Novel silicon carbide mirror image slurry
The novel silicon carbide mirror paste addresses wear and stability issues by incorporating a reinforcing rib plate and buffer mechanism, enhancing durability and stability through reduced direct contact and improved clamping security.
Patent Information
- Application Number
- CN202420439792.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-07
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2034-03-07
AI Technical Summary
Existing silicon carbide mirror paste experiences wear and tear during clamping and is not stable enough, leading to reduced service life and use effectiveness.
A novel silicon carbide mirror paste design featuring a reinforcing rib plate, protective mechanism with a wear-resistant fixed shell, and a buffer mechanism with dampers and springs to enhance stability and reduce direct contact wear.
The design improves the bearing capacity and stability of the mirror paste, extending its service life and ensuring secure, shake-free operation during clamping and movement.
Smart Images
Figure CN222214138U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon carbide mirror paste, in particular to a novel silicon carbide mirror paste. Background Art
[0002] Silicon carbide mirror paste, also known as silicon carbide rod reaction sintered silicon carbide mirror paste, is a key component of semiconductor wafer loading system. Silicon carbide mirror paste has stable performance, does not deform in high temperature environment, has large wafer loading force, and is suitable for robot automatic loading and handling systems.
[0003] The prior art has the following problems:
[0004] When the existing silicon carbide mirror slurry is in use, since the mirror slurry is directly connected to the clamping mechanism, it is easy to cause certain damage to the slurry when the mirror slurry is used for a long time, thereby reducing the service life of the mirror slurry. At the same time, during the process of clamping and moving the mirror slurry, the slurry is not stable enough and is prone to shaking, which affects the use effect of the slurry. Utility Model Content
[0005] In view of the deficiencies in the prior art, the utility model provides a novel silicon carbide mirror paste, which solves the problem that the existing silicon carbide mirror paste is prone to cause greater wear and tear during clamping and is not stable enough during use.
[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a novel silicon carbide mirror paste, comprising a mirror paste, a clamping position is arranged on one side surface of the mirror paste, a reinforcing rib plate is arranged on one side of the interior of the mirror paste, a protective mechanism is arranged on the outside of the mirror paste, a buffer mechanism is arranged on the surface of the protective mechanism, a mounting groove is arranged inside the protective mechanism, and a partition is arranged inside the mounting groove;
[0007] The protective mechanism includes a wear-resistant fixed shell, a through slot, a mounting block and a mounting hole. The through slot is arranged inside the wear-resistant fixed shell. A mounting block is fixedly mounted on one side surface of the wear-resistant fixed shell. The mounting hole is arranged on the surface of the mounting block.
[0008] As a preferred technical solution of the utility model, the buffer mechanism includes a damper, a connecting plate, a buffer spring, a fixing rod and a pressure plate, the damper is fixedly connected to the connecting plate, the buffer spring is fixedly connected to the connecting plate, and the fixing rod is fixedly connected to the pressure plate.
[0009] As a preferred technical solution of the utility model, two groups of the protective mechanisms are provided, and the protective mechanisms are fixedly installed on the outer surface of the clamping position.
[0010] As a preferred technical solution of the utility model, the mirror image slurry is fixedly installed inside the through groove, and the wear-resistant fixed shell is fixedly installed on the outer surface of the mirror image slurry.
[0011] As a preferred technical solution of the utility model, the mounting blocks are located on both side surfaces of the wear-resistant fixed shell, the mounting blocks are arranged in a mirror image, and the mounting holes penetrate the wear-resistant fixed shell.
[0012] As a preferred technical solution of the utility model, the mounting groove is fixedly installed at the upper four corners and the lower four corners inside the wear-resistant fixed shell, the buffer mechanism is fixedly installed with the mounting groove, and a partition is fixedly installed inside the mounting groove.
[0013] As a preferred technical solution of the utility model, the damper is fixedly installed in the mounting groove, the fixing rod is fixedly connected between the connecting plate and the pressure plate, the buffer spring is fixedly connected between the connecting plate and the partition, and the fixing rod is slidably connected to the protective mechanism and the partition.
[0014] Compared with the prior art, the utility model provides a new type of silicon carbide mirror paste, which has the following
[0015] Beneficial effects:
[0016] The utility model provides a novel silicon carbide mirror slurry, which effectively improves the overall bearing capacity of the mirror slurry by adding a reinforcing rib plate inside the mirror slurry, and at the same time, through a protective mechanism fixedly installed on the outer surface of the clamping position, the wear-resistant fixed shell of the protective mechanism can prevent the clamping mechanism from directly contacting the mirror slurry, thereby effectively reducing the wear of the mirror slurry and thus effectively improving the service life of the mirror slurry. At the same time, due to the cooperation of the pressure plate and the damper and buffer spring inside the installation groove, when the mirror slurry is clamped and moved by the clamping mechanism, the clamping of the mirror slurry can be ensured to be more firmly, and the shaking of the mirror slurry can also be avoided, thereby improving the use effect of the mirror slurry. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 This is the front view of the overall structure of the mirror paste of the utility model;
[0018] Figure 2 This is an analysis diagram of the internal structure of the mirror paste of the utility model;
[0019] Figure 3 This is a schematic diagram of the structure of the protection mechanism of the utility model;
[0020] Figure 4 It is a side view of the installation structure of the buffer mechanism of the utility model.
[0021] In the figure: 1. mirror slurry; 2. clamping position; 3. reinforcing rib plate; 4. protective mechanism; 41. wear-resistant fixed shell; 42. through groove; 43. mounting block; 44. mounting hole; 5. buffer mechanism; 51. damper; 52. connecting plate; 53. buffer spring; 54. fixing rod; 55. pressure plate; 6. mounting groove; 7. partition. DETAILED DESCRIPTION
[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0023] See also Figure 1-4 In this embodiment: a novel silicon carbide mirror slurry comprises a mirror slurry 1, a clamping position 2 is arranged on one side of the mirror slurry 1, a protective mechanism 4 is installed through the clamping position 2, a reinforcing rib plate 3 is arranged on one side of the inner part of the mirror slurry 1, and the strength of the mirror slurry 1 is improved by the reinforcing rib plate 3, a protective mechanism 4 is arranged on the outer part of the mirror slurry 1, a buffer mechanism 5 is arranged on the surface of the protective mechanism 4, a mounting groove 6 is arranged inside the protective mechanism 4, and a partition plate 7 is arranged inside the mounting groove 6;
[0024] The protective mechanism 4 includes a wear-resistant fixed shell 41, a through groove 42, a mounting block 43 and a mounting hole 44. The through groove 42 is opened inside the wear-resistant fixed shell 41. A mounting block 43 is fixedly installed on the surface of one side of the wear-resistant fixed shell 41. The surface of the mounting block 43 is provided with a mounting hole 44. The wear-resistant fixed shell 41 prevents the clamping mechanism from directly contacting the mirror slurry 1.
[0025] In this embodiment, the buffer mechanism 5 includes a damper 51, a connecting plate 52, a buffer spring 53, a fixing rod 54 and a pressure plate 55. The damper 51 is fixedly connected to the connecting plate 52, the buffer spring 53 is fixedly connected to the connecting plate 52, and the fixing rod 54 is fixedly connected to the pressure plate 55. The reaction force of the buffer mechanism 5 makes the installation of the mirror slurry 1 and the clamping mechanism more secure; the protective mechanism 4 is provided with two groups, the protective mechanism 4 is fixedly installed on the outer surface of the clamping position 2, and the protective mechanism 4 is installed through the clamping position 2; the mirror slurry 1 is fixedly installed inside the through groove 42, the wear-resistant fixed shell 41 is fixedly installed on the outer surface of the mirror slurry 1, and the mirror slurry 1 is installed through the through groove 42; The mounting blocks 43 are located on both side surfaces of the wear-resistant fixed shell 41. The mounting blocks 43 are arranged in a mirror image. The mounting holes 44 penetrate the wear-resistant fixed shell 41. The wear-resistant fixed shell 41 and the clamping mechanism are installed through the mounting blocks 43. The mounting grooves 6 are fixedly installed at the upper four corners and the lower four corners inside the wear-resistant fixed shell 41. The buffer mechanism 5 is fixedly installed with the mounting grooves 6. A partition 7 is fixedly installed inside the mounting grooves 6. The buffer mechanism 5 is installed through the mounting grooves 6. The damper 51 is fixedly installed with the mounting grooves 6. The fixing rod 54 is fixedly connected between the connecting plate 52 and the pressure plate 55. The buffer spring 53 is fixedly connected between the connecting plate 52 and the partition 7. The fixing rod 54 is slidably connected with the protective mechanism 4 and the partition 7.
[0026] The working principle and use process of the utility model are as follows: the operator moves the mirror slurry 1 through the through groove 42 of the wear-resistant fixed shell 41 and then moves it to the clamping position 2 and fixes it with the wear-resistant fixed shell 41. After the installation is completed, the protective mechanism 4 and the mirror slurry 1 are placed inside the clamping mechanism, and the protective mechanism 4 and the mirror slurry 1 are clamped and fixed by passing the fixing screw of the clamping mechanism through the mounting hole 44 of the mounting block 43. The wear on the mirror slurry 1 can be reduced by avoiding direct contact between the clamping mechanism and the mirror slurry 1 through the action of the wear-resistant fixed shell 41 and the pressure plate 55. At the same time, in the process of clamping the mirror slurry 1, the damper 51, the buffer spring 53 and the pressure plate 55 can make the clamping of the mirror slurry 1 more stable, thereby ensuring that the mirror slurry 1 will not shake during use.
[0027] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A novel silicon carbide mirror paste, comprising a mirror paste (1), a clamping position (2) is arranged on one side of the mirror paste (1), and a reinforcing rib plate (3) is arranged on one side of the interior of the mirror paste (1), characterized in that: The mirror slurry (1) is provided with a protective mechanism (4) on its exterior, a buffer mechanism (5) on its surface, a mounting groove (6) on its interior, and a partition plate (7) on its interior; The protection mechanism (4) comprises a wear-resistant fixed shell (41), a through slot (42), a mounting block (43) and a mounting hole (44); the through slot (42) is arranged inside the wear-resistant fixed shell (41); a mounting block (43) is fixedly mounted on one side surface of the wear-resistant fixed shell (41); and a mounting hole (44) is arranged on the surface of the mounting block (43).
2. The novel silicon carbide mirror paste according to claim 1, characterized in that: The buffer mechanism (5) comprises a damper (51), a connecting plate (52), a buffer spring (53), a fixing rod (54) and a pressing plate (55); the damper (51) is fixedly connected to the connecting plate (52); the buffer spring (53) is fixedly connected to the connecting plate (52); and the fixing rod (54) is fixedly connected to the pressing plate (55).
3. The novel silicon carbide mirror paste according to claim 1, characterized in that: The protective mechanism (4) is provided in two groups, and the protective mechanism (4) is fixedly mounted on the outer surface of the clamping position (2).
4. The novel silicon carbide mirror paste according to claim 1, characterized in that: The mirror image slurry (1) is fixedly mounted inside the through groove (42), and the wear-resistant fixed shell (41) is fixedly mounted on the outer surface of the mirror image slurry (1).
5. The novel silicon carbide mirror paste according to claim 1, characterized in that: The mounting blocks (43) are located on both side surfaces of the wear-resistant fixed shell (41), the mounting blocks (43) are arranged in a mirror image, and the mounting holes (44) penetrate the wear-resistant fixed shell (41).
6. The novel silicon carbide mirror paste according to claim 1, characterized in that: The mounting groove (6) is fixedly mounted at the upper four corners and the lower four corners inside the wear-resistant fixed shell (41), the buffer mechanism (5) is fixedly mounted on the mounting groove (6), and a partition plate (7) is fixedly mounted inside the mounting groove (6).
7. The novel silicon carbide mirror paste according to claim 2, characterized in that: The damper (51) is fixedly mounted on the mounting groove (6), the fixing rod (54) is fixedly connected between the connecting plate (52) and the pressure plate (55), the buffer spring (53) is fixedly connected between the connecting plate (52) and the partition (7), and the fixing rod (54) is slidably connected to the protective mechanism (4) and the partition (7).