High-inclination-angle sample rod
By thinning the bottom of the chip placement groove of the sample rod and increasing the extended light-transmitting area, the problem of electron beam occlusion during the tilt process is solved, achieving a larger field of view and a higher tilt angle , improving the experimental efficiency.
Patent Information
- Application Number
- CN202420084983.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-12
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-01-12
AI Technical Summary
The existing sample rods will cause electron beam occlusion in the observation area during tilting, limiting the tilt angle and experimental efficiency.
A high-inclination sample rod is designed, with the bottom of the chip placing groove thinning to form a give way space and an extended light-transmitting area at the light-transmitting port, ensuring that the electron beam can always pass through during the tilt process, providing a larger Vision and higher tilt angle.
It effectively avoids the blockage of the electron beam by the chip placement groove, provides an extremely large field of view, greatly improves the upper limit of the tilt angle of the sample rod, and improves the experimental efficiency.
Smart Images
Figure CN222146133U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of transmission electron microscope accessories, in particular to a high-inclination-angle sample rod. Background Art
[0002] As a very powerful material analysis and characterization device, the transmission electron microscope has the advantages of high time / space resolution, etc. It can obtain information such as the crystal structure, element valence, and element distribution of materials at the microscopic scale. It has now become a very important and effective tool for material characterization and has been widely used in the fields of materials, biology, chemistry, physics, etc. With the development of sample rod and in-situ test chip technology, the transmission electron microscope can realize three-dimensional operations such as moving and tilting samples through the sample rod, satisfying the information observation and shooting of samples in different directions. It can also introduce additional force, heat, light, electricity and other conditions through the in-situ test chip, monitor the real-time microstructural changes inside the material under the action of the external field in real time, and combine the structure and performance evolution of the material.
[0003] In the sample holder for loading samples through chips, the chip placement slot is its core part. An observation hole is usually processed in a circular or square shape, so that the electron beam can pass through the chip placement slot and the observation window of the chip to form the image information of the sample. At present, most of the sample holders with tilting function have not further improved the chip placement slot structure to ensure that the electron beam in the observation area always has the maximum transmission area, which will cause the loss of the observation part of the field of view during the tilting process, and the blocked area will continue to expand with the increase of the tilting angle, thereby limiting the tilting angle and affecting the experimental efficiency. For example, patent CN110441334B discloses a multi-field in-situ transmission electron microscope sample holder with a dual tilting function, which facilitates experimental observation, but does not consider the influence of the observation hole on the sample holder on the field of view during the tilting process, nor does it mention the maximum tilting angle that can be achieved; the sample holders disclosed in patents CN114203504A and CN105223213B also have the same limitations.
[0004] Therefore, developing a sample rod that can ensure that the field of view of the observation area is always unaffected at different tilt angles and thereby achieve a higher tilt angle rotation function is one of the problems to be solved urgently in this field. Utility Model Content
[0005] Therefore, the utility model provides a high-inclination-angle sample rod to solve the above problems.
[0006] To achieve the above purpose, the technical solution provided by the utility model is as follows:
[0007] A high-angle sample rod comprises a handle, a rod body and a rod head body connected in sequence, the rod head body is provided with a chip placement groove, and a light-transmitting opening is opened at the bottom of the chip placement groove; the rod head body is thinned at the bottom of the chip placement groove to form a clearance space, the clearance space is arranged through the width direction of the rod head body, and the light-transmitting opening comprises a central light-transmitting area located in the center and extended light-transmitting areas extending from the central light-transmitting area to both sides of the rod head body in the width direction.
[0008] Furthermore, an inclined transition edge is provided between the clearance space and the bottom opening of the light-transmitting port.
[0009] Furthermore, the extended light-transmitting area penetrates to the outer side wall of the club head body.
[0010] Furthermore, the central light-transmitting area of the light-transmitting opening is circular or square, and the extended light-transmitting area is square. In the length direction of the club head body, the size of the extended light-transmitting area is smaller than the central light-transmitting area.
[0011] Furthermore, the size of the clearance space is the same as the maximum size of the central light-transmitting area.
[0012] Furthermore, the shaft includes a first shaft, a second shaft and a flexible circuit board inserted into the first shaft and the second shaft. The head of the first shaft and the tail of the second shaft are coaxially connected and sealed by a sealing ring. The club head body is coaxially connected to the head of the second shaft.
[0013] Furthermore, the rod head body includes a sample seat, a flip cover sheet and a pressing sheet, a chip placement groove and a clearance space are formed on the sample seat, the flip cover sheet and the pressing sheet are assembled on the sample seat and are located on opposite sides of the chip placement groove; the flip cover sheet can be flipped and assembled on the sample seat through a connecting shaft, and the head of the flip cover sheet is provided with a claw connected to a flexible circuit board, and the claw is made of a conductive elastic material and corresponds to the chip placement groove.
[0014] Furthermore, the handle includes a shell, a front cover and a rear cover. The shell is provided with an aviation interface connected to a flexible circuit board. The front cover and the rear cover are fixedly installed at both ends of the shell. The front cover is provided with a limit buckle and is fixedly connected to the first shaft through the limit buckle.
[0015] Furthermore, the first shaft and the second shaft are hollow cylindrical rods made of an alloy having anti-corrosion and anti-oxidation functions.
[0016] The technical solution provided by the utility model has the following beneficial effects:
[0017] This case innovatively designed the chip placement slot structure on the sample rod. By thinning the bottom to form a clearance space and adding an extended light-transmitting area to the light-transmitting port, the chip placement slot largely avoids blocking the electron beam during the tilting process, providing an ultra-large field of view for observation, thereby greatly increasing the upper limit of the sample rod's tilting angle. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 The figure shows a schematic diagram of the structure of a high-inclination sample rod in an embodiment;
[0019] Figure 2 Shown Figure 1 A magnified schematic diagram of area A in the middle, where the chip is assembled;
[0020] Figure 3 Shown is a top view of a sample holder of a rod head body in an embodiment;
[0021] Figure 4 Shown is a bottom view of a sample holder of a rod head body in an embodiment;
[0022] Figure 5 Shown is a side view of a sample holder of a rod head body in an embodiment;
[0023] Figure 6 Shown Figure 5 A magnified schematic diagram of the middle B area;
[0024] Figure 7 The figure shows a cross-sectional view of the club head body in the embodiment;
[0025] Figure 8 The figure shows a cross-sectional view of the club head body after the chip is assembled in the embodiment. DETAILED DESCRIPTION
[0026] To further illustrate the various embodiments, the present invention provides drawings. These drawings are part of the disclosure of the present invention, which are mainly used to illustrate the embodiments and can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, a person of ordinary skill in the art should be able to understand other possible implementations and advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are generally used to represent similar components.
[0027] The utility model is now further described in conjunction with the accompanying drawings and specific implementation methods.
[0028] Reference Figures 1 to 8As shown, a high-angle sample rod provided in this embodiment includes a handle 10, a rod body 20 and a rod head body 30 connected in sequence, wherein the rod head body 30 is provided with a chip placement groove 41, and a light-transmitting opening 42 is opened at the bottom of the chip placement groove 41. The rod head body 30 is thinned at the bottom of the chip placement groove 41 to form a clearance space 43, and the bottom opening of the light-transmitting opening 42 is connected to the clearance space 43.
[0029] Specifically, when the high-tilt sample rod is in use, it is tilted around the central axis L (i.e., the length extension line) of the shaft 20 and the head body 30, and the width direction of the head body 30 is perpendicular to the central axis L. The clearance space 43 is arranged through the width direction of the head body 30, and the light-transmitting opening 42 includes a central light-transmitting area 421 located in the center and extended light-transmitting areas 422 extending from the central light-transmitting area 421 to both sides of the head body 30 in the width direction.
[0030] With such arrangement, when in use, the chip 100 containing the sample is assembled in the chip placement slot 41 of the high-angle sample rod, and then moved into the electron microscope for experiment. When the high-angle sample rod is tilted around the central axis L, the arrangement of the sample rod's clearance space 43 and the extended light-transmitting area 422 largely avoids the chip placement slot 421 from blocking the electron beam during the tilting process, providing an extra-large field of view for observation, thereby greatly improving the upper limit of the sample rod's tilting angle.
[0031] Specifically, in this embodiment, the extended light-transmitting area 422 penetrates to the outer side wall of the club head body 43, that is, it is also arranged to penetrate in the width direction of the club head body 30, so that the extended light-transmitting area 422 can make room to the maximum extent.
[0032] Specifically, in this embodiment, the central light-transmitting area 421 of the light-transmitting opening 42 is circular, and the extended light-transmitting area 422 is square. In the length direction of the club head body 30, the size of the extended light-transmitting area 422 is smaller than the central light-transmitting area 421; the light-transmitting opening 42 is equivalent to a circle and a concentrically arranged rectangle superimposed. Specifically, in order to adapt to different chips 100, the shape and size of the central light-transmitting area 421 and the extended light-transmitting area 422 can be adjusted adaptively. For example, in this embodiment, the shape of the light-transmitting opening 42 is a circle with a diameter of 5 mm and another concentric 3 mm×10 mm rectangle superimposed. Of course, in other embodiments, the size of the central light-transmitting area 421 and the extended light-transmitting area 422 is not limited thereto, or the shape of the central light-transmitting area 421 can also be square, etc.
[0033] At the same time, in this embodiment, in the length direction of the club head body 30, the size of the clearance space 43 is the same as the maximum size of the central light-transmitting area 421 (that is, the diameter of the central light-transmitting area 421), which can achieve good clearance without being too large to affect the strength of the club head body 30.
[0034] An inclined transition edge 431 is provided between the clearance space 43 and the bottom opening of the light-transmitting port 42. With the inclined transition edge, the closer the area to the light-transmitting port 42 is, the greater the degree of chamfering, that is, the thinner the thickness is, further ensuring that the electron beam can always completely penetrate the chip placement groove 41 and the chip 100 when it is tilted to a different angle with the bottom of the chip placement groove 41, without affecting the observation field. Preferably, the angle a between the inclined transition edge 431 and the length extension line of the rod head body 30 is less than or equal to 30°, such as the angle a between the inclined transition edge 431 and the length extension line of the rod head body 30 in this embodiment is 10°.
[0035] At the same time, the thickness dimension from the bottom of the chip placement groove 41 to the bottom opening of the light-transmitting port 42 is 1mm-2mm, such as 1.5mm in the present embodiment. This arrangement can minimize the thickness while ensuring the strength of the chip placement groove 41.
[0036] Specifically, the shaft 20 includes a first shaft 21, a second shaft 22, and a flexible circuit board (not shown) inserted into the first shaft 21 and the second shaft 22. The head of the first shaft 21 and the tail of the second shaft 22 are coaxially connected and sealed by a sealing ring, and the head body 30 is coaxially connected to the head of the second shaft 22. The first shaft 21 and the second shaft 22 are hollow cylindrical rods made of an alloy with anti-corrosion and anti-oxidation functions.
[0037] The rod head body 30 includes a sample holder 31, a flap sheet 32 and a pressing sheet 33. The sample holder 31 is formed with a chip placement groove 41 and a clearance space 43. The flap sheet 32 and the pressing sheet 33 are assembled on the sample holder 31 and are located on opposite sides of the chip placement groove 41. The flap sheet 32 and the pressing sheet 33 are used to fix the chip 100 placed in the chip placement groove 41. Figure 8 shown.
[0038] The flip cover sheet 32 is reversibly assembled on the sample holder 31 through a connecting shaft. Specifically, the flip cover sheet 32 can be flipped within a range of 0°-150° on the sample holder 31. A through hole is provided on the flip cover sheet 32. When the flip cover sheet 32 needs to be fixed, the first screw 34 is passed through the through hole and fixed on the sample holder 31. The head of the flip cover sheet 32 is provided with a claw 321 connected to the flexible circuit board. The claw 321 is made of a conductive elastic material and corresponds to the chip placement groove. In this way, the claw 321 of the flip cover sheet 32 is used to press the chip 100 and provide electrical connection for the electrodes on the chip 100. Specifically, the number of the claws 321 can be selected according to the structure of the chip 100, such as symmetrically setting 2, 4 or 6 claws 321.
[0039] The pressing sheet 33 is provided with an elongated hole extending along the length direction of the rod head body 30. When fixing is required, the second screw 35 is passed through the elongated hole and fixed on the sample holder 31; when releasing the fixation, the second screw 35 is simply loosened to move the pressing sheet 33 along the length direction of the rod head body 31.
[0040] The handle 10 includes a housing 11, a front cover 12 and a rear cover 13. The housing 11 is provided with an aviation interface 14 connected to a flexible circuit board. The front cover 12 and the rear cover 13 are fixedly mounted at both ends of the housing 11. The front cover 12 is provided with a limit buckle, and is fixedly connected to the first shaft 21 through the limit buckle; in this way, the connection between the handle 10, the shaft 20 and the club head body 30 is achieved. Of course, in other embodiments, the connection structure of the handle 10, the shaft 20 and the club head body 30 is not limited to this.
[0041] Through the above solution provided in this embodiment, a maximum tilt of 75° can be achieved while meeting observation requirements.
[0042] Although the present invention has been specifically demonstrated and described in conjunction with the preferred embodiments, those skilled in the art should understand that various changes may be made to the present invention in form and detail without departing from the spirit and scope of the present invention as defined in the appended claims, all of which are within the scope of protection of the present invention.
Claims
1. A high-angle sample rod, comprising a handle, a rod body and a rod head body connected in sequence, wherein the rod head body is provided with a chip placement groove, and a light-transmitting opening is provided at the bottom of the chip placement groove; characterized in that: The club head body is thinned at the bottom of the chip placement groove to form a clearance space, and the clearance space is set through the width direction of the club head body. The light-transmitting opening includes a central light-transmitting area located in the center and extended light-transmitting areas extending from the central light-transmitting area to both sides of the club head body in the width direction.
2. The high-inclination sample holder according to claim 1, characterized in that: An inclined transition edge is arranged between the clearance space and the bottom opening of the light-transmitting opening.
3. The high-inclination sample holder according to claim 1, characterized in that: The extended light-transmitting area penetrates to the outer side wall of the club head body.
4. The high-inclination sample holder according to claim 1 or 3, characterized in that: The central light-transmitting area of the light-transmitting opening is circular or square, and the extended light-transmitting area is square. In the length direction of the club head body, the size of the extended light-transmitting area is smaller than the central light-transmitting area.
5. The high-inclination sample holder according to claim 4, characterized in that: The size of the clearance space is the same as the maximum size of the central light-transmitting area.
6. The high-inclination-angle sample holder according to claim 1, characterized in that: The shaft comprises a first shaft, a second shaft and a flexible circuit board penetrating the first shaft and the second shaft. The head of the first shaft and the tail of the second shaft are coaxially connected and sealed by a sealing ring. The main body of the shaft head is coaxially connected to the head of the second shaft.
7. The high-inclination-angle sample holder according to claim 6, characterized in that: The rod head body includes a sample seat, a flip cover sheet and a pressing sheet. A chip placement groove and a clearance space are formed on the sample seat. The flip cover sheet and the pressing sheet are assembled on the sample seat and are located on opposite sides of the chip placement groove. The flip cover sheet can be flipped and assembled on the sample seat through a connecting shaft. The head of the flip cover sheet is provided with a claw connected to a flexible circuit board. The claw is made of conductive elastic material and corresponds to the chip placement groove.
8. The high-inclination-angle sample holder according to claim 6, characterized in that: The handle includes a shell, a front cover and a rear cover. The shell is provided with an aviation interface connected to a flexible circuit board. The front cover and the rear cover are fixedly installed at both ends of the shell. The front cover is provided with a limit buckle and is fixedly connected to the first shaft through the limit buckle.