Wafer production transfer equipment

Abstract

The utility model relates to the field of wafer conveying equipment, in particular to wafer production and transfer equipment which comprises a case, a mechanical arm is arranged in the case, a storage table is arranged on the outer side of the case, and the mechanical arm is used for carrying wafers to the storage table for temporary storage; and a positioning assembly is additionally arranged at the top of the storage table and is used for positioning the wafer on the storage table. The objective of the utility model is to ensure that after the mechanical arm carries the wafers to the storage table, the stacked wafers can be placed in order, and the adjacent wafers do not have the problems of position disorder and the like, thereby facilitating the subsequent overall transfer of the stacked wafers.

Description

Technical Field

[0001] The present application relates to the field of wafer conveying equipment, and in particular to a device for wafer production and transportation. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polysilicon is dissolved and mixed with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After the silicon crystal rod is ground, polished, and sliced, it forms a silicon wafer. After the wafer is processed, the wafer needs to be transferred. Specifically, when transferring the wafer, the robotic arm moves the processed wafer to the corresponding storage table for stacking and temporary storage.

[0003] In the related art, when the robotic arm transports the wafers to the corresponding storage table for temporary storage, the stacked wafers often have inconsistent stacking positions, and adjacent wafers are misplaced, tilted, and missing. This requires the staff to re-regulate the positions of the stacked wafers every time, which is not conducive to the subsequent transmission of the entire wafer on the storage table. Utility Model Content

[0004] The present application provides a device for wafer production and transfer, the purpose of which is to ensure that after a robotic arm moves the wafers to a storage table, the stacked wafers can be placed neatly, and there is no problem of position confusion between adjacent wafers, thereby facilitating the subsequent overall transfer of the stacked wafers.

[0005] The present application provides a wafer production and transfer device, which adopts the following technical solution:

[0006] A wafer production and transportation device,

[0007] It includes a chassis, a mechanical arm is arranged inside the chassis, a material storage table is arranged outside the chassis, and the mechanical arm is used to move the wafers to the material storage table for temporary storage;

[0008] A positioning component is provided on the top of the material storage table, and the positioning component is used to position the wafers on the material storage table.

[0009] By adopting the above technical solution, the positioning component can be used to regularize the position of the wafers on the storage table, effectively preventing problems such as the disordered placement of the wafers on the storage table, which is beneficial to the subsequent transportation of the stacked wafers.

[0010] Preferably, the positioning assembly includes a plurality of positioning columns, the plurality of positioning columns are evenly distributed on the top of the storage table, and the plurality of positioning columns are all in contact with the circumferential side of the wafer, and the plurality of positioning columns are used to clamp and position the wafer.

[0011] By adopting the above technical solution, after the wafer is transferred to the storage table by the robot, the wafer is embedded between multiple positioning pillars, and the position of the wafer is positioned using multiple positioning pillars, thereby effectively preventing problems such as the wafer being placed incorrectly on the storage table.

[0012] Preferably, a plurality of the positioning posts are distributed in a triangular shape on the top of the storage platform.

[0013] By adopting the above technical solution, when the wafer is embedded between these positioning pillars, the triangular positioning pillars can evenly press the periphery of the wafer, which is beneficial to ensure the stability of the wafer placed on the storage table.

[0014] Preferably, the positioning column is slidably installed on the top of the storage platform along the horizontal direction.

[0015] By adopting the above technical solution, the positioning column is slidably installed on the top of the storage table, so that the position of the positioning column on the storage table can be adjusted, thereby realizing that the positioning component can position wafers of different specifications and sizes, which is conducive to improving the adaptability of the positioning component.

[0016] Preferably, the top of the material storage platform is sunken with multiple groups of plug holes, the multiple groups of plug holes are distributed in a triangular shape, and the multiple groups of plug holes correspond to the multiple groups of positioning columns one by one;

[0017] An insertion rod matched with the insertion hole is integrally formed at the bottom of the positioning column along the vertical direction, and the positioning column is inserted into the corresponding insertion hole through the insertion rod.

[0018] By adopting the above technical solution, when the position of the positioning column on the material storage table needs to be adjusted, the positioning column is pulled out from the socket, and then the insertion rod is plugged into the corresponding socket, which is very convenient.

[0019] Preferably, a mounting base is fixed in the chassis along the vertical direction, a driving member is fastened in the mounting base along the vertical direction, a rotating motor is installed on the top of the driving member along the vertical direction, and the mechanical arm is connected to the driving end of the rotating motor.

[0020] By adopting the above technical solution, when transferring wafers, the staff will place the wafers on the robotic arm from the side wall of the chassis, and then the robotic arm will turn to the storage table under the rotation of the rotating motor, and place the wafer on the storage table and position it through the positioning component. The specific height of the robotic arm is adjusted according to the height of the stacked wafers on the storage table under the drive of the driving member. Then, the driving member and the rotating motor are used to drive the robotic arm to rotate and rise and fall in the chassis, so as to realize the robotic arm to transport the wafers.

[0021] Preferably, the driving member is a cylinder, the cylinder body of the cylinder is fastened in the mounting seat along the vertical direction by fastening bolts, and the piston rod of the cylinder is vertically upward and connected to the bottom of the rotating motor.

[0022] By adopting the above technical solution and using the cylinder as the driving part, the material is generally easy to find, and it is convenient to replace the worn parts.

[0023] Preferably, a plurality of protective doors are installed on the side wall of the chassis, and the plurality of protective doors correspond one-to-one to the plurality of material storage tables.

[0024] By adopting the above technical solution, the protective door is used to seal the inside of the chassis, thereby effectively protecting the robot arm and internal parts inside the chassis. A cylinder is installed inside the chassis at a position relative to the protective door. When the robot arm moves the wafer to the protective door, the cylinder is used to pull up the corresponding protective door, and then the robot arm passes through the protective door to place the wafer on the corresponding storage table.

[0025] In summary, the present application includes at least one of the following beneficial technical effects:

[0026] 1. The positioning component can be used to regularize the position of the wafers on the storage table, effectively preventing problems such as the disorder of the wafers on the storage table, which is conducive to the subsequent transportation of the stacked wafers;

[0027] 2. The positioning column is slidably installed on the top of the storage table, so that the position of the positioning column on the storage table can be adjusted, thereby realizing that the positioning component can position wafers of different specifications and sizes, which is conducive to improving the adaptability of the positioning component;

[0028] 3. When the position of the positioning column on the storage table needs to be adjusted, pull the positioning column out of the socket, and then plug the plug rod into the corresponding socket, which is very convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the overall structure of the embodiment of the present application;

[0030] Figure 2 It is a structural schematic diagram of an embodiment of the present application specifically showing the positional relationship between the mechanical arm, the mounting base and the driving member;

[0031] Figure 3 yes Figure 1 The enlarged schematic diagram of point A in the middle;

[0032] Figure 4 It is a structural schematic diagram of an embodiment of the present application specifically showing the position relationship of the insertion rod.

[0033] Figure numerals: In the figure, 1, chassis; 2, mechanical arm; 3, storage table; 4, positioning column; 5, socket; 6, plug rod; 7, mounting seat; 8, driving part; 9, protective door. DETAILED DESCRIPTION

[0034] The following is combined with Figure 1 -Attached Figure 4 , further details of this application are given.

[0035] Example:

[0036] The present application embodiment discloses a wafer production and transportation device, referring to Figure 1 and Figure 2 , including a rectangular parallelepiped chassis 1, the chassis 1 is hollow inside, a mechanical arm 2 is arranged inside the chassis 1, a material storage table 3 is installed outside the chassis 1, and the mechanical arm 2 is used to move the wafers to the material storage table 3 outside the chassis 1 for temporary storage. At the same time, a positioning component is added on the top of the material storage table 3, and the positioning component is used to effectively position the wafers on the material storage table 3, and then the position of the wafers on the material storage table 3 can be regularized through the positioning component, effectively preventing the wafers on the material storage table 3 from being placed in disorder, and thus facilitating the subsequent transportation of the stacked wafers.

[0037] In this embodiment, a plurality of material storage tables 3 are provided, and the plurality of material storage tables 3 are evenly distributed to the outside of the chassis 1 . The plurality of material storage tables 3 can be used to further increase the number of wafers temporarily stored at the same time.

[0038] Specifically, refer to Figure 1 and Figure 2 A columnar mounting seat 7 is welded in the chassis 1 along the vertical direction. The mounting seat 7 is hollow inside. A driving member 8 is fastened in the mounting seat 7 along the vertical direction by fastening bolts. A rotating motor is installed on the top of the driving member 8 along the vertical direction. The robot arm 2 is connected to the driving end of the rotating motor.

[0039] Specifically, when transferring wafers, the staff places the wafers on the robot arm 2 from the side wall of the chassis 1, and then the robot arm 2 turns to the storage table 3 under the rotation of the rotating motor, and places the wafers on the storage table 3 for positioning through the positioning component. The specific height of the robot arm 2 is adjusted according to the height of the stacked wafers on the storage table 3 under the drive of the driving member 8. Then, the driving member 8 and the rotating motor drive the robot arm 2 to rotate and rise and fall in the chassis 1, so that the robot arm 2 can transport the wafers.

[0040] In this embodiment, the driving member 8 is a cylinder, the cylinder body of which is fastened in the mounting seat 7 by fastening bolts in the vertical direction, and the piston rod of the cylinder is vertically connected to the bottom of the rotating motor. The cylinder is used as the driving member 8, and the material is common and easy to find, so it is easy to replace the worn parts.

[0041] Further, refer to Figure 1 and Figure 2 The side wall of the chassis 1 is equipped with multiple protective doors 9, which are arranged vertically. The multiple protective doors 9 correspond to the multiple material storage tables 3 one by one. The protective doors 9 are used to seal the inside of the chassis 1, thereby effectively protecting the robot arm 2 and internal parts inside the chassis 1. A cylinder is installed inside the chassis 1 at a position relative to the protective door 9. When the robot arm 2 moves the wafer to the protective door 9, the corresponding protective door 9 is pulled up by the cylinder, and then the robot arm 2 passes through the protective door 9 to place the wafer on the corresponding material storage table 3.

[0042] Reference Figure 1 and Figure 3 The positioning component includes a plurality of positioning columns 4, which are vertically arranged and evenly distributed on the top of the storage table 3. After the wafer is transferred to the storage table 3 by the robot, the wafer is embedded between the plurality of positioning columns 4, and the plurality of positioning columns 4 are used to locate the position of the wafer, thereby effectively preventing the occurrence of problems such as the wafers on the storage table 3 being placed in disorder.

[0043] In this embodiment, there are three positioning posts 4 on the storage table 3, and the three positioning posts 4 are distributed in a triangular shape on the top of the storage table 3. This enables the three triangular positioning posts 4 to evenly tighten the periphery of the wafer when the wafer is embedded between these positioning posts 4, thereby facilitating the stability of the wafer placed on the storage table 3.

[0044] Furthermore, the positioning column 4 is slidably installed on the top of the storage platform 3 along the horizontal direction.

[0045] The positioning column 4 is slidably installed on the top of the storage table 3, so that the position of the positioning column 4 on the storage table 3 can be adjusted, thereby realizing that the positioning component can position wafers of different specifications and sizes, which is conducive to improving the adaptability of the positioning component.

[0046] Specifically, refer to Figure 1 , Figure 3 as well as Figure 4 The top of the material storage platform 3 is sunken with three groups of jacks 5, each group of jacks 5 is composed of a plurality of circular through holes, and the three groups of jacks 5 are also distributed in a triangular shape, and the three groups of jacks 5 correspond to the three positioning columns 4. The bottom of the positioning column 4 is integrally formed with a plug rod 6 adapted to the jack 5 along the vertical direction, and the positioning column 4 is installed on the material storage platform 3 by plugging the plug rod 6 into the corresponding jack 5.

[0047] When the position of the positioning column 4 on the material storage platform 3 needs to be adjusted, the positioning column 4 is pulled out from the insertion hole 5, and then the insertion rod 6 is inserted into the corresponding insertion hole 5, which is very convenient.

[0048] The implementation principle of a wafer production and transfer device in the embodiment of the present application is as follows:

[0049] Specifically, when transferring wafers, the staff places the wafers on the robot arm 2 from the side wall of the chassis 1, and then the robot arm 2 turns to the storage table 3 under the rotation of the rotating motor, and places the wafers on the storage table 3 for positioning through the positioning component. The specific height of the robot arm 2 is adjusted according to the height of the stacked wafers on the storage table 3 under the drive of the driving member 8. Then, the driving member 8 and the rotating motor drive the robot arm 2 to rotate and rise and fall in the chassis 1, so that the robot arm 2 can transport the wafers.

[0050] A positioning component is added to the top of the storage table 3, and the positioning component is used to effectively position the wafers on the storage table 3. The positioning component can then regularize the positions of the wafers on the storage table 3, effectively preventing problems such as the wafers on the storage table 3 being placed in disorder, which is facilitating the subsequent transportation of the stacked wafers.

[0051] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A wafer production and transportation device, Features: It comprises a chassis (1), wherein a mechanical arm (2) is provided inside the chassis (1), and a material storage platform (3) is provided outside the chassis (1), and the mechanical arm (2) is used to transport wafers to the material storage platform (3) for temporary storage; A positioning component is provided on the top of the material storage table (3), and the positioning component is used to position the wafers on the material storage table (3).

2. The wafer production and transportation device according to claim 1, Features: The positioning assembly comprises a plurality of positioning columns (4), the plurality of positioning columns (4) being evenly distributed at intervals on the top of the material storage platform (3), and the plurality of positioning columns (4) all abutting against the peripheral side of the wafer, and the plurality of positioning columns (4) being used to clamp and position the wafer.

3. The wafer production and transportation device according to claim 2, Features: The plurality of positioning columns (4) are distributed in a triangular shape on the top of the material storage platform (3).

4. The wafer production and transportation device according to claim 3, Features: The positioning column (4) is slidably mounted on the top of the material storage platform (3) in a horizontal direction.

5. The wafer production and transportation device according to claim 4, Features: The top of the material storage platform (3) is recessed with a plurality of groups of insertion holes (5), the plurality of groups of insertion holes (5) are distributed in a triangular shape, and the plurality of groups of insertion holes (5) correspond one to one with the plurality of groups of positioning columns (4); An insertion rod (6) adapted to the insertion hole (5) is integrally formed at the bottom of the positioning column (4) along the vertical direction, and the positioning column (4) is inserted into the corresponding insertion hole (5) via the insertion rod (6).

6. The wafer production and transportation device according to claim 1, Features: A mounting seat (7) is fixed in the chassis (1) in the vertical direction, a driving member (8) is fastened in the mounting seat (7) in the vertical direction, a rotating motor is mounted on the top of the driving member (8) in the vertical direction, and the mechanical arm (2) is connected to the driving end of the rotating motor.

7. The wafer production and transportation device according to claim 6, Features: The driving member (8) is a cylinder, the cylinder body of which is fastened in the mounting seat (7) in a vertical direction by means of fastening bolts, and the piston rod of the cylinder is vertically upwardly connected to the bottom of the rotating motor.

8. The wafer production and transportation device according to claim 1, Features: A plurality of protective doors (9) are installed on the side wall of the chassis (1), and the plurality of protective doors (9) correspond one-to-one to the plurality of material storage tables (3).

Images