Auxiliary laminating structure for gum film laminator
The auxiliary laminating structure addresses wafer crushing and bubble issues by using a cushioned pressing mechanism with a silicone sleeve and rubber ball, improving film adherence and dust removal in semiconductor packaging.
Patent Information
- Application Number
- CN202421019933.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-11
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2034-05-11
AI Technical Summary
Existing laminating machines crush thin silicon wafers and generate bubbles between the film and wafer due to hard pressing mechanisms and loose film tension, affecting film quality.
An auxiliary laminating structure with a stainless steel cylinder and silicone sleeve reducing hardness, a rubber ball for bubble prevention, and an air cushion for dust removal, combined with motors and rollers for film handling.
Reduces wafer fragmentation and bubble formation while ensuring film adherence, enhancing film quality and dust removal efficiency.
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Figure CN222214134U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor packaging, and in particular relates to an auxiliary laminating structure for a back-adhesive film laminating machine. Background Art
[0002] In the field of semiconductor packaging, a laminating machine is used to apply adhesive film to the back of the substrate. Its working principle mainly includes steps such as film feeding, film lamination, and film cutting. The existing pressing mechanism is relatively hard. When operating silicon wafers with a thickness of about 100um, the existing pressing mechanism can easily crush the silicon wafers. In addition, when laminating the film, if the film is not tightened, bubbles are easily generated between the silicon wafer and the film, affecting the quality of the film. Utility Model Content
[0003] The purpose of the utility model is to provide an auxiliary laminating structure for a back-adhesive film laminating machine to solve the problems in the prior art that the existing pressing mechanism is relatively hard and easily crushes the silicon wafers when operating thin silicon wafers, and that when laminating the film, when the film is not tightened, bubbles are easily generated between the silicon wafer and the film, affecting the quality of the film laminating.
[0004] To achieve the above objectives, the present invention provides the following technical solutions:
[0005] An auxiliary laminating structure for a self-adhesive film laminating machine includes a platform, an electric telescopic rod is installed on the surface of the platform, a pressing column is installed on the output end of the electric telescopic rod, and the pressing column includes a mounting plate, a stainless steel cylinder and a silicone sleeve. The mounting plate is fixedly connected to the output end of the electric telescopic rod, the stainless steel cylinder is fixedly connected to the bottom surface of the mounting plate, and the silicone sleeve is fixedly connected to the arc surface of the stainless steel cylinder. The side wall of the mounting plate is fixedly connected to a connecting block, the bottom surface of the connecting block is fixedly connected to a second motor, the output end of the second motor is fixedly connected to a long rod, the arc surface of the long rod is fixedly connected to a strip plate, and the surface of the strip plate is fixedly connected to a rubber ball.
[0006] Preferably: both sides of the platform are fixedly connected with fixed plates, the front sides of the two fixed plates are installed with first motors, the output ends of the first motors are fixedly connected with round rollers, and the arc surfaces of the two round rollers are commonly provided with films.
[0007] Preferably, the end surface of the platform is fixedly connected to two vertical blocks, and the surfaces of the two vertical blocks are rotatably connected to limit rollers.
[0008] Preferably, the two limiting rollers are respectively located below the two round rollers, and the arc surfaces of the limiting rollers are in contact with the film.
[0009] Preferably, the rubber ball is a hemispherical ball.
[0010] Preferably: the side wall of the mounting plate is fixedly connected with a cylinder, a rectangular hole is opened on the arc surface of the cylinder, a pressure plate is slidably connected to the inner wall of the cylinder, an air cushion is bonded to the inner wall of the cylinder, the end face of the pressure plate is fixedly connected with a connecting rod, the end of the connecting rod away from the pressure plate is fixedly connected with a block, the block is threadedly connected to the arc surface of the long rod, a thread is provided on the arc surface of the long rod, and the surface of the air cushion is connected to a conduit.
[0011] Preferably, the connecting rod passes through the cylinder via a rectangular hole on the cylinder, and the cross-section of the end of the conduit away from the air cushion is trapezoidal.
[0012] Compared with the prior art, the beneficial effects of the present invention are:
[0013] 1. The utility model increases cushioning and reduces the occurrence of fragments by arranging a stainless steel cylinder and a silicone sleeve, increasing the thickness of the outermost layer of silicone, reducing the outer diameter of the stainless steel cylinder, and reducing the overall hardness of the pressing column. The contact force can be reduced by reducing the hardness without reducing the air pressure. The silicone pad is inexpensive, easy to purchase and manufacture, and the total outer diameter of the pressing column does not change, so there is no need to adjust the platform height during use.
[0014] 2. The utility model sets a rubber ball and takes advantage of the flexibility and hemispherical shape of the rubber ball. When applying the film, it can be slowly spread from the center of the silicon wafer to the periphery to reduce the generation of bubbles between the film and the silicon wafer. By setting an air cushion and taking advantage of the drive of the second motor, as long as the rubber ball is used, the air cushion will be squeezed, and the squeezed air flow will be used to supply air to the top of the film, so as to blow the dust here as far away as possible. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;
[0016] Figure 2 For this utility model Figure 1 A partial front view structural diagram;
[0017] Figure 3 This is a schematic diagram of the planar structure of the pressing column of the utility model;
[0018] Figure 4 This is a schematic diagram of the split structure of the air cushion and cylinder of the utility model;
[0019] Figure 5 This is a test data table after the pressing column of the utility model is changed;
[0020] Figure 6 This is a test data table of the utility model before the pressing column is changed.
[0021] In the figure: 1. Platform; 2. Electric telescopic rod; 3. Pressing column; 31. Stainless steel cylinder; 32. Silicone sleeve; 33. Mounting plate; 4. Fixing plate; 5. First motor; 6. Round roller; 7. Film; 8. Vertical block; 9. Limiting roller; 10. Connecting block; 11. Second motor; 12. Long rod; 13. Strip plate; 14. Rubber ball; 15. Cylinder; 16. Air cushion; 17. Pressing plate; 18. Connecting rod; 19. Block; 20. Catheter. DETAILED DESCRIPTION
[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0023] Reference Figures 1-6 As shown, the utility model provides an auxiliary laminating structure for a self-adhesive film laminating machine, including a platform 1, an electric telescopic rod 2 is installed on the surface of the platform 1, and a pressing column 3 is installed on the output end of the electric telescopic rod 2. The pressing column 3 includes a mounting plate 33, a stainless steel cylinder 31 and a silicone sleeve 32. The mounting plate 33 is fixedly connected to the output end of the electric telescopic rod 2, the stainless steel cylinder 31 is fixedly connected to the bottom surface of the mounting plate 33, and the silicone sleeve 32 is fixedly connected to the arc surface of the stainless steel cylinder 31. The side wall of the mounting plate 33 is fixedly connected to a connecting block 10, and the bottom surface of the connecting block 10 is fixedly connected to a second motor 11, and the second motor 11 can be self-locking. The output end of the second motor 11 is fixedly connected to a long rod 12, and the arc surface of the long rod 12 is fixedly connected to a strip plate 13, and the surface of the strip plate 13 is fixedly connected to a rubber ball 14.
[0024] In this embodiment, Figure 5 and Figure 6 As shown, by increasing the thickness of the outermost layer of silicone, reducing the outer diameter of the stainless steel cylinder 31, and reducing the overall hardness of the pressing column 3, the hardness of the pressing column 3 is reduced from the original 80 to 60. Figure 5 and Figure 6 It can be seen that under the same test conditions, the lower the hardness, the lower the pressure F;
[0025] By increasing the thickness of the outermost layer of silicone, reducing the outer diameter of the stainless steel cylinder 31, and reducing the overall hardness of the pressing column 3, the cushioning is increased and the occurrence of fragments is reduced. The contact force can be reduced by reducing the hardness without reducing the air pressure. The silicone pad is inexpensive, easy to purchase and make, and the total outer diameter of the pressing column 3 does not change, so there is no need to adjust the platform height during use.
[0026] In a further embodiment, referring to Figure 1-Figure 2 Both sides of the platform 1 are fixedly connected with fixed plates 4, the front of the two fixed plates 4 are installed with first motors 5, the output end of the first motor 5 is fixedly connected with a round roller 6, and the arc surfaces of the two round rollers 6 are jointly provided with a film 7.
[0027] Two vertical blocks 8 are fixedly connected to the end faces of the platform 1. The surfaces of both vertical blocks 8 are rotatably connected to limit rollers 9. The two limit rollers 9 are located below the two circular rollers 6, respectively. The arc surfaces of the limit rollers 9 are in contact with the film 7. The rubber ball 14 is a hemispherical ball with a relatively soft and elastic texture.
[0028] In this embodiment, the limiting roller 9 serves to limit the position of the film 7. The two round rollers 6 and the two first motors 5 cooperate to release the film 7 while reeling it in. One end of the film 7 is fixed on the round roller 6, and the first motor 5 can achieve self-locking.
[0029] In a further embodiment, referring to Figure 2 and Figure 4 The side wall of the mounting plate 33 is fixedly connected to the cylinder 15, and a rectangular hole is opened on the arc surface of the cylinder 15. The inner wall of the cylinder 15 is slidably connected to the pressure plate 17. The inner wall of the cylinder 15 is bonded with an air cushion 16. The end face of the pressure plate 17 is fixedly connected to the connecting rod 18. The end of the connecting rod 18 away from the pressure plate 17 is fixedly connected to the block 19. The block 19 is threadedly connected to the arc surface of the long rod 12. The arc surface of the long rod 12 is provided with a thread. The surface of the air cushion 16 is connected to the conduit 20.
[0030] The connecting rod 18 passes through the cylinder 15 via the rectangular hole on the cylinder 15. The cross-section of the end of the conduit 20 away from the air cushion 16 is trapezoidal, so that the airflow can be diffused over a wider range when discharged.
[0031] In this embodiment, the air cushion 16 is made of elastic material and has a cavity inside. After being squeezed, the internal air flow is discharged. When it is not squeezed, it returns to its original shape according to its own elastic force, and air is re-inhaled in this process.
[0032] The working principle of the present invention is as follows: when in use, after placing the silicon wafer at a suitable position on the table 1, the first motor 5 is started, and the output shafts of the two first motors 5 rotate in the same direction. The round roller 6 on one side releases the film 7, and the round roller on the other side reels up the film 7. After the film 7 covers the silicon wafer and is released to a suitable position, the first motor 5 is self-locked. If there is an unevenness between the film 7 and the silicon wafer, the second motor 11 is started to drive the strip plate 13 to rotate, so that the rubber ball 14 rotates to the bottom of the pressing column 3, and the electric telescopic rod 2 is started. Since the rubber ball 14 is soft in texture, when the rubber ball 14 contacts the film 7 and the silicon wafer, it first spreads slowly from the center to the periphery. In this process, it is easy to The bubbles are discharged, and then the rubber ball 14 is removed, and the film 7 is pressed again by the pressing column 3 to make it fit better. Under the action of the silicone sleeve 32, the hardness of the pressing column 3 is reduced to reduce the risk of fragmentation. When the second motor 11 is started, the block 19 will move with the help of the thread on the long rod 12, and the pressure plate 17 will squeeze the air cushion 16. The air cushion 16 is made of elastic material and has a cavity inside. After squeezing, the internal air flow is discharged. When it is not squeezed, it returns to its original state according to its own elastic force. In this process, air is re-inhaled, and the air discharged by the air cushion 16 is discharged from the duct 20, which can discharge the dust above the film 7 to the side, making it difficult for the rubber ball 14 to press the dust tightly on the film 7 when pressing down.
[0033] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. An auxiliary laminating structure for a self-adhesive film laminating machine, comprising a platform (1), It is characterized in that An electric telescopic rod (2) is mounted on the surface of the platform (1); a pressing column (3) is mounted on the output end of the electric telescopic rod (2); the pressing column (3) comprises a mounting plate (33), a stainless steel cylinder (31) and a silicone sleeve (32); the mounting plate (33) is fixedly connected to the output end of the electric telescopic rod (2); the stainless steel cylinder (31) is fixedly connected to the bottom surface of the mounting plate (33); the silicone sleeve (32) is fixedly connected to the arc surface of the stainless steel cylinder (31); a connecting block (10) is fixedly connected to the side wall of the mounting plate (33); a second motor (11) is fixedly connected to the bottom surface of the connecting block (10); a long rod (12) is fixedly connected to the output end of the second motor (11); a strip plate (13) is fixedly connected to the arc surface of the long rod (12); and a rubber ball (14) is fixedly connected to the surface of the strip plate (13).
2. The auxiliary laminating structure for a self-adhesive film laminating machine according to claim 1, Features: Both sides of the platform (1) are fixedly connected with fixed plates (4), the front sides of the two fixed plates (4) are both equipped with first motors (5), the output ends of the first motors (5) are fixedly connected with round rollers (6), and the arc surfaces of the two round rollers (6) are jointly provided with thin films (7).
3. The auxiliary laminating structure for a self-adhesive film laminating machine according to claim 1, Features: The end surface of the platform (1) is fixedly connected to two vertical blocks (8), and the surfaces of the two vertical blocks (8) are rotatably connected to limit rollers (9).
4. The auxiliary laminating structure for a self-adhesive film laminating machine according to claim 3, Features: The two limiting rollers (9) are respectively located below the two round rollers (6), and the arc surfaces of the limiting rollers (9) are in contact with the film (7).
5. The auxiliary laminating structure for a self-adhesive film laminating machine according to claim 1, Features: The rubber ball (14) is a hemispherical body.
6. The auxiliary laminating structure for a self-adhesive film laminating machine according to claim 1, Features: The side wall of the mounting plate (33) is fixedly connected to a cylinder (15), the arc surface of the cylinder (15) is provided with a rectangular hole, the inner wall of the cylinder (15) is slidably connected to a pressure plate (17), the inner wall of the cylinder (15) is bonded with an air cushion (16), the end surface of the pressure plate (17) is fixedly connected to a connecting rod (18), the end of the connecting rod (18) away from the pressure plate (17) is fixedly connected to a block (19), the block (19) is threadedly connected to the arc surface of the long rod (12), the arc surface of the long rod (12) is provided with threads, and the surface of the air cushion (16) is connected to a conduit (20).
7. The auxiliary laminating structure for a self-adhesive film laminating machine according to claim 6, Features: The connecting rod (18) penetrates the cylinder (15) via a rectangular hole on the cylinder (15), and the cross-section of the end of the conduit (20) away from the air cushion (16) is trapezoidal.
Citation Information
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