Turnover equipment and annular sheet carrying turnover robot

Abstract

The utility model relates to the technical field of annular sheet carrying and overturning mechanical equipment, in particular to overturning equipment and an annular sheet carrying and overturning robot. A turnover device comprises a first bearing disc, a second bearing disc and a centering device. The first bearing disc can rotate relative to the second bearing disc, so that the first bearing disc and the second bearing disc are switched from a side-by-side arrangement state to a buckling state, and at least the second bearing disc is annular. The centering device is arranged in an inner ring of the second bearing disc, the center of the centering device coincides with the center of the second bearing disc, the centering device can radially stretch and retract in at least three directions at the same time, and the at least three directions are evenly distributed in the radial direction of the second bearing disc. The overturning equipment and the annular sheet carrying and overturning robot have the advantages that silicon wafers are prevented from being broken, the center position of an annular workpiece can be guaranteed, and the clamping and machining requirements of the next procedure are met.

Description

Technical Field

[0001] The utility model relates to the technical field of annular sheet material conveying and turning mechanical equipment, in particular to a turning device and annular sheet material conveying and turning robot. Background Art

[0002] Elemental silicon is a grey, brittle, tetravalent non-metallic chemical element. 27.8% of the earth's crust is made up of silicon, second only to oxygen. Silicon is a relatively abundant element in nature. Silicon can be found in quartz, agate, flint and common beach stones. Silicon wafers, also known as wafers, are made from silicon ingots. Millions of transistors can be etched on silicon wafers through a special process and are widely used in the manufacture of integrated circuits. Silicon is a semiconductor material and its own conductivity is not very good. However, its resistivity can be precisely controlled by adding appropriate dopants. Therefore, silicon wafers are widely used in many electronic products, mainly in the manufacture of semiconductor devices, solar cells, etc.

[0003] Silicon wafers have high hardness, good wear resistance and pressure resistance, but are relatively brittle. In particular, many electronic components require ring-shaped silicon wafers, which are very easy to break, resulting in high difficulty in processing silicon wafers, especially in the process of handling. The breakage rate is extremely high. Therefore, special equipment is required to handle silicon wafer workpieces. For example, the Chinese invention patent with publication number CN112623746A discloses a movable clamp, a handling robot and an operation method of the movable clamp, including fixed fingers and movable fingers, vacuum suction cups are installed on the opposite surfaces of the fixed fingers and the movable fingers, the vacuum suction cups are arranged relatively, the movable fingers are hinged with the fixed fingers, the first drive motor is connected to the movable fingers from the hinge position, the first drive motor drives the movable fingers to rotate around the fixed fingers at any angle, and also includes a base, a large arm and a lifting assembly, one end of the large arm is rotatably connected to the base, the lifting assembly is rotatably connected to the other end of the large arm, and the movable clamp is connected to the lifting assembly. The fixed clamp picks up the workpiece, the movable clamp cooperates to clamp the workpiece, and the movable clamp realizes the flipping of the workpiece. However, the robot's movable gripper can only grip the silicon wafer at two locations, causing uneven force on the silicon wafer, resulting in breakage. Similarly, when the workpiece is turned over, the silicon wafer is also prone to breakage. In addition, the center position of the workpiece cannot be guaranteed when the movable gripper of the patent picks up the workpiece. The movable gripper is not suitable for the next process that requires the center of the annular workpiece. Utility Model Content

[0004] In view of this, the utility model aims to provide a flipping device and an annular sheet material handling and flipping robot, which adopts a first annular carrying plate and a second carrying plate, the first carrying plate rotates relative to the second carrying plate through a rotating device, a clamping device is provided in the first carrying plate, and a centering device is provided in the second carrying plate. The centering device includes at least three sliders that move along radially evenly distributed tracks, and the three sliders are connected to the rotating plate located at the center of the second carrying plate through a connecting rod, thereby solving the problems of easily causing silicon wafers to break and being unable to ensure the center position of the workpiece.

[0005] In order to solve the above problems, the utility model provides a flipping device, comprising:

[0006] a first carrier plate;

[0007] A second carrier plate, wherein the first carrier plate can rotate relative to the second carrier plate, so that the first carrier plate and the second carrier plate switch from a side-by-side arrangement state to a buckled state, and at least the second carrier plate is annular;

[0008] A centering device is arranged in the inner ring of the second carrier plate, the center of the centering device coincides with the center of the second carrier plate, and the centering device can be radially extended and retracted in at least three directions at the same time, and at least three directions are evenly distributed in the radial direction of the second carrier plate.

[0009] Furthermore, the centering device comprises:

[0010] Tracks, at least three of which are arranged in the inner ring of the second carrier plate, each of which extends from the center of the second carrier plate in a radial direction, and at least three of which are evenly distributed;

[0011] The moving blocks, at least three of which move synchronously along the track respectively.

[0012] Furthermore, the centering device further comprises:

[0013] a turntable, the center of which coincides with the center of the second carrying plate;

[0014] At least three connecting rods are provided, one end of each connecting rod is connected to the rotating disk, and the other end is connected to the moving block, and the connection points between the connecting rods and the rotating disk are evenly distributed on equal circumferences.

[0015] Furthermore, the centering device further comprises:

[0016] A track base, on which at least three tracks are arranged.

[0017] Furthermore, the track base is an equilateral triangle, the center of the track base coincides with the center of the second supporting plate, and one end of the track extending in the radial direction is arranged at each vertex of the triangle.

[0018] Furthermore, a roller is provided on the moving block, and the roller protrudes from the moving block at least in a direction away from the center.

[0019] Furthermore, the first carrier plate is ring-shaped.

[0020] Furthermore, the flipping device further includes:

[0021] The rotating device comprises a rotating drive mechanism and a rotating shaft, wherein the rotating shaft is driven to rotate by the rotating drive mechanism;

[0022] The first carrying plate is connected to the rotating shaft.

[0023] Furthermore, the flipping device further includes:

[0024] A clamping device, comprising a clamping assembly, a clamping drive mechanism and a clamping bracket;

[0025] The clamping drive mechanism and the clamping assembly are fixed on the clamping bracket;

[0026] Clamping a workpiece by the clamping assembly and the first carrier plate;

[0027] The clamping drive mechanism drives the clamping assembly to move in a direction opposite to or away from the first carrier plate, and the clamping assembly rotates along a plane parallel to the first carrier plate;

[0028] The clamping bracket is fixed on the first carrying plate.

[0029] A ring-shaped sheet material handling and flipping robot, comprising:

[0030] A flipping device, such as any of the above flipping devices;

[0031] A body, which is movable, and the flipping device is fixed on the body;

[0032] The picking device comprises a mechanical arm and a mechanical hand, wherein the mechanical hand is fixed on the main body through the mechanical arm, and the mechanical hand has 6 degrees of freedom of movement through the mechanical arm.

[0033] Compared with the prior art, the flipping device described in the utility model has the following advantages:

[0034] The advantage of this technical solution is that a first and a second ring-shaped carrier plate are adopted, the first carrier plate rotates relative to the second carrier plate through a rotating device, a clamping device is provided in the first carrier plate, and a centering device is provided in the second carrier plate. The centering device includes at least three sliders that move along radially evenly distributed tracks, and the three sliders are connected to the rotating plate located at the center of the second carrier plate through connecting rods in the same circle, thereby avoiding the breakage of the silicon wafer and ensuring the center position of the annular workpiece to meet the clamping and processing requirements of the next process. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 A three-dimensional diagram of a flipping device according to an embodiment of the present utility model;

[0036] Figure 2 A three-dimensional diagram of a centering device according to an embodiment of the present utility model;

[0037] Figure 3 A three-dimensional diagram of a first carrier plate and a clamping device according to an embodiment of the present utility model;

[0038] Figure 4 It is a three-dimensional diagram of the annular sheet material handling and flipping robot described in an embodiment of the utility model.

[0039] Description of reference numerals:

[0040] 100-main body, 200-flipping device, 210-first carrying plate, 220-second carrying plate, 230-clamping device, 231-clamping assembly, 232-clamping drive mechanism, 233-clamping bracket, 240-centering device, 241-moving block, 242-track, 243-turntable, 244-connecting rod, 245-roller, 246-track base, 250-rotating device, 251-rotating shaft, 252-rotating drive mechanism, 300-picking device, 400-workpiece. DETAILED DESCRIPTION

[0041] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0042] In the present utility model, the descriptions involving "first", "second", "upper", "lower", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second", "upper", "lower" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in the field to implement. When the technical solutions between the embodiments can be combined, they are all within the protection scope required by the present utility model.

[0043] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0044] like Figures 1 to 3 As shown, a flipping device 200 includes: a first carrier plate 210, a second carrier plate 220 and a centering device 240. The first carrier plate 210 can rotate relative to the second carrier plate 220, so that the first carrier plate 210 and the second carrier plate 220 switch from a side-by-side arrangement state to a buckled state, and at least the second carrier plate 220 is annular. The centering device 240 is arranged in the inner ring of the second carrier plate 220, and the center of the centering device 240 coincides with the center of the second carrier plate 220. The centering device 240 can be radially extended and retracted in at least three directions at the same time, and at least three directions are evenly distributed in the radial direction of the second carrier plate 220.

[0045] The workpiece 400 is placed on the first carrier plate 210, and the first carrier plate 210 is rotated toward the second carrier plate 220, and the workpiece 400 is flipped and placed on the second carrier plate 220. Through the above method, the workpiece 400 can be flipped by the flipping device 200 of this embodiment according to the requirements of the processing process or the test process. As an embodiment, the flipping device 200 of this embodiment can be applied to the flipping of annular workpieces 400. After flipping, in order to facilitate the picking up of the workpiece 400 by a robot, etc., and to ensure the center position of the workpiece 400 after picking up, it is necessary to perform centering correction on the second carrier plate 220, that is, the center of the annular workpiece 400 is overlapped with the center of the annular second carrier plate 220. When picking up, the center of the robot is also picked up with the center of the second carrier plate 220 as the reference. Therefore, a centering device 240 is arranged in the inner ring of the second carrier plate 220, and the center of the centering device 240 coincides with the center of the second carrier plate 220, so that the centering correction operation of the workpiece 400 is achieved by radially contracting in at least three evenly distributed directions.

[0046] The flipping device 200 of this embodiment facilitates the flipping of the annular workpiece 400 and can automatically calibrate the center of the workpiece 400 to meet the clamping and processing requirements of the next process.

[0047] Further, the centering device 240 includes: a track 242, a moving block 241, a rotating disk 243, a connecting rod 244 and a track base 246. At least three tracks 242 are arranged in the inner ring of the second carrier disk 220, each of which extends from the center of the second carrier disk 220 in a radial direction, and at least three tracks 242 are evenly arranged. At least three moving blocks 241 move synchronously along the tracks 242 respectively. The center of the rotating disk 243 coincides with the center of the second carrier disk 220. At least three connecting rods 244 are arranged, one end of each connecting rod 244 is connected to the rotating disk 243, and the other end is connected to the moving block 241, and the connection points of the connecting rod 244 and the rotating disk 243 are evenly distributed on equal circumferences. A roller 245 is arranged on the moving block 241, and the roller 245 protrudes from the moving block 241 at least in a direction away from the center. At least three tracks 242 are arranged on the track base 246. The rail base 246 is in the shape of an equilateral triangle, the center of the rail base 246 coincides with the center of the second carrier plate 220 , and one end of the rail 242 extending in the radial direction is disposed at each vertex of the triangle.

[0048] The track base 246 has an equilateral triangle outer contour and a circular hole inside. The circular hole is sleeved on the outside of the turntable 243. Three tracks 242 are preferably arranged on the track base 246. The three tracks 242 are radial, with one end extending radially toward the center of the second carrier plate 220 and the other end extending radially away from the center of the second carrier plate 220. A moving block 241 is arranged on each track 242. One end of the three connecting rods 244 is connected to the center of the turntable 243 at an equal distance, and the other end is connected to a moving block 241 respectively. Preferably, the centering device 240 also includes a motor, which drives the turntable 243 to rotate. When the turntable 243 rotates, the connecting rod 244 drives the moving block 241 to move synchronously along the track 242, so that each moving block 241 always keeps the same distance from the center, and the center of the annular workpiece 400 is adjusted to coincide with the center of the second carrier plate 220 through the synchronous movement of the three moving blocks 241. The roller 245 is in contact with the inner ring periphery of the workpiece 400 to prevent the moving block 241 from rubbing against the inner ring of the workpiece 400 and damaging the workpiece 400 .

[0049] Furthermore, the first carrier plate 210 is ring-shaped.

[0050] In this embodiment, the workpiece 400 is annular, and the corresponding first carrier plate 210 is also annular. When in use, the workpiece 400 is first placed on the first carrier plate 210. If the workpiece 400 needs to be turned over according to a processing technique or a test technique, the first carrier plate 210 can be turned over to the second carrier plate 220 by the rotating device 250, and the workpiece 400 is turned over and placed on the second carrier plate 220.

[0051] The rotating device 250 includes a rotating drive mechanism 252 and a rotating shaft 251 , and the rotating shaft 251 is driven to rotate by the rotating drive mechanism 252 . The first carrier plate 210 is connected to the rotating shaft 251 .

[0052] Furthermore, the flipping device 200 further includes: a clamping device 230, including a clamping assembly 231, a clamping drive mechanism 232 and a clamping bracket 233. The clamping drive mechanism 232 and the clamping assembly 231 are fixed on the clamping bracket 233. The workpiece 400 is clamped by the clamping assembly 231 and the first carrier plate 210. The clamping assembly 231 is driven by the clamping drive mechanism 232 to move in a direction relative to or away from the first carrier plate 210, and the clamping assembly 231 rotates along a plane parallel to the first carrier plate 210. The clamping bracket 233 is fixed on the first carrier plate 210.

[0053] The flipping device 200 of this embodiment can flip the annular workpiece 400. If the workpiece 400 is processed more precisely, or the material is brittle, especially the workpiece 400 with higher cost, it is necessary to avoid the workpiece 400 from falling off during the reversal process. Therefore, the above-mentioned clamping device 230 is set on the first carrier plate 210. The clamping drive mechanism 232 is preferably a motor and a simple transmission mechanism. The transmission mechanism can be any existing mechanism, and its function can convert the rotation of the motor spindle into axial movement, so that the clamping assembly 231 connected to the motor spindle can move along the motor spindle, and realize the clamping and releasing of the workpiece 400 by the clamping assembly 231 and the first carrier plate 210. The clamping bracket 233 is fixed on the first carrier plate 210 and can rotate with the rotation of the first carrier plate 210.

[0054] like Figure 4 As shown, a ring-shaped sheet material handling and flipping robot comprises: a flipping device 200, a body 100 and a picking device 300. The flipping device 200 is a flipping device 200 as described in any one of the above. The body 100 is movable, and the flipping device 200 is fixed on the body 100. The picking device 300 comprises a mechanical arm and a manipulator, and the manipulator is fixed on the body 100 through the mechanical arm, and the manipulator has 6 degrees of freedom of movement through the mechanical arm.

[0055] The above-mentioned flipping device 200 can be applied to a handling robot. After the workpiece 400 is picked up by the picking device 300, it is placed on the first carrier plate 210. The robot moves to the next station and picks up the workpiece 400 by the picking device 300 and places it on the station. If the workpiece 400 needs to be flipped at the next station, the workpiece 400 can be flipped by the flipping device 200, picked up by the picking device 300, and placed on the next station.

[0056] The annular sheet material transporting and flipping robot of this embodiment can effectively avoid damage to the workpiece 400, facilitate flipping of the workpiece 400, and improve production efficiency.

[0057] Although the utility model is disclosed as above, the utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the scope defined by the claims.

Claims

1. A turning device, characterized in that: include: A first carrier plate (210); a second carrier plate (220), wherein the first carrier plate (210) can rotate relative to the second carrier plate (220), so that the first carrier plate (210) and the second carrier plate (220) switch from a side-by-side arrangement state to a buckled state, and at least the second carrier plate (220) is annular; The centering device (240) is arranged in the inner ring of the second supporting plate (220), and the center of the centering device (240) coincides with the center of the second supporting plate (220). The centering device (240) can be radially extended and contracted in at least three directions at the same time, and the at least three directions are evenly distributed in the radial direction of the second supporting plate (220).

2. The flipping device according to claim 1, characterized in that: The centering device (240) comprises: At least three tracks (242) are arranged in the inner ring of the second carrier plate (220), each track (242) extends from the center of the second carrier plate (220) in a radial direction, and at least three tracks (242) are evenly distributed; Moving blocks (241), at least three of the moving blocks (241) move synchronously along the track (242).

3. The flipping device according to claim 2, characterized in that: The centering device (240) further comprises: a rotating disk (243), wherein the center of the rotating disk (243) coincides with the center of the second carrying disk (220); At least three connecting rods (244) are provided, one end of each connecting rod (244) is connected to the rotating disk (243), and the other end is connected to the moving block (241), and the connection points between the connecting rods (244) and the rotating disk (243) are evenly distributed on equal circumferences.

4. The turning device according to claim 3, characterized in that: The centering device (240) further comprises: A track base (246), at least three of the tracks (242) are arranged on the track base (246).

5. The turning device according to claim 4, characterized in that: The track base (246) is in the shape of an equilateral triangle, the center of the track base (246) coincides with the center of the second carrier plate (220), and one end of the track (242) extending in the radial direction is arranged at each vertex of the triangle.

6. The flipping device according to claim 2, characterized in that: A roller (245) is provided on the moving block (241), and the roller (245) protrudes from the moving block (241) at least in a direction away from the center.

7. The flipping device according to claim 1, characterized in that: The first carrying plate (210) is ring-shaped.

8. The turning device according to claim 7, characterized in that: Also includes: The rotating device (250) comprises a rotating drive mechanism (252) and a rotating shaft (251), and the rotating shaft (251) is driven to rotate by the rotating drive mechanism (252); The first carrying plate (210) is connected to the rotating shaft (251).

9. The turning device according to claim 7, characterized in that: Also includes: A clamping device (230), comprising a clamping assembly (231), a clamping drive mechanism (232) and a clamping bracket (233); The clamping drive mechanism (232) and the clamping assembly (231) are fixed on the clamping bracket (233); Clamping a workpiece (400) by means of the clamping assembly (231) and the first carrier plate (210); The clamping drive mechanism (232) drives the clamping assembly (231) to move in a direction relative to or away from the first carrier plate (210), and the clamping assembly (231) rotates along a plane parallel to the first carrier plate (210); The clamping bracket (233) is fixed on the first carrying plate (210).

10. A ring-shaped sheet material handling and flipping robot, characterized in that: include: A flipping device (200), a flipping device (200) as claimed in any one of claims 1 to 9; A body (100) is movable, and the flipping device (200) is fixed on the body (100); A picking device (300) comprises a mechanical arm and a mechanical hand, wherein the mechanical hand is fixed on the body (100) via the mechanical arm, and the mechanical hand has 6 degrees of freedom of movement via the mechanical arm.

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