reduces the mass of the object to be driven and effectively reduces the influence of inertia on the transmission speed and accuracy.

[0057] In this embodiment, there are two flat linear motors and two grating rulers. One flat linear motor corresponds to one grating ruler. The detector assembly 200 and the source box assembly 210 are respectively connected to one flat linear motor and one grating ruler.

[0058] The grating ruler itself has high measurement accuracy, and when used in combination with a flat linear motor, it can further improve the accuracy of the entire system. The linear motor has the characteristics of fast response and can achieve high-speed and high-precision motion control, while the grating ruler can provide accurate position information, thereby ensuring the fast response capability of the entire system. The combination of linear motors and grating rulers has low noise during operation and has little impact on the surrounding environment.

[0059] The two flat linear motors are synchronized by the control system, which can achieve high-precision position control and speed synchronization, thereby ensuring that the motion trajectory and speed of the two linear motors are completely consistent. It has excellent anti-interference ability and stability, can effectively avoid the influence of mechanical failure and vibration on motion accuracy, and ensure production stability and reliability.

[0060] Reference Figure 3 and Figure 4 In this embodiment, the scanning system 10 also includes an anti-misalignment device 300; the anti-misalignment device 300 is electrically connected to the driving component or is communicatively connected to the control system, and the anti-misalignment device 300 is arranged on the detector component 200 and the source box component 210. The anti-misalignment device 300 is used to detect the misalignment of the detector component 200 and the source box component 210, and the driving component or the control system is used to drive the detector component 200 and the source box component 210 to move synchronously according to the misalignment.

[0061] When the detector assembly 200 and the source box assembly 210 do not move synchronously or are not aligned, the anti-misalignment device 300 can detect the misalignment of the detector assembly 200 and the source box assembly 210, and the driving motor adjusts the driving conditions of the detector assembly 200 and the source box assembly 210 according to the misalignment conditions, so that the detector assembly 200 and the source box assembly 210 keep moving synchronously.

[0062] When the two flat linear motors are running synchronously, the grating ruler is used to adjust the relative position. At the same time, the anti-misalignment device 300 is used for double protection, and the detector assembly 200 and the source box assembly 210 are kept relatively aligned. Of course, in other embodiments, it is also possible to use a mechanical structure to avoid misalignment, or to use a mechanical structure to feedback to the motor for synchronous adjustment when misalignment occurs, or to use the source box assembly 210 to emit rays for further misalignment detection.

[0063] Reference Figure 3 and Figure 4 In this embodiment, the anti-misalignment device 300 includes a displacement sensor 310; the displacement sensor 310 is fixed on the detector assembly 200 or the source box assembly 210; when the displacement sensor 310 is fixed to the detector assembly 200, the source box assembly 210 is provided with a corresponding detection hole 320, or when the displacement sensor 310 is fixed to the source box assembly 210, the detector assembly 200 is provided with a corresponding detection hole 320; the detection hole 320 is used to align with the light beam emitted by the displacement sensor 310 when the detector assembly 200 and the source box assembly 210 move synchronously, or the detection hole 320 is used to stagger with the light beam emitted by the displacement sensor 310 when the detector assembly 200 and the source box assembly 210 are misaligned.

[0064] When the detector assembly 200 and the source box assembly 210 move synchronously, the light beam emitted by the displacement sensor 310 can pass through the detection hole 320. When a position deviation occurs during the movement, the surrounding side of the detection hole 320 will block the light beam emitted by the displacement sensor 310, generating a signal to be fed back to the control system. The control system fine-tunes at least one linear motor to realign the detector assembly 200 and the source box assembly 210 for effective detection.

[0065] In this embodiment, the anti-misalignment device 300 includes a beam hole arranged on the detector assembly 200; the beam hole is used to align with the light beam emitted by the source box assembly 210 when the detector assembly 200 and the source box assembly 210 move synchronously, or the beam hole is used to misalign with the light beam emitted by the source box assembly 210 when the detector assembly 200 and the source box assembly 210 are misaligned.

[0066] Directly use the rays emitted by the source box assembly 210 to perform misalignment detection. When the detector assembly 200 and the source box assembly 210 move synchronously, the rays emitted by the source box assembly 210 pass through the beam hole and irradiate the receiving end of the detector assembly 200. When the detector assembly 200 and the source box assembly 210 are misaligned, the detector assembly 200 cannot receive the rays emitted by the source box assembly 210, and one of the driving motors is adjusted until the detector assembly 200 and the source box assembly 210 move synchronously.

[0067] The embodiment of the utility model further provides a pole piece scanning system 11. The pole piece scanning system 11 comprises an unwinding assembly 400, a rewinding assembly 410 and a scanning system 10; the unwinding assembly 400 and the rewinding assembly 410 are arranged side by side and spaced apart, and a space for the detector assembly 200 and the source box assembly 210 to pass through is formed between the unwinding assembly 400 and the rewinding assembly 410, the unwinding assembly 400 is used to unwind the substrate to be tested, and the rewinding assembly 410 is used to rewind the substrate to be tested.

[0068] The unwinding assembly 400 is used to unwind the substrate to be tested onto the winding assembly 410, so that the substrate to be tested is laid between the unwinding assembly 400 and the winding assembly 410. The detector assembly 200 and the source box assembly 210 are respectively driven by a driving assembly to move between the unwinding assembly 400 and the winding assembly 410, and the substrate to be tested between the unwinding assembly 400 and the winding assembly 410 will pass through the detection gap 220 between the detector assembly 200 and the source box assembly 210, and the detector assembly 200 and the source box assembly 210 scan the substrate to be tested. If the substrate to be tested is unwound and wound between the unwinding assembly 400 and the winding assembly 410 along its length direction, the detector assembly 200 and the source box assembly 210 scan the substrate to be tested along the width direction of the substrate to be tested.

[0069] According to a scanning system 10 provided in this embodiment, the working principle of the scanning system 10 is: the detector assembly 200 and the source box assembly 210 are respectively driven to move by an independent driving assembly, which can reduce the moving inertia of a single drive, and can increase the moving speed of the detector assembly 200 and the source box assembly 210, thereby increasing the scanning speed.

[0070] During the synchronous movement of the detector assembly 200 and the source box assembly 210 , the substrate to be tested passing through the detection gap 220 is scanned to complete sampling.

[0071] The scanning system 10 provided in this embodiment has at least the following advantages:

[0072] The precision and speed are improved. The running speed of the detector assembly 200 and the source box assembly 210 can reach 60m / min, and the measurement repeatability accuracy can be maintained within 0.1% at high speed, which is 5 times higher than the traditional movement speed of 12m / min, thereby improving the sampling rate.

[0073] The positioning accuracy is improved. The driving motor and the position detector cooperate with each other, and the relative position of the detector assembly 200 and the source box assembly 210 is more accurate. At a moving speed of 60m / min, the relative error is less than 0.05mm, which is 6 times higher than the traditional error of 0.3mm.

[0074] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A scanning system, characterized in that: include: Frame assembly (100); A detector assembly (200) and a source box assembly (210), wherein the detector assembly (200) and the source box assembly (210) are respectively movably arranged on the frame assembly (100) along two parallel directions, and a detection gap (220) capable of passing through a substrate to be tested is formed between the detector assembly (200) and the source box assembly (210); and a driving assembly, wherein the number of the driving assemblies is two, one of the driving assemblies is connected to the detector assembly (200), and the other of the driving assemblies is connected to the source box assembly (210), and the two driving assemblies are used to drive the detector assembly (200) and the source box assembly (210) to move synchronously.

2. The scanning system according to claim 1, characterized in that: The detector assembly (200) and the source box assembly (210) are connected and can have relative displacement, or the detector assembly (200) and the source box assembly (210) are separately and independently arranged.

3. The scanning system according to claim 2, characterized in that: Each of the driving components comprises a driving motor and a position detector, wherein the position detector is electrically connected to the driving motor; the two position detectors are respectively used to detect the real-time positions of the detector component (200) and the source box component (210); the two driving motors are respectively connected to the detector component (200) and the source box component (210); and the two driving motors are respectively used to synchronously drive the movement of the detector component (200) and the source box component (210) according to the real-time positions of the detector component (200) and the source box component (210).

4. The scanning system according to claim 3, characterized in that: The driving motor is a flat linear motor; the position detector is a grating ruler.

5. The scanning system according to any one of claims 1 to 4, characterized in that: The scanning system further comprises an anti-misalignment device (300); the anti-misalignment device (300) is electrically connected to the driving component, the anti-misalignment device (300) is arranged on the detector component (200) and the source box component (210), the anti-misalignment device (300) is used to detect the misalignment of the detector component (200) and the source box component (210), and the driving component is used to drive the detector component (200) and the source box component (210) to move synchronously according to the misalignment.

6. The scanning system according to claim 5, characterized in that: The anti-misalignment device (300) comprises a displacement sensor (310); the displacement sensor (310) is fixed on the detector assembly (200) or the source box assembly (210); when the displacement sensor (310) is fixed to the detector assembly (200), the source box assembly (210) is provided with a corresponding detection hole (320); or when the displacement sensor (310) is fixed to the source box assembly (210), the detector assembly (200) is provided with a corresponding detection hole (320); the detection hole (320) is used to align with a light beam emitted by the displacement sensor (310) when the detector assembly (200) and the source box assembly (210) move synchronously, or the detection hole (320) is used to stagger with the light beam emitted by the displacement sensor (310) when the detector assembly (200) and the source box assembly (210) are misaligned.

7. The scanning system according to claim 5, characterized in that: The anti-misalignment device (300) comprises a light beam hole arranged on the detector assembly (200); the light beam hole is used to align with the light beam emitted by the source box assembly (210) when the detector assembly (200) and the source box assembly (210) move synchronously, or the light beam hole is used to stagger with the light beam emitted by the source box assembly (210) when the detector assembly (200) and the source box assembly (210) are misaligned.

8. The scanning system according to any one of claims 1 to 4, characterized in that: The scanning system further comprises a steel structure side column (110) and a marble beam (120); the number of the steel structure side columns (110) is two, and the two steel structure side columns (110) are arranged vertically; the number of the marble beams (120) is two, and the two marble beams (120) are respectively arranged transversely at the top and bottom ends of the two steel structure side columns (110); the detector assembly (200) and the source box assembly (210) are respectively movably connected to the two marble beams (120) along two parallel directions.

9. The scanning system according to claim 8, characterized in that: The frame assembly (100) further comprises a first guide rail (130) and a second guide rail (140); the first guide rail (130) and the second guide rail (140) are respectively fixed on the two marble beams (120) along two parallel directions; the detector assembly (200) and the source box assembly (210) are arranged side by side between the first guide rail (130) and the second guide rail (140); the detector assembly (200) is slidably connected to the first guide rail (130), and the source box assembly (210) is slidably connected to the second guide rail (140).

10. A pole piece scanning system (11), characterized in that: The pole piece scanning system (11) comprises an unwinding assembly (400), a winding assembly (410) and a scanning system according to any one of claims 1 to 9; the unwinding assembly (400) and the winding assembly (410) are arranged side by side with a spacing therebetween, and a space for the detector assembly (200) and the source box assembly (210) to pass through is formed between the unwinding assembly (400) and the winding assembly (410); the unwinding assembly (400) is used for unwinding a substrate to be tested, and the winding assembly (410) is used for winding up the substrate to be tested.

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