Crystal growth furnace heating device
By introducing a heating rotating mechanism and material picking mechanism into the heating device of the crystal furnace, the problems of uneven heating and safety of the staff are solved, and uniform heating and automatic removal of the heating drum are realized, which improves the processing quality and work of SiC Safety of personnel.
Patent Information
- Application Number
- CN202421081062.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-17
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2034-05-17
AI Technical Summary
After the existing crystal furnace heating device heats SiC at a high temperature, the staff will be susceptible to high temperature damage when they directly remove the heating barrel, and the heating is uneven, which affects the processing quality of SiC.
A crystal furnace heating device including a heating body, a heating legs, a heating plating table, a heating drum, a cover base, a rising top block, a heating rotary mechanism and a material pickup mechanism are designed, and the heating rotary mechanism is realized through the heating rotary mechanism. The cylinder is heated evenly and the cover is automatically opened through the material pickup mechanism to facilitate and safely remove the heating cylinder.
The uniform heating of the heating drum is achieved, the heating quality of SiC is improved, and the operational risks of staff are reduced through the automated material pickup mechanism, and the safety and convenience are improved.
Smart Images
Figure CN222205557U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of SiC production and processing, and more specifically, particularly relates to a crystal growth furnace heating device. Background Art
[0002] When SiC is processed and produced, it is necessary to use the PVT SiC crystal growth process. The PVT SiC crystal growth process is to put SiC into the crystal growth furnace, open the device cover, put SiC into the heating device, and the heating device on the crystal growth furnace heats up. By heating up, SiC is heated to form a gas phase substance, and the gas phase substance is crystallized on the surface.
[0003] According to CN202223046689.0, the utility model discloses an efficient crystal growth furnace heating device, which includes a furnace body, a sealing cover is provided on the top of the furnace body, a square rod is fixedly connected to the bottom of the sealing cover, the bottom end of the square rod is sleeved with a cover plate slidably connected thereto, the bottom of the cover plate is sleeved with a crucible slidably connected thereto, the bottom of the crucible is fixedly connected with a support sleeve, and the bottom of the furnace body is fixedly connected with a motor. The utility model drives the vertical rod and the horizontal rod to rotate by starting the motor, and then drives a plurality of heating plates located outside the crucible to rotate around the crucible, so that the heating plates can evenly heat each area outside the crucible and the bottom, thereby improving the uniform heating effect of the device, effectively solving the problem of poor uniform heating effect of the existing device, and replacing the method of rotating the crucible to achieve uniform heating of the crucible, thereby improving the practicality of the device.
[0004] Based on the above, the existing crystal growth furnace heating device generally places SiC inside the heating tube, and the heating tube is placed inside the crystal growth furnace for processing. Since the heating device heats the SiC at high temperature, it is easy for the temperature inside the heating device to be high. After the SiC processing is completed, when the staff directly takes the heating tube out of the heating device, due to the high temperature inside the heating device, the staff are easily damaged by the temperature inside the heating device. Utility Model Content
[0005] In order to solve the above technical problems, the utility model provides a crystal growth furnace heating device to solve the problem that the existing crystal growth furnace heating device generally places SiC into a heating tube, and the heating tube is placed inside the crystal growth furnace for processing. Since the heating device heats the SiC at high temperature, it is easy to make the temperature inside the heating device high. After the SiC processing is completed, when the staff directly takes the heating tube out of the heating device, due to the high temperature inside the heating device, the staff is easily damaged by the temperature inside the heating device.
[0006] The purpose and effect of the crystal growth furnace heating device of the utility model are achieved by the following specific technical means:
[0007] A crystal growth furnace heating device, comprising a heating body, heating legs, a heating placement table, a heating drum, a protective cover base, a rising top block, a heating rotating mechanism and a material picking mechanism; the heating legs are provided with a total of four groups, and the four groups of heating legs are respectively fixedly connected to the four corners of the lower end surface of the heating body; the heating placement table is fixedly connected to the upper side of the inner end surface of the heating body; the heating drum rotates on the inner end surface of the heating body, and the upper side of the heating drum rotates on the upper side of the heating placement table; the protective cover base is provided with a total of two groups, and the two groups of protective cover bases are respectively fixedly connected to the upper sides of the left and right end surfaces of the heating body; the rising top blocks are provided with a total of two groups, and the two groups of rising top blocks are respectively slidably connected to the left and right sides of the lower end surface of the heating body, and the two groups of rising top blocks are respectively located on the lower side of the heating drum; the heating rotating mechanism is arranged inside the lower end surface of the heating body; the material picking mechanism is provided with a total of two groups, and the two groups of material picking mechanisms are respectively arranged on the left and right sides inside the heating body.
[0008] Furthermore, the heating rotating mechanism includes: a rotating motor and a rotating shaft; the rotating motor is fixedly connected to the middle position of the lower end surface of the heating body; the rotating shaft rotates inside the lower end surface, and the rotating motor and the rotating shaft are coaxially fixedly connected.
[0009] Furthermore, the heating rotating mechanism also includes: a rotating slot and a rotating plug; the rotating slot is opened in the middle position of the lower end surface of the heating drum; the rotating plug is coaxially fixedly connected to the upper end surface of the rotating shaft, the rotating plug rotates on the lower side of the inner end surface of the heating body, and the rotating slot and the rotating plug are plug-connected.
[0010] Furthermore, the material picking mechanism includes: a lifting motor, a synchronous pulley and a synchronous transmission belt; the lifting motor is fixedly connected to the lower side of the heating body; there are two groups of synchronous pulleys, which are rotatably connected to the lower side of the heating body, and the left group of synchronous pulleys is coaxially fixedly connected to the rotating shaft of the lifting motor; the synchronous transmission belt is transmission-connected to the outer end faces of the two groups of synchronous pulleys.
[0011] Furthermore, the material picking mechanism also includes: an ascending gear and an ascending rack; there are two groups of ascending gears, and the two groups of ascending gears are coaxially fixedly connected to the rear sides of the two groups of synchronous pulleys; there are two groups of ascending racks, and the two groups of ascending racks are fixedly connected to the front sides of the right end faces of the two groups of ascending top blocks; the two groups of ascending gears are respectively meshed with the two groups of ascending racks to form a gear and rack transmission mechanism.
[0012] Furthermore, the material picking mechanism also includes: a switch rack and a switch gear; the switch rack is fixedly connected to the rear side of the outer end surface of the rising top block; the switch gear is rotatably connected to the inside of the heating body, and the switch rack and the switch gear are meshed to form a gear rack transmission mechanism.
[0013] Furthermore, the material picking mechanism also includes: a device cover, a cover pulley, a cover torsion spring, a switch pulley and a switch transmission belt; the device cover is rotatably connected to the inside of the cover base, and the device cover rotates on the upper end surface of the heating body; the cover pulley is coaxially fixedly connected to the front side of the device cover shaft; the cover torsion spring is fixedly connected to the rear side of the inside of the cover base, and the cover torsion spring and the device cover shaft are elastically connected; the switch pulley is coaxially fixedly connected to the rear side of the switch gear; the switch transmission belt is transmission-connected to the cover pulley and the outer end surface of the switch pulley.
[0014] Compared with the prior art, the utility model has the following beneficial effects:
[0015] The utility model adopts a heating rotating mechanism to put SiC into a heating drum, which is then placed inside a heating body. When the heating device processes SiC, the heating drum rotates to heat the SiC inside the heating drum evenly, thereby ensuring the quality of SiC heating.
[0016] The utility model adopts a material taking mechanism, which realizes that after SiC processing is completed, the rising motor shaft rotates to drive the rising top block to slide, and the sliding of the rising top block drives the heating drum to slide upward, and the heating drum drives the device cover to rotate and open when sliding upward, avoiding the problem that the staff needs to manually open the device cover when taking the heating drum, reducing the staff's operation, and the device cover is opened, the heating drum rises to the upper side of the heating body, which is convenient for the staff to take the heating drum, avoiding the problem that the staff is directly taken away by the heating drum inside the heating body, causing the staff to be injured by high temperature, thereby improving the safety of the staff and facilitating the staff to take the heating drum. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is an isometric structural diagram of the heating device of the utility model.
[0018] Figure 2 It is a schematic structural diagram of the heating device of the utility model when viewed from below.
[0019] Figure 3 It is a schematic diagram of the structure inside the heating main body of the utility model.
[0020] Figure 4 It is a structural schematic diagram of the internal transmission of the heating device of the utility model.
[0021] Figure 5 It is a structural schematic diagram of the heating rotating mechanism of the utility model.
[0022] Figure 6 It is a structural schematic diagram of the overall transmission of the material taking mechanism of the utility model.
[0023] Figure 7 It is a structural schematic diagram of the rising transmission of the rising top block of the utility model.
[0024] Figure 8 It is a structural schematic diagram of the rotation transmission of the protective cover of the utility model device.
[0025] In the figure, the corresponding relationship between the component names and the figure numbers is as follows:
[0026] 1. Heating body; 2. Heating legs; 3. Heating table; 4. Heating drum; 401. Rotating slot; 5. Protective cover base; 6. Installing protective cover; 601. Protective cover pulley; 602. Protective cover torsion spring; 7. Rotating motor; 8. Rotating shaft; 801. Rotating plug block; 9. Ascending motor; 10. Synchronous pulley; 1001. Ascending gear; 11. Synchronous transmission belt; 12. Ascending top block; 1201. Ascending rack; 1202. Switch rack; 13. Switch gear; 1301. Switch pulley; 14. Switch transmission belt. DETAILED DESCRIPTION
[0027] The implementation of the utility model is further described in detail below in conjunction with the drawings and examples.
[0028] Embodiment 1:
[0029] As attached Figure 1 To Attachment Figure 5 As shown:
[0030] The utility model provides a crystal growth furnace heating device, comprising a heating body 1, heating legs 2, a heating placement table 3, a heating drum 4, a protective cover base 5, a rising top block 12 and a heating rotating mechanism; the heating legs 2 are provided with four groups, and the four groups of heating legs 2 are respectively fixedly connected to the four corners of the lower end surface of the heating body 1; the heating placement table 3 is fixedly connected to the upper side of the inner end surface of the heating body 1; the heating drum 4 rotates on the inner end surface of the heating body 1, and the upper side of the heating drum 4 rotates on the upper side of the heating placement table 3; the protective cover base 5 is provided with two groups, and the two groups of protective cover bases 5 are respectively fixedly connected to the upper sides of the left and right end surfaces of the heating body 1; the rising top block 12 is provided with two groups, and the two groups of rising top blocks 12 are respectively slidably connected to the left and right sides of the lower end surface of the heating body 1, and the two groups of rising top blocks 12 are respectively located on the lower side of the heating drum 4; the heating rotating mechanism is arranged inside the lower end surface of the heating body 1.
[0031] Among them, the heating rotating mechanism includes: a rotating motor 7 and a rotating shaft 8; the rotating motor 7 is fixedly connected to the middle position of the lower end surface of the heating body 1; the rotating shaft 8 rotates inside the lower end surface, and the rotating motor 7 and the rotating shaft 8 are coaxially fixedly connected. During use, the rotation of the rotating motor 7 shaft drives the rotating shaft 8 to rotate.
[0032] Among them, the heating rotation mechanism also includes: a rotating slot 401 and a rotating plug block 801; the rotating slot 401 is opened in the middle position of the lower end surface of the heating drum 4; the rotating plug block 801 is coaxially fixedly connected to the upper end surface of the rotating shaft 8, the rotating plug block 801 rotates on the lower side of the inner end surface of the heating body 1, and the rotating slot 401 and the rotating plug block 801 are plug-connected. During use, when the heating drum 4 is placed on the inner end surface of the heating body 1, it drives the rotating slot 401 to move, the rotating slot 401 moves and is plugged together with the rotating plug block 801, the rotating shaft 8 rotates to drive the rotating plug block 801 to rotate, the rotating plug block 801 rotates to drive the rotating slot 401 to rotate, and the rotating slot 401 rotates to drive the heating drum 4 to rotate.
[0033] The specific usage and function of the first embodiment are as follows:
[0034] During use, the rotation of the rotating shaft of the rotating motor 7 drives the rotating shaft 8 to rotate. When the heating drum 4 is placed on the inner end surface of the heating body 1, it drives the rotating slot 401 to move. The rotating slot 401 moves and is inserted together with the rotating plug block 801. The rotation of the rotating shaft 8 drives the rotating plug block 801 to rotate. The rotation of the rotating plug block 801 drives the rotating slot 401 to rotate. The rotation of the rotating slot 401 drives the heating drum 4 to rotate, thereby realizing the rotation of the heating drum 4 for heating.
[0035] Embodiment 2:
[0036] Based on the first embodiment, as shown in the attached Figure 6 To Attachment Figure 8 As shown:
[0037] The utility model provides a crystal growth furnace heating device, which also includes a material taking mechanism. The material taking mechanism is provided with two groups, and the two groups of material taking mechanisms are respectively arranged on the left and right sides of the inside of a heating main body 1. The material taking mechanism includes: an ascending motor 9, a synchronous pulley 10 and a synchronous transmission belt 11; the ascending motor 9 is fixedly connected to the lower side of the inside of the heating main body 1; there are two groups of synchronous pulleys 10, and the two groups of synchronous pulleys 10 are respectively rotatably connected to the lower side of the inside of the heating main body 1, and the left group of synchronous pulleys 10 is coaxially fixedly connected with the rotating shaft of the ascending motor 9; the synchronous transmission belt 11 is transmission-connected to the outer end faces of the two groups of synchronous pulleys 10. During use, the rotating shaft of the ascending motor 9 rotates to drive the synchronous pulley 10 to rotate, and the rotation of the synchronous pulley 10 drives the synchronous transmission belt 11 to transmit.
[0038] Among them, the material picking mechanism also includes: an ascending gear 1001 and an ascending rack 1201; there are two groups of ascending gears 1001, and the two groups of ascending gears 1001 are coaxially fixedly connected to the rear sides of the two groups of synchronous pulleys 10; there are two groups of ascending racks 1201, and the two groups of ascending racks 1201 are fixedly connected to the front sides of the right end faces of the two groups of ascending top blocks 12; the two groups of ascending gears 1001 are respectively meshed with the two groups of ascending racks 1201 to form a gear rack transmission mechanism. During use, the synchronous pulley 10 rotates to drive the ascending gear 1001 to rotate, and the rotation of the ascending gear 1001 drives the meshed ascending rack 1201 to slide, and the sliding of the ascending rack 1201 drives the ascending top block 12 to slide, and the sliding of the ascending top block 12 lifts the heating drum 4 to slide.
[0039] Among them, the material picking mechanism also includes: a switch rack 1202 and a switch gear 13; the switch rack 1202 is fixedly connected to the rear side of the outer end surface of the rising top block 12; the switch gear 13 is rotatably connected to the inside of the heating body 1, and the switch rack 1202 and the switch gear 13 are meshed to form a gear rack transmission mechanism. During use, the sliding of the rising top block 12 drives the switch rack 1202 to slide, and the sliding of the switch rack 1202 drives the meshing switch gear 13 to rotate.
[0040] The material picking mechanism further comprises: a device cover 6, a cover pulley 601, a cover torsion spring 602, a switch pulley 1301 and a switch transmission belt 14; the device cover 6 is rotatably connected to the inside of the cover base 5, and the device cover 6 is rotated on the upper end surface of the heating body 1; the cover pulley 601 is coaxially fixedly connected to the front side of the rotating shaft of the device cover 6; the cover torsion spring 602 is fixedly connected to the rear side of the inside of the cover base 5, and the cover torsion spring 602 is elastically connected to the rotating shaft of the device cover 6; the switch pulley 1301 is connected to the inner side of the cover base 5, and ... 301 is coaxially fixedly connected to the rear side of the switch gear 13; the switch transmission belt 14 is transmission-connected to the outer end surface of the cover pulley 601 and the switch pulley 1301. During use, the switch gear 13 rotates to drive the switch pulley 1301 to rotate, the switch pulley 1301 rotates to drive the switch transmission belt 14, the switch transmission belt 14 drives the cover pulley 601 to rotate, the cover pulley 601 rotates to drive the device cover 6 to rotate, and the device cover 6 rotates to drive the cover torsion spring 602 to expand and contract.
[0041] The specific usage and function of the second embodiment are as follows:
[0042] During use, the rotation of the rotating shaft of the ascending motor 9 drives the synchronous pulley 10 to rotate, and the rotation of the synchronous pulley 10 drives the synchronous transmission belt 11 to transmit, and the rotation of the synchronous pulley 10 drives the ascending gear 1001 to rotate, and the rotation of the ascending gear 1001 drives the meshing ascending rack 1201 to slide, and the sliding of the ascending rack 1201 drives the ascending top block 12 to slide, and the sliding of the ascending top block 12 lifts the heating drum 4 to slide, and the sliding of the ascending top block 12 drives the switch rack 1202 to slide, and the sliding of the switch rack 1202 drives the meshing switch gear 13 to rotate, and the rotation of the switch gear 13 drives the switch pulley 1301 to rotate, and the rotation of the switch pulley 1301 drives the switch transmission belt 14 to transmit, and the switch transmission belt 14 drives the protective cover pulley 601 to rotate, and the rotation of the protective cover pulley 601 drives the device protective cover 6 to rotate, and the rotation of the device protective cover 6 drives the protective cover torsion spring 602 to extend and retract, so that the device protective cover 6 automatically rotates and opens when the heating drum 4 slides out.
Claims
1. A crystal growth furnace heating device, comprising a heating body, heating legs, a heating placement table, a heating drum, a cover base, a rising top block, a heating rotating mechanism and a material taking mechanism; the heating legs are provided in four groups, and the four groups of heating legs are respectively fixedly connected to the four corners of the lower end surface of the heating body; characterized in that: The heating placement table is fixedly connected to the upper side of the inner end surface of the heating body; the heating drum rotates on the inner end surface of the heating body, and the upper side of the heating drum rotates on the upper side of the heating placement table; the protective cover base is provided in two groups, and the two groups of protective cover bases are respectively fixedly connected to the upper sides of the left and right end surfaces of the heating body; the rising top blocks are provided in two groups, and the two groups of rising top blocks are respectively slidably connected to the left and right sides of the lower end surface of the heating body, and the two groups of rising top blocks are respectively located on the lower side of the heating drum; the heating rotating mechanism is arranged inside the lower end surface of the heating body; the material picking mechanism is provided in two groups, and the two groups of material picking mechanisms are respectively arranged on the left and right sides of the inside of the heating body.
2. A crystal growth furnace heating device as claimed in claim 1, characterized in that: The heating rotating mechanism comprises: a rotating motor and a rotating shaft; the rotating motor is fixedly connected to the middle position of the lower end surface of the heating body; the rotating shaft rotates inside the lower end surface, and the rotating motor and the rotating shaft are coaxially fixedly connected.
3. A crystal growth furnace heating device as claimed in claim 2, characterized in that: The heating rotating mechanism also includes: a rotating slot and a rotating plug; the rotating slot is opened in the middle position of the lower end surface of the heating drum; the rotating plug is coaxially fixedly connected to the upper end surface of the rotating shaft, the rotating plug rotates on the lower side of the inner end surface of the heating body, and the rotating slot and the rotating plug are plug-connected.
4. A crystal growth furnace heating device as claimed in claim 1, characterized in that: The material picking mechanism includes: an ascending motor, a synchronous pulley and a synchronous transmission belt; the ascending motor is fixedly connected to the lower side of the heating body; there are two groups of synchronous pulleys, which are rotatably connected to the lower side of the heating body respectively, and the left group of synchronous pulleys is coaxially fixedly connected to the rotating shaft of the ascending motor; the synchronous transmission belt is transmission-connected to the outer end surfaces of the two groups of synchronous pulleys.
5. A crystal growth furnace heating device as claimed in claim 4, characterized in that: The material picking mechanism also includes: an ascending gear and an ascending rack; there are two groups of ascending gears, and the two groups of ascending gears are coaxially fixedly connected to the rear sides of the two groups of synchronous pulleys; there are two groups of ascending racks, and the two groups of ascending racks are fixedly connected to the front sides of the right end faces of the two groups of ascending top blocks; the two groups of ascending gears are respectively meshed with the two groups of ascending racks to form a gear rack transmission mechanism.
6. A crystal growth furnace heating device as claimed in claim 1, characterized in that: The material picking mechanism also includes: a switch rack and a switch gear; the switch rack is fixedly connected to the rear side of the outer end surface of the rising top block; the switch gear is rotatably connected to the inside of the heating body, and the switch rack and the switch gear are meshed to form a gear rack transmission mechanism.
7. A crystal growth furnace heating device as claimed in claim 6, characterized in that: The material picking mechanism also includes: a device cover, a cover pulley, a cover torsion spring, a switch pulley and a switch transmission belt; the device cover is rotatably connected to the inside of the cover base, and the device cover rotates on the upper end surface of the heating body; the cover pulley is coaxially fixedly connected to the front side of the device cover shaft; the cover torsion spring is fixedly connected to the rear side of the inside of the cover base, and the cover torsion spring and the device cover shaft are elastically connected; the switch pulley is coaxially fixedly connected to the rear side of the switch gear; the switch transmission belt is transmission-connected to the cover pulley and the outer end surface of the switch pulley.