Impressing device

Abstract

The utility model provides an impressing device. The impressing device comprises a substrate, an upper shell, a sealing piece, a connecting piece and a carrying table, the upper shell is connected with the carrying table through a connecting piece so that a first sealing cavity can be formed between the upper shell and the carrying table. The sealing piece is arranged between the carrying table and the substrate so as to form a second sealing cavity between the carrying table and the substrate; forming an imprint template on the carrying table; at least two telescopic pieces are arranged on the side, away from the imprinting template, of the carrying table, the at least two telescopic pieces are located between the carrying table and the base plate, and the carrying table is lifted by different heights in different imprinting areas through the telescopic effect of the telescopic pieces; according to the preset demolding direction, different telescopic pieces are controlled to stretch out and draw back by different heights in the vertical direction, the coupling-out area and / or the turning area are / is preferentially removed, and finally the coupling-in area is removed; according to the device provided by the utility model, the damage of the impressing template to different tooth-shaped structures can be reduced, and the integrity of the demoulded grating structure can be kept as far as possible.

Description

Technical Field

[0001] The utility model relates to the technical field of nano-imprinting, in particular to an imprinting device. Background Art

[0002] In recent years, the concept of "metaverse" has gone through the process of going from concept to the actual implementation of various related physical products, allowing users to truly feel the existence of the "metaverse". Among them, AR glasses and MR head displays are the two most representative products. In fact, different optical display solutions can be used to realize the manufacturing of these two products.

[0003] In waveguide optics, compared with array waveguides and holographic waveguides, surface relief diffraction waveguides have the ability to fully reuse existing semiconductor manufacturing and processing technologies and equipment, can meet consumer-grade imaging needs, and have the ability to be mass-produced and manufactured, and are therefore highly anticipated.

[0004] At present, the mass production of surface relief diffraction optical waveguides mainly relies on nanoimprinting technology. Due to the limitations of the imprinting technology, it is difficult to achieve large-scale mass production, which makes AR glasses currently unpopular. The difficulty lies in how to achieve large-scale imprinting of waveguides to achieve mass production. After searching, the prior art CN111679554B discloses a dual-chamber nanoimprinting mechanism, which controls the imprinting wood board to be tightly pressed on the substrate through air pressure, wherein the imprinting template is not fully clamped in the imprinting fixture, and a certain margin is reserved. The imprinting template is pressed tightly against the substrate surface by increasing the pressure. However, those skilled in the art know that the imprints are all micro-nano structures with a size of tens to hundreds of nanometers. When imprinting under force through an untensioned imprinting template, it is difficult to align the substrate, and how to control the tension scale is difficult to achieve. When the tension scale is different, the resulting The changes in the imprinting structure and size are huge and difficult to accept; for example, the prior art CN218866308U discloses a nanoimprinting device, which performs imprinting between the mold 4 and the substrate 5 through the pressure component 5 and the lifting mechanism 2. The mold 4 can be pressed by the pressure component 5, and the mold 4 with a certain bending deformation is tangentially contacted with the substrate 3 and slowly expands to avoid bubbles during the bonding process; after completing the photocuring molding, the imprinting component 5 discharges high-pressure gas through the vent 52 to shrink the pressure chamber, and at the same time the lifting mechanism 2 rises upward to separate the mold 4 from the substrate 3. However, those skilled in the art know that, for the same reasons as above, a bent and deformed mold piece will cause a change in the imprinted structure during embossing, which has a huge impact, and during demolding, the mold piece is lifted by a lifting mechanism, and this straight up and down demolding method will affect the microstructure of the embossing, even greatly; further, as disclosed in CN111929985A, a demolding method for embossing is used, by controlling the entire movement process to copy the angle of the hard mold substrate 112 and the glass substrate 211 to be 50 degrees with the angle of the bevel grating, and moving in a parallelogram with a left bottom angle of 50 degrees, so as to complete the demolding in this way, thereby avoiding the bevel teeth of the original mold from damaging the solidified polymer during demolding. The problem of the colloidal beveled grating structure of the composite has alleviated the damage to the imprinted structure during demolding to a certain extent, but it is known that the imprinted structure is often not single, not just beveled teeth. When imprinting on a wafer, the imprinted structure includes straight teeth, beveled teeth, flares, or multiple different combinations, but it is difficult to demold the entire wafer by simply removing the beveled teeth, especially for a variety of imprinted structures. It is difficult to ensure the complete morphology of each grating structure tooth. Therefore, the untensioned imprinting method or the beveled teeth demolding method used in the prior art has limited improvement on the imprinting quality, and even untensioned imprinting will make it difficult to achieve alignment between the template and the substrate, and the imprinted structure is difficult to control. Therefore, for those skilled in the art, it is urgent to improve the imprinting process and improve the quality of imprinting and demolding. Utility Model Content

[0005] The utility model provides an imprinting device to solve the problems existing in the prior art, so that the imprinting template can be accurately aligned with the wafer during imprinting, and the imprinting template is in a tensioned state to reduce the impact on the imprinting structure; at the same time, through an independently designed demolding method, it is suitable for the demolding of various current grating structures, especially when there are a variety of tooth shapes such as flare, bevel teeth, straight teeth, etc. mixed on the same wafer. The utility model can minimize the damage caused by demolding to each tooth structure, thereby ensuring the integrity of the structure.

[0006] The utility model provides an imprinting device, comprising a substrate, an upper shell, a sealing member, a connecting member and a carrier; the upper shell is connected to the carrier through the connecting member to form a sealed chamber 1 between the upper shell and the carrier; the sealing member is arranged between the carrier and the substrate to form a sealed chamber 2 between the carrier and the substrate; an imprinting template is formed on the carrier; at least two telescopic members are arranged on a side of the carrier away from the imprinting template, at least two of the telescopic members are located between the carrier and the substrate, and the carrier is lifted to different heights in different imprinting areas through the telescopic effect of the telescopic members.

[0007] In some embodiments, at least one ventilation hole is independently provided on the upper shell and the substrate, and at least one transparent area is provided in the middle of the upper shell.

[0008] In some embodiments, the seal adapts to different height variations of the carrier.

[0009] In some embodiments, different retractable members are retracted to different heights, controlling the platforms in different imprinting areas to be lifted to different heights, so that the imprinting templates in the corresponding connection areas are also adapted to the height changes of the retractable members.

[0010] In some embodiments, the connector and the seal may be integrally formed.

[0011] In some embodiments, it is characterized in that the imprint template is attached to a side of the carrier away from the substrate.

[0012] In some embodiments, the lifting heights of the stage in different areas are different to adapt to the changes in the directions of the teeth of different grating structures, and the different areas are defined as the locations of different telescopic members.

[0013] Furthermore, the platform is annular in structure, and at least two of the telescopic members are evenly arranged on one side of the platform, and the positions of the telescopic members are adapted to the orientations of different imprinted grating structures.

[0014] In some embodiments, the upper shell is indirectly connected to the carrier through the connecting member to form a sealed chamber between the upper shell and the carrier.

[0015] Furthermore, in some embodiments, the carrier and the substrate are indirectly connected via the sealing member to form a sealed chamber 2 between the carrier and the substrate.

[0016] The utility model provides an imprinting device, in which a plurality of telescopic parts are arranged, and different telescopic parts are extended and retracted to different heights, so as to control the platforms in different imprinting areas to be lifted to different heights, so that the imprinting templates in the corresponding connecting areas are also adapted to the height changes of the telescopic parts, and the imprinting templates are lifted to different heights, thereby controlling the demoulding conditions of different areas during demoulding, and avoiding the defects in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 A schematic diagram of an imprinting device provided by the utility model;

[0019] Figure 2 A schematic diagram of another imprinting device provided by the utility model;

[0020] Figure 3 A schematic diagram of a load-bearing telescopic member carrier provided by the utility model;

[0021] Figure 4 A schematic diagram of an imprinting process based on an imprinting device provided by the utility model;

[0022] Figure 5 A schematic diagram of a demoulding process based on an imprinting device provided by the utility model;

[0023] Figure 6 A schematic diagram of a demoulding process based on an imprinting device provided by the utility model;

[0024] Figure 7 A schematic diagram of a demoulding process based on an imprinting device provided by the utility model;

[0025] Figure 8 A schematic diagram of an imprint template grating structure 1 provided by the utility model;

[0026] Fig. 9 A schematic diagram of a second grating structure of an imprint template provided by the utility model;

[0027] Figure ID:

[0028] 10: upper shell; 11: base plate; 12: sealing member; 13: connecting member; 14: vent hole;

[0029] 20: stage; 21: imprint template; 30: wafer; 40: lifting plate; 50: driving rod; 60: telescopic part; 100: imprint structure DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0031] It should be noted that the terms "first", "second", etc. in the specification and claims of the utility model and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the utility model described here can be implemented in an order other than those illustrated or described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0032] Based on the problems in the prior art, the utility model provides an imprinting device and method, such as Figures 1 to 9 On the one hand, the utility model provides an imprinting device, referring to Figures 1-2As shown, it includes a substrate 11, an upper shell 10, a sealing member 12, a connecting member 13, and a carrier 20; the upper shell 10 is connected to the carrier 20 through the connecting member 13 to form a sealed chamber 1 between the upper shell 10 and the carrier 20; the sealing member 12 is arranged between the carrier 20 and the substrate 11 to form a sealed chamber 2 between the carrier 20 and the substrate 11; an imprint template 21 is formed on the carrier 20; at least two telescopic members 60 are arranged on the side of the carrier 20 away from the imprint template 21, and at least two telescopic members 60 are located between the carrier 20 and the substrate 11, and the carrier 20 is lifted to different heights in different imprinting areas through the telescopic effect of the telescopic members 60.

[0033] like Figure 1 As shown, the upper shell 10 is connected to the carrier 20 through the connecting member 13 to form a sealed chamber 1 between the upper shell 10 and the carrier 20. The connection here includes "direct connection" or "indirect connection". Figure 1 It is shown that the upper shell 10 is directly connected to the carrier 20 through the connecting member 13, that is, a direct connection method; when the upper shell 10 is indirectly connected to the carrier 20 through the connecting member 13, such as first connecting through other structures and then connecting to the carrier 20 and other indirect forms, it is also within the "connection" relationship defined in the utility model, with the purpose of forming a sealed chamber between the upper shell 10 and the carrier 20, and the connection relationship is not particularly limited.

[0034] As can be implemented, in some embodiments, the upper shell 10 is indirectly connected to the carrier 20 via a connecting member 13 to form a sealed chamber 1 between the upper shell 10 and the carrier 20 .

[0035] Furthermore, in some embodiments, the stage 20 and the substrate 11 are indirectly connected via a sealing member 12 to form a sealed chamber 2 between the stage 20 and the substrate 11 .

[0036] Through the above indirect method, it is also beneficial for those skilled in the art as long as sealing can be achieved.

[0037] Similarly, further, a seal 12 is provided between the carrier 20 and the substrate 11, and a sealed chamber 2 is formed between the carrier 20 and the substrate 11 through the action of the seal 12. The seal 12 can adapt to different height position changes of the carrier 20, so as to form a sealed chamber 2 between the carrier 20 and the substrate 11. The structure of the seal 12 is not further limited by the present invention, and similar structures such as elastic or flexible seals are all within the scope of the present invention.

[0038] Furthermore, in the present invention, the connector 13 and the seal 12 can be made of the same material, or the connector 13 and the seal 12 form an integral structure to achieve the sealing of the sealed chamber 1 and the sealed chamber 2, that is, the connector 13 and the seal 12 are integrated. This is also within the protection scope of the present invention, as long as it can achieve the separate sealing of the two chambers and adapt to the different height changes of the carrier 20.

[0039] The "retractable component" defined in the present invention refers to a component that enables the carrier 20 to be lifted to different heights in different imprinting areas, that is, it can produce a change in height. It can also be understood as a component with similar functions such as a driving component and a control component. As long as the functional component can meet the height change, "retractable" is used as a limitation of its function.

[0040] At least one vent hole 14 is independently provided on the upper shell 10 and the base plate 11. Figures 1-2 As shown, two vent holes 14 are provided on the upper shell 10, and one vent hole 14 is provided on the substrate 11. The utility model does not limit the number of vent holes 14. The function of the vent holes 14 is to perform vacuum or gas filling and degassing operations on the sealed chamber 1 and the sealed chamber 2 according to the requirements of the stamping, so as to modulate the different pressures of the two sealed chambers. The vent holes 14 are connected to different vacuum generators (not shown in the figure), and the pressures of the sealed chamber 1 and the sealed chamber 2 are controlled by the vacuum generators, and the stamping or demolding is achieved by the size of the pressure of the two chambers.

[0041] Going further, combined Figure 3 The stage 20 is in a circular ring structure, and the imprint template 21 is formed on one side of the stage 20 by means of vacuum negative pressure, that is, the vacuum bonding method, which is of course only an example, and other loads are also possible; between the stage 20 and the substrate 11, that is, on the side away from the stage 20 where the imprint template 21 is set, at least two telescopic members 60 are set, and are set on the opposite side of the imprint template 21, and at least two telescopic members 60 are located between the stage 20 and the substrate 11;

[0042] In some embodiments, Figure 3 Eight telescopic members 60 are provided, and the stage 20 is lifted to different heights in different imprinting areas by the telescopic effect of the multiple telescopic members 60; of course, to achieve this purpose, the number of telescopic rods 60 is not limited, and is selected according to the size of the imprinting area and the demoulding requirements, without departing from the purpose of the utility model; at the same time, Figure 3It is shown that 8 telescopic parts 60 are evenly arranged on the ring of the carrier 20. In actual work, multiple telescopic parts 60 can be unevenly arranged to facilitate the design of grating tooth demoulding. The utility model does not limit the specific position. At the same time, each telescopic part 60 is connected to a control system (not shown in the figure) to achieve individual control of each telescopic part 60, and its control accuracy is at the nanometer level. For the structure of the telescopic part, it is sufficient to achieve nanometer-level telescopic control, and the utility model does not limit its specific structure.

[0043] Furthermore, the present invention further defines the above-mentioned statement “the stage 20 is lifted to different heights in different imprinting areas by the telescopic effect of the multiple telescopic members 60”, such as Figures 6-7 As shown, when demoulding is performed after the stamping is completed, the stamping device provided by the utility model can select different telescopic parts to be extended to different heights in the vertical direction based on different demoulding requirements, thereby controlling the stage 20 in different stamping areas to be lifted to different heights, so that the stamping templates in the corresponding connection areas are also adapted to the height changes of different telescopic parts 60;

[0044] like Figure 7 The cross-sectional diagram of the stamping device is shown in the figure. In the prior art, the stamping is usually performed from the leftmost side to the rightmost side or from the rightmost side to the leftmost side. It can be seen that, assuming that the stamping is performed from the rightmost side, when the stamping device defined in the present invention is applied, in a certain area (such as Figure 7 The height of the telescopic part on the left side can be higher than that of another area (such as Figure 7 The height of the telescopic part on the right side is adjusted to adapt to the direction of the teeth of different grating structures; more specifically, assuming that demoulding starts from the rightmost side, according to the conventional demoulding idea, the imprint template 21 is slowly removed from the rightmost side, but due to the reasons pointed out in the background technology part, it is not possible to demould according to this idea. Therefore, the utility model creatively proposes to demould according to the direction of multiple grating structure teeth, and limits the lifting height of the stage 20 in different areas to be different to adapt to the change of the direction of the teeth of different grating structures, that is, the imprint template 21 connected to the stage 20 is driven by the stage 20, and the heights of different areas of the imprint template 21 can be different, such as Figure 7 , the lifting height on the left side of the middle is greater than the lifting height on the right side of the middle; of course Figure 7 This is only an example, and various situations may be limited to different areas being lifted to different heights or some areas being the same height, etc., all of which are within the scope of protection of the present utility model and do not depart from the essence of the present utility model.

[0045] It can be known that in order to adapt to the changes in different heights in different areas, the changes in the imprint template 21 can be driven by the change in the height of the carrier 20, and in order to more easily achieve the purpose of the utility model, the utility model can limit the carrier 20 to a material with a certain toughness to meet the requirements of the imprint template 21 being formed on one side of the carrier 20 through vacuum negative pressure or other means, and at the same time adapting to the height changes of different telescopic parts 60. Such a design is beneficial to the utility model.

[0046] The carrier 20 is annular in structure, and the telescopic parts 60 are evenly arranged on one side of the carrier, and the positions of the telescopic parts 60 are adapted to the orientations of different imprinted grating structures; that is, the positions of the telescopic parts 60 must ensure that there are a certain number of telescopic parts in each grating structure area, so that the demolding of the area can be achieved through the telescopic parts in the area, and at the same time, it should be ensured that the setting positions of the telescopic parts are as consistent as possible with the orientations of the teeth of different grating structures to facilitate demolding; it is disadvantageous for technical personnel in this field to avoid the situation where there are no telescopic parts in the grating structure area and even if there are telescopic parts, they are contrary to the orientation of the grating structure teeth.

[0047] like Figures 1-2 A transparent area is set in the middle of the upper shell 10, such as setting the area between the two vents 14 of the upper shell 10 to be transparent, so as to facilitate ultraviolet exposure and facilitate the imprint curing operation during the imprinting process.

[0048] Further reference Figure 1 The wafer 30 as a substrate is placed between the stage 20 and the substrate 11, and is arranged corresponding to the imprint structure area of ​​the imprint template 21, so that the imprint structure on the imprint template 21 can be complementary to each other and formed on the wafer surface; of course, Figure 1 Only the wafer 30 is shown to be placed on the substrate 11. Further, as an alternative solution, Figure 2 As shown, the wafer 30 is placed on the lifting plate 40, and the lifting plate 40 is driven by the driving rod 50 to realize the up and down driving of the lifting plate 40. The driving rod 50 is connected to the driving control (not shown in the figure), so that according to the imprinting requirements, the lifting plate can be autonomously controlled to adjust the distance of the imprint template 21 to imprint the wafer 30; of course, Figures 1-2 The limited method is only one method of controlling the wafer, and the present invention does not make any limitation within the alternative scheme.

[0049] Based on the imprinting device described in any of the above embodiments, using the device includes the following steps:

[0050] S1: Prepare the stage 20 with the imprint template 21 and the wafer 30 in advance, and place the stage 20 and the wafer 30 in the imprint device; then seal the stage 20 and the wafer 30 through the sealing member 12 and the connecting member 13, and form a sealed chamber 1 between the upper housing 10 and the stage 20, and a sealed chamber 2 between the stage 20 and the substrate 11;

[0051] S2: The sealed chamber 1 and the sealed chamber 2 are simultaneously evacuated through the vent hole 14, and the air pressure of the sealed chamber 1 and the sealed chamber 2 is always the same during this process;

[0052] In this step, the sealed chamber 1 and the sealed chamber 2 are simultaneously and synchronously evacuated through the vent holes 14 on the upper shell 10 and the vent holes 14 on the substrate 11, so that the environment where the wafer 30 and the imprint template 21 are located becomes a vacuum environment to prevent bubbles from being generated during the imprinting process; at the same time, during operation, the air pressure of the sealed chamber 1 and the sealed chamber 2 must be kept the same to prevent the imprint template from being stretched or squeezed due to different air pressures, resulting in damage and deformation, which is undesirable. Therefore, in the process of evacuating the two chambers, the gas pressure of the two chambers must always be kept the same; Figure 2 As shown, all parts are ready.

[0053] S3: Based on the preset pressure, the pressures of the sealed chamber 1 and the sealed chamber 2 are controlled respectively, so that the pressure of the sealed chamber 1 is at least greater than the pressure of the sealed chamber 2, and the stage 20 is controlled to move downward by changing the pressure difference to achieve imprinting;

[0054] In this step, the sealed chamber 1 and the sealed chamber 2 are inflated through the vent hole 14, so that the pressure of the sealed chamber 1 is at least 0.2 MPa greater than the pressure of the sealed chamber 2, and then the stage 20 is controlled to move slowly downward by changing the pressure difference while controlling the pressure difference, thereby driving the imprint template 21 to move downward. When the imprint template 21 is closely attached to the surface of the wafer 30, the corresponding pressure difference between the two is maintained for a certain period of time, such as 5 seconds, so as to achieve the imprinting steps of different structural areas;

[0055] S4: After a period of time of imprinting, the imprinting adhesive is cured (the imprinting adhesive is not shown in the figure) to completely transfer the optical structure of the imprinting template into the imprinting adhesive;

[0056] like Figure 4 As shown, in this step, ventilation is continued to maintain a preset pressure difference between the sealed chamber 1 and the sealed chamber 2. After a period of time, ultraviolet exposure is achieved through the transparent area in the middle of the upper shell 10, and curing is performed. After ultraviolet exposure for a period of time, the optical structure of the imprint template is completely transferred to the imprint glue;

[0057] S5: adjusting the air pressure of the sealed chamber 1 to be the same as or less than the air pressure of the sealed chamber 2; according to the preset demoulding direction, controlling different telescopic parts to extend and retract to different heights in the vertical direction, thereby controlling the carrier 20 in different imprinting areas to be lifted to different heights, so that the connected imprinting template is also adapted to the height changes of different telescopic parts 60;

[0058] In this process, first, Figure 8 As shown, assuming that an imprinting structure 100 is set on the imprinting template, which includes a coupling area, a turning area and a coupling-out area, or the imprinting structure 100 includes a coupling area and a coupling-out area, but does not include a turning area, and the like structures are all within the scope of the imprinting structure of the present invention.

[0059] When the embossing is completed, during demolding, when the turning area is not included, the preset demolding direction is to first decouple the out-of-region and then decouple the in-region, and the demolding direction is adapted to different grating structure orientations.

[0060] When the turning area is also included, the preset demolding direction is to first decouple the outgoing area and the turning area, and then decouple the incoming area. The demolding direction is adapted to different grating structure orientations.

[0061] It is further explained that the demoulding direction is adapted to different orientations of the grating structure, which means that when demoulding, the direction consistent with the orientation of the grating structure should be selected as much as possible; when there are multiple grating structures with different orientations, the demoulding order of different structures is limited, taking into account different orientations.

[0062] Since the grating structure may be straight teeth, helical teeth, flared or a combination thereof, different structures have different demolding methods. When it comes to helical teeth, specifically, Figure 8 , set the positions of the eight telescopic members 60 to be A1, A2, A3, ..., A8, respectively, first determine the specific position of the telescopic member 16 closest to the outcoupling region grating structure, such as Figure 8 The figure shows the distances of the out-coupling area from different telescopic parts, such as the distance to point A1 is S1, the distance to point A2 is S2, the distance to point A3 is S3... and so on. The position of the telescopic part closest to the out-coupling area grating structure is determined as the position where A2 is located, and then the positions of the telescopic parts adjacent to the position on the left and right, namely A1 and A3, are determined. A2 is used as the starting point for the out-coupling area grating structure to be demolded.

[0063] At the same time, based on the same idea, for the helical teeth, the specific position of the telescopic member 16 closest to the grating structure in the turning area is determined, such as Figure 8, determine the distance to different positions, such as A6, A7, and A8. If they are S6, S7, and S8 respectively, then the shortest distance toward the grating structure in the turning area is determined to be S7, and A7 is used as the starting point for demolding toward the grating structure in the turning area.

[0064] Therefore, when the helical gear is demoulded, the telescopic part with the grating structure facing the closest distance in the out-coupling area and the turning area is selected as the starting point for demoulding the corresponding area.

[0065] When demolding the helical teeth, first adjust the air pressure in sealed chamber one to make it the same as the air pressure in sealed chamber two, so that the pressure difference between the two is 0, so as to prevent structural damage caused by the pressure difference. After completing the pressure difference adjustment, first remove the decoupling area, and control the control system to extend the grating structure in the decoupling area toward the nearest A2 telescopic part by a certain distance, such as not more than 1 / 2 of the height of the grating structure in the decoupling area, and then synchronously control the telescopic parts of A1 and A3 adjacent to A2 to extend by a certain distance, such as not more than 1 / 3 of the height of the grating structure in the decoupling area, so as to achieve a semi-demolding state of the decoupling area.

[0066] Then, the turning area is released, and the control system is used to control the A7 telescopic part closest to the turning area to extend a certain distance, such as not more than 1 / 2 of the height of the grating structure in the turning area. Then, the telescopic parts of A6 and A8 adjacent to A7 are synchronously controlled to extend a certain distance, such as not more than 1 / 3 of the height of the grating structure in the turning area, to achieve a semi-demolding state of the turning area.

[0067] After completing the above steps, the three telescopic parts A1, A2, A3 close to the decoupling area and the three telescopic parts A6, A7, A8 close to the turning area are synchronously controlled to extend at the same time, maintaining a uniform speed to remove the decoupling area and the turning area.

[0068] That is, with respect to the coupling area and the turning area, the utility model does not completely remove the coupling area and then remove the turning area, but keeps the coupling area in a semi-demolded state, and then synchronously makes the turning area also in a semi-demolded state, and then removes the coupling area and the turning area at the same time. This is more conducive to protecting different tooth shapes in different structural areas and is beneficial to technical personnel skilled in the art.

[0069] Further with respect to the coupling area, first determine the position of the telescopic component that is closest to the grating structure in the coupling area, and stretch it by a certain distance, such as not greater than 1 / 2 of the height of the grating structure in the coupling area. Then, synchronously control the two telescopic components adjacent to it on the left and right to stretch by a certain distance, such as not greater than 1 / 3 of the height of the grating structure in the coupling area. Finally, control the nearest telescopic component and the telescopic components adjacent to it to stretch by a certain distance at the same rate at the same time to achieve demolding of the coupling area.

[0070] S6: After the above step S5 is completed, it is determined whether the imprinting template is completely removed. If it is not completely removed, the demoulding step of the area corresponding to step S5 is selectively repeated to achieve complete demoulding.

[0071] Based on the same demolding idea, when targeting flash or straight teeth or their combination, there is no need to consider the direction of the grating structure. The position of the telescopic part closest to the coupling area and the turning area is directly determined, and the telescopic parts adjacent to it on the left and right are synchronously controlled to complete the demolding of different areas based on the same demolding method as before.

[0072] Of course, the above embodiment shows the demoulding method when the turning area is included. When the turning area is not included, the corresponding demoulding step can be cancelled.

[0073] Furthermore, in some embodiments, the wafer includes a multi-mesh imprint structure, such as Fig. 9 As shown, assuming that it includes a four-mesh embossing structure, such as serial numbers 1 to 4, when demolding, combined with Figure 7 Demolding direction, for ease of explanation, combined with Fig. 9 Top view, assuming that the embossed structures 1 to 2 are located at Figure 7 The left area in the figure, No. 3 to No. 4 are located in the right area. When the stamping is completed and the demoulding is carried out, it is limited to start from the right side. Fig. 9 , prioritize the synchronous removal of coupling-out areas 3 to 4 and the turning area, and then the coupling-in area. The demolding method is as described above. Based on the tooth shape of the grating structure, the position of the telescopic part closest to it is determined to achieve demolding. When the demolding of grating structures 3 to 4 is completed, based on the same principle, the structures of grating structures 1 and 2 are synchronously removed.

[0074] By analogy, when there are multiple meshes, the preset demoulding direction sequence is to first decouple the outgoing area and the turning area, and then decouple the incoming area. After completing the demoulding of one area, the next area is demoulded, and the cycle is repeated to achieve the demoulding of the entire imprint template.

[0075] The embossing device provided by the utility model can, to a certain extent, be applicable to the demoulding of various grating structures, and during demoulding, it can reduce the damage of the embossing template to different structures and improve the integrity of demoulding, which is beneficial to technical personnel in this field.

[0076] The above specific implementations do not constitute a limitation on the protection scope of the present utility model. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. An imprinting device, comprising a substrate, an upper shell, a sealing member, a connecting member and a stage; It is characterized in that The upper shell is connected to the carrier through the connecting member to form a sealed chamber 1 between the upper shell and the carrier; the sealing member is arranged between the carrier and the substrate to form a sealed chamber 2 between the carrier and the substrate; an imprint template is formed on the carrier; at least two telescopic members are arranged on the side of the carrier away from the imprint template, at least two of the telescopic members are located between the carrier and the substrate, and the carrier is lifted to different heights in different imprinting areas through the telescopic effect of the telescopic members.

2. The imprinting device according to claim 1, It is characterized in that At least one ventilation hole is independently arranged on the upper shell and the base plate, and at least one transparent area is arranged in the middle of the upper shell.

3. The imprinting device according to claim 1 or 2, It is characterized in that Different retractable members are retracted to different heights, and the platforms in different imprinting areas are controlled to be lifted to different heights, so that the imprinting templates in the corresponding connection areas are also adapted to the height changes of the retractable members.

4. The imprinting device according to claim 3, It is characterized in that The connecting member and the sealing member may be integrally provided.

5. The imprinting device according to claim 1 or 2, It is characterized in that The imprint template is attached to a side of the stage away from the substrate.

6. The imprinting device according to claim 5, It is characterized in that The lifting heights of the platform are different in different areas to adapt to the changes in the directions of the teeth of different grating structures. The different areas are defined as the locations of the different telescopic members.

7. The imprinting device according to claim 3, It is characterized in that The seal adapts to different height variations of the carrier.

8. The imprinting device according to claim 5, It is characterized in that The platform is annular in structure, and at least two of the telescopic members are evenly arranged on one side of the platform. The positions of the telescopic members are adapted to the orientations of different imprinted grating structures.

9. The imprinting device according to claim 3, It is characterized in that The upper shell is indirectly connected to the carrier through the connecting member to form a sealed chamber 1 between the upper shell and the carrier.

10. The imprinting device according to claim 3, It is characterized in that The carrier and the substrate are indirectly connected through the sealing member to form a second sealed chamber between the carrier and the substrate.

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