Feeding support clamping jaw

Abstract

The utility model discloses a feeding support clamping jaw, which comprises a clamping jaw main body and a material support, the clamping jaw main body comprises two clamping jaw arms and a cylinder, the two clamping jaw arms slide relatively, the cylinder drives the clamping jaw arms to move linearly, the clamping jaw arms are provided with a compression cylinder, the compression cylinder is provided with a telescopic pressure head, the material support is provided with a side baffle and a slope bottom support, and silicon wafers are stacked on the slope bottom support. According to the utility model, the clamping jaw main body and the upper transfer mechanical arm are assembled, the clamping jaw arm is driven by the clamping jaw driving air cylinder to grab the material support, and meanwhile, the telescopic pressure head is driven by the pressing air cylinder to press the material support on the jaw head, so that the material support with silicon wafers is grabbed and transferred, and the silicon wafers are more stable in the transfer process; the device can cooperate with an upper transfer mechanical arm, is compatible with automatic equipment of each station in the whole process, and improves the transfer safety and efficiency of silicon wafers.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafers and semiconductor processing equipment, in particular to a material loading support clamping claw. Background Art

[0002] As a good conductive material, silicon wafers can be widely used in semiconductor, solar cell and other technical fields. The later processing of silicon wafers generally includes chamfering, cleaning, drying and other steps.

[0003] In the processing technology of the prior art, when performing multiple processing steps such as positioning detection, chamfering, cleaning and drying on silicon wafers one by one, it is necessary to transfer the silicon wafers between two stations through a transfer mechanism.

[0004] The existing transfer equipment uses a clamping device to clamp the tray containing silicon wafers to complete the transfer. The existing clamping device is not compatible enough and cannot adapt to the trays of different stations. It is necessary to design corresponding clamping mechanisms for trays of different specifications.

[0005] Secondly, the structure of the material tray is relatively complex, and a positioning mechanism is provided to limit the silicon wafers to prevent them from falling. The positioning mechanism is required when taking and placing the silicon wafers, which reduces the transfer efficiency.

[0006] Therefore, we propose a material support clamp. In order to match the tilted state of the material support in its carrying water tank and the comprehensive working conditions such as carrying and positioning, this new type of clamp structure is designed to meet the material support grabbing and taking actions under special working conditions. Utility Model Content

[0007] The purpose of the utility model is to provide a material loading support clamping claw to solve the problems raised in the above background technology.

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a material loading support clamp, comprising: a clamp body and a material support, the clamp body comprising two relatively sliding clamp arms and a cylinder driving the clamp arms to move linearly;

[0009] The clamping claw arm is provided with a clamping cylinder, and the clamping cylinder is provided with a telescopic pressure head;

[0010] The material tray is provided with a side baffle and an inclined bottom tray, and the silicon wafers are stacked on the inclined bottom tray.

[0011] Preferably, the clamp body comprises an upper platen and a lower platen, the upper platen and the lower platen are fixedly connected, and a slide groove is provided on the lower platen.

[0012] Preferably, an I-shaped slide rail is fixedly installed on the lower surface of the upper platform, a lifting slider is symmetrically slidable on the I-shaped slide rail, a kit is fixedly installed on the lower surface of the slider, and a clamping claw arm is fixedly installed on the lower surface of the kit.

[0013] Preferably, a claw head is fixedly mounted on the lower end of the clamping claw arm.

[0014] Preferably, two clamping jaw driving cylinders are fixedly mounted on the lower surface of the upper platform, and the clamping jaw driving cylinders drive the slide block to slide along the I-shaped slide rail.

[0015] Preferably, a detection rod passes through the upper platen and the lower platen.

[0016] Preferably, claw holes are provided on both sides of the material tray, and the claw holes are plug-fitted with the claw heads.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] 1. Assemble the main body of the gripper with the upper transfer robot arm, and drive the gripper arm through the gripper drive cylinder to grab the tray. At the same time, the pressing cylinder drives the telescopic pressure head to press the tray on the claw head, thereby realizing the grabbing and transportation of the tray with silicon wafers, making the transportation process of silicon wafers more stable. It can cooperate with the upper transfer robot arm and be compatible with the automation equipment of each station throughout the process, thereby improving the transportation safety and efficiency of silicon wafers;

[0019] 2. The material tray is equipped with side baffles and an inclined bottom tray. The side baffles and the inclined bottom tray cooperate to complete the storage of silicon wafers. No positioning mechanism is required. It is very convenient to take and place silicon wafers, and transportation is also safer. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the utility model;

[0021] Figure 2 It is a rear view of the utility model;

[0022] Figure 3 It is a side view of the utility model.

[0023] In the figure: 1. jaw body; 11. upper plate; 111. I-shaped slide rail; 12. lower plate; 13. jaw driving cylinder; 14. clamping cylinder; 141. telescopic pressure head; 15. jaw arm; 151. jaw head; 16. slider; 17. kit; 18. detection rod; 2. material support; 21. jaw hole; 22. inclined bottom support; 23. side baffle. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-3 The utility model provides a technical solution: a material support clamp, comprising: a clamp body 1 and a material support 2, the clamp body 1 comprising an upper platen 11 and a lower platen 12, the upper platen 11 and the lower platen 12 are fixedly connected, and a slide groove is provided on the lower platen 12;

[0026] An I-shaped slide rail 111 is fixedly installed on the lower surface of the upper platform 11, and a lifting slider 16 is symmetrically slidably mounted on the I-shaped slide rail 111. A kit 17 is fixedly installed on the lower surface of the slider 16, and a clamping claw arm 15 is fixedly installed on the lower surface of the kit 17. A claw head 151 is fixedly installed on the lower end of the clamping claw arm 15;

[0027] Two clamping claw driving cylinders 13 are also fixedly installed on the lower surface of the upper platen 11. The clamping claw driving cylinder 13 drives the slider 16 to slide along the I-shaped slide rail 111, so that the kit 17 drives the two clamping claw arms 15 to move closer or farther away, thereby making the claw head 151 grab the material tray 2, which is convenient for the transportation of the material tray 2;

[0028] A clamping cylinder 14 is fixedly installed on the inner wall of the clamping claw arm 15. The clamping cylinder 14 is provided with a telescopic pressing head 141. The telescopic pressing head 141 presses the upper surface of the material tray 2 to further tighten the material tray 2 and the claw head 151.

[0029] A detection rod 18 is provided between the upper platen 11 and the lower platen 12;

[0030] Claw holes 21 are provided on both sides of the material tray 2, and the claw holes 21 are plugged and matched with the claw heads 151 to enable the claw heads 151 to grab the material tray 2;

[0031] The material tray 2 is provided with a side baffle 23 and an inclined bottom tray 22, and the side baffle 23 and the inclined bottom tray 22 cooperate to complete the storage of the silicon wafers.

[0032] Working principle: Assemble the clamp body 1 with the upper transfer robot arm, and drive the clamp arm 15 through the clamp drive cylinder 13 to complete the grabbing of the tray 2. At the same time, the pressing cylinder 14 drives the telescopic pressure head 141 to press the tray 2 onto the claw head 151, thereby realizing the grabbing and transportation of the tray 2 containing silicon wafers, making the transportation process of silicon wafers more stable. It can cooperate with the upper transfer robot arm and is fully compatible with automated equipment to improve the transportation safety and efficiency of silicon wafers.

[0033] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0034] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A feeding support clamp, comprising: A clamping jaw body (1) and a material tray (2), characterized in that: the clamping jaw body (1) comprises two relatively sliding clamping jaw arms (15) and a cylinder for driving the clamping jaw arms (15) to move linearly; The clamping claw arm (15) is provided with a clamping cylinder (14), and the clamping cylinder (14) is provided with a telescopic pressure head (141); The material tray (2) is provided with a side baffle (23) and an inclined bottom tray (22), and the silicon wafers are stacked on the inclined bottom tray (22).

2. A material loading support clamp according to claim 1, characterized in that: The clamp body (1) further comprises an upper platen (11) and a lower platen (12); the upper platen (11) and the lower platen (12) are fixedly connected, and a slide groove is provided on the lower platen (12).

3. A material loading support clamp according to claim 2, characterized in that: An I-shaped slide rail (111) is fixedly mounted on the lower surface of the upper platform (11), a sliding block (16) is symmetrically slidably mounted on the I-shaped slide rail (111), a kit (17) is fixedly mounted on the lower surface of the sliding block (16), and a clamping claw arm (15) is fixedly mounted on the lower surface of the kit (17).

4. A material loading support clamp according to claim 3, characterized in that: A claw head (151) is fixedly mounted on the lower end of the clamping claw arm (15).

5. The material loading support clamp according to claim 2, characterized in that: Two clamping jaw driving cylinders (13) are also fixedly mounted on the lower surface of the upper platform (11), and the clamping jaw driving cylinders (13) drive the slide block (16) to slide along the I-shaped slide rail (111).

6. The material loading support clamp according to claim 2, characterized in that: A detection rod (18) passes through the upper platform (11) and the lower platform (12).

7. The material loading support clamp according to claim 1, characterized in that: The two side surfaces of the material tray (2) are provided with claw holes (21), and the claw holes (21) are plug-fitted with the claw heads (151).

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