Scanning electron microscope sample table suitable for multi-angle observation

Abstract

The utility model discloses a scanning electron microscope sample stage suitable for multi-angle observation. The scanning electron microscope sample stage comprises a fixed frame, a rotating rod arranged at the top of the fixed frame, and a rotating frame fixed at the top end of the rotating rod, a swinging groove is formed in the top of the rotating frame, a movable block is hinged to the inner side, close to the top, of the swinging groove, a sample table body is fixed to the top of the movable block, and a plurality of placing holes are formed in the top of the sample table body, so that a plurality of samples to be observed can be placed at the top of the sample table body through the placing holes; after one sample is observed, the other sample can be taken to the scanning electron microscope for continuous observation under the condition that the scanning electron microscope is not moved through cooperation of the rotation adjusting assembly, and meanwhile the inclination angle of the sample table body can be adjusted under cooperation of the angle adjusting assembly. And therefore, the multi-angle and all-directional observation view angle of the sample can be improved, and the controllability and the practicability of the device are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of scanning electron microscope detection, in particular to a scanning electron microscope sample stage suitable for multi-angle observation. Background Art

[0002] Scanning electron microscope (SEM), referred to as SEM, is an observation electronic device between transmission electron microscope and optical microscope. It uses a focused narrow high-energy electron beam to scan samples, and stimulates various physical information through the interaction between the beam and the material. These information are collected, amplified, and re-imaged to achieve the purpose of characterizing the microscopic morphology of the material. Scanning electron microscope detection, referred to as SEM detection, is a test method using a scanning electron microscope. It has two basic functions: one is that it can magnify the sample surface by 25 times to 1 million times; the other is that it can perform qualitative and quantitative analysis on the elements in the micro-area of ​​the sample surface.

[0003] The Chinese utility model patent with the patent number CN217112142U discloses a scanning electron microscope sample stage, wherein the sample stage body has a sample attaching portion for attaching a sample and a connecting portion for connecting the sample stage body to the base, wherein the sample attaching portion is composed of at least two plates extending upward and intersecting each other perpendicular to the upper end surface of the connecting portion to provide at least eight vertical planar sample attaching areas, and the at least two plates are formed integrally with the connecting portion. In the above-mentioned scanning electron microscope sample stage, by providing a sample attaching portion of such a structure, the sample can be attached more stably on the flat sample attaching surface, and a larger amount of samples can be attached.

[0004] However, when the device is actually used, when using a scanning electron microscope to observe samples on the sample stage, only one of the eight flat sample mounting areas facing vertically downward can be observed. After observing one of the samples, it is often necessary to move the scanning electron microscope to another sample to continue observing. In addition, when observing the samples, it is difficult to conduct multi-angle and all-round observations, thereby reducing operability and practicality. Summary of the invention

[0005] The utility model overcomes the shortcomings of the prior art and provides a scanning electron microscope sample stage suitable for multi-angle observation.

[0006] To achieve the above object, the technical solution adopted by the utility model is: a scanning electron microscope sample stage suitable for multi-angle observation, comprising: a fixed frame, a rotating rod arranged on the top of the fixed frame, and a rotating frame fixed on the top of the rotating rod;

[0007] The top of the rotating frame is provided with a swinging groove, the inner side of the swinging groove close to the top is hinged with a movable block, the top of the movable block is fixed with a sample stage body, and the top of the sample stage body is provided with a plurality of placement holes for placing samples to be observed;

[0008] The rotating rod is provided with a rotating adjustment component for driving the sample stage body to perform rotation adjustment, and an angle adjustment component for driving the sample stage body to perform tilt angle adjustment is provided between the rotating frame and the movable block.

[0009] In a preferred embodiment of the present invention, the side surfaces of the rotating rod close to both ends are rotatably connected to the inner side of the fixing frame.

[0010] In a preferred embodiment of the utility model, the rotation adjustment assembly includes: a worm wheel fixed on the rotating rod, a worm arranged on the inner side of the fixed frame, and a crank fixed to one end of the worm located outside the fixed frame.

[0011] In a preferred embodiment of the utility model, the side surface of the worm is rotatably connected to the inner wall of the fixed frame, and the worm is meshingly connected to the worm wheel.

[0012] In a preferred embodiment of the utility model, the angle adjustment component includes: a servo motor fixed on one side of the rotating frame, a rotating shaft fixed on the output end of the servo motor, and a driving gear fixed on the rotating shaft located on the inner side of the swing groove; a driven gear is arranged on the inner side of the movable block.

[0013] In a preferred embodiment of the utility model, the side surface of the rotating shaft is rotatably connected to the inner side of the swing groove, the two sides of the driven gear are fixed to the inner side of the movable block, and the driving gear is meshingly connected to the driven gear.

[0014] In a preferred embodiment of the utility model, a fixing ring is sleeved on the side of the worm gear located outside the fixed frame, one side of the fixing ring is fixed to one side of the fixed frame, a rotation scale is provided on the side of the fixing ring, and a rotating pointer is provided on one end of the worm gear located outside the fixed frame, and one end of the rotating pointer faces one side of the rotation scale.

[0015] In a preferred embodiment of the utility model, an angle scale is provided on one side of the rotating frame, an angle pointer is fixed on the bottom of the sample stage body, and the bottom of the angle pointer is aligned with one side of the angle scale.

[0016] In a preferred embodiment of the present invention, handles are fixed on both sides of the fixing frame.

[0017] In a preferred embodiment of the utility model, a plurality of supporting legs are fixed to the bottom of the fixing frame, and anti-slip pads are fixed to the bottom of the supporting legs.

[0018] The utility model solves the defects existing in the background technology, and has the following beneficial effects:

[0019] (1) The utility model provides a scanning electron microscope sample stage suitable for multi-angle observation. By arranging a plurality of placement holes on the top of the sample stage body, a plurality of samples to be observed can be placed on the top of the sample stage body through the plurality of placement holes. After observing one of the samples, by rotating the adjustment component, another sample can be retrieved and continued to be observed under the scanning electron microscope without moving the scanning electron microscope. At the same time, with the cooperation of the angle adjustment component, the inclination angle of the sample stage body can be adjusted, thereby improving the multi-angle and all-round observation viewing angle of the sample, thereby improving the controllability and practicality of the device.

[0020] (2) In the utility model, a fixing ring is sleeved on the side of the worm gear outside the fixing frame. When the sample stage body is rotated by rotating the adjustment component, the cooperation of the rotating scale and the rotating pointer makes it easy to observe and record the adjustment distance during rotation. When the sample stage body is adjusted to a tilt angle by the angle adjustment component, the cooperation of the angle scale and the angle pointer makes it easy to observe and record the tilt angle during tilt, thereby facilitating more precise control of the adjustment range. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The utility model is further described below in conjunction with the accompanying drawings and embodiments;

[0022] Figure 1 It is a three-dimensional structure of a preferred embodiment of the utility model and a partial enlarged view thereof;

[0023] Figure 2 It is a structural diagram of the meshing position of the driving gear and the driven gear of the preferred embodiment of the utility model;

[0024] Figure 3 It is a structural diagram of the meshing position of the worm wheel and the worm in the preferred embodiment of the utility model;

[0025] Figure 4 It is a front view structural diagram of a preferred embodiment of the utility model;

[0026] In the figure: 1. fixed frame; 11. rotating rod; 12. rotating frame; 13. swinging groove; 14. movable block; 15. sample stage body; 16. placement hole; 2. worm gear; 21. worm; 22. crank; 3. servo motor; 31. rotating shaft; 32. driving gear; 33. driven gear; 4. fixing ring; 41. rotating scale; 42. rotating pointer; 43. angle scale; 44. angle pointer; 5. carrying handle; 6. supporting leg; 61. anti-slip pad. DETAILED DESCRIPTION

[0027] The present invention will now be further described in detail in conjunction with the accompanying drawings and embodiments. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0028] like Figure 1 and Figure 2 As shown, a scanning electron microscope sample stage suitable for multi-angle observation includes: a fixed frame 1, a rotating rod 11 arranged on the top of the fixed frame 1, and a rotating frame 12 fixed on the top of the rotating rod 11.

[0029] A swinging groove 13 is provided at the top of the rotating frame 12, and a movable block 14 is hinged on the inner side of the swinging groove 13 near the top. A sample stage body 15 is fixed on the top of the movable block 14, and a plurality of placement holes 16 for placing samples to be observed are provided on the top of the sample stage body 15; the rotating rod 11 is provided with a rotation adjustment component for driving the sample stage body 15 to perform rotation adjustment, and an angle adjustment component for driving the sample stage body 15 to adjust the tilt angle is provided between the rotating frame 12 and the movable block 14.

[0030] It should be noted that the side of the rotating rod 11 is rotatably connected to the inner side of the fixed frame 1; multiple samples to be observed are placed on the top of the sample stage body 15 through a number of placement holes 16, and through the scanning electron microscope, after observing one of the samples, by rotating the adjustment component, another sample can be retrieved under the scanning electron microscope for continued observation without moving the scanning electron microscope. At the same time, with the cooperation of the angle adjustment component, the inclination angle of the sample stage body 15 can be adjusted, thereby improving the multi-angle and all-round observation viewing angle of the sample, thereby improving the controllability and practicality of the device.

[0031] Handles 5 are fixed on both sides of the fixed frame 1. The provision of the handles 5 makes it convenient for the user to hold the handles 5 and drive the whole to move.

[0032] A plurality of supporting legs 6 are fixed to the bottom of the fixed frame 1, and an anti-skid pad 61 is fixed to the bottom of the supporting legs 6; the provision of the plurality of supporting legs 6 facilitates the support of the fixed frame 1, and the provision of the anti-skid pad 61 can provide an anti-skid and stable support.

[0033] like Figure 2 and Figure 3 As shown, the rotation adjustment assembly includes: a worm wheel 2 fixed on the rotating rod 11, a worm 21 arranged on the inner side of the fixed frame 1, and a crank 22 fixed to one end of the worm 21 located outside the fixed frame 1.

[0034] It should be noted that the side of the worm 21 is rotatably connected to the inner side of the fixed frame 1, and the worm 21 is meshed with the worm wheel 2; when it is necessary to rotate the sample stage body 15 and the observed sample, hold the crank 22 to drive the worm 21 to rotate, and through the meshing of the worm 21 and the worm wheel 2, the worm wheel 2 and the rotating rod 11 can be driven to rotate while rotating, thereby driving the sample stage body 15 on the top and the observed sample to be rotated and adjusted.

[0035] The angle adjustment assembly includes: a servo motor 3 fixed to one side of the rotating frame 12, a rotating shaft 31 fixed to the output end of the servo motor 3, and a driving gear 32 fixed to the rotating shaft 31 located on the inner side of the swing groove 13; a driven gear 33 is arranged on the inner side of the movable block 14.

[0036] It should be noted that the side of the rotating shaft 31 is rotatably connected to the inner side of the swing groove 13, the two sides of the driven gear 33 are fixed to the inner side of the movable block 14, and the driving gear 32 is meshed and connected with the driven gear 33; when it is necessary to adjust the observation angle of the sample stage body 15 and the observed sample, the servo motor 3 is started to drive the rotating shaft 31 to rotate, which can drive the driving gear 32 fixed on the side of the rotating shaft 31 to rotate synchronously, and through the meshing of the driving gear 32 with the driven gear 33 fixed on the inner side of the movable block 14, when the driving gear 32 rotates, the movable block 14 can be flipped to the left or right with the driven gear 33 as the center, thereby driving the sample stage body 15 and the observed sample on the top of the movable block 14, thereby adjusting the observation angle.

[0037] like Figure 1 and Figure 4 As shown, the worm 21 is located on the side outside the fixed frame 1 and is sleeved with a fixing ring 4. One side of the fixing ring 4 is fixed to one side of the fixed frame 1. A rotation scale 41 is provided on the side of the fixing ring 4. A rotation pointer 42 is provided at one end of the worm 21 located outside the fixed frame 1. One end of the rotation pointer 42 is aligned with one side of the rotation scale 41.

[0038] An angle scale 43 is provided on one side of the rotating frame 12 , and an angle pointer 44 is fixed on the bottom of the sample stage body 15 , with the bottom of the angle pointer 44 aligned with one side of the angle scale 43 .

[0039] It should be noted that when the worm 21 is driven to rotate the sample stage body 15, the rotating pointer 42 at one end of the worm 21 will rotate synchronously. Since one end of the rotating pointer 42 is opposite to one side of the rotating scale 41, it is convenient to observe and record the adjustment distance during rotation. When the movable block 14 is driven to adjust the tilt angle of the sample stage body 15, the angle pointer 44 at the bottom of the sample stage body 15 will tilt synchronously. Since the bottom of the angle pointer 44 is opposite to one side of the angle scale 43, it is convenient to observe and record the tilt angle during tilt, thereby facilitating more precise control of the adjustment range.

[0040] When the utility model is used, a plurality of samples to be observed are placed on the top of the sample stage body 15 through a plurality of placement holes 16. After observing one of the samples through the scanning electron microscope, the crank 22 is held to drive the worm 21 to rotate, and the rotating pointer 42 at one end of the worm 21 will rotate synchronously. Since one end of the rotating pointer 42 is opposite to one side of the rotating scale 41, it is convenient to observe and record the adjustment distance during rotation. Through the meshing of the worm 21 and the worm wheel 2, the worm wheel 2 and the rotating rod 11 can be driven to rotate while rotating, and then the sample stage body 15 on the top and the observed sample can be driven to rotate and adjust. Without moving the scanning electron microscope, another sample can be retrieved and continued to be observed under the scanning electron microscope. When the sample stage body 15 and the observed sample need to be adjusted, When adjusting the observation angle, start the servo motor 3 to drive the rotating shaft 31 to rotate, which can drive the driving gear 32 fixed on the side of the rotating shaft 31 to rotate synchronously. Through the engagement of the driving gear 32 with the driven gear 33 fixed on the inner side of the movable block 14, when the driving gear 32 rotates, the movable block 14 can be flipped to the left or right with the driven gear 33 as the center, thereby driving the sample stage body 15 on the top of the movable block 14 and the observed sample, and then adjusting the observation angle. The angle pointer 44 at the bottom of the sample stage body 15 will tilt synchronously. Since the bottom of the angle pointer 44 is opposite to one side of the angle scale 43, it is convenient to observe and record the tilt angle during tilt, thereby improving the multi-angle and all-round observation viewing angle of the sample, thereby improving the controllability and practicality of the device.

[0041] The above is based on the ideal embodiment of the utility model. Through the above description, relevant personnel can make various changes and modifications without deviating from the technical concept of the utility model. The technical scope of this utility model is not limited to the content in the specification, and the technical scope must be determined according to the scope of the claims.

Claims

1. A scanning electron microscope sample stage suitable for multi-angle observation, characterized in that: include: A fixed frame (1), a rotating rod (11) arranged on the top of the fixed frame (1), and a rotating frame (12) fixed on the top of the rotating rod (11); The top of the rotating frame (12) is provided with a swinging groove (13), the inner side of the swinging groove (13) close to the top is hinged with a movable block (14), the top of the movable block (14) is fixed with a sample stage body (15), and the top of the sample stage body (15) is provided with a plurality of placement holes (16) for placing samples to be observed; The rotating rod (11) is provided with a rotation adjustment component for driving the sample stage body (15) to perform rotation adjustment, and an angle adjustment component for driving the sample stage body (15) to perform tilt angle adjustment is provided between the rotating frame (12) and the movable block (14).

2. The scanning electron microscope sample stage suitable for multi-angle observation according to claim 1, characterized in that: The side surfaces of the rotating rod (11) close to both ends are rotatably connected to the inner side of the fixing frame (1).

3. The scanning electron microscope sample stage suitable for multi-angle observation according to claim 1, characterized in that: The rotation adjustment assembly comprises: a worm wheel (2) fixed on the rotation rod (11), a worm (21) arranged inside the fixed frame (1), and a crank (22) fixed to one end of the worm (21) located outside the fixed frame (1).

4. The scanning electron microscope sample stage suitable for multi-angle observation according to claim 3, characterized in that: The side surface of the worm (21) is rotatably connected to the inner wall of the fixed frame (1), and the worm (21) is meshingly connected to the worm wheel (2).

5. The scanning electron microscope sample stage suitable for multi-angle observation according to claim 1, characterized in that: The angle adjustment component comprises: a servo motor (3) fixed to one side of the rotating frame (12), a rotating shaft (31) fixed to the output end of the servo motor (3), and a driving gear (32) fixed to the rotating shaft (31) and located on the inner side of the swing groove (13); a driven gear (33) is arranged on the inner side of the movable block (14).

6. The scanning electron microscope sample stage suitable for multi-angle observation according to claim 5, characterized in that: The side surface of the rotating shaft (31) is rotatably connected to the inner side of the swing groove (13), the two sides of the driven gear (33) are fixed to the inner side of the movable block (14), and the driving gear (32) is meshingly connected to the driven gear (33).

7. The scanning electron microscope sample stage suitable for multi-angle observation according to claim 3, characterized in that: The worm (21) is located on the side surface outside the fixed frame (1) and is sleeved with a fixed ring (4), one side of the fixed ring (4) is fixed to one side of the fixed frame (1), a rotation scale (41) is provided on the side surface of the fixed ring (4), and a rotation pointer (42) is provided at one end of the worm (21) located outside the fixed frame (1), and one end of the rotation pointer (42) faces one side of the rotation scale (41).

8. The scanning electron microscope sample stage suitable for multi-angle observation according to claim 1, characterized in that: An angle scale (43) is provided on one side of the rotating frame (12), and an angle pointer (44) is fixed on the bottom of the sample stage body (15), with the bottom of the angle pointer (44) aligned with one side of the angle scale (43).

9. The scanning electron microscope sample stage suitable for multi-angle observation according to claim 1, characterized in that: Handles (5) are fixed on both sides of the fixing frame (1).

10. The scanning electron microscope sample stage suitable for multi-angle observation according to claim 1, characterized in that: A plurality of supporting legs (6) are fixed to the bottom of the fixing frame (1), and an anti-slip pad (61) is fixed to the bottom of the supporting legs (6).

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