Cleaning device

Abstract

The utility model discloses a cleaning device which comprises a liquid storage tank, a liquid conveying pipeline and an ultrasonic cleaning device. Two opposite ends of the liquid conveying pipeline are respectively connected with the outlet end of the liquid storage tank and the liquid supply pipeline; a first control piece is arranged on the infusion pipeline and used for controlling connection and disconnection of the infusion pipeline. The ultrasonic cleaning device comprises an ultrasonic generator and a plurality of ultrasonic transducers electrically connected with the ultrasonic generator; and an ultrasonic transducer is arranged on the inner wall of each pipeline joint on the liquid supply pipeline. Thus, the ultrasonic transducer is arranged, the ultrasonic generator is started to enable the ultrasonic transducer to vibrate, so that crystal particles on the pipeline joint are vibrated off, and meanwhile, vibration can be transmitted to the inner wall of the liquid supply pipeline and the positions, such as the liquid supply valve, the filter and the liquid separation block, located around the pipeline joint through the cleaning agent; and the crystal particles which are shaken off are flushed out of the liquid supply pipeline through the cleaning agent, so that the crystal particles at dead corners of the liquid supply system are removed completely, and potential safety hazards in polishing processing are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing machines, in particular to a cleaning device. Background Art

[0002] During the chemical mechanical polishing (CMP) process, the polishing machine's liquid supply system continuously supplies polishing liquid to the polishing position of the workpiece. The liquid supply system includes a liquid supply barrel, a liquid supply pump, a liquid supply valve, a filter device, a flow meter, a liquid separator, a nozzle, and various connecting pipes and other structures. Usually, after a period of polishing, the particles in the polishing liquid will form crystals inside the various components of the liquid supply system. If these crystals are not cleaned, these crystal particles will be supplied to the polishing position of the workpiece along with the polishing liquid, causing damage to the workpiece surface, thereby affecting the polishing effect of the workpiece and even causing waste. Therefore, the liquid supply system needs to be cleaned regularly.

[0003] The traditional cleaning method is to flush the supply system with pure water. However, due to the long liquid supply pipeline and narrow space, there are some dead corners in the liquid supply pipeline, such as pipe joints, liquid supply valves, filters, liquid separators, etc. Once crystals are formed in these locations, it is difficult to remove them by flushing with pure water, which will bring great safety hazards to the subsequent polishing process. Utility Model Content

[0004] The utility model aims to provide a cleaning device, which can improve the cleaning effect of the dead angle position in the liquid supply pipeline and reduce the potential safety hazards in the polishing process.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A cleaning device for cleaning a liquid supply system of a polishing machine, the cleaning device comprising:

[0007] A liquid storage tank, wherein the cleaning agent is stored in the liquid storage tank;

[0008] An infusion pipeline, the opposite ends of which are respectively connected to the outlet end of the liquid storage tank and the liquid supply pipeline of the liquid supply system; a first control member is provided on the infusion pipeline for controlling the connection and disconnection of the infusion pipeline;

[0009] The ultrasonic cleaning device comprises an ultrasonic generator and a plurality of ultrasonic transducers, all of which are electrically connected to the ultrasonic generator respectively; one ultrasonic transducer is arranged on the inner wall of each pipe joint on the liquid supply pipe.

[0010] In one embodiment, the cleaning device also includes a drying device, which includes an air source, an air supply pipeline and a heating component. The opposite ends of the air supply pipeline are respectively connected to the liquid supply pipeline and the air source, and the heating component is used to heat the air in the air supply pipeline.

[0011] In one embodiment, the drying device further includes a second control component, which is disposed on the air supply pipeline and is used to control the connection and disconnection of the air supply pipeline.

[0012] In one embodiment, the second control member is a ball valve.

[0013] In one embodiment, the cleaning device further includes a humidity detection device, which is disposed in the liquid supply pipeline and is used to detect the humidity in the liquid supply pipeline.

[0014] In one embodiment, the ultrasonic transducer is configured as a ring-shaped structure, a sheet-shaped structure, or a rod-shaped structure.

[0015] In one embodiment, the ultrasonic transducer is constructed as an annular structure, the inner wall of the pipe joint is provided with a mounting groove, and the ultrasonic transducer is installed in the mounting groove.

[0016] In one embodiment, the thickness of the ultrasonic transducer is not greater than the depth of the mounting groove.

[0017] In one embodiment, the first control member is a ball valve.

[0018] In one embodiment, the cleaning agent is deionized water.

[0019] Beneficial effects of the utility model:

[0020] The utility model provides a cleaning device, including a liquid storage tank, a liquid infusion pipeline and an ultrasonic cleaning device, and the cleaning device is used to clean the liquid supply system of a polishing machine. The cleaning agent is stored in the liquid storage tank; the opposite ends of the liquid infusion pipeline are respectively connected to the outlet end of the liquid storage tank and the liquid supply pipeline of the liquid supply system; the liquid infusion pipeline is provided with a first control component for controlling the connection and disconnection of the liquid infusion pipeline. The ultrasonic cleaning device includes an ultrasonic generator and a plurality of ultrasonic transducers, and all ultrasonic transducers are electrically connected to the ultrasonic generator respectively; an ultrasonic transducer is provided on the inner wall of each pipeline joint on the liquid supply pipeline.

[0021] In this way, the infusion pipeline is connected through the first control component, so that the cleaning agent in the liquid storage tank can flow through the infusion pipeline and the liquid supply system; by arranging an ultrasonic transducer on the inner wall of each pipe joint of the liquid supply pipeline, and the ultrasonic transducer is electrically connected to the ultrasonic generator, the ultrasonic generator is turned on to make the ultrasonic transducer vibrate, thereby shaking off the crystal particles on the pipe joint, and at the same time, the vibration can be transmitted to the inner wall of the liquid supply pipeline and the liquid supply valve, filter, liquid separator block and other positions around the pipe joint through the cleaning agent, and the crystal particles at these positions are shaken off by the high-frequency vibration of the ultrasonic transducer, and the shaken crystal particles are flushed out of the liquid supply pipeline by the flowing cleaning agent, thereby removing the crystal particles in the dead corners of the liquid supply system, reducing the safety hazards in the polishing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the connection between the cleaning device and the liquid supply system in the embodiment of the utility model;

[0023] Figure 2 yes Figure 1 The enlarged schematic diagram of point A in the middle;

[0024] Figure 3 yes Figure 1 Schematic diagram of the connection between the ultrasonic cleaning device and the liquid supply pipeline of the cleaning device.

[0025] Description of Figure Numbers:

[0026] 11. Liquid supply pipeline; 12. Pipeline joint; 121. Installation groove; 13. Liquid supply barrel; 14. Liquid supply pump; 151. Check valve; 152. Ball valve; 16. Filter device; 17. Flow meter; 18. Liquid separation block;

[0027] 21. Ultrasonic generator; 22. Ultrasonic transducer; 23. First control component; 24. Second control component; 25. Connector; 26. Three-way pipe. DETAILED DESCRIPTION

[0028] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] See also Figure 1 The utility model provides a cleaning device, including a liquid storage tank (not shown in the figure), a liquid infusion pipeline (not shown in the figure) and an ultrasonic cleaning device, and the cleaning device is used for cleaning the liquid supply system of a polishing machine.

[0032] The liquid storage tank stores a cleaning agent, which is used to clean the crystal particles in the liquid supply system.

[0033] In some embodiments, the cleaning agent is deionized water. It is understandable that the cleaning agent can be selected from other cleaning agents that meet the use requirements according to actual use conditions, and is not limited to the deionized water listed in this embodiment.

[0034] See also Figure 1 The opposite ends of the infusion pipeline are respectively connected to the outlet end of the liquid storage tank and the liquid supply pipeline 11 of the liquid supply system.

[0035] See also Figure 1 and Figure 2It should be noted that the liquid supply system includes a liquid supply barrel 13, a liquid supply pump 14, a liquid supply valve, a filter device 16, a flow meter 17, a liquid separation block 18, a nozzle (not shown in the figure), and various connecting pipelines and other structures, wherein the liquid supply valve includes a one-way valve 151 and a ball valve 152 arranged in sequence. Since the liquid supply system is widely present in the prior art, it will not be repeated here. In this embodiment, in order to facilitate the description of the technical solution, all the connecting pipelines are collectively referred to as the liquid supply pipeline 11, and the above-mentioned liquid supply barrel 13, liquid supply pump 14, liquid supply valve, filter device 16, flow meter 17, liquid separation block 18, and nozzle are respectively connected to the liquid supply pipeline 11 through a pipeline connector 12. In this embodiment, the outlet end of the infusion pipeline is connected to the inlet end of the liquid supply pipeline 11, so that the cleaning agent can flow through the inlet end and the outlet end of the liquid supply pipeline 11 in sequence, thereby washing away the crystal particles in the liquid supply pipeline 11.

[0036] See also Figure 1 The infusion pipeline is provided with a first control member 23 for controlling the connection and disconnection of the infusion pipeline. In this embodiment, the first control member 23 is arranged at the outlet end of the infusion pipeline, and the first control member 23 is connected to the infusion pipeline through a connector 25.

[0037] In some embodiments, the first control member 23 is a ball valve. It is understandable that the first control member 23 can also be other types of control members according to actual use needs, and no further limitation is made here.

[0038] In this way, the infusion pipeline is connected through the first control component 23, so that the cleaning agent in the liquid storage tank can flow through the liquid supply system through the infusion pipeline; the infusion pipeline is disconnected through the first control component 23 to stop the delivery and flushing of the cleaning agent.

[0039] See also Figure 1 and Figure 3 The ultrasonic cleaning device includes an ultrasonic generator 21 and a plurality of ultrasonic transducers 22 , and all ultrasonic transducers 22 are electrically connected to the ultrasonic generator 21 ; an ultrasonic transducer 22 is arranged on the inner wall of each pipe joint 12 on the liquid supply pipe 11 .

[0040] In this way, an ultrasonic transducer 22 is arranged on the inner wall of each pipe joint 12 of the liquid supply pipe 11, and the ultrasonic transducer 22 is electrically connected to the ultrasonic generator 21, and the ultrasonic generator 21 is turned on to make the ultrasonic transducer 22 vibrate, thereby shaking off the crystal particles on the pipe joint 12, and at the same time, the vibration can be transmitted to the inner wall of the liquid supply pipe 11 and the liquid supply valve, filter, liquid separator block 18 and other positions located around the pipe joint 12 through the cleaning agent, and the crystal particles at these positions are shaken off by the high-frequency vibration of the ultrasonic transducer 22, and the shaken crystal particles are flushed out of the liquid supply pipe 11 by the flowing cleaning agent, so that the crystal particles in the dead corners of the liquid supply system are removed cleanly, reducing the safety hazards in the polishing process.

[0041] In some embodiments, the cleaning device also includes a drying device (not shown in the figure), which includes an air source, an air supply pipeline and a heating component. The opposite ends of the air supply pipeline are respectively connected to the liquid supply pipeline 11 and the air source, and the heating component is used to heat the air in the air supply pipeline.

[0042] See also Figure 1 In some embodiments, the drying device further includes a second control member 24, which is disposed on the air supply pipeline and is used to control the connection and disconnection of the air supply pipeline. The second control member 24 is disposed at the outlet end of the air supply pipeline, and the second control member 24 is connected to the air supply pipeline via a connector 25.

[0043] In some embodiments, the second control member 24 is a ball valve. It is understandable that the second control member 24 can also be selected from other types of control members according to actual use needs, and no further limitation is made here.

[0044] It is understandable that there are many ways to heat the air. For example, the heating component is selected as a heating wire, and the heating wire directly heats the air, or the heating component heats hot water so that the hot water and air exchange heat to heat the air. The heating component can heat the air, and there are no excessive restrictions on the structural composition and heating method of the heating component.

[0045] It should be noted that, in this embodiment, the cleaning device is further provided with a three-way pipe 26 , and three ends of the three-way pipe 26 are respectively connected to the first control component 23 , the second control component 24 and the inlet end of the liquid supply pipeline 11 .

[0046] In some embodiments, the cleaning device further includes a humidity detection device (not shown in the figure), which is disposed in the liquid supply pipeline 11 and is used to detect the humidity in the liquid supply pipeline 11. The humidity detection device is disposed at the outlet end of the liquid supply pipeline 11 so as to install the humidity detection device. It can be understood that if the humidity at the outlet end of the liquid supply pipeline 11 meets the requirements, the humidity of the entire liquid supply pipeline 11 meets the requirements, and the humidity of the liquid supply pipeline 11 can be effectively judged.

[0047] Optionally, the humidity detection device is a humidity sensor.

[0048] In this way, by providing a humidity detection device, the humidity at the outlet end of the liquid supply pipeline 11 can be detected in real time, so that the drying device can be turned off in time when the liquid supply pipeline 11 is dried.

[0049] In some embodiments, the ultrasonic transducer 22 is configured as a ring-shaped structure, a sheet-shaped structure, or a rod-shaped structure.

[0050] See also Figure 3 In some embodiments, the ultrasonic transducer 22 is constructed as an annular structure, and the inner wall of the pipe connector 12 is provided with a mounting groove 121, and the ultrasonic transducer 22 is installed in the mounting groove 121.

[0051] In some embodiments, the thickness of the ultrasonic transducer 22 is not greater than the depth of the mounting groove 121 .

[0052] In this embodiment, the thickness of the ultrasonic transducer 22 is equal to the depth of the mounting groove 121, and the mounting groove 121 is an annular groove, so as to prevent the ultrasonic transducer 22 from protruding out of the annular groove and affecting the flow of the cleaning agent.

[0053] It is understandable that, in order to improve the effect of cleaning the crystal particles, an ultrasonic transducer 22 may be provided in the liquid supply pipeline, and an ultrasonic transducer 22 capable of high-frequency vibration may be selected as required.

[0054] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A cleaning device for cleaning a liquid supply system of a polishing machine, characterized in that: The cleaning device comprises: A liquid storage tank, wherein the cleaning agent is stored in the liquid storage tank; an infusion pipeline, wherein two opposite ends of the infusion pipeline are respectively connected to the outlet end of the liquid storage tank and the liquid supply pipeline (11) of the liquid supply system; a first control component (23) is provided on the infusion pipeline for controlling the connection and disconnection of the infusion pipeline; An ultrasonic cleaning device comprises an ultrasonic generator (21) and a plurality of ultrasonic transducers (22), wherein all the ultrasonic transducers (22) are electrically connected to the ultrasonic generator (21) respectively; and one ultrasonic transducer (22) is arranged on the inner wall of each pipeline joint (12) on the liquid supply pipeline (11).

2. The cleaning device according to claim 1, characterized in that: The cleaning device also includes a drying device, which includes an air source, an air supply pipeline and a heating component. The opposite ends of the air supply pipeline are respectively connected to the liquid supply pipeline (11) and the air source, and the heating component is used to heat the air in the air supply pipeline.

3. The cleaning device according to claim 2, characterized in that: The drying device further comprises a second control component (24), which is arranged on the air supply pipeline and is used to control the connection and disconnection of the air supply pipeline.

4. The cleaning device according to claim 3, characterized in that: The second control component (24) is a ball valve.

5. The cleaning device according to claim 1, characterized in that: The cleaning device further comprises a humidity detection device, which is arranged in the liquid supply pipeline (11) and is used to detect the humidity in the liquid supply pipeline (11).

6. The cleaning device according to claim 1, characterized in that: The ultrasonic transducer (22) is constructed as a ring-shaped structure, a sheet-shaped structure, or a rod-shaped structure.

7. The cleaning device according to claim 1, characterized in that: The ultrasonic transducer (22) is constructed as an annular structure, the inner wall of the pipe joint (12) is provided with a mounting groove (121), and the ultrasonic transducer (22) is mounted in the mounting groove (121).

8. The cleaning device according to claim 7, characterized in that: The thickness of the ultrasonic transducer (22) is no greater than the depth of the mounting groove (121).

9. The cleaning device according to claim 1, characterized in that: The first control component (23) is a ball valve.

10. The cleaning device according to claim 1, characterized in that: The cleaning agent is deionized water.

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