Boat structure and reaction furnace

Abstract

The utility model provides a boat structure and a reaction furnace, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that a central area of a sheet-shaped material is sunken and cracked when the sheet-shaped material is processed in the boat structure. The boat structure is used for supporting sheet materials, and comprises a base, an end plate; the first groove rods are connected with the base and the end plate to form a space for containing the sheet materials, each first groove rod comprises first groove teeth, and the first groove teeth are configured to support the edge area of the sheet materials; and the at least one supporting piece is connected with the base and the end plate, the supporting piece comprises second groove teeth, and the second groove teeth are configured to support the central area of the sheet-shaped material. According to the boat structure provided by the invention, the central area of the sheet material can be supported through the supporting sheet, so that the central area of the sheet material is prevented from being sunken or even cracked.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor or photovoltaic material processing, in particular to a boat structure and a reaction furnace. Background Art

[0002] When processing semiconductor or photovoltaic materials, the sheet material (such as silicon wafer) is usually sent to a reaction furnace for processing. The reaction furnace can provide a certain temperature and pressure and introduce process gas to process the sheet material. A boat structure is usually used to load or move the sheet material to be processed, in process or after processing.

[0003] In the related art, the boat structure includes a plurality of groove bars, each of which has a plurality of groove teeth, through which the edge of the sheet material can be supported. However, due to the self-gravity of the sheet material, it is easy to cause the central area of ​​the sheet material to sag or even crack. Utility Model Content

[0004] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a boat structure and a reaction furnace.

[0005] In a first aspect, an embodiment of the present application provides a boat structure for supporting a sheet material, comprising: a base; an end plate; a plurality of first slot bars, the first slot bars connecting the base and the end plate to form a space for accommodating the sheet material, the first slot bars comprising first slot teeth, the first slot teeth being configured to support an edge area of ​​the sheet material; at least one support plate, the support plate connecting the base and the end plate, the support plate comprising second slot teeth, the second slot teeth being configured to support a central area of ​​the sheet material.

[0006] In some embodiments, the support plate also includes a main body, the second groove tooth includes a first tooth segment and a second tooth segment, the first tooth segment connects the main body and the second tooth segment; wherein, in the vertical direction, the size of the second tooth segment is larger than the size of the first tooth segment, and the second tooth segment is used to support the central area of ​​the sheet material.

[0007] In some embodiments, the contact mode between the second tooth segment and the sheet material is point contact, line contact or surface contact; wherein, when the contact mode between the second tooth segment and the sheet material is surface contact, the contact area between the second tooth segment and the sheet material is smaller than a preset area.

[0008] In some embodiments, the boat structure includes at least two supporting plates, and the at least two supporting plates are used to support the central area of ​​the sheet material in different directions.

[0009] In some embodiments, one end of the support piece is detachably connected to the base, and the other end of the support piece is detachably connected to the end plate.

[0010] In some embodiments, the boat structure also includes a boat ear, which connects adjacent first slot rods, and a support plate is at least arranged on the side where the boat ear is located; wherein, the boat ear includes a through slot passing through in a vertical direction, and the support plate is located between adjacent first slot rods and embedded in the through slot.

[0011] In some embodiments, a reinforcement member is further included, wherein the reinforcement member connects the boat ear and the end plate.

[0012] In some embodiments, the boat structure further comprises a second slot bar, the second slot bar connects the base and the end plate, the second slot bar comprises a third slot tooth, and the third slot tooth is configured to support an edge region of the sheet-like processing object.

[0013] In some embodiments, the number of the second slot bars is three, and the three second slot bars are distributed in a triangle.

[0014] In a second aspect, an embodiment of the present application provides a reaction furnace, comprising: a boat structure as described in any one of the first aspects above; a furnace body; a furnace door, wherein the furnace body and the furnace door are closed to form a processing chamber, and the processing chamber is used to accommodate the boat structure and sheet materials.

[0015] The boat structure and reactor provided in the embodiment of the present application, wherein the boat structure is used to support sheet materials, and includes: a base; an end plate; a plurality of first slot rods, the first slot rods connecting the base and the end plate to form a space for accommodating the sheet materials, the first slot rods including first slot teeth, the first slot teeth being configured to support the edge area of ​​the sheet materials; at least one supporting piece, the supporting piece connecting the base and the end plate, the supporting piece including second slot teeth, the second slot teeth being configured to support the central area of ​​the sheet materials. The boat structure provided in the present application can support the central area of ​​the sheet materials through the supporting piece, thereby preventing the central area of ​​the sheet materials from being sunken or even cracked. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 Shown is a schematic structural diagram of a boat structure in the related art.

[0018] Figure 2 Shown is a front view of a boat structure of the related art.

[0019] Figure 3 Shown is a partial enlarged view of a groove tooth in the related art.

[0020] Figure 4Shown is a schematic structural diagram of a boat structure provided by an exemplary embodiment of the present application.

[0021] Figure 5 Shown is a front view of a boat structure provided by an exemplary embodiment of the present application.

[0022] Figure 6 Shown is a partially enlarged view of a first groove tooth provided by an exemplary embodiment of the present application.

[0023] Figure 7 Shown is a schematic structural diagram of a support provided by an exemplary embodiment of the present application.

[0024] Figure 8 Shown is a partially enlarged view of a second tooth provided by an exemplary embodiment of the present application.

[0025] Fig. 9 Shown is a schematic structural diagram of a boat structure (with the support sheet hidden) provided by another exemplary embodiment of the present application.

[0026] Fig.10 Shown is a schematic structural diagram of a reaction furnace provided by an exemplary embodiment of the present application.

[0027] Reference numerals:

[0028] 100, boat structure; 101, slot rod; 1011, slot tooth; 200, boat structure; 201, base; 2011, second fixed slot; 202, end plate; 2021, first fixed slot; 203, first slot rod; 2031, first slot tooth; 204, support plate; 2041, second slot tooth; 20411, first tooth segment; 20412, second tooth segment; 2042, body; 205, boat ear; 2051, through slot; 206, reinforcement; 207, second slot rod; 2071, third slot tooth; 300, reaction furnace; 301, furnace body; 302, furnace door; 400, sheet material. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0030] Application Overview

[0031] See also Figure 1 , which is a schematic diagram of a boat structure in the related art. Figure 2 , which is a front view of a boat structure of the related art. Figure 3 As shown in FIG. , it is a partial enlarged view of the groove teeth of the related art. Figure 1 , Figure 2 and Figure 3 As shown, in the related art, when supporting a sheet material, the sheet material is usually supported by the groove teeth 1011 of a plurality of groove bars 101 in the boat structure 100, but the groove teeth 1011 of the groove bars 101 are relatively short and can only support the edge of the sheet material. In this way, due to the effect of its own gravity, the center area of ​​the sheet material will sag and produce depressions or even hidden cracks, thereby affecting the quality of the sheet material.

[0032] In view of this, the present application provides a boat structure. The boat structure is used to support sheet materials. The boat structure includes: a base; an end plate; a plurality of first slot bars, the first slot bars connect the base and the end plate to form a space for accommodating sheet materials, the first slot bars include first slot teeth, and the first slot teeth are configured to support the edge area of ​​the sheet material; at least one support plate, the support plate connects the base and the end plate, the support plate includes second slot teeth, and the second slot teeth are configured to support the central area of ​​the sheet material. The boat structure provided by the present application can support the central area of ​​the sheet material through the support plate, thereby avoiding depression or even hidden cracks in the central area of ​​the sheet material.

[0033] Exemplary Devices

[0034] See also Figure 4 FIG. 1 is a schematic diagram of a boat structure provided by an exemplary embodiment of the present application, see Figure 5 FIG. 1 is a front view of a boat structure provided by an exemplary embodiment of the present application, see Figure 6 FIG. 1 is a partial enlarged view of a first groove tooth provided by an exemplary embodiment of the present application, see Figure 7 , which is a schematic diagram of the structure of a support sheet provided by an exemplary embodiment of the present application.

[0035] like Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, the boat structure 200 provided in the embodiment of the present application is used to support the sheet material 400, and the boat structure 200 includes: a base 201; an end plate 202; a plurality of first slot bars 203, the first slot bars 203 connecting the base 201 and the end plate 202 to form a space for accommodating the sheet material 400, the first slot bars 203 including first slot teeth 2031, and the first slot teeth 2031 are configured to support the edge area of ​​the sheet material 400; at least one support plate 204, the support plate 204 connecting the base 201 and the end plate 202, the support plate 204 including second slot teeth 2041, and the second slot teeth 2041 are configured to support the central area of ​​the sheet material 400.

[0036] The edge area surrounds the central area, that is, the area within the preset distance range from the edge to the center of the sheet material 400 is the edge area, and the area surrounded by the edge area is the central area. In practical applications, the preset distance can be determined according to the actual situation of the sheet material.

[0037] Specifically, Figure 4 and Figure 5 As shown, the first slot bar 203 is fixed on the base 201. The first slot bar 203 is used to support the end plate 202 and the sheet material 400. Therefore, there is no need to separately set up a structure for supporting the end plate 202 and a structure for supporting the sheet material 400, saving materials and space. The first slot teeth 2031 of the first slot bar 203 can be as shown in FIG. Figure 6 As shown, the first groove teeth 2031 are usually short and are used to support the edge area of ​​the sheet material 400, reducing the contact area between the first groove teeth 2031 and the sheet material 400, making the airflow flowing through the surface of the sheet material 400 more uniform and covering the area required for the reaction of the entire sheet material 400, and reducing the probability of airflow marks and boat tooth marks appearing on the edge of the sheet material 400 during processing, thereby making the thickness of the coating or deposition layer on the sheet material 400 more uniform. The sheet material 400 can be exemplarily a semiconductor material or a photovoltaic material, such as a silicon wafer.

[0038] like Figure 4 and Figure 5 As shown, the second groove teeth 2041 of the support plate 204 are longer than the first groove teeth 2031 of the first groove bar 203. Compared with the first groove teeth 2031, the length of the second groove teeth 2041 can extend to a position closer to the center of the sheet material 400, thereby supporting the central area.

[0039] In some embodiments, any support sheet 204 may be placed at the center of any side edge of the base 201 to better support the center area of ​​the sheet material 400 .

[0040] In some embodiments, in the vertical direction, the overlapping portion of the second groove teeth 2041 and the sheet material 400 can both be used to support the sheet material 400 , that is, the second groove teeth 2041 can support both the edge area and the center area of ​​the sheet material 400 .

[0041] In some embodiments, in the vertical direction, only a part of the overlapped portion of the second groove teeth 2041 and the sheet material 400 is used to support the sheet material 400, that is, the second groove teeth 2041 can only support the central area of ​​the sheet material 400. Exemplarily, the sheet material 400 can be supported only by the ends of the second groove teeth 2041, thereby reducing the contact area between the second groove teeth 2041 and the sheet material 400, and reducing the mark of the second groove teeth 2041 on the contact portion of the sheet material 400 with the second groove teeth 2041.

[0042] In some embodiments, see Figure 8 As shown in FIG. 1 , a partial enlarged view of a second groove tooth provided by an exemplary embodiment of the present application is shown in FIG. Figure 7 and Figure 8 As shown, the support plate 204 also includes a main body 2042, and the second groove tooth 2041 includes a first tooth segment 20411 and a second tooth segment 20412, and the first tooth segment 20411 connects the main body 2042 and the second tooth segment 20412; wherein, in the vertical direction, the size of the second tooth segment 20412 is larger than the size of the first tooth segment 20411, and the second tooth segment 20412 is used to support the central area of ​​the sheet material 400.

[0043] For example, Figure 8 As shown, the second tooth segment 20412 of any second groove tooth 2041 is higher in the vertical direction than the first tooth segment 20411. When the sheet material 400 is placed on the second groove tooth 2041, only the second tooth segment 20412 with a higher height will contact the sheet material 400, thereby supporting the central area of ​​the sheet material 400.

[0044] With this structure, the central area of ​​the sheet material 400 can be supported only by the second tooth segment 20412 , thereby reducing the contact area between the sheet material 400 and the second groove tooth 2041 , thereby reducing the area of ​​the concave mark produced by the second groove tooth 2041 on the sheet material 400 .

[0045] In some embodiments, the contact mode between the second tooth segment 20412 and the sheet material 400 is point contact, line contact or surface contact. Specifically, the shape structure of the contact surface between the second tooth segment 20412 and the sheet material 400 can be set so that the contact mode between the second tooth segment 20412 and the sheet material 400 is point contact, line contact or surface contact. For example, the surface of the second tooth segment 20412 can be a spherical surface, a cylindrical surface, or a horizontal surface, so as to respectively achieve point contact, line contact, and surface contact with the sheet material 400. The contact area between the sheet material 400 and the second groove tooth 2041 can be further reduced through point contact and line contact, thereby reducing the area of ​​the concave mark produced by the second groove tooth 2041 on the sheet material 400.

[0046] In some embodiments, when the contact between the second tooth segment 20412 and the sheet material 400 is surface contact, the contact area between the second tooth segment 20412 and the sheet material 400 is smaller than the preset area. The preset area can be set according to actual conditions. For example, the preset area can be 2-10 mm 2 By controlling the contact area between the second tooth segment 20412 and the sheet material 400 to be smaller than the preset area, the contact area between the sheet material 400 and the second groove teeth 2041 can also be reduced, thereby reducing the area of ​​the concave mark produced by the second groove teeth 2041 on the sheet material 400 .

[0047] In some embodiments, the shape of the base 201 is exemplarily polygonal, circular, elliptical, etc.

[0048] In some embodiments, Figure 4 As shown, the base 201 has a rectangular shape, and the boat structure 200 includes at least four first slot bars 203, any two of the at least four first slot bars 203 are arranged on any side edge of the base 201, and the other two of the at least four first slot bars 203 are arranged on the side edge opposite to the side edge. By respectively arranging at least two first slot bars 203 on two opposite side edges, the end plate 202 can be stably supported, and the sheet material 400 can be stably supported.

[0049] In some embodiments, Figure 4 As shown, the boat structure 200 includes at least two supporting pieces 204, and the at least two supporting pieces 204 are used to support the central area of ​​the sheet material 400 in different directions.

[0050] In some embodiments, the base 201 is circular in shape, and the boat structure 200 includes two supporting plates 204. The angle between the two supporting plates 204 and the center line of the circular base 201 is 90 degrees, that is, the two supporting plates 204 support the central area of ​​the sheet material 400 in directions 90 degrees apart.

[0051] In some embodiments, Figure 4 As shown, the base 201 has a rectangular shape, and the boat structure 200 includes at least two supporting pieces 204, any one of the at least two supporting pieces 204 is disposed on a first side of the base 201, and another one of the at least two supporting pieces 204 is disposed on a second side of the base 201, and the second side is adjacent to the first side. By arranging the supporting pieces 204 on two adjacent sides, the central area of ​​the sheet material 400 can be supported from two directions, and the sheet material 400 can be taken and placed on the other two sides where the supporting pieces 204 are not placed, or on the sides where the supporting pieces 204 and the first groove rod 203 are not placed.

[0052] In some embodiments, when the outer shape of the base 201 is rectangular, at least one support piece 204 can be placed on any one side, or any three sides, or all sides of the base 201 to support the central area of the sheet material 400. The more sides the support piece 204 is placed on, the better the support effect on the central area of the sheet material 400.

[0053] In some embodiments, the above-mentioned rectangle can be a solid rectangle or a hollow rectangle. For example, Figure 4 as shown, the base 201 of the hollow rectangle can be exemplary in the shape of a double-square.

[0054] In a specific example, as Figure 4 shown, the outer shape of the base 201 is rectangular. One support piece 204 can be provided on the first side, and two first groove bars 203 can be provided on both sides of the support piece. One support piece 204 can be provided on the second side adjacent to the first side, and two first groove bars 203 can be provided on the third side opposite to the first side.

[0055] In some embodiments, one end of the support piece 204 is detachably connected to the base 201, and the other end of the support piece 204 is detachably connected to the end plate 202.

[0056] In some embodiments, as Figure 4 shown, the end plate 202 includes a first fixing groove 2021, and the base 201 includes a second fixing groove 2011. The support piece 204 is embedded in the first fixing groove 2021 and the second fixing groove 2011. By grooving on the base 201 and the end plate 202 and embedding the support piece 204, the support piece 204 can be firmly fixed without adding new components, and the support piece 204 can be detachably connected to the base 201 and the end plate 202 by grooving, which is convenient for detaching the support piece 204.

[0057] In some embodiments, the support piece 204 can also be fixedly connected to the base 201 and the end plate 202 by welding or by means of a connecting piece.

[0058] In some embodiments, as Figure 4 and Figure 5As shown, the boat structure 200 further includes a boat ear 205, the boat ear 205 is connected to the adjacent first slot rods 203, and the support piece 204 is at least arranged on the side where the boat ear 205 is located, wherein the boat ear 205 includes a through slot 2051 penetrating along the vertical direction, and the support piece 204 is located between the adjacent first slot rods 203 and embedded in the through slot 2051. Specifically, the boat ear 205 is used for carrying the boat structure 200 when it is manually carried, that is, the boat ear 205 is a carrying handle of the boat structure 200, and since the position of the support piece 204 and the position of the boat ear 205 may overlap, a through slot 2051 can be opened on the boat ear to embed the support piece 204, and the support piece 204 can be fixed more firmly through this structure.

[0059] Since the end plate 202 may become concave after long-term use, in some embodiments, such as Figure 4 and Figure 5 As shown, the boat structure 200 further includes a reinforcement member 206 , which connects the boat ear 205 and the end plate 202 . The reinforcement member 206 is used to provide tension to the end plate 202 , thereby preventing the end plate 202 from deforming.

[0060] In a specific example, if Figure 4 As shown, the reinforcement member 206 is used to connect the boat ear 205 and the edge area of ​​the end plate 202.

[0061] In some embodiments, the cross-section of the reinforcement member 206 includes a circular shape. For example, the reinforcement member 206 may be a cylindrical rod to facilitate processing.

[0062] In some embodiments, see Fig. 9 As shown, it is a schematic diagram of the structure of a boat structure (without the support sheet) provided by an exemplary embodiment of the present application, as shown Fig. 9 As shown, the boat structure 200 further includes a second slot bar 207, the second slot bar 207 connects the base 201 and the end plate 202, and the second slot bar 207 includes a third slot tooth 2071, and the third slot tooth 2071 is configured to support the sheet-like processing object 400 and to assist in supporting the sheet-like material 400. That is, the second slot bar 207 is provided on the basis of the edge area of ​​the sheet-like material 400 supported by the first slot bar 203, so as to increase the support position and support area of ​​the sheet-like material 400 and reduce the probability of deformation and depression of the sheet-like material 400.

[0063] In some embodiments, the second groove bars 207 may be used to support the edge regions of the sheet material 400 , thereby enhancing the ability of the boat structure 200 to support the edge regions of the sheet material 400 .

[0064] In some embodiments, there are three second slot bars 207, which are distributed in a triangle. By distributing the three second slot bars 207 in a triangle, the sheet material 400 can be supported at three points by utilizing the triangle stability principle, thereby stably supporting the sheet material 400.

[0065] In a specific example, if Fig. 9 As shown, the base 201 is rectangular, and three second slot rods 207 are respectively disposed on three sides of the base 201 .

[0066] In a specific example, if Fig. 9 As shown, two first slot bars 203 are respectively provided on two opposite sides of the base 201, two of the three second slot bars 207 can be respectively provided between the two first slot bars 203, another of the three second slot bars 207 can be provided on another side other than the two opposite sides, and more specifically, each second slot bar 207 can be provided at the center point of the side.

[0067] Here, the second groove bars 207 are respectively arranged on the three sides of the base 201, and when the support sheet 204 and the first groove bars 203 are not placed on the other side except the three sides, the sheet material 400 can be taken and placed on the other side.

[0068] The boat structure 200 provided in the embodiment of the present application is used to support the sheet material 400, and includes: a base 201; an end plate 202; a plurality of first slot bars 203, the first slot bars 203 connecting the base 201 and the end plate 202 to form a space for accommodating the sheet material 400, the first slot bars 203 including first slot teeth 2031, the first slot teeth 2031 being configured to support the edge area of ​​the sheet material 400; at least one supporting piece 204, the supporting piece 204 connecting the base 201 and the end plate 202, the supporting piece 204 including second slot teeth 2041, the second slot teeth 2041 being configured to support the central area of ​​the sheet material 400. The boat structure 200 provided in the present application can support the central area of ​​the sheet material 400 through the supporting piece 204, thereby preventing the central area of ​​the sheet material 400 from being sunken or even cracked.

[0069] Based on the same concept, the embodiment of the present application also provides a reaction furnace 300. Fig.10 As shown, Fig.10 The schematic diagram of the structure of the reactor provided by an exemplary embodiment of the present application is shown in FIG. Fig.10 As shown, the reaction furnace 300 comprises: the boat structure 200 as described in the above embodiment, a furnace body 301 and a furnace door 302. The furnace body 301 and the furnace door 302 are closed to form a processing chamber, which is used to accommodate the boat structure 200 and the sheet material 400.

[0070] The reaction furnace 300 may be a diffusion furnace, a vertical reaction furnace or a horizontal reaction furnace, or, for example, a low pressure chemical vapor deposition (LPCVD) device.

[0071] Since the boat structure 200 in the reaction furnace 300 can support the central area of ​​the sheet material 400 and prevent the central area of ​​the sheet material 400 from sagging, sinking, or cracking, the process quality of the sheet material 400 can be improved by processing the sheet material 400 in the reaction furnace 300.

[0072] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0073] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0074] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0075] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0076] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A boat structure, characterized in that: Used to support sheet materials, the boat structure includes: Base; End plate; a plurality of first slot bars, the first slot bars connecting the base and the end plate to form a space for accommodating the sheet material, the first slot bars comprising first slot teeth, the first slot teeth being configured to support an edge area of ​​the sheet material; At least one support piece is connected to the base and the end plate, and the support piece includes a second groove tooth, and the second groove tooth is configured to support the central area of ​​the sheet material.

2. The boat structure according to claim 1, characterized in that: The support piece further comprises a body, the second groove teeth comprise a first tooth segment and a second tooth segment, and the first tooth segment connects the body and the second tooth segment; Wherein, in the vertical direction, the size of the second tooth segment is larger than that of the first tooth segment, and the second tooth segment is used to support the central area of ​​the sheet material.

3. The boat structure according to claim 2, characterized in that: The contact mode between the second tooth segment and the sheet material is point contact, line contact or surface contact; Wherein, when the contact mode between the second tooth segment and the sheet material is surface contact, the contact area between the second tooth segment and the sheet material is smaller than a preset area.

4. The boat structure according to claim 1, characterized in that: The boat structure includes at least two supporting plates, and the at least two supporting plates are used to support the central area of ​​the sheet material in different directions.

5. The boat structure according to any one of claims 1 to 4, characterized in that: One end of the support piece is detachably connected to the base, and the other end of the support piece is detachably connected to the end plate.

6. The boat structure according to any one of claims 1 to 4, characterized in that: The boat structure further includes a boat ear, the boat ear is connected to the adjacent first slot rods, and the support piece is at least arranged on the side where the boat ear is located; Wherein, the boat ear comprises a through slot penetrating in a vertical direction, and the supporting piece is located between adjacent first slot rods and embedded in the through slot.

7. The boat structure according to claim 6, characterized in that: A reinforcement member is also included, wherein the reinforcement member connects the boat ear and the end plate.

8. The boat structure according to any one of claims 1 to 4, characterized in that: The boat structure further includes a second slot bar connecting the base and the end plate, the second slot bar including a third slot tooth configured to support an edge region of the sheet material.

9. The boat structure according to claim 8, characterized in that: The number of the second slot bars is three, and the three second slot bars are distributed in a triangle shape.

10. A reaction furnace, characterized in that: include: The boat structure as claimed in any one of claims 1 to 9; Furnace body; A furnace door is provided. When the furnace body and the furnace door are closed, a processing chamber is formed. The processing chamber is used to accommodate the boat structure and the sheet material.

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