Dust removal device for cleaning single crystal furnace during furnace disassembly and single crystal production workshop

Abstract

The utility model relates to the technical field of single crystal furnace disassembly and cleaning, in particular to a dust removal device for single crystal furnace disassembly and cleaning, which comprises a rack, a dust removal device and a dust removal device, the rack comprises two oppositely arranged frames, the frames are of hollow structures to form dust collection cavities, a plurality of dust collection ports are formed in the inner side parts of the frames, and sealing plates are respectively mounted on the outer side parts of the two frames; the dust collection unit is mounted at the mounting opening; the telescopic rods are of hollow structures, and the two frames are communicated through the multiple telescopic rods; the telescopic shed assembly comprises an electric telescopic shed; the electric telescopic shed is arranged between the two frames; after the electric telescopic shed is unfolded, a dust collection space with a downward opening is defined by the two sealing plates and the electric telescopic shed; the walking mechanism is mounted at the bottom of the cross beam; the bottom of the cross beam and the bottom of the electric telescopic shed are respectively provided with air insulation cloth. According to the device, the automation degree of dust removal can be improved during furnace disassembly and cleaning, silicide dust can be collected fundamentally, and the cleaning cleanliness is high.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace dismantling and cleaning, and in particular to a dust removal device for single crystal furnace dismantling and cleaning and a single crystal production workshop. Background Art

[0002] After the single crystal furnace heat field is completed, it needs to be dismantled and cleaned. The high purity hygiene of the main chamber is particularly important. The impurities such as silicon carbide and silicon vapor attached to the disassembled graphite parts are mainly cleaned by operators using conventional tools. The vacuum pipes are easy to cause dust and there is a lot of dust.

[0003] Disadvantages of the existing technology:

[0004] Manual cleaning will generate a large amount of silicide dust when disassembling and assembling hot field graphite parts. There are no reasonable measures to isolate or collect the dust. The silicide dust will enter the workshop from the top furnace port. The silicide dust will also accumulate on the single crystal furnace and every corner of the workshop, causing workshop environmental pollution. The workshop staff are also required to clean up and wipe the furnace with a rag, which requires a lot of manpower and material resources, but it cannot solve the fundamental problem. There is no effective way to isolate the silicide dust and prevent it from entering the production workshop. When the operator cleans the dust on the surface, it cannot provide a more reasonable working environment for the operator. When cleaning, it needs to use tools such as ladders. The cleaning work is more troublesome and not ergonomic, and it cannot reduce the workload of the operator.

[0005] Therefore, some cleaning tools used in the prior art have low cleaning cleanliness and low automation, and cannot collect silicide dust at the source. In summary, the high cleanliness of the environment in the single crystal production workshop has always been a pain point in the industry. Utility Model Content

[0006] The utility model aims to provide a dust removal device for single crystal furnace dismantling and cleaning, which can improve the degree of automation of dust removal during furnace dismantling and cleaning, can collect silicide dust at the source, and has a high degree of cleaning cleanliness.

[0007] Another object of the utility model is to provide a single crystal production workshop, which can improve the degree of automation of dust removal when dismantling the furnace for cleaning, can collect silicide dust at the source, and has a high degree of cleaning cleanliness.

[0008] The technical solution of the utility model is achieved in this way:

[0009] A dust removal device for dismantling and cleaning a single crystal furnace, which is correspondingly arranged at the top furnace opening of the lower furnace chamber of the single crystal furnace, comprises:

[0010] The frame comprises two frames arranged opposite to each other, the two frames are respectively a first frame and a second frame; the frame comprises a crossbeam at the bottom and an arch beam arranged on the crossbeam, two ends of the arch beam are respectively connected to two ends of the crossbeam to form a closed frame, the frame is a hollow structure to form a dust suction chamber, a plurality of dust suction ports are provided on the inner side of the frame, and sealing plates are respectively installed on the outer sides of the two frames;

[0011] A dust suction unit, wherein the sealing plate is provided with a mounting opening, the dust suction unit is mounted on the mounting opening, the air suction port of the dust suction unit is connected to the dust suction chamber, and the air exhaust port of the dust suction unit is connected to the external atmosphere;

[0012] A telescopic rod, which is a hollow structure, and the two frames are connected by a plurality of telescopic rods, and the telescopic rod can control the two frames to move closer to or farther away from each other;

[0013] The telescopic shed assembly comprises an electric telescopic shed; the electric telescopic shed is arranged between the two frames, and one end of the electric telescopic shed is fixed to the inner side of the first frame; after the electric telescopic shed is extended, a dust suction space with an opening facing downward is enclosed between the two sealing plates and the electric telescopic shed, and the opening is a suction port of the dust suction space;

[0014] A walking mechanism, the walking mechanism is installed at the bottom of the crossbeam;

[0015] The bottom of the crossbeam and the bottom of the electric telescopic shed are respectively provided with air-isolating cloths for forming a seal with the ground.

[0016] Furthermore, the telescopic shed assembly also includes a spare manual telescopic shed. The electric telescopic shed and the manual telescopic shed are sequentially arranged between the two frames, and one end of the manual telescopic shed is fixed to the inner side of the second frame. The bottom of the manual telescopic shed is also provided with an air-isolating cloth for forming a seal with the ground.

[0017] Furthermore, the electric telescopic shed includes a first telescopic shed body and an electric telescopic assembly, and the manual telescopic shed includes a second telescopic shed body. The structures of the first telescopic shed body and the second telescopic shed body are consistent with the shape of the arch beam. The first telescopic shed body and the second telescopic shed body are sequentially arranged between the two frames and are respectively placed on the telescopic rod, and one end of the first telescopic shed body and one end of the electric telescopic assembly are respectively connected to the first frame, the other end of the electric telescopic assembly is connected to the other end of the first telescopic shed body, and one end of the second telescopic shed body is connected to the inner side of the second frame.

[0018] Furthermore, the first telescopic shed body and the second telescopic shed body have the same structure, and the telescopic direction of the first telescopic shed body and the second telescopic shed body is the same as the telescopic direction of the telescopic rod.

[0019] Furthermore, the electric telescopic assembly adopts an electric push rod, an electric hydraulic rod or a telescopic cylinder.

[0020] Furthermore, the first telescopic shed, the second telescopic shed and the arch beam are all in an inverted "U" shape;

[0021] U-shaped sealing gaskets are respectively arranged between the first frame and the first telescopic shed body, and between the second frame and the second telescopic shed body;

[0022] A U-shaped sealing gasket is provided on one side of the first telescopic shed body close to the second telescopic shed body, and / or a U-shaped sealing gasket is provided on one side of the second telescopic shed body close to the first telescopic shed body; or a U-shaped magnetic pad is provided on one side of the first telescopic shed body close to the second telescopic shed body and on one side of the second telescopic shed body close to the first telescopic shed body respectively.

[0023] Furthermore, the walking mechanism includes four groups of walking components, and the four groups of walking components are respectively installed at the four corners of the bottom of the frame;

[0024] The walking assembly comprises a servo motor, a coupling, a bearing mounting seat and a Mecanum wheel, the wheel axle of the Mecanum wheel is mounted on the bearing mounting seat through a bearing, the bearing mounting seat is fixedly mounted on the bottom of the crossbeam, and the output shaft of the servo motor is connected to the wheel axle of the Mecanum wheel through the coupling.

[0025] Furthermore, the dust collection unit adopts a fan filter unit.

[0026] Furthermore, the sealing plate is made of transparent material.

[0027] A single crystal production workshop comprises a lower furnace chamber and a horizontal furnace platform, wherein the furnace platform is jointly arranged on the top of a plurality of the lower furnace chambers, and a furnace opening on the top of the lower furnace chamber is installed in the furnace platform, and further comprises a dust removal device for dismantling and cleaning the single crystal furnace, wherein the dust removal device for dismantling and cleaning the single crystal furnace can move to any of the furnace openings on the furnace platform.

[0028] Compared with the prior art, the beneficial effects of the present invention are:

[0029] The present application provides a dust removal device for dismantling and cleaning a single crystal furnace. The entire device can be folded and made smaller or expanded and made larger by the extension and retraction of an electric telescopic shed. When dust removal is needed, the entire dust removal device can be moved to the furnace mouth at the top of the single crystal furnace by a walking mechanism and completely cover the furnace mouth at the top of the entire lower furnace chamber. The electric telescopic shed is expanded, and at the same time, a dust suction space with an opening facing downward is formed between two sealing plates and the electric telescopic shed. The dust suction space is sealed and connected to the furnace mouth at the top of the lower furnace chamber through the action of an air-isolating cloth. When the operator dismantles the furnace for cleaning in the furnace chamber, the dust generated in the furnace chamber can be uniformly absorbed by starting the dust suction unit, and dust removal can be sealed at the source. Compared with the prior art, the manpower and material resources spent are greatly reduced, the degree of automation is improved, and the cleaning cleanliness is higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0031] Figure 1 It is a schematic diagram of the overall structure of the dust removal device of the utility model;

[0032] Figure 2 It is a side view of the dust removal device of the utility model;

[0033] Figure 3 It is an axonometric drawing of the framework of the utility model;

[0034] Figure 4 This is a schematic diagram of the structure of one of the walking components of the utility model;

[0035] Figure 5 It is a structural schematic diagram of the dust removal device of the utility model moving on the furnace table.

[0036] In the figure:

[0037] 1-first frame; 2-second frame; 3-dust suction port; 4-sealing plate; 5-dust suction unit; 6-telescopic rod; 7-electric telescopic shed; 701-first telescopic shed body; 702-electric telescopic assembly; 8-manual telescopic shed; 801-second telescopic shed body; 9-traveling mechanism; 91-servo motor; 92-coupling; 93-bearing mounting seat; 94-Mecanum wheel; 10-furnace table; 11-furnace mouth. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0039] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0041] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0042] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0043] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0044] In conjunction with the accompanying drawings, some embodiments of the present invention are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0045] Example 1

[0046] In order to ensure the quality of single crystal silicon rods, the production environment of single crystal silicon must be maintained at a high level of cleanliness. At the same time, it can also reduce the workload of personnel. A dust removal device for dismantling and cleaning single crystal furnaces has been studied to ensure that the hygiene of single crystal furnaces meets the standards and the cleanliness of the production workshop is maintained, and to avoid powdered particulate impurities falling into the crucible during the crystal pulling process, resulting in single crystal breakage during the single crystal silicon rod pulling process, affecting production and quality.

[0047] Specifically, refer to Figure 1-Figure 5 This embodiment provides a dust removal device for cleaning a single crystal furnace, which is correspondingly arranged at the top furnace opening 11 of the lower furnace chamber of the single crystal furnace, and includes:

[0048] The frame comprises two frames arranged opposite to each other, the two frames are respectively a first frame 1 and a second frame 2; the frame comprises a crossbeam at the bottom and an arch beam arranged on the crossbeam, the two ends of the arch beam are respectively connected to the two ends of the crossbeam to form a closed frame, the frame is a hollow structure to form a dust suction chamber, the inner side of the frame is provided with a plurality of dust suction ports 3, and the outer sides of the two frames are respectively provided with sealing plates 4;

[0049] A dust suction unit 5 is provided with an installation opening on the sealing plate 4, and the dust suction unit 5 is installed at the installation opening. The air intake port of the dust suction unit 5 is connected with the dust suction chamber, and the air exhaust port of the dust suction unit 5 is connected with the external atmosphere. A plurality of dust suction units 5 can be provided, distributed on two sealing plates 4, to improve suction force.

[0050] Telescopic rod 6, the telescopic rod 6 is a hollow structure, the two frames are connected by a plurality of telescopic rods 6, and the telescopic rod 6 can control the two frames to move closer to or farther away from each other;

[0051] The telescopic shed assembly comprises an electric telescopic shed 7; the electric telescopic shed 7 is arranged between the two frames, and one end of the electric telescopic shed 7 is fixed to the inner side of the first frame 1; after the electric telescopic shed 7 is extended, a dust suction space with an opening facing downward is formed between the two sealing plates 4 and the electric telescopic shed 7, and the opening is a suction port of the dust suction space;

[0052] A walking mechanism 9, wherein the walking mechanism 9 is installed at the bottom of the beam, and the entire dust removal device is driven to move by the walking mechanism 9;

[0053] Among them, the bottom of the beam and the bottom of the electric telescopic shed 7 are respectively provided with air-blocking cloth (not shown in the figure) for forming a seal with the ground. Due to the existence of the walking mechanism 9, there will be a gap between the bottom of the beam and the ground, so an air-blocking cloth can be set at the bottom of the beam to achieve a seal between the beam and the ground. The electric telescopic shed 7 has an extended state or a retracted state. In order to achieve the seal between the bottom of the electric telescopic shed 7 and the ground, an air-blocking cloth is also set at the bottom of the electric telescopic shed 7, and the air-blocking cloth at the bottom of the electric telescopic shed 7 is equivalent to drooping at its bottom, and has a good deformation ability. It can bend and deform arbitrarily with the extension and contraction of the electric telescopic shed 7, so it can achieve a good sealing effect between the electric telescopic shed 7 and the ground.

[0054] The telescopic shed assembly also includes a spare manual telescopic shed 8. The electric telescopic shed 7 and the manual telescopic shed 8 are arranged between the two frames in sequence, and one end of the manual telescopic shed 8 is fixed to the inner side of the second frame 2. The bottom of the manual telescopic shed 8 is also provided with an air-blocking cloth for forming a seal with the ground. The air-blocking cloth has the same function as the air-blocking cloth at the bottom of the electric telescopic shed 7, which will not be repeated here. When the electric telescopic shed 7 and the manual telescopic shed 8 are in the folded state, they are respectively located on the inner side of the first frame 1 and the inner side of the second frame 2. The function of the electric telescopic shed 7 and the manual telescopic shed 8 is to make the device larger or smaller as a whole, and also to enclose the dust collection space together with the sealing plates 4 on both sides. The electric telescopic shed 7 and the manual telescopic shed 8 are equivalent to a set of electric drive systems and a set of manual drive systems. In actual use, only one of them needs to be used. Under normal circumstances, only the electric telescopic shed 7 is generally used, because its electric control method improves the degree of automation. In the case of power outage in the workshop or when the electric telescopic shed 7 fails, the spare manual telescopic shed 8 can be used.

[0055] It should be noted that a plurality of weighted blocks can be arranged at the bottom of all the above air-isolating cloths in sequence to form a weighted air-isolating cloth, which increases the probability of the air-isolating cloth contacting the ground. It can be tightly combined with various uneven grounds, thereby improving the sealing effect.

[0056] Specifically, the electric telescopic shed 7 includes a first telescopic shed body 701 and an electric telescopic assembly 702, and the manual telescopic shed 8 includes a second telescopic shed body 801. The structures of the first telescopic shed body 701 and the second telescopic shed body 801 are consistent with the shape of the arch beam. The first telescopic shed body 701 and the second telescopic shed body 801 are sequentially arranged between the two frames and are respectively placed on the telescopic rod 6, and one end of the first telescopic shed body 701 and one end of the electric telescopic assembly 702 are respectively connected to the first frame 1, the other end of the electric telescopic assembly 702 is connected to the other end of the first telescopic shed body 701, and one end of the second telescopic shed body 801 is connected to the inner side of the second frame 2. It should be noted that the inner side of the second frame 2 mentioned in this article is close to one side of the first frame 1, and the inner side of the first frame 1 is close to one side of the second frame 2. It should be noted that when one end of the first telescopic shed body 701 is connected to the first frame 1, the two can be fixed by bolt connection; when one end of the second telescopic shed body 801 is connected to the second frame 2, the two can also be fixed by bolt connection.

[0057] When the electric telescopic shed 7 or the manual telescopic shed 8 is extended or retracted, all the telescopic rods 6 will be driven to extend or retract synchronously. The telescopic rods 6 play a guiding role. At the same time, the telescopic rods 6 also play a role of supporting the first shed body and the second shed body. Based on this, two telescopic rods 6 are arranged on both sides of the upper part of the frame to support the first shed body and the second shed body. At the same time, two telescopic rods 6 can also be arranged on both sides of the lower part of the frame to improve the guiding stability and the connection stability between the two frames.

[0058] In a preferred implementation manner of the present embodiment, the first telescopic shed body 701 and the second telescopic shed body 801 have the same structure, size and material, and the telescopic direction of the first telescopic shed body 701 and the second telescopic shed is the same as the telescopic direction of the telescopic rod 6.

[0059] The electric telescopic shed 7 of this embodiment uses an electric telescopic assembly 702 to drive the extension and retraction of the first telescopic shed body 701. The electric telescopic assembly 702 can use an electric push rod, an electric hydraulic rod or a telescopic cylinder. In addition, the first telescopic shed body 701 can also use a hydraulic rod that transmits power and realizes movement by liquid pressure as a drive. It should be noted that the other end of the electric telescopic assembly 702 can be directly connected to the other end of the first telescopic shed body 701, or the first telescopic shed body 701 can be pulled to move by a traction member (a traction member such as a rope or a ring). It should be noted that two or more electric telescopic assemblies 702 can be set for synchronous driving to improve the driving effect.

[0060] In this embodiment, the first telescopic shed body 701, the second telescopic shed body 801 and the arch beam are all in an inverted "U" shape; it should be noted that the upper part of the inverted U shape can be an arc structure or a straight rod structure. The frame as a whole is made of stainless steel round tubes or square tubes. Preferably, the frame in this embodiment is a square frame structure, that is, the upper part of the arch beam is a straight rod structure, and the frame as a whole is made of four square tubes connected end to end and connected to form a frame. The frame is made of stainless steel square tubes and is covered with POM board (polyoxymethylene board). As for the setting of the dust suction port 3, it is mainly set on the inner walls of the three sides of the arch beam.

[0061] U-shaped sealing gaskets are respectively arranged between the first frame 1 and the first telescopic shed body 701 , and between the second frame 2 and the second telescopic shed body 801 , for sealing therebetween.

[0062] A U-shaped sealing pad is provided on one side of the first telescopic shed 701 close to the second telescopic shed 801, and / or a U-shaped sealing pad is provided on one side of the second telescopic shed 801 close to the first telescopic shed 701; that is, at least one of the first telescopic shed 701 and the second telescopic shed 801 is provided with a U-shaped sealing pad, so that the sealing between them is achieved when the device is extended as a whole. Alternatively, a U-shaped magnetic pad is provided on one side of the first telescopic shed 701 close to the second telescopic shed 801 and a U-shaped magnetic pad is provided on one side of the second telescopic shed 801 close to the first telescopic shed 701, respectively, so that when the first telescopic shed 701 and the second telescopic shed 801 are relatively close, the two U-shaped magnetic pads can attract each other to achieve sealing between them. The above Y-shaped sealing pad can also be replaced by a Y-shaped sealing strip. By providing a U-shaped sealing pad or a U-shaped magnetic pad, the sealing effect of the dust suction space inside the device is improved, and the insect-proof effect can also be improved.

[0063] In this embodiment, the walking mechanism 9 includes four groups of walking components, and the four groups of walking components are respectively installed at the four corners of the bottom of the frame; the walking components include a servo motor 91, a coupling 92, a bearing mounting seat 93 and a Mecanum wheel 94, the axle of the Mecanum wheel 94 is mounted on the bearing mounting seat 93 through a bearing, the bearing mounting seat 93 is fixedly mounted on the bottom of the beam, and the output shaft of the servo motor 91 is connected to the axle of the Mecanum wheel 94 through the coupling 92. The Mecanum wheel 94 is designed to be independently driven, with the flexibility of large equipment, and can be moved freely in the workshop. At the same time, the walking mechanism 9 uses the Mecanum wheel 94 to turn around 360° on the spot, and has a strong ability to adapt to deformation, ensuring that the telescopic shed components can be opened and closed smoothly under telescopic errors and various live loads.

[0064] The dust collection unit 5 of this embodiment adopts a fan filter unit (FFU). When the FFU starts working, its exhaust motor runs at high speed, so that the dust collection space inside the device forms a momentary vacuum, and the internal air pressure is much lower than the external air pressure. Under the effect of this air pressure difference, the dust generated when cleaning the lower furnace chamber enters the dust collection port 3 along the air duct with the air flow. When the air flow passes through the FFU, it will be screened for the first time to block inappropriate impurities. The remaining air flow will enter the dust collection bag through the primary filter plate along the guide pipe. Dust and impurities stay in the dust collection bag. After filtering, the gas will enter the shell through the side wall of the dust collection bag and then enter the air outlet through the ventilation net and be discharged from the air outlet. The device can suck all impurities and dust into the device, and dust will no longer enter the air through the gas. The device not only achieves a good cleaning effect, but also ensures an environmental protection effect.

[0065] The device is also equipped with a safety unit, which uses a safety electric eye. A safety electric eye is installed on the outside of the frame to provide anti-collision and emergency stop protection, making the working environment safer and more reliable.

[0066] The opening and closing speed of the electric telescopic shed 7 can be set to: 0.6-2.5 m / sec for opening, 0.8-2.0 m / sec for closing (adjustable).

[0067] The sealing plate 4 is made of a transparent material, such as a transparent acrylic plate. When the sealing plate 4 is made of a transparent material, the sealing plates 4 on both sides form transparent observation windows, which are convenient for operators to observe the inside of the device.

[0068] As a supplementary explanation, the control method of the device is connected to the control center by radar sensing or remote communication connection, and can also be combined with the manual method of a hand-pressed switch (for example, the power on and off of the entire device and the opening and closing of the electric telescopic component 702 are controlled by a hand-pressed switch), which is quick and convenient to use. The walking mechanism 9 is also connected to the control center for remote control.

[0069] Example 2

[0070] The present embodiment provides a single crystal production workshop, comprising a lower furnace chamber and a horizontal furnace platform 10, wherein the furnace platform 10 is disposed on the top of a plurality of the lower furnace chambers, and a furnace opening 11 on the top of the lower furnace chamber is installed in the furnace platform 10, and further comprising the dust removal device for dismantling and cleaning the single crystal furnace, wherein the dust removal device for dismantling and cleaning the single crystal furnace can move to any of the furnace openings 11 on the furnace platform 10 (such as Figure 5 shown).

[0071] The dust removal device is initially in a retracted state (the electric telescopic shed 7 and the manual telescopic shed 8 are in a retracted state (when retracted and smaller, the overall volume of the device can be reduced, saving space). When a lower furnace chamber is dismantled and cleaned, the entire dust removal device can be moved to the furnace mouth 11 on the furnace platform 10 corresponding to the lower furnace chamber through the walking mechanism 9, and the overall device can be expanded and enlarged by extending the electric telescopic shed 7 or the manual telescopic shed 8. When dust removal is required, the entire dust removal device can be moved to the furnace mouth 11 on the top of the single crystal furnace through the walking mechanism 9 and completely cover the furnace mouth 11 on the top of the entire lower furnace chamber. The electric telescopic shed 7 is expanded and enlarged. At the same time, a dust suction space with an opening facing downward is formed between the two sealing plates 4 and the electric telescopic shed 7. The dust suction space is sealed and connected with the furnace mouth 11 on the top of the lower furnace chamber through the action of the air-isolating cloth. When the operator dismantles the furnace for cleaning in the furnace chamber, starting the dust suction unit 5 can uniformly absorb the dust generated in the furnace chamber, and can seal and remove dust at the source. Compared with the prior art, it greatly reduces the manpower and material resources spent, improves the degree of automation, and has a higher degree of cleaning cleanliness.

[0072] The steps for using the dust removal device are:

[0073] 1. Approaching the site: Start the equipment and operate the dust removal device to the work site;

[0074] 2. Parking: Micro-operate the device to completely cover the furnace opening 11 of the entire lower furnace chamber;

[0075] 3. Work: The operator enters the furnace chamber from the reserved small door and starts the dust cleaning work. At the same time, the dust collection unit 5 is turned on and the dust collection starts;

[0076] 4. Transposition: When the next furnace chamber needs to be cleaned, the device is transposed as a whole and moved to the furnace opening 11 of the next furnace chamber, and then the operations of steps 2 and 3 are repeated in sequence;

[0077] 5. Departure: Reset the device and control the device to leave the site.

[0078] This application proposes a leading dust-proof and dust-absorbing method in the industry, realizing the cleaning technology of clean workshop production. This invention technology has the following advantages:

[0079] 1. Automated cleaning: The 5 modules of the dust collection unit provide high-strength suction, and the internal environment forms a low-pressure environment above the lower furnace chamber, so that dust cannot overflow and is sucked away;

[0080] 2. High efficiency: multiple dust suction ports 3 are opened on the frame and connected to the dust suction unit 5, which greatly matches the actual working conditions;

[0081] 3. Comprehensive dustproof: 360° cubic seal to prevent dust;

[0082] 5. Green and environmentally friendly: Using ingenious structural technology, oxides, silicides, etc. are blocked from flowing into the production workshop, improving the cleanliness of the workshop, and also providing production with high-quality and high-yield products.

[0083] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

[0084] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A dust removal device for cleaning a single crystal furnace during dismantling, which is correspondingly arranged at the top furnace opening (11) of the lower furnace chamber of the single crystal furnace, and is characterized in that: include: A frame, comprising two frames arranged opposite to each other, the two frames being a first frame (1) and a second frame (2); the frames comprising a crossbeam at the bottom and an arch beam arranged on the crossbeam, the two ends of the arch beam being respectively connected to the two ends of the crossbeam to form a closed frame, the frame being a hollow structure to form a dust suction chamber, the inner side of the frame being provided with a plurality of dust suction ports (3), and the outer sides of the two frames being respectively provided with sealing plates (4); A dust suction unit (5), wherein a mounting opening is provided on the sealing plate (4), the dust suction unit (5) is mounted on the mounting opening, an air suction port of the dust suction unit (5) is connected to the dust suction chamber, and an air exhaust port of the dust suction unit (5) is connected to the external atmosphere; A telescopic rod (6), wherein the telescopic rod (6) is a hollow structure, and the two frames are connected via a plurality of telescopic rods (6), and the telescopic rod (6) can control the two frames to move closer to or farther from each other; A telescopic shed assembly, comprising an electric telescopic shed (7); the electric telescopic shed (7) is arranged between two frames, and one end of the electric telescopic shed (7) is fixed to the inner side of the first frame (1); after the electric telescopic shed (7) is extended, a dust suction space with an opening facing downward is formed between the two sealing plates (4) and the electric telescopic shed (7), and the opening is a suction port of the dust suction space; A walking mechanism (9), wherein the walking mechanism (9) is installed at the bottom of the crossbeam; The bottom of the crossbeam and the bottom of the electric telescopic shed (7) are respectively provided with air-isolating cloth for forming a seal with the ground.

2. The dust removal device for single crystal furnace dismantling and cleaning according to claim 1 is characterized in that: The telescopic shed assembly also includes a spare manual telescopic shed (8), the electric telescopic shed (7) and the manual telescopic shed (8) are arranged in sequence between the two frames, and one end of the manual telescopic shed (8) is fixed to the inner side of the second frame (2), and the bottom of the manual telescopic shed (8) is also provided with an air-isolating cloth for forming a seal with the ground.

3. The dust removal device for single crystal furnace dismantling and cleaning according to claim 2 is characterized in that: The electric telescopic shed (7) comprises a first telescopic shed body (701) and an electric telescopic assembly (702); the manual telescopic shed (8) comprises a second telescopic shed body (801); the structures of the first telescopic shed body (701) and the second telescopic shed body (801) are consistent with the shape of the arch beam; the first telescopic shed body (701) and the second telescopic shed body (801) are sequentially arranged between the two frames and respectively placed on the telescopic rod (6); one end of the first telescopic shed body (701) and one end of the electric telescopic assembly (702) are respectively connected to the first frame (1); the other end of the electric telescopic assembly (702) is connected to the other end of the first telescopic shed body (701); and one end of the second telescopic shed body (801) is connected to the inner side of the second frame (2).

4. The dust removal device for single crystal furnace dismantling and cleaning according to claim 3 is characterized in that: The first telescopic shed body (701) and the second telescopic shed body (801) have the same structure, and the telescopic direction of the first telescopic shed body (701) and the second telescopic shed body is the same as the telescopic direction of the telescopic rod (6).

5. The dust removal device for single crystal furnace dismantling and cleaning according to claim 3 is characterized in that: The electric telescopic assembly (702) adopts an electric push rod, an electric hydraulic rod or a telescopic cylinder.

6. The dust removal device for single crystal furnace dismantling and cleaning according to claim 4 is characterized in that: The first telescopic shed (701), the second telescopic shed (801) and the arch beam are all in an inverted "U" shape; U-shaped sealing gaskets are respectively arranged between the first frame (1) and the first telescopic shed body (701), and between the second frame (2) and the second telescopic shed body (801); A U-shaped sealing gasket is provided on one side of the first telescopic shed body (701) close to the second telescopic shed body (801), and / or a U-shaped sealing gasket is provided on one side of the second telescopic shed body (801) close to the first telescopic shed body (701); or a U-shaped magnetic pad is provided on one side of the first telescopic shed body (701) close to the second telescopic shed body (801) and on one side of the second telescopic shed body (801) close to the first telescopic shed body (701), respectively.

7. The dust removal device for single crystal furnace dismantling and cleaning according to claim 1, characterized in that: The walking mechanism (9) comprises four groups of walking components, and the four groups of walking components are respectively installed at the four corners of the bottom of the frame; The walking assembly comprises a servo motor (91), a coupling (92), a bearing mounting seat (93) and a Mecanum wheel (94); the wheel axle of the Mecanum wheel (94) is mounted on the bearing mounting seat (93) via a bearing; the bearing mounting seat (93) is fixedly mounted on the bottom of the crossbeam; and the output shaft of the servo motor (91) is connected to the wheel axle of the Mecanum wheel (94) via the coupling (92).

8. The dust removal device for single crystal furnace dismantling and cleaning according to claim 1, characterized in that: The dust collection unit (5) adopts a fan filter unit.

9. The dust removal device for single crystal furnace dismantling and cleaning according to claim 1, characterized in that: The sealing plate (4) is made of a transparent material.

10. A single crystal production workshop, comprising a lower furnace chamber and a horizontal furnace platform (10), wherein the furnace platform (10) is commonly arranged on the top of a plurality of the lower furnace chambers, and a furnace opening (11) on the top of the lower furnace chamber is installed in the furnace platform (10), characterized in that: It also comprises a dust removal device for dismantling and cleaning a single crystal furnace as claimed in any one of claims 1 to 9, wherein the dust removal device for dismantling and cleaning a single crystal furnace can move to any of the furnace openings (11) on the furnace platform (10).

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