Automatic testing and adjusting device for temperature of aging oven

Abstract

The utility model discloses an aging oven temperature automatic testing and adjusting device. The device comprises a nitrogen glove box; the aging ovens are symmetrically arranged in the nitrogen glove box, the interiors of the aging ovens are divided into a plurality of baking process cavities through a plurality of parallel interlayers, and a temperature measuring device containing cavity is further formed in one aging oven; the mechanical arm is arranged in the middle of the interior of the nitrogen glove box, is located between the symmetrically-arranged aging ovens and is used for conveying the temperature measuring component between the temperature measuring device placement layer and the baking process cavities and conveying the glass substrates; the temperature measuring component is placed in the temperature measuring device placing cavity; and the data processing controller is connected with the heating element of the process layer, the mechanical arm and the temperature measuring component through a bus. The aging oven temperature automatic testing and adjusting device of the utility model can realize testing duration control and automatically adjust and optimize the temperature, reduces the error probability of manual adjustment, and improves the testing efficiency.

Description

Technical Field

[0001] The utility model relates to an automatic temperature testing and adjusting device, in particular to an automatic temperature testing and adjusting device for an aging furnace. Background Art

[0002] In the manufacturing industry of new organic light-emitting diodes (OLED), thin-film encapsulation (TFE) is required to prevent the light-emitting materials or devices from being invaded by water and oxygen, which would cause poor product reliability. The encapsulation layer is mainly composed of an inorganic film layer and an organic film layer, in which the organic film layer is made by inkjet printing and curing processes. After the ink is cured, there is a small amount of uncured material and other by-products. In order to prevent internal leakage from causing poor packaging, most of the excess material needs to be removed through a high-temperature aging furnace.

[0003] The interior of the high-temperature aging furnace is a nitrogen environment, and the process glass substrate is baked mainly through infrared heating and thermal radiation. In order to increase production capacity, the existing aging furnace has multiple layers of independent baking space (more than 40 layers) and each layer is temperature-controlled by multiple temperature-controlled areas. With the increase of usage time, in order to ensure the uniformity of the temperature of the heated glass substrate, to ensure that the removal capacity of excess substances on each screen on the substrate (20 to 150 screens are printed on each substrate) is close, to prevent the temperature from being too high to affect the efficiency of the lower display device, and the temperature from being too low to cause the by-products and other excess substances to not be removed, etc., each layer temperature test needs to be performed regularly.

[0004] At present, the testing method is mainly carried out by manually operating the robotic arm and manually adjusting the temperature. This is a repetitive and tedious operation, which is prone to problems such as inconsistent temperature measurement time, damage to the temperature measurement substrate due to misoperation, incorrect temperature adjustment, too long overall temperature measurement time, and personnel safety.

[0005] Therefore, there is an urgent need for an automatic temperature testing and adjustment device for an aging furnace to solve the above problems. Summary of the invention

[0006] The utility model aims to provide an automatic temperature test and adjustment device for an aging furnace, which can realize test duration control and automatically adjust the optimized temperature, reduce the probability of manual adjustment errors, and improve test efficiency.

[0007] In order to achieve the above-mentioned purpose, the utility model provides an automatic temperature testing and adjustment device for an aging furnace, the device comprising: a nitrogen glove box; an aging furnace, which is symmetrically arranged in the nitrogen glove box, and the interior of the aging furnace is divided into a plurality of baking process chambers by a plurality of parallel partitions, wherein a temperature measuring device placement chamber is also provided in one of the aging furnaces, the temperature measuring device placement chamber is located below the baking process chamber, the temperature measuring device placement chamber is used to place a temperature measuring component, and the bottom of each baking process chamber is placed with: a process layer, the process layer is used to place a glass substrate to be baked and has a heating function; a mechanical arm, which is arranged in the middle of the nitrogen glove box and is located between the symmetrically arranged aging furnaces, and is used to transfer the temperature measuring component between the temperature measuring device placement layer and a plurality of baking process chambers and to transfer the glass substrates; a temperature measuring component, which is placed in the temperature measuring device placement chamber and is used to measure the temperature in the baking process chamber; and a data processing controller, which is connected to the heating element, the mechanical arm and the temperature measuring component of the process layer through a bus.

[0008] Among them, the temperature measuring component includes: a temperature measuring substrate; thermocouples, which are distributed on the temperature measuring substrate; a temperature reader, whose terminals are connected to the thermocouples through temperature measuring lines, and is used to read the temperature data tested by the thermocouples; and a wireless transmitter, which is connected to the temperature reader and the data processing controller through a bus, and is used to wirelessly transmit the temperature data collected by the temperature reader to the data processing controller.

[0009] Preferably, the process layer comprises: a plurality of support modules 1 and heating modules; wherein the plurality of heating modules are fixedly connected together and placed on the partition of the baking process chamber, and the process layer is divided into a plurality of heating areas according to the number of the heating modules, and the heating modules provide heat as heat sources; the support module 1 is fixed on the upper surface of the heating module, and the support module 1 is used to support the glass substrate to be baked.

[0010] Preferably, the heating module comprises: a heating rod and a fixing plate; wherein the heating rod is fixed in the fixing plate.

[0011] Preferably, the support module 1 includes: a guide rail fixing block 1, which is fixed on the upper surface of the heating module; a support rail 1, whose lower surface is in contact with the guide rail fixing block 1; a support column 1, whose bottom is fixed on the upper surface of the support rail 1, for supporting the glass substrate to be baked; and a fixing bolt 1, which is used to fix the guide rail fixing block 1 and the support rail 1.

[0012] Preferably, the upper surface of the temperature measuring device placement layer is fixedly provided with: a plurality of supporting modules 2, and the supporting modules 2 are used to support the temperature measuring components.

[0013] Preferably, the support module 2 includes: a guide rail fixing block 2, which is fixed on the upper surface of the temperature measuring device placement layer; a support rail 2, whose lower surface is in contact with the guide rail fixing block 2; a support column 2, whose bottom is fixed on the upper surface of the support rail 2, for supporting the temperature measuring component; and a fixing bolt 2, which is used to fix the guide rail fixing block 2 and the support rail 2.

[0014] Preferably, the temperature measuring substrate is provided with: a fixing groove, and the temperature measuring wire is connected to the terminal of the temperature reader after being integrated and wrapped by the cluster soft shell through the internal channel of the fixing groove.

[0015] The automatic temperature test and adjustment device for the aging furnace of the utility model has the following advantages:

[0016] (1) The automatic temperature test and adjustment device for the aging furnace of the utility model can realize automatic temperature measurement. There is no need to open the nitrogen glove box and manually operate the mechanical arm to transfer the temperature-measured substrate after replacing the environment, thereby reducing the risk of personnel safety and damage to the warm substrate.

[0017] (2) The automatic temperature test and adjustment device for the aging furnace of the utility model can realize the test time control and automatically adjust the optimized temperature, thereby reducing the probability of human adjustment errors and improving the test efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the automatic temperature testing and adjusting device of the aging furnace of the utility model.

[0019] Figure 2 It is a structural schematic diagram of the process layer of the utility model.

[0020] Figure 3 It is a structural schematic diagram of the heating module of the utility model.

[0021] Figure 4 It is a structural schematic diagram of the support module of the utility model.

[0022] Figure 5 It is a structural schematic diagram of the temperature measuring component of the utility model.

[0023] Figure 6 The utility model is a test flow diagram of the automatic test and adjustment device for the temperature of an aging furnace.

[0024] Figure 7 This is a temperature curve diagram obtained by testing the device of the utility model.

[0025] Figure 8 The output temperature curves before and after adjustment obtained by testing the device of the utility model are shown. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] Example 1

[0028] An automatic temperature test and adjustment device for an aging furnace, such as Figure 1 As shown, the device comprises: a nitrogen glove box 100, an aging furnace 200, a robot arm 300, a temperature measuring component 400, and a data processing controller 500. The aging furnace 200, the robot arm 300 and the temperature measuring component 400 are all arranged in the nitrogen glove box 100, and the data processing controller 500 is connected to the temperature measuring component 400, the heating element of the aging furnace 200 and the robot arm 300 through a bus.

[0029] Two aging furnaces 200 are symmetrically fixed in the nitrogen glove box 100. The interior of the aging furnace 200 is divided into several baking process chambers by several parallel partitions. A temperature measuring device placement chamber is also provided in one of the aging furnaces 200. The temperature measuring device placement chamber is located below the baking process chamber. The bottom of each baking process chamber is provided with: a process layer 110, the process layer 110 is used to place the glass substrate to be baked, and the temperature measuring device placement chamber is provided with: a temperature measuring device placement layer 120, the temperature measuring device placement layer 120 is used to place the temperature measuring component 400. The robot arm 300 is fixed in the middle of the nitrogen glove box 100 and is located between the two aging furnaces 200. The robot arm 300 executes the command of the data processing controller 500 to transfer the temperature measuring component 400 between the baking process chamber and the temperature measuring device placement chamber and to transfer the glass substrate.

[0030] Specifically, the robot arm 300 is purchased from SANKYO, model: SR9173.

[0031] like Figure 2 As shown, the process layer 110 comprises: a plurality of support modules 111 and heating modules 112. The plurality of heating modules 112 are fixedly connected together and placed on the interlayer of the baking process chamber. The process layer 110 is divided into a plurality of heating areas according to the number of heating modules 112. The heating modules 112 provide heat as a heat source. The support module 111 is fixed on the upper surface of the heating module 112. The support module 111 is used to support the glass substrate to be baked.

[0032] A plurality of supporting modules 2 are fixedly disposed on the upper surface of the temperature measuring device placement layer 120 , and the supporting modules 2 are used to support the temperature measuring component 400 .

[0033] like Figure 3 As shown, specifically, the heating module 112 is composed of a heating rod 1121 and a fixing plate 1122 , and a plurality of heating rods 1121 are arranged in parallel in the fixing plate 1122 .

[0034] like Figure 4 As shown, specifically, the support module 111 includes: a guide rail fixing block 1111, a support rail 1112, a support column 1113 and a fixing bolt 1114. The guide rail fixing block 1111 is fixed (via screws) on the upper surface of the heating module 112, the lower surface of the support rail 1112 is fitted with the guide rail fixing block 1111 and connected via a fixing bolt 1114, the bottom of the support column 1113 is fixed (via threaded connection) on the upper surface of the support rail 1112, and the support column 1113 is used to support the glass substrate to be baked. The support module 2 includes: a support column 2, a support rail 2, a fixing bolt 2 and a guide rail fixing block 2. Among them, the guide rail fixing block 2 is fixed (by screws) on the upper surface of the temperature measuring device placement layer 120, the lower surface of the support guide rail 2 is in contact with the guide rail fixing block 2 and is connected by the fixing bolt 2, the bottom of the support column 2 is fixed (by threads) on the upper surface of the support guide rail 2, and the support column 2 is used to support the temperature measuring component 400.

[0035] like Figure 5 As shown, the temperature measuring component 400 includes: a temperature measuring substrate 410, a thermocouple 420, a temperature reader 430, a wireless transmitter 440 and a temperature measuring line. Among them, the thermocouples 420 are distributed on the temperature measuring substrate 410, and are fixed according to the number of heating modules 112, ensuring that there are several (4 can be set) thermocouples 420 evenly distributed directly above each heating module 112, the thermocouples 420 are connected to the terminals of the temperature reader 430 through the temperature measuring line, the temperature reader 430 is connected to the wireless transmitter through a bus, and the wireless transmitter is connected to the data processing controller 500 through a bus. The temperature reader 430 reads the test point data of each thermocouple 420, and transmits the data to the data processing controller 500 through the wireless transmitter 440 to realize wireless data transmission.

[0036] Specifically, the temperature measuring substrate 410 is provided with a fixing groove 450 , and the temperature measuring wire passes through the internal channel of the fixing groove 450 and is integrated and wrapped by the cluster soft shell 460 and then connected to the terminal of the temperature reader 430 .

[0037] Specifically, the temperature reader 430 is purchased from YOKOGAWA, model: SMARTDAC+GP10. The thermocouple 420 is purchased from OMEGA, model: CO1-KB. The wireless transmitter 440 is purchased from TP-LINK, model: TL-TR906. The data processing controller 500 is purchased from North Ying Electronics, model: BYBox controller.

[0038] The use method of the automatic test and adjustment device for the temperature of the aging furnace of the utility model (see Figure 6 ), as follows:

[0039] S1, start the data processing controller 500 when in use;

[0040] S2, the data processing controller 500 controls the robot arm 300 to take out the temperature measuring component 400 from the temperature measuring device placement layer 120 and transfer it to the baking process chamber to be tested for temperature testing;

[0041] S3, 10 minutes later, the temperature reader 430 collects temperature data of 20 points (5 heating modules 112, each heating module 112 corresponds to 4 thermocouples) and transmits the collected temperature data to the data processing controller 500 via the wireless transmitter 440, and the data processing controller 500 processes the temperature data and compares the temperature data with the reference temperature in the reference database to obtain the difference Δ, Δ=test point temperature-reference temperature;

[0042] S4-1, if the absolute value of the difference Δ is less than or equal to 3 degrees Celsius, the robot arm 300 transfers the temperature measuring component 400 to the next baking process chamber to be measured;

[0043] S4-2, if the absolute value of the difference Δ is greater than 3 degrees Celsius, the data processing controller 500 controls the heating rod 1121 in the heating module 112 to adjust the temperature, controls the robot arm 300 to wait for 10 minutes and then transfer the temperature measuring device to the adjusted baking process chamber for temperature testing, and then performs S4-1 operation;

[0044] S5. After all the baking process chamber temperature tests are completed, if S4-2 is not executed, the temperature curve is output (see Figure 7 ), if S4-2 is executed, the output temperature curve before and after adjustment will be output (see Figure 8 );

[0045] S6. Automatic control temperature measurement ends.

[0046] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.

Claims

1. An automatic temperature test and adjustment device for an aging furnace, characterized in that: The device contains: Nitrogen glove box (100); An aging furnace (200) is symmetrically arranged in the nitrogen glove box (100), and its interior is divided into a plurality of baking process chambers by a plurality of parallel partitions, wherein a temperature measuring device placement chamber is further provided inside one of the aging furnaces (200), wherein the temperature measuring device placement chamber is located below the baking process chamber, and the temperature measuring device placement chamber is used to place a temperature measuring component, and the bottom of each baking process chamber is provided with: a process layer (110), wherein the process layer (110) is used to place a glass substrate to be baked and has a heating function; A robot arm (300) is arranged in the middle of the nitrogen glove box (100) and between the symmetrically arranged aging furnaces (200), and is used to transfer the temperature measuring component (400) between the temperature measuring device placement layer (120) and a plurality of baking process chambers, and to transfer the glass substrate; A temperature measuring component (400) is placed in the temperature measuring device placement chamber and is used to measure the temperature in the baking process chamber; as well as A data processing controller (500) connected to the heating element of the process layer (110), the robot arm (300) and the temperature measuring component (400) via a bus; Wherein, the temperature measuring component (400) comprises: A temperature measuring substrate (410); Thermocouples (420) distributed on the temperature measuring substrate (410); A temperature reader (430), whose terminals are connected to the thermocouple (420) via a temperature measuring line, and is used to read temperature data tested by the thermocouple; as well as A wireless transmitter (440) is connected to the temperature reader (430) and the data processing controller (500) via a bus, and is used to wirelessly transmit the temperature data collected by the temperature reader (430) to the data processing controller (500).

2. The automatic temperature test and adjustment device for an aging furnace according to claim 1, characterized in that: The process layer (110) comprises: a plurality of support modules (111) and a heating module (112); A plurality of heating modules (112) are fixedly connected together and placed on the partition of the baking process chamber, and the process layer (110) is divided into a plurality of heating areas according to the number of the heating modules (112). The heating modules (112) serve as heat sources to provide heat; and the support module one (111) is fixed on the upper surface of the heating module (112), and the support module one (111) is used to support a glass substrate to be baked.

3. The automatic temperature test and adjustment device for an aging furnace according to claim 2, characterized in that: The heating module (112) comprises: a heating rod (1121) and a fixing plate (1122); wherein the heating rod (1121) is fixed inside the fixing plate (1122).

4. The automatic temperature test and adjustment device for an aging furnace according to claim 2, characterized in that: The support module 1 (111) comprises: A guide rail fixing block (1111) fixed on the upper surface of the heating module (112); A support guide rail 1 (1112), the lower surface of which is in contact with the guide rail fixing block 1 (1111); A support column 1 (1113), the bottom of which is fixed on the upper surface of the support rail 1 (1112), and is used to support the glass substrate to be baked; and A fixing bolt (1114) is used to fix the guide rail fixing block (1111) and the supporting guide rail (1112).

5. The aging furnace temperature automatic test and adjustment device according to claim 1 is characterized in that: The upper surface of the temperature measuring device placement layer is fixedly provided with: a plurality of supporting modules 2, and the supporting modules 2 are used to support the temperature measuring components.

6. The automatic temperature test and adjustment device for an aging furnace according to claim 5, characterized in that: The supporting module 2 comprises: A second guide rail fixing block, which is fixed on the upper surface of the temperature measuring device placement layer (120); A second supporting guide rail, the lower surface of which is in contact with the second guide rail fixing block; A second support column, the bottom of which is fixed to the upper surface of the second support rail, and is used to support the temperature measuring component; and The second fixing bolt is used to fix the second guide rail fixing block and the second supporting guide rail.

7. The automatic temperature test and adjustment device for an aging furnace according to any one of claims 1 to 6, characterized in that: The temperature measuring substrate (410) is provided with a fixing groove (450), and the temperature measuring wire is connected to the terminal of the temperature reader (430) after being integrally wrapped by the cluster soft shell (460) through the internal channel of the fixing groove (450).

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