Driving mechanism for scanning system of ion implanter

Abstract

The utility model provides a driving mechanism for a scanning system of an ion implanter, which comprises a support assembly, a power driving assembly, a switching transmission assembly, a rotation sensing assembly, a bearing support assembly, a circumferential rotation assembly and an axial transmission assembly which are tightly mounted in the support assembly, so that the driving mechanism is small in occupied space and high in reliability. Equipment space can be effectively utilized, accurate control over vertical scanning motion of the target disc assembly is achieved, the buffering cushion block between the driving base plate and the supporting frame can absorb vibration energy generated when the driving motor operates, driving stability is guaranteed, and therefore the rotary motion of the switching transmission assembly is stable, and the stability of the target disc assembly is improved. The rotation angle of the transmission end column is metered through the photoelectric sensor and the rotary coding disc, the rotation state of the switching transmission assembly can be accurately sensed in real time, information is transmitted to the control system for feedback control, the requirement of the scanning system of the ion implanter is met, the ion implantation process is stable and accurate, and the efficiency is high. And the performance of the integrated circuit is improved.

Description

Technical Field

[0001] The utility model relates to integrated circuit production equipment, in particular to a driving mechanism for a scanning system of an ion implanter. Background Art

[0002] Patent document CN109860012B discloses a vertical scanning device for an ion implanter, the ion implanter includes a vacuum chamber and a target stage located in the vacuum chamber, the vertical scanning device includes a bracket, a spindle, a first driving mechanism for driving the spindle to rise and fall, and a second driving mechanism for driving the spindle to rotate, the vacuum chamber is arranged on the bracket, the upper end of the spindle is connected to the target stage, the lower end of the spindle extends outside the vacuum chamber and is connected to the first driving mechanism and the second driving mechanism, which can reduce the space occupied by the vacuum process chamber and avoid affecting the ultimate vacuum degree of the process chamber. However, the driving mechanism structure used in this scanning device is relatively complex, occupies a large space in the ion implanter, and its own operating stability is difficult to guarantee. Therefore, it is necessary to optimize its structure to overcome the above-mentioned defects. Utility Model Content

[0003] The utility model aims to provide a driving mechanism for a scanning system of an ion implanter.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A driving mechanism for an ion implanter scanning system, comprising:

[0006] A support assembly component is installed in the base and has an assembly space inside;

[0007] A power drive assembly, which is installed in the support assembly assembly and can operate in the support assembly assembly;

[0008] A transfer transmission assembly is installed in the support assembly and connected with the power drive assembly, and the power drive assembly drives the transfer transmission assembly to rotate in the support assembly;

[0009] A rotation sensing assembly, which is installed between the transfer transmission assembly and the support assembly assembly and can sense the rotation state of the transfer transmission assembly;

[0010] A swivel support assembly, which is installed in the support assembly assembly and has a swivel space inside;

[0011] A circumferential rotation assembly, which is installed in the swivel support assembly and connected with the transfer transmission assembly, and the transfer transmission assembly drives the circumferential rotation assembly to perform circumferential rotation in the swivel support assembly;

[0012] The axial transmission component is installed on the circumferential rotation component and connected with the target disk component. The circumferential rotation component drives the circumferential displacement component to move axially, so that the target disk component performs vertical scanning motion.

[0013] Specifically, the support assembly components include:

[0014] The supporting frame is formed by enclosing plates, forming an assembly space inside the supporting frame, and the side of the supporting frame is fixed to the base by connecting bolts.

[0015] The power drive assembly includes:

[0016] A driving seat plate, which is located below the supporting frame and is fixed to the bottom of the supporting frame by connecting bolts;

[0017] The driving motor is installed at the bottom of the driving seat plate, and its power output shaft penetrates the driving seat plate and extends to the top of the driving seat plate.

[0018] In one embodiment of the utility model, a buffer pad is installed between the driving seat plate and the supporting frame, and the buffer pad is used to buffer the driving motor, absorb the vibration energy generated when the driving motor is running, and ensure its operating stability.

[0019] The transfer drive assembly includes:

[0020] The transmission end column is located above the driving seat plate and is engaged with the end of the power output shaft of the driving motor. The driving motor drives the transmission end column to rotate.

[0021] The rotation sensing components include:

[0022] A sensing mounting plate is installed in the supporting frame and is located above the driving seat plate, and the transmission end column passes through the sensing mounting plate and then extends to the top of the sensing mounting plate;

[0023] A photoelectric sensor is installed on the sensing mounting plate and corresponds to the position of the transmission end column;

[0024] The rotary encoder disk is installed in the transmission end column and cooperates with the photoelectric sensor. The photoelectric sensor and the rotary encoder disk jointly measure the rotation angle of the transmission end column.

[0025] In one embodiment of the utility model, the photoelectric sensor and the rotating encoder disk are performed by the servo encoder of the prior art. There are several equidistant slots on the rotating encoder disk, each slot represents a counting unit. When the rotating encoder disk rotates, the change of the slot will be detected by the photoelectric sensor, and it will be converted into an electrical signal and transmitted back to the control system. The control system calculates the exact position of the transmission end column based on these signals and performs feedback control.

[0026] The swivel support assembly includes:

[0027] A support seat plate, which is installed in the support frame and is located above the sensing mounting plate;

[0028] The swivel end head is installed in the support base plate through a bearing and can rotate in the support base plate.

[0029] The circumferential rotation components include:

[0030] A rotary screw rod is installed in the rotating end head, and its top end extends above the supporting base plate;

[0031] The rotary end tube is located between the support base plate and the sensing mounting plate, and its two ends are respectively engaged with the rotary screw and the transmission end column. The transmission end column drives the rotary screw to perform circumferential rotation through the rotary end tube.

[0032] The axial transmission assembly includes:

[0033] A transmission nut, which is sleeved on the rotary screw and can move axially along the rotary screw;

[0034] The matching end head is installed on the driving nut and is connected with the target plate assembly through a connecting piece. The driving nut can be connected with the target plate assembly through the matching end head to carry the target plate assembly to perform vertical scanning movement.

[0035] The advantages of the utility model are:

[0036] The drive mechanism cooperates with components such as a support assembly component, a power drive component, a transfer transmission component, a rotation sensing component, a rotation support component, a circumferential rotation component and an axial transmission component. Each component is tightly installed in the support assembly component, occupies a small space, can effectively utilize the equipment space, and realizes precise control of the vertical scanning movement of the target disk component. The buffer pad between the drive base plate and the support frame can absorb the vibration energy of the drive motor during operation to ensure the stability of the drive, thereby making the rotation movement of the transfer transmission component smooth. The rotation angle of the transmission end column is measured by a photoelectric sensor and a rotating encoder disk, and the rotation state of the transfer transmission component can be accurately sensed in real time, and the information is transmitted to the control system for feedback control, thereby meeting the movement requirements of the ion implanter scanning system, making the ion implantation process stable and accurate, which is beneficial to improving the performance of the integrated circuit. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a structural schematic diagram of a driving mechanism for an ion implanter scanning system proposed by the utility model;

[0038] Figure 2It is one of the side structural diagrams of the driving mechanism;

[0039] Figure 3 This is the second schematic diagram of the side structure of the drive mechanism. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0041] like Figure 1 to Figure 3 As shown, the driving mechanism for the scanning system of the ion implanter proposed by the utility model includes a support assembly component, a power drive assembly, a transfer transmission component, a rotation sensing component, a rotation support component, a circumferential rotation component and an axial transmission component. The support assembly component is installed in the machine base, and has an assembly space inside. The power drive assembly is installed in the support assembly component and can run in the support assembly component. The transfer transmission component is installed in the support assembly component and connected with the power drive assembly. The power drive assembly drives the transfer transmission component to rotate in the support assembly component. The rotation sensing component The measuring component is installed between the transfer transmission component and the supporting assembly component, and can sense the rotation state of the transfer transmission component. The rotating support component is installed in the supporting assembly component, and has a rotation space inside. The circumferential rotation component is installed in the rotating support component and is connected with the transfer transmission component. The circumferential rotation component is driven by the transfer transmission component to perform circumferential rotational motion in the rotating support component. The axial transmission component is installed on the circumferential rotation component and is connected with the target disk component. The circumferential rotation component drives the circumferential displacement component to move axially, so that the target disk assembly performs vertical scanning motion.

[0042] In Example 1, the support assembly component includes a support frame 100, which is formed by enclosing plates and forming an assembly space inside the support frame. The side of the support frame is fixed to the base by connecting bolts.

[0043] The power drive assembly includes a drive base plate 210 and a drive motor 220. The drive base plate is located below the support frame and is fixed to the bottom of the support frame by connecting bolts. The drive motor is installed at the bottom of the drive base plate, and its power output shaft passes through the drive base plate and extends to the top of the drive base plate.

[0044] The transfer transmission assembly includes a transmission end column 300, which is located above the driving base plate and is engaged with the end of the power output shaft of the driving motor. The driving motor drives the transmission end column to rotate.

[0045] The rotary sensing assembly includes a sensing mounting plate 410, a photoelectric sensor 420 and a rotating encoding disk 430. The sensing mounting plate is installed in the support frame and is located above the driving base plate. The transmission end column extends above the sensing mounting plate after passing through the sensing mounting plate. The photoelectric sensor is installed on the sensing mounting plate and corresponds to the position of the transmission end column. The rotating encoding disk is installed in the transmission end column and cooperates with the photoelectric sensor. The photoelectric sensor and the rotating encoding disk jointly measure the rotation angle of the transmission end column.

[0046] The swivel support assembly includes a support base plate 510 and a swivel end head 520. The support base plate is installed in the support frame and is located above the sensing mounting plate. The swivel end head is installed in the support base plate through a bearing and can rotate in the support base plate.

[0047] The circumferential rotation component includes a rotating screw 610 and a rotating end tube 620. The rotating screw is installed in the supporting end head, and its top end extends above the support seat plate. The rotating end tube is located between the support seat plate and the sensing mounting plate, and its two ends are respectively engaged with the rotating screw and the transmission end column. The transmission end column drives the rotating screw to perform circumferential rotation through the rotating end tube.

[0048] The axial transmission assembly includes a transmission nut 710 and a matching end 720. The transmission nut is sleeved on the rotary screw and can move axially along the rotary screw. The matching end is installed on the transmission nut and is engaged with the target disk assembly through a connecting piece. The transmission nut can be connected with the target disk assembly through the matching end to carry the target disk assembly for vertical scanning movement.

[0049] In Embodiment 2, the support assembly component includes a support frame 100, which is formed by enclosing plates and forming an assembly space inside the support frame. The side of the support frame is fixed to the base by connecting bolts.

[0050] The power drive assembly includes a drive base plate 210 and a drive motor 220. The drive base plate is located below the support frame and is fixed to the bottom of the support frame by connecting bolts. The drive motor is installed at the bottom of the drive base plate, and its power output shaft passes through the drive base plate and extends to the top of the drive base plate.

[0051] In this embodiment, a buffer pad 230 is installed between the driving seat plate and the supporting frame, and the buffer pad is used to buffer the driving motor, absorb the vibration energy generated when the driving motor is running, and ensure its operating stability.

[0052] The transfer transmission assembly includes a transmission end column 300, which is located above the driving base plate and is engaged with the end of the power output shaft of the driving motor. The driving motor drives the transmission end column to rotate.

[0053] The rotary sensing assembly includes a sensing mounting plate 410, a photoelectric sensor 420 and a rotating encoding disk 430. The sensing mounting plate is installed in the support frame and is located above the driving base plate. The transmission end column extends above the sensing mounting plate after passing through the sensing mounting plate. The photoelectric sensor is installed on the sensing mounting plate and corresponds to the position of the transmission end column. The rotating encoding disk is installed in the transmission end column and cooperates with the photoelectric sensor. The photoelectric sensor and the rotating encoding disk jointly measure the rotation angle of the transmission end column.

[0054] In this embodiment, the photoelectric sensor and the rotating encoder disk are performed by the servo encoder of the prior art. There are several equidistant slots on the rotating encoder disk, and each slot represents a counting unit. When the rotating encoder disk rotates, the change of the slot will be detected by the photoelectric sensor, and it will be converted into an electrical signal and transmitted back to the control system. The control system calculates the exact position of the transmission end column based on these signals and performs feedback control. Its structure is prior art, so it is not described in detail.

[0055] The swivel support assembly includes a support base plate 510 and a swivel end head 520. The support base plate is installed in the support frame and is located above the sensing mounting plate. The swivel end head is installed in the support base plate through a bearing and can rotate in the support base plate.

[0056] The circumferential rotation component includes a rotating screw 610 and a rotating end tube 620. The rotating screw is installed in the supporting end head, and its top end extends above the support seat plate. The rotating end tube is located between the support seat plate and the sensing mounting plate, and its two ends are respectively engaged with the rotating screw and the transmission end column. The transmission end column drives the rotating screw to perform circumferential rotation through the rotating end tube.

[0057] The axial transmission assembly includes a transmission nut 710 and a matching end 720. The transmission nut is sleeved on the rotary screw and can move axially along the rotary screw. The matching end is installed on the transmission nut and is engaged with the target disk assembly through a connecting piece. The transmission nut can be connected with the target disk assembly through the matching end to carry the target disk assembly for vertical scanning movement.

[0058] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. A driving mechanism for an ion implanter scanning system, characterized in that: include: A support assembly component is installed in the base and has an assembly space inside; A power drive assembly, which is installed in the support assembly assembly and can operate in the support assembly assembly; A transfer transmission assembly is installed in the support assembly and connected with the power drive assembly, and the power drive assembly drives the transfer transmission assembly to rotate in the support assembly; A rotation sensing assembly, which is installed between the transfer transmission assembly and the support assembly assembly and can sense the rotation state of the transfer transmission assembly; A swivel support assembly, which is installed in the support assembly assembly and has a swivel space inside; A circumferential rotation assembly, which is installed in the swivel support assembly and connected with the transfer transmission assembly, and the transfer transmission assembly drives the circumferential rotation assembly to perform circumferential rotation in the swivel support assembly; The axial transmission component is installed on the circumferential rotation component and connected with the target disk component. The circumferential rotation component drives the circumferential displacement component to move axially, so that the target disk component performs vertical scanning motion.

2. A driving mechanism for an ion implanter scanning system according to claim 1, characterized in that: The support assembly components include: The supporting frame is formed by enclosing plates, forming an assembly space inside the supporting frame, and the side of the supporting frame is fixed to the base by connecting bolts.

3. The driving mechanism for an ion implanter scanning system according to claim 2, characterized in that: The power drive assembly includes: A driving seat plate, which is located below the supporting frame and is fixed to the bottom of the supporting frame by connecting bolts; The driving motor is installed at the bottom of the driving seat plate, and its power output shaft penetrates the driving seat plate and extends to the top of the driving seat plate.

4. The driving mechanism for an ion implanter scanning system according to claim 3, characterized in that: The transfer drive assembly includes: The transmission end column is located above the driving seat plate and is engaged with the end of the power output shaft of the driving motor. The driving motor drives the transmission end column to rotate.

5. The driving mechanism for an ion implanter scanning system according to claim 4, characterized in that: The rotation sensing components include: A sensing mounting plate is installed in the supporting frame and is located above the driving seat plate, and the transmission end column passes through the sensing mounting plate and then extends to the top of the sensing mounting plate; A photoelectric sensor is installed on the sensing mounting plate and corresponds to the position of the transmission end column; A rotary encoder disk is installed in the transmission end column and cooperates with the photoelectric sensor.

6. The driving mechanism for an ion implanter scanning system according to claim 5, characterized in that: The swivel support assembly includes: A support seat plate, which is installed in the support frame and is located above the sensing mounting plate; The swivel end head is installed in the support base plate through a bearing and can rotate in the support base plate.

7. The driving mechanism for an ion implanter scanning system according to claim 6, characterized in that: The circumferential rotation components include: A rotary screw rod is installed in the rotating end head, and its top end extends above the supporting base plate; The rotary end tube is located between the support base plate and the sensing mounting plate, and its two ends are respectively connected with the rotary screw and the transmission end column.

8. The driving mechanism for an ion implanter scanning system according to claim 7, characterized in that: The axial transmission assembly includes: A transmission nut, which is sleeved on the rotary screw and can move axially along the rotary screw; The matching end head is installed on the driving nut and is connected with the target plate assembly through a connecting piece. The driving nut can be connected with the target plate assembly through the matching end head.

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