Evaporation source evaporation device

Abstract

The utility model discloses an evaporation device with an evaporation source in the technical field of evaporation, which comprises an evaporation seat, a crucible, a flip cylinder, a storage tank and a suction device, the crucible is arranged in the evaporation seat, an evaporation box is closed and blocked at a top opening of the crucible, a cover plate is covered at the top opening of the evaporation box through the flip cylinder in a turnover opening manner, and the storage tank is arranged in the storage tank. An air suction pipe is arranged on the front side of the top of the cover plate, the air suction pipe communicates with the interior of the storage tank through a suction hose, the evaporation box can be opened or closed through the cover plate, meanwhile, organic material steam which is not subjected to evaporation is sucked through a corresponding vacuum pump and can be reused, loss is reduced, the replacement frequency of the cover plate is reduced, and the production efficiency is improved. The sealing performance of evaporation materials in the crucible is improved, the chance of mutual influence of evaporation steam is effectively reduced, excessive material scales of the evaporation steam cannot be accumulated on the cover plate, and the possibility that evaporation holes are blocked can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation, in particular to an evaporation source evaporation device. Background Art

[0002] In the production process of the organic light-emitting film layer of the display panel, vacuum evaporation technology is the mainstream technology in its preparation process.

[0003] The vacuum evaporation process heats a crucible through an evaporation source to evaporate the organic material, so that it is deposited on the substrate to form the OLED light-emitting layer in sequence. Some display panels need to evaporate a variety of different organic materials, so the evaporation process is carried out layer by layer, so it is necessary to evaporate in sequence according to the process sequence. Generally, during the evaporation process, multiple crucibles are placed in an evaporation source cavity to heat the organic material to generate steam, so as to evaporate different materials on the actual panel.

[0004] In the evaporation process of different types of materials, when one material is being evaporated, the crucibles of other materials need to be covered to prevent the vapor of the material from overflowing and thus preventing mixed deposition. For the evaporation of different materials, it is necessary to evaporate the vapor on different crucibles in turn, and at the same time, the vapor overflow openings on the top of other crucibles need to be covered to complete the evaporation coating of different functional layer materials.

[0005] At present, the evaporation source baffle is basically made of metal, which is covered above the nozzle of the evaporation source crucible, and the vapor is blocked and adsorbed by the baffle. During the use of the baffle, as time goes by, too much evaporation material will be deposited on the shielding surface of the baffle to form particles, and after a long time, block scale will be formed, which needs to be replaced. The baffle itself needs to be replaced about once a week, but due to the different types of evaporation materials, the adhesion of the materials is different, and the attachment position is uneven, which will cause the scale particles of the evaporation material attached to the baffle to fall off during the shielding movement of the baffle when the baffle is opened or closed. This kind of granular or block scale will cause the steam hole of the crucible to be blocked, and will also fall around to cause too many dust particles in the cavity. If it falls into the evaporation source of other materials, it will cause mixed pollution of the evaporation material. During the evaporation process, if the evaporation rate of the organic material to be evaporated is large, it will cause more vapor to overflow from the crucible. If the baffle area is not large enough, it is easy for the baffle to block and adsorb the material incompletely, and some materials will overflow to cause cross evaporation, affecting the film performance and evaporation effect. These abnormal conditions will cause excessive dust particles in the crucible cavity environment, causing the display panel screen to appear dark or bright, reducing the service life of the display panel, low product yield, and causing color mixing, color deviation and other defects on the display screen, as well as poor device performance.

[0006] Based on this, the utility model designs an evaporation source evaporation device to solve the above problems. Utility Model Content

[0007] The utility model aims to provide an evaporation source evaporation device, which can be turned up and down above the evaporation device by a cover plate to open or close the evaporation box. When the material in the crucible is not undergoing evaporation, the corresponding baffle is pushed and moved to the top of the crucible for covering. At the same time, the organic material vapor that has not been evaporated is absorbed by the corresponding vacuum pump, and is cooled and stored in a solid state so that it can be reused, thereby reducing loss. Moreover, it is no longer just adsorbed by the cover plate above the crucible, but is used in combination with the vacuum cover plate, thereby reducing the replacement frequency of the cover plate, increasing the sealing of the evaporation material inside the crucible, and effectively reducing the probability of overflow of the evaporation vapor, and effectively reducing the chance of mutual influence of the evaporation vapor. Excessive material scale of the evaporation vapor will not accumulate on the cover plate, which can reduce the possibility of the evaporation hole being blocked.

[0008] The utility model is implemented as follows: an evaporation source evaporation device, comprising:

[0009] Evaporation base, crucible, cover plate, storage tank and suction device;

[0010] The evaporation seat is a stably supported base, a placement groove is provided on the top of the evaporation seat, and a heating device is provided in the inner cavity of the placement groove;

[0011] The crucible is a closed rectangular structure, an evaporation nozzle is arranged on the top of the crucible, a crucible is detachably arranged inside the placement groove, an evaporation box is arranged above the crucible, and the evaporation box is sealed and blocked at the top opening of the crucible;

[0012] The evaporation box is also a closed box body, the top of the evaporation box is open, the evaporation nozzle is inserted from below into the bottom of the inner cavity of the evaporation box, and partitions are also arranged on the left and right sides of the evaporation box, and the vertical gap between the evaporation box and the partition is an isolation chamber;

[0013] The cover plate is a flat plate, a cover plate is arranged outside the evaporation box, an air intake pipe is arranged on the front side of the top of the cover plate, the pipe opening of the air intake pipe extends into the bottom surface of the cover plate, and a rotating shaft is arranged on the rear side of the top of the cover plate;

[0014] A flip cylinder and a lifting cylinder are respectively arranged on the front and rear sides of the evaporation seat, and the flip cylinder and the lifting cylinder are both rotatably connected to the evaporation seat, and the outside of the rotating shaft and the air intake pipe are respectively rotatably connected to a separate lifting cylinder, and the lifting cylinders are also rotatably connected to a flip cylinder;

[0015] The cover plate can be lifted by a lifting cylinder and vertically placed in the isolation chamber, and the cover plate can be flipped open by a flip cylinder and closed at the top opening of the vapor deposition box;

[0016] The outer end of the air suction pipe is connected to a suction hose, the suction hose is communicated with the interior of the storage tank, and the interior of the storage tank is connected to a suction device.

[0017] Furthermore, the bottom of the partition is connected to the bottom of the evaporation box to form an integral structure;

[0018] Each evaporation box is connected to a crucible at the bottom thereof to form a complete closed chamber;

[0019] A plurality of placement grooves are provided on the top of the evaporation seat, a crucible is arranged in each of the placement grooves, a evaporation box is arranged on the top of each crucible, a cover plate is arranged on the top of each evaporation box, a flip cylinder and a lifting cylinder are connected to the front and rear sides of each cover plate, a separate air intake pipe is arranged on each cover plate, and each air intake pipe is connected to a separate storage tank.

[0020] Furthermore, the heating device inside the placement groove is an electric heating wire, and the inner wall of the placement groove is evenly covered with the electric heating wire.

[0021] Furthermore, a vertical avoidance groove is provided on each of the front and rear sides of the evaporation seat, and the fixed end of each lifting cylinder is rotatably arranged in the avoidance groove through a rotating shaft, and the rotating shaft of the fixed end of each lifting cylinder is horizontally arranged along the front-to-back direction;

[0022] The telescopic end of the lifting cylinder is a circular ring, and the circular ring of the lifting cylinder is rotatably connected to the rotating shaft or the suction pipe;

[0023] The fixed end of the lifting cylinder is rotatably mounted on the evaporation seat, and a plurality of the lifting cylinders are respectively arranged in the avoidance grooves on the front and rear sides of the evaporation seat;

[0024] The fixed end of each lifting cylinder is rotatably connected to the telescopic end of a flip cylinder through a hinge support, and the fixed end of the flip cylinder is rotatably mounted on the evaporation seat through a rotating shaft, and the plurality of flip cylinders are also respectively arranged in the avoidance grooves on the front and rear sides of the evaporation seat;

[0025] The telescopic paths of each of the flip cover cylinders on the same side and the lifting cylinders on the same side are arranged in the same vertical plane without conflicting with each other.

[0026] Furthermore, the top of the vapor deposition box is flat, the bottom of the cover plate is flat, and the vapor deposition box and the bottom of the cover plate can be detachably fitted and sealed.

[0027] The beneficial effects of the utility model are as follows: 1. The utility model controls the cover plate to flip and rise above the evaporation device to open or close the evaporation box. When the material in the crucible is not being evaporated, the corresponding baffle is pushed and moved to the top of the unoperated crucible to cover it, so as to avoid the evaporation and mixing of different evaporation vapors, thereby making the vapor for evaporating the organic material on the display panel purer;

[0028] 2. The inside of the covered crucible of the device is sealed by a vapor deposition box, and the vapor deposition box is covered by a cover plate. The cover plate can not only prevent the organic material vapor from overflowing upward, but also absorb the temporarily unused vapor through the suction pipe connected to the cover plate, and store the vapor deposition vapor of the organic material to avoid waste. This method of absorbing the organic material vapor can reduce the amount of organic material attached to the cover plate, and can also effectively reduce the amount of vapor scaling, effectively prevent the scaling of organic materials from falling and clogging the evaporation holes, so that the crucible can maintain a normal operating state, so that the device can continue to operate, and will not be affected by other vapor deposition vapors, can always keep the crucible in an operating state, and can keep the vapor deposition vapors in adjacent crucibles from affecting each other;

[0029] 3. The device covers the evaporation box with a cover plate, and the suction pipe is opened or closed with the cover plate flipped, thereby preventing organic materials from staying in the suction pipe and ensuring that the suction pipe is not scaled and passes. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The present invention will be further described below in conjunction with the embodiments with reference to the accompanying drawings.

[0031] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0032] Figure 2 It is a schematic diagram of the side structure of the utility model;

[0033] Figure 3 It is a schematic diagram of the front structure of the evaporation seat, evaporation box and the interior of the crucible of the utility model;

[0034] Figure 4 It is a half-section schematic diagram of the evaporation box and crucible structure of the utility model;

[0035] Figure 5 This is a schematic diagram of the structure of the evaporation seat of the utility model;

[0036] Figure 6 This is a schematic diagram of the structure of the evaporation box of the utility model;

[0037] Figure 7 This is a schematic diagram of the bottom structure of the cover plate of the utility model;

[0038] Figure 8This is a front structural diagram of the cooperation between the flip cylinder and the lifting cylinder of the utility model.

[0039] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0040] 1-evaporation seat, 11-placement groove, 12-avoidance groove, 2-evaporation box, 21-isolation chamber, 22-partition, 23-crucible, 24-evaporation hole, 3-cover plate, 31-suction pipe, 32-flip cylinder, 33-lifting cylinder, 34-rotating shaft, 4-storage tank, 41-suction device, 42-suction hose. DETAILED DESCRIPTION

[0041] See also Figures 1 to 8 As shown, the utility model provides an evaporation source evaporation device. In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods of the specification.

[0042] In a specific embodiment of the technical solution of the utility model:

[0043] It includes an evaporation seat 1, a crucible 23, a cover plate 3, a storage tank 4 and a suction device 41;

[0044] The evaporation seat 1 is a base for stable support. A placement groove 11 is provided on the top of the evaporation seat 1. A heating device is provided in the inner cavity of the placement groove 11. The heating device inside the placement groove 11 is an electric heating wire. The inner wall of the placement groove 11 is evenly covered with electric heating wires. The inner wall of the placement groove 11 is heated by the electric heating wire, so that the crucible 23 is heated more evenly, ensuring that the crucible 23 placed therein can be completely heated, so that the organic material inside the crucible 23 is effectively heated to produce steam. Moreover, because the inside of the placement groove 11 is heated, it will not affect the cover plate outside the crucible 23, so that only the crucible 23 is heated, while the cover plate 3 stored on one side is not heated. Moreover, the cover plate 3 also needs to be a heat-resistant material, and the air intake pipe 31 also needs to be a heat-resistant material.

[0045] The crucible 23 is a closed rectangular structure, and a plurality of evaporation nozzles 24 are arranged on the top of the crucible 23. The crucible 23 is connected to the outside through the evaporation nozzles 24 for evaporation. A crucible 23 is detachably arranged inside a placement groove 11, and an evaporation box 2 is arranged above the crucible 23. The evaporation box 2 is sealed and blocked at the top opening of the crucible 23.

[0046] The evaporation box 2 is also a closed box body with an opening at the top. Each evaporation nozzle 24 is inserted from below into the bottom of the inner cavity of the evaporation box 2. When inserting, the evaporation nozzle 24 should be relatively tight with the evaporation box 2 to prevent the evaporation vapor from overflowing. The evaporation nozzle 24 is a commonly used opening, but it goes deep into the evaporation box 2. Partitions 22 are also arranged on the left and right sides of the evaporation box 2. The partitions 22 are used to isolate and insulate the evaporation box 2. They can not only keep the evaporation box 2 warm, but also isolate the cover plate 3. The vertical gap between the evaporation box 2 and the partition 22 is an isolation chamber 21; the top of the evaporation box 2 is flat, and the bottom of the cover plate 3 is flat. The evaporation box 2 and the bottom of the cover plate 3 can be separated and sealed.

[0047] The bottom of the partition 22 is connected to the bottom of the evaporation box 2 to form an integral structure;

[0048] Each evaporation box 2 is connected to a crucible 23 at the bottom thereof to form a complete closed cavity;

[0049] A plurality of placement grooves 11 are provided on the top of the evaporation seat 1, a crucible 23 is arranged in each placement groove 11, a vapor deposition box 2 is arranged on the top of each crucible 23, a cover plate 3 is arranged on the top of each vapor deposition box 2, and a flip cylinder 32 and a lifting cylinder 33 are connected to the front and rear sides of each cover plate 3, and each cover plate 3 has a separate air intake pipe 31, and each air intake pipe 31 is connected to a separate storage tank 4.

[0050] There are three vapor deposition boxes 2 in the present device, which can be connected in a row to form an integral structure or be arranged separately. However, no matter whether the three vapor deposition boxes 2 are in a separate state or three are connected in a row to form an integral structure, each vapor deposition box 2 has an isolation chamber 21 on the side. The isolation chamber 21 is not only used for heat insulation, but also can be used to store the cover plate 3. When the cover plate 3 is received therein, half of the side of the cover plate 3 will be received in the isolation chamber 21, and the side with the air intake pipe 31 and the rotating shaft 34 cannot be received therein because of its thickness. Therefore, when each cover plate 3 is received in the isolation chamber 21, a small section will be exposed on the outside. Of course, the isolation chamber 21 can also be appropriately widened so that the entire cover plate 3 can be retracted into the isolation chamber 21.

[0051] The cover plate 3 is a flat plate. A cover plate 3 is disposed outside the vapor deposition box 2. An air intake pipe 31 is disposed on the front side of the top of the cover plate 3. The mouth of the air intake pipe 31 extends into the bottom surface of the cover plate 3. A rotating shaft 34 is disposed on the rear side of the top of the cover plate 3.

[0052] A flip cylinder 32 and a lifting cylinder 33 are respectively arranged on the front and rear sides of the evaporation seat 1. The flip cylinder 32 and the lifting cylinder 33 are both rotatably connected to the evaporation seat 1. The rotating shaft 34 and the outside of the air intake pipe 31 are respectively rotatably connected to a separate lifting cylinder 33. The lifting cylinders 33 are also rotatably connected to a flip cylinder 32.

[0053] The cover plate 3 can be lifted by the lifting cylinder 33 and vertically placed in the isolation chamber 21. The cover plate 3 can be flipped open by the flip cylinder 32 to cover the top opening of the evaporation box 2; a vertical avoidance groove 12 is respectively provided on the front and rear sides of the evaporation seat 1, and the fixed end of each lifting cylinder 33 can be rotatably placed in the avoidance groove 12 through a rotating shaft, and the fixed end rotating shaft of each lifting cylinder 33 is horizontally arranged along the front and rear direction;

[0054] The telescopic end of the lifting cylinder 33 is a circular ring, and the circular ring of the lifting cylinder 33 is rotatably connected to the rotating shaft 34 or the suction pipe 31;

[0055] The fixed end of the lifting cylinder 33 is rotatably mounted on the evaporation seat 1, and a plurality of lifting cylinders 33 are respectively arranged in the avoidance grooves 12 on the front and rear sides of the evaporation seat 1;

[0056] The fixed end of each lifting cylinder 33 is also rotatably connected to the telescopic end of a flip cylinder 32 through a hinge support, and the fixed end of the flip cylinder 32 is also rotatably mounted on the evaporation seat 1 through a rotating shaft, and multiple flip cylinders 32 are also respectively arranged in the avoidance grooves 12 on the front and rear sides of the evaporation seat 1;

[0057] The telescopic paths of each flip cover cylinder 32 and the lifting cylinder 33 on the same side are arranged in the same vertical plane without conflicting with each other.

[0058] Such a structure enables each cover plate 3 to be lifted or flipped by the lifting cylinder 33 and the flip cylinder 32 on its front and rear sides, so that the cover plate 3 can be flipped to cover the top opening of the vapor deposition box 2 or retracted vertically into the placement groove 21.

[0059] The inner end of the intake pipe 31 is a pipe opening, and the pipe opening of the intake pipe 31 passes through the cover plate 3 and is connected to the inner cavity of the vapor deposition box 2, and the intake pipe 31 is only arranged at the front end top of the vapor deposition box 2, and the rear end top of the vapor deposition box 2 is a rotating shaft 34. The rotating shaft 34 is a closed structure without a pipe opening, and is only used to connect with the cover plate 3. The rotating shaft 34 and the intake pipe 31 are both fixedly connected to the cover plate 3, and the rotating shaft 34 and the intake pipe 31 are rotatably connected to the circular ring of the telescopic end of the lifting cylinder 33, but the position is fixed, and the rotating shaft 34 and the intake pipe 31 and the lifting cylinder 33 will not move forward or backward, and will only rotate relative to each other along the axis of the rotating shaft 34 or the intake pipe 31.

[0060] The outer end of the suction pipe 31 is connected to a suction hose 42, which is connected to the inside of the storage tank 4, and the inside of the storage tank 4 is connected to the suction device 41. The suction device 41 generally uses a vacuum pump, and the storage tank 4 and the suction device 41 need to be isolated by a filter device or a water filter device to ensure that the suction device 41 only sucks out air, but not the vapor of organic materials. This recovery device is a commonly used evaporation tail gas recovery and reprocessing device in the evaporation industry, which can be used and will not be described in detail in this embodiment.

[0061] The suction hose 42 is a hose made of heat-resistant silicone material, with only one section extending forward, that is, the section rotating with the suction pipe 31. The pipe connecting the front end of the suction hose 42 and the storage tank 4 can be a hard copper pipe, and the suction pipe 31 is also a steel hard pipe. The suction pipe 31 not only bears the role of suction, but also rotates with the telescopic end ring of the lifting cylinder 33 to play the role of a rotating shaft. The suction pipe 31 needs to be high in strength and resistant to high temperatures, and is generally made of stainless steel.

[0062] During evaporation, the crucible 23 is generally heated to a temperature of about 500 degrees Celsius, and high heat-resistant stainless steel is heated to 1200 degrees Celsius, which is completely sufficient.

[0063] When each cover plate 3 is flipped open, it is vertically placed in an isolation chamber 21, and when the cover plate 3 is flipped closed, it horizontally covers the top opening of the vapor deposition box 2. It is necessary to ensure that when the cover plate 3 is closed, the top opening of the vapor deposition box 2 can be tightly covered, rather than being embedded in the top opening of the vapor deposition box 2. It is sufficient to cover tightly all around. The vapor deposition vapor is blocked by the cover plate 3, and then the unnecessary vapor deposition vapor is absorbed through the suction pipe 31. Such a structure is sufficient to prevent the vapor from overflowing upward, effectively avoiding the mixing of vapor deposition vapors of different organic materials, ensuring the purity of the vapor deposition material, and improving the vapor deposition effect.

[0064] Compared with the existing technology, the structure of the embodiment of the utility model has the following differences:

[0065] 1. The existing organic material evaporation device uses a conventional baffle, which rotates horizontally to stagger with the steam, thereby releasing the upward steam, and rotates to block the evaporation steam, which completely relies on the adsorption force of the baffle. When too much organic material is adsorbed, it cannot continue to adhere and needs to be replaced. The replacement is troublesome and the frequency is high. In addition, the baffle needs to be replaced after the crucible 23 cools down. It often takes 1-2 hours to replace all the crucibles 23. The replacement operation of the baffle is very inconvenient. The present device uses a vacuum suction device 41 to remove the unused organic material. The organic material vapor is continuously absorbed and collected through the storage tank 4, which can reduce the adhesion of organic vapor on the cover plate 3. Instead, the vapor is sucked away by the suction device 41, so that the amount of organic vapor scaling on the cover plate 3 is reduced, which greatly reduces the frequency of replacing the cover plate 3, thereby increasing the working time of the evaporation device and reducing the number of replacements. The device allows the cover plate 3 to only follow the frequency of cleaning and replacement of the crucible 23. Generally, the crucible 23 needs to be cleaned and replaced once a month, while the conventional baffles in the past need to be replaced and cleaned at least twice a week. The device greatly reduces the replacement frequency;

[0066] 2. This method of adsorbing vapor through baffles and metal materials is just that the baffle blocks the vapor above, and due to the easy adhesion of organic materials and metals, it can only adsorb as much as possible, and cannot completely seal the vapor. Because if it is completely sealed, the existing crucible is still heated inside to ensure the continuous generation of organic material vapor, thereby ensuring the needs of subsequent evaporation process, but this will cause the continuous generation of vapor inside the evaporation device, resulting in high internal pressure. When the pressure is too high, it will be dangerous. Therefore, the current evaporation device is generally not completely sealed with a baffle. This device changes this situation. This device is through a cover plate 3. The vapor deposition box 2 receiving the guided vapor is completely sealed as much as possible, and then the vapor is connected to the suction device 41 through the suction pipe 31 on the cover plate 3, so that the vapor is completely sucked away, which will not cause the pressure inside the vapor deposition box 2 to be high due to the continuously generated organic material vapor, and can more completely prevent the unused vapor from overflowing upward. The device has a tighter vapor blocking cover, and tries not to use the attachment method, but blocks the vapor by sucking away the vapor, effectively avoiding the situation where different types of vapor affect each other, ensuring the purity of the vapor material in the vapor deposition process, and optimizing the vapor deposition effect of the display panel;

[0067] 3. The device absorbs the organic vapor of evaporation, reduces the amount of scaling, and effectively prevents the cover plate 3 from falling due to excessive scaling, and can also effectively prevent the evaporation hole 24 from being blocked, effectively preventing the situation where there are too many dust particles in the evaporation box 2, and can also effectively prevent the particles from scattering and mixing with other materials. Moreover, the cover plate 3 of the device is stored in the isolation chamber 21, instead of being rotated and staggered in the horizontal plane along the vertical axis. The cover plate 3 of the device is vertically lifted by the lifting cylinder 33, and the cover plate 3 is flipped by the flip cylinder 32, so that the cover plate 3 can be stored in the isolation chamber 21, avoiding the situation where the cover plate 3 is flipped over other crucibles 23, and also avoiding the situation where scaling of the cover plate 3 falls on other crucibles 23 and affects each other. For the convenience of use, many existing evaporation devices of this type are equipped with a baffle to block two crucibles 23. The unused crucible 23 is blocked by the baffle, while the crucible 23 being evaporated is exposed for use. In the evaporation device of this design, the baffle structure is very easy to fall off, resulting in mixing of evaporation materials, affecting the evaporation effect of the display panel.

[0068] This device Figure 1 As shown, the side connected to the suction hose 42 is the front side, the side where only the rotating shaft 34 is provided is the rear side, and the placement grooves 11 are neatly arranged in parallel in the left-right direction.

[0069] When the utility model is in use, the present embodiment has three placement grooves 11, which can accommodate three different crucibles 23, and can also be used for vapor deposition of three different materials. When the display panel needs to be vapor deposited, the three crucibles 23 filled with different materials are placed in the placement grooves 11, and each crucible 23 needs to be covered by the vapor deposition box 2. The bottom of the vapor deposition box 2 can be a close-fitting cover, or it can be a stepped annular edge, which can be inserted into the top opening of the crucible 23. This assembly structure is the same as the plug-in and buckle form of the cup cover. As long as it has a certain degree of sealing and the vapor deposition material does not overflow along the gap, the entire evaporation seat 1 starts to heat, the heating wires in the three placement grooves 11 start to heat, and the three crucibles 23 are heated evenly.

[0070] The organic material generates vapor when heated. The vapor floats upward and sprays out or overflows. The vapor enters the vapor deposition box 2 along the evaporation holes 24. When the vapor deposition box 2 is in the vapor deposition operation, the cover plate 3 is in the open state, and the vapor deposition vapor continues to spray upward to perform the vapor deposition operation on the display panel.

[0071] When the evaporation of this evaporation box 2 is completed, it needs to be covered to facilitate the evaporation of the organic material in the next crucible 23. At this time, it is necessary to close the cover plate 3, and the telescopic end of the lifting cylinder 33 is extended and raised, so that the bottom of the entire cover plate 3 in the vertical state is also pulled out of the isolation chamber 21, and then the telescopic end of the flip cylinder 32 is shortened, and the fixed end of the lifting cylinder 33, that is, the lower end is fixedly mounted on the side of the evaporation seat 1 through a rotating shaft, and the flip cylinder 32 is rotatably connected to the middle position of the lifting cylinder 33 through a hinge support. The flip cylinder 32 is shortened, so that the telescopic end of the lifting cylinder 33 is pulled downward, and the upper end of the lifting cylinder 33 is above the flip cylinder 32. At this time, the lifting cylinder 33 is pulled downward, so that the upper end of the lifting cylinder 33 rotates along the rotating shaft at the lower end, so that the cover plate 3 is also pulled down and rotated, and only the right side of the leftmost cover plate 3 is connected to the lifting cylinder 33. Figure 6 As shown, the air intake pipe 31 of each cover plate 3 is above the fixed end of the flip cylinder 32. When the lifting cylinder 33 is pulled down, the stroke of the cylinder needs to ensure that the cover plate 3 just covers the top opening of the vapor deposition box 2, and the covering position needs to be accurate and tight, so that the vapor deposition box 2 can be covered, and then the suction device 41 corresponding to the covered cover plate 3 is turned on to start sucking the steam inside the tightly covered vapor deposition box 2, so that the continuously generated vapor deposition steam is sucked into the storage tank 4, and cooled, and the vaporized organic raw material is quickly reduced to a solid state for storage, which is convenient for subsequent use.

[0072] The display panel needs to enter the second evaporation box 2 for evaporation.

[0073] This crucible 23 is in a state of continuous heating and evaporation. The suction device 41 on the corresponding cover plate 3 is closed, and the flip cylinder 32 is extended first, so that the lifting cylinder 33 is pushed and rotated, thereby lifting the already covered cover plate 3. Only one side of the cover plate with the suction pipe 31 and the rotating shaft 34 is connected to the lifting cylinder 33. The cover plate 3 will naturally flip over under the action of gravity, and one side of the suction pipe 31 will rise, while the position of the other side will remain basically unchanged. When the flip cylinder 32 is extended to a set length, the cover plate 3 is in a vertical state, and the lower end is just facing the top opening of the matching isolation chamber 21. Then the lifting cylinder 33 is shortened, and the cover plate 3 is retracted into the isolation chamber 21. Each cover plate 3 has a corresponding isolation chamber 21.

[0074] Then the evaporation vapor in the crucible 23 overflows and sprays upward along the evaporation hole 24, and evaporates to the display panel placed on the evaporation box 2. In this way, the evaporation process of different materials can be completed in sequence, and when the material in each crucible 23 is evaporated, the other evaporation boxes 2 need to be kept closed by the cover plate 3, and the driving sequence and action of the flip cylinder 32, the lifting cylinder 33 and the suction device 41 of the device can be completed by setting a fixed program through the PLC controller.

[0075] In addition, in the description of the present invention, it should be noted that if the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0076] Although the specific implementation methods of the present invention are described above, those skilled in the art should understand that the specific embodiments described are only illustrative and are not intended to limit the scope of the present invention. Equivalent modifications and changes made by those skilled in the art in accordance with the spirit of the present invention should be included in the scope of protection of the claims of the present invention.

Claims

1. An evaporation source evaporation device, characterized in that: include: An evaporation seat (1), a crucible (23), a cover plate (3), a storage tank (4) and a suction device (41); The evaporation seat (1) is a stably supported base, a placement groove (11) is provided on the top of the evaporation seat (1), and a heating device is provided in the inner cavity of the placement groove (11); The crucible (23) is a closed rectangular structure, a plurality of evaporation nozzles (24) are arranged on the top of the crucible (23), a crucible (23) is detachably arranged inside one of the placement grooves (11), a vapor deposition box (2) is arranged above each of the crucibles (23), and the vapor deposition box (2) is sealed and blocked at the top opening of the crucible (23); The evaporation box (2) is also a closed box body. The top of the evaporation box (2) is open. Each of the evaporation nozzles (24) extends from below into the bottom of the inner cavity of the evaporation box (2). Partition plates (22) are also arranged on the outside of the left and right sides of the evaporation box (2). The vertical gap between the evaporation box (2) and the partition plate (22) is an isolation chamber (21). The cover plate (3) is a flat plate. A cover plate (3) is arranged outside the vapor deposition box (2). An air intake pipe (31) is arranged on the front side of the top of the cover plate (3). The pipe opening of the air intake pipe (31) extends into the bottom surface of the cover plate (3). A rotating shaft (34) is arranged on the rear side of the top of the cover plate (3). A flip cylinder (32) and a lifting cylinder (33) are respectively arranged on the front and rear sides of the evaporation seat (1); the flip cylinder (32) and the lifting cylinder (33) are both rotatably connected to the evaporation seat (1); the rotating shaft (34) and the outside of the air intake pipe (31) are both rotatably connected to a separate lifting cylinder (33); and the lifting cylinders (33) are also rotatably connected to a flip cylinder (32); The cover plate (3) is vertically arranged in the isolation chamber (21) so as to be lifted by a lifting cylinder (33), and the cover plate (3) is flipped open by a flip cylinder (32) so as to cover the top opening of the vapor deposition box (2); The outer end of the air suction pipe (31) is connected to a suction hose (42), the suction hose (42) is in communication with the interior of the storage tank (4), and the interior of the storage tank (4) is connected to the suction device (41).

2. The evaporation source evaporation device according to claim 1, characterized in that: The bottom of the partition (22) is connected to the bottom of the vapor deposition box (2) to form an integral structure; Each evaporation box (2) is connected to a crucible (23) at the bottom thereof to form a complete closed cavity; A plurality of placement grooves (11) are provided on the top of the evaporation seat (1), a crucible (23) is arranged in each placement groove (11), a vapor deposition box (2) is arranged on the top of each crucible (23), a cover plate (3) is arranged on the top of each vapor deposition box (2), a flip cylinder (32) and a lifting cylinder (33) are connected to the front and rear sides of each cover plate (3), a separate air intake pipe (31) is provided on each cover plate (3), and each air intake pipe (31) is connected to a separate storage tank (4).

3. The evaporation source evaporation device according to claim 2, characterized in that: The heating device inside the placement groove (11) is an electric heating wire, and the inner wall of the placement groove (11) is evenly covered with the electric heating wire.

4. The evaporation source evaporation device according to claim 2, characterized in that: A vertical avoidance groove (12) is respectively provided on the front and rear sides of the evaporation seat (1); the fixed end of each lifting cylinder (33) is rotatably arranged in the avoidance groove (12) via a rotating shaft, and the rotating shaft of the fixed end of each lifting cylinder (33) is arranged horizontally along the front-rear direction; The telescopic end of the lifting cylinder (33) is a circular ring, and the circular ring of the lifting cylinder (33) is rotatably connected to the rotating shaft (34) or the suction pipe (31); The fixed end of the lifting cylinder (33) is rotatably mounted on the evaporation seat (1), and a plurality of the lifting cylinders (33) are respectively arranged in the avoidance grooves (12) on the front and rear sides of the evaporation seat (1); The fixed end of each lifting cylinder (33) is rotatably connected to the telescopic end of a flip cylinder (32) via a hinge support, and the fixed end of the flip cylinder (32) is rotatably mounted on the evaporation seat (1) via a rotating shaft. The plurality of flip cylinders (32) are also respectively arranged in the avoidance grooves (12) on the front and rear sides of the evaporation seat (1); The telescopic paths of each of the flip cover cylinders (32) on the same side and the lifting cylinders (33) on the same side are arranged in the same vertical plane without conflicting with each other.

5. The evaporation source evaporation device according to claim 1, characterized in that: The top of the vapor deposition box (2) is flat, the bottom of the cover plate (3) is flat, and the vapor deposition box (2) and the bottom of the cover plate (3) are detachably fitted and sealed.

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