Vacuum cavity of optical coating machine

Abstract

The utility model discloses a vacuum cavity of an optical coating machine, which comprises an optical coating machine main body, a coating protection device is arranged in the optical coating machine main body, and a cavity cooling mechanism is arranged on the bottom side of the optical coating machine main body. The cavity cooling mechanism is installed, the cooling assembly of the cavity cooling mechanism can pump cooling liquid in the water tank into the cooling zigzag pipe, the cooling zigzag pipe can exchange heat generated by coating in the vacuum chamber to cool the cooling zigzag pipe, the flowing cooling liquid returns to the water tank again through the cooling zigzag pipe, and the cooling efficiency is improved. Liquid in the water tank is cooled through the semiconductor chilling plate, heat diffusion can be accelerated through the additionally-arranged heat dissipation assembly, the heat dissipation effect is further improved through the arrangement of the multiple heat dissipation fins, the circulating use efficiency of cooling liquid is improved, the coating protection device is installed, a buffer assembly enables a buffer seat to move downwards in the coating process, and the coating effect is improved. And the optical part can be prevented from being damaged through the arranged elastic piece.

Description

Technical Field

[0001] The utility model relates to the technical field of optical coating machines, in particular to a vacuum chamber of an optical coating machine. Background Art

[0002] Optical coating machine is a process testing instrument used in the fields of information science, system science and physics. It is a device that uses physical principles to prepare thin films. It mainly deposits metals, alloys, oxides and other materials on the surface of the substrate through vacuum evaporation, ion plating, magnetron sputtering and other technologies to form a thin film.

[0003] When coating, the vacuum chamber of the optical coating machine makes the coating machine come into contact with the optical parts and damages the optical parts. In addition, a large amount of heat is generated during coating and cooling is required to ensure the normal operation of the equipment. The existing cooling method uses natural cooling or fan cooling, which makes it difficult to dissipate the internal heat and has a poor cooling effect. Summary of the invention

[0004] The purpose of the utility model is to provide a vacuum chamber for an optical coating machine to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum chamber of an optical coating machine, comprising an optical coating machine body, a coating protection device is installed inside the optical coating machine body, and a cavity cooling mechanism is installed on the bottom side of the optical coating machine body.

[0006] The coating protection device comprises a base, which is arranged on the bottom side of the optical coating machine body, and a buffer component is fixedly mounted on the base.

[0007] The cavity cooling mechanism comprises a water tank, which is arranged on the bottom side of the optical coating machine body through a support rod, a cooling component is installed in the water tank, and a heat dissipation component is installed on the water tank.

[0008] As a further preferred embodiment of the present technical solution, the optical coating machine body includes a casing, a vacuum chamber is provided on the left side of the casing, a control unit is installed on the right side of the casing, and an organic door is hingedly provided on the outer wall of the casing and located in front of the vacuum chamber.

[0009] As a further preferred embodiment of the present technical solution, the buffer assembly includes a support seat, the support seat is fixedly connected to the base, and the outer walls on both sides of the support seat are provided with sliding grooves, and the inner walls of the sliding grooves are slidably connected to the buffer seat.

[0010] As a further preferred embodiment of the present technical solution, an elastic member is provided between the buffer seat and the support seat, and a plurality of the elastic members are arranged.

[0011] In the above technical solution, the buffer assembly is provided so that the buffer seat moves downward during the coating process, and the elastic member provided can prevent the optical parts from being damaged, thereby improving the quality and efficiency of the coating process.

[0012] As a further preferred embodiment of the present technical solution, the cooling assembly includes a water pump, which is arranged in a water tank. A cooling loop tube is provided on the water pump, which extends to the inner wall of the vacuum chamber and is arranged in a serpentine shape, and the other end of the cooling loop tube is arranged in the water tank.

[0013] In the above technical solution, the cooling component is capable of drawing the coolant in the water tank into the cooling loop tube. The cooling loop tube can exchange the heat generated by the coating in the vacuum chamber to cool it down. The flowing coolant returns to the water tank through the cooling loop tube for easy recycling.

[0014] As a further preferred embodiment of the present technical solution, the heat dissipation component includes a semiconductor refrigeration sheet, the semiconductor refrigeration sheet is arranged on the water tank, the cooling end of the semiconductor refrigeration sheet is fixedly connected to a heat conduction block, and the heat conduction block is arranged in the water tank.

[0015] As a further preferred embodiment of the present technical solution, the heating end of the semiconductor refrigeration plate is fixedly connected to a heat sink, and the outer wall of the heat sink is fixedly connected to heat dissipation fins.

[0016] In the above technical solution, the heat dissipation component is provided to accelerate the diffusion of heat, and a plurality of heat dissipation fins are provided to further improve the heat dissipation effect and the efficiency of the circulation of the coolant is improved.

[0017] The utility model provides a vacuum chamber of an optical coating machine, which has the following beneficial effects:

[0018] (1) The utility model installs a cavity cooling mechanism, and the cooling component arranged therein can draw the coolant in the water tank into the cooling loop tube. The cooling loop tube can exchange the heat generated by the coating in the vacuum chamber to cool it down. The flowing coolant returns to the water tank through the cooling loop tube, and cools the liquid in the water tank through the semiconductor refrigeration plate. In addition, the heat dissipation component arranged therein can accelerate the diffusion of heat, and a plurality of heat dissipation fins are arranged therein to further improve the heat dissipation effect, thereby improving the efficiency of the circulating use of the coolant.

[0019] (2) The utility model installs a coating protection device, and the buffer assembly is arranged so that the buffer seat moves downward during the coating process. The elastic member is arranged to prevent the optical parts from being damaged, thereby improving the quality and efficiency of the coating process. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1It is a schematic diagram of the overall structure of the optical coating machine of the utility model;

[0021] Figure 2 The utility model is Figure 1 Schematic diagram of the structure inside the vacuum chamber;

[0022] Figure 3 The utility model is Figure 2 Structural schematic diagram of the cavity cooling mechanism;

[0023] Figure 4 The utility model is Figure 3 A magnified view of Figure A;

[0024] Figure 5 The utility model is Figure 2 Schematic diagram of the structure of the coating protection device;

[0025] In the figure: 1. Optical coating machine body; 2. Coating protection device; 3. Cavity cooling mechanism; 11. Casing; 12. Vacuum chamber; 13. Control unit; 14. Door; 21. Base; 22. Buffer assembly; a1. Support seat; a2. Slide groove; a3. Buffer seat; a4. Elastic part; 31. Water tank; 32. Cooling assembly; 33. Heat dissipation assembly; b1. Water pump; b2. Cooling coil; c1. Heat conduction block; c2. Semiconductor refrigeration sheet; c3. Heat sink; c4. Heat dissipation fin. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0027] The utility model provides a technical solution: Figure 1 As shown, in this embodiment, a vacuum chamber of an optical coating machine includes an optical coating machine body 1, a coating protection device 2 is installed inside the optical coating machine body 1, a cavity cooling mechanism is installed on the bottom side of the optical coating machine body 1, and the optical coating machine body 1 includes a casing 11, a vacuum chamber 12 is opened on the left side of the casing 11, a control unit 13 is installed on the right side of the casing 11, and an organic door 14 is hinged on the outer wall of the casing 11 and located in front of the vacuum chamber 12.

[0028] like Figure 2 and Figure 5As shown, the coating protection device 2 includes a base 21, which is arranged on the bottom side of the optical coating machine body 1, and a buffer assembly is fixedly installed on the base 21. The buffer assembly 22 includes a support seat a1, and the support seat a1 is fixedly connected to the base 21. The outer walls of the left and right sides of the support seat a1 are provided with slide grooves a2, and the inner walls of the slide grooves a2 are slidably connected with buffer seats a3. An elastic member a4 is arranged between the buffer seat a3 and the support seat a1, and a plurality of elastic members a4 are arranged. The coating protection device 2 is installed, and the buffer assembly 22 is arranged to make the buffer seat a3 move downward during the coating process. The elastic member a4 can prevent the optical parts from being damaged, thereby improving the quality and efficiency of the coating process.

[0029] like Figure 3 and Figure 4 As shown, the cavity cooling mechanism 3 includes a water tank 31, which is arranged at the bottom side of the optical coating machine body 1 through a support rod. A cooling component 32 is installed in the water tank 31, and a heat dissipation component 33 is installed on the water tank 31. The cooling component 32 includes a water pump b1, which is arranged in the water tank 31, and a cooling loop b2 is arranged on the water pump b1. The cooling loop b2 extends to the inner wall of the vacuum chamber 12 and is arranged in a serpentine shape, and the other end of the cooling loop b2 is arranged in the water tank 31. The heat dissipation component 33 includes a semiconductor refrigeration sheet c2, which is arranged on the water tank 31, and the cooling end of the semiconductor refrigeration sheet c2 is fixedly connected to a heat conductive block c1, which is arranged in the water tank 31, and the heat conductive block c1 is arranged in the water tank 31. The heating end of the conductor refrigeration plate c2 is fixedly connected to a heat sink c3, and the outer wall of the heat sink c3 is fixedly connected to heat fins c4. By installing the cavity cooling mechanism 3, the cooling component 32 set therein can draw the coolant in the water tank 31 into the cooling loop tube b2. The cooling loop tube b2 can exchange the heat generated by the coating in the vacuum chamber 12 to cool it down. The flowing coolant returns to the water tank 31 through the cooling loop tube b2, and the liquid in the water tank 31 is cooled by the semiconductor refrigeration plate c2. In addition, the heat dissipation component 33 can accelerate the diffusion of heat, and a plurality of heat dissipation fins c4 are set to further improve the heat dissipation effect and improve the efficiency of the circulating use of the coolant.

[0030] The utility model provides a vacuum chamber of an optical coating machine, and its specific working principle is as follows: a buffer seat a3 moves downward during the coating process, that is, the buffer seat a3 slides on the inner wall of a slide groove a2, and the elastic member a4 is arranged to prevent the optical parts from being damaged; the heat generated by the coating is cooled by the coolant flowing in b2, that is, the coolant in a water tank 31 is pumped into a cooling loop pipe b2 by a water pump b1, and after cooling, the other end of the cooling loop pipe b2 returns the liquid to the water tank 31, and the coolant is cooled by a semiconductor refrigeration sheet c2, and a plurality of heat dissipation plates c3 and heat dissipation fins c4 are arranged at the heating end of the semiconductor refrigeration sheet c2 to accelerate the diffusion of heat.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum chamber of an optical coating machine, comprising an optical coating machine body (1), characterized in that: A coating protection device (2) is installed inside the optical coating machine body (1), and a cavity cooling mechanism (3) is installed on the bottom side of the optical coating machine body (1); The coating protection device (2) comprises a base (21), the base (21) being arranged on the bottom side of the optical coating machine body (1), and a buffer assembly (22) being fixedly mounted on the base (21); The cavity cooling mechanism (3) comprises a water tank (31), the water tank (31) being arranged on the bottom side of the optical coating machine body (1) via a support rod, a cooling component (32) being installed in the water tank (31), and a heat dissipation component (33) being installed on the water tank (31).

2. The vacuum chamber of an optical coating machine according to claim 1, characterized in that: The optical coating machine body (1) comprises a casing (11), a vacuum chamber (12) is provided on the left side of the casing (11), a control unit (13) is installed on the right side of the casing (11), and an organic door (14) is hingedly connected to the outer wall of the casing (11) and located in front of the vacuum chamber (12).

3. The vacuum chamber of an optical coating machine according to claim 1, characterized in that: The buffer assembly (22) comprises a support seat (a1), the support seat (a1) is fixedly connected to the base (21), the left and right outer walls of the support seat (a1) are both provided with sliding grooves (a2), and the inner wall of the sliding groove (a2) is slidably connected to the buffer seat (a3).

4. The vacuum chamber of an optical coating machine according to claim 3, characterized in that: An elastic member (a4) is arranged between the buffer seat (a3) ​​and the support seat (a1), and a plurality of the elastic members (a4) are arranged in an array.

5. The vacuum chamber of an optical coating machine according to claim 1, characterized in that: The cooling assembly (32) comprises a water pump (b1), the water pump (b1) being arranged in a water tank (31), the water pump (b1) being provided with a cooling loop pipe (b2), the cooling loop pipe (b2) extending to the inner wall of the vacuum chamber (12) and arranged in a serpentine shape, and the other end of the cooling loop pipe (b2) being arranged in the water tank (31).

6. The vacuum chamber of an optical coating machine according to claim 1, characterized in that: The heat dissipation component (33) comprises a semiconductor refrigeration sheet (c2), the semiconductor refrigeration sheet (c2) is arranged on the water tank (31), the refrigeration end of the semiconductor refrigeration sheet (c2) is fixedly connected to a heat conduction block (c1), and the heat conduction block (c1) is arranged in the water tank (31).

7. The vacuum chamber of an optical coating machine according to claim 6, characterized in that: The heating end of the semiconductor refrigeration sheet (c2) is fixedly connected to a heat dissipation plate (c3), and the outer wall of the heat dissipation plate (c3) is fixedly connected to heat dissipation fins (c4).

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