Cooling device of vacuum coating machine

Abstract

The utility model discloses a cooling device of a vacuum coating machine, which comprises a U-shaped base, a cooling device and a cooling device, wherein the U-shaped base comprises a vertical part and a groove; the heat dissipation assembly comprises a plurality of heat-conducting fins which are vertically arranged in parallel to the width direction of the groove; the coating machine body is arranged on the heat dissipation assembly; the water cooling assembly comprises a water inlet tank and a water return tank; wherein the water return tank comprises a water return outer tank and a water return inner tank arranged at the middle upper part in the water return outer tank, a water seepage hole communicated with the water return outer tank is formed in the water return inner tank, a cooling fan is arranged at the top of the water return inner tank, the U-shaped water pipe part is communicated with the water inlet tank and the water return outer tank, and the water return inner tank is communicated with the water inlet tank through a backflow pipeline. The backflow pipeline is located between the U-shaped base and the heat dissipation assembly. The cooling device of the vacuum coating machine has a cooling mode, is economical and environment-friendly, can be used in a transfer manner, and is convenient to maintain.

Description

Technical Field

[0001] The utility model relates to vacuum coating technology Lingyue, and more specifically, to a cooling device for a vacuum coating machine. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metallic materials under high vacuum conditions to evaporate and condense them on the surface of the coated object to form a thin film, wherein the coated object can be a metal, a semiconductor or an insulator. Simply put, vacuum coating is a method of evaporating or sputtering metal alloys or compounds in a vacuum to solidify and deposit them on the coated object (generally called a substrate, substrate or matrix). Vacuum coating technology has been widely used in electronics, aerospace, packaging, photovoltaics and other fields. When vacuum coating is performed, the coated object needs to be heated at high temperature. The heating process causes the temperature inside the vacuum cavity to be too high, causing the vacuum cavity to deform. Therefore, a cooling device is used to cool the vacuum coating machine. The existing vacuum coating machine cooling devices generally have the following defects: First, the temperature of the workpiece disk and its surrounding areas where the coated object is set in the vacuum coating machine cavity is too high, while the temperature of the area far away from the workpiece disk is lower than the position of the workpiece disk. The existing cooling equipment cannot select a more economical cooling combination according to the temperature difference of each area in the vacuum coating machine cavity, and the energy consumption is large. Second, the vacuum coating machine cooling device often uses a water cooling structure, and the circulating water used by the water cooling structure cannot be cooled and reused in time, requiring a large amount of reserve water, resulting in a waste of water resources.

[0003] A utility model patent with announcement number CN218378870U and name "A vacuum coating cooling device" discloses a vacuum coating cooling device, which includes a vacuum coating cavity, a casing is provided on the outside of the vacuum coating cavity, a cavity is formed between the casing and the vacuum coating cavity, water pipes are evenly arranged on the outer surface of the vacuum coating cavity, the water pipes are connected to a water tank and a waste water tank, semiconductor heat sinks are arranged on the outer surface of the water pipes, and a cooling fan is arranged inside the cavity. First, although the vacuum coating cooling device adopts a recovery pipe and a recovery box to realize the recycling and reuse of cooling water, which reduces the waste of water resources to a certain extent, it cannot cool the circulating water in time. During the vacuum coating process, a large amount of reserve water needs to be prepared, which still causes waste of water resources; second, the vacuum coating cooling device is provided with both a water cooling structure and an air cooling structure, and its energy consumption is relatively high to a certain extent. Utility Model Content

[0004] An object of the present invention is to solve at least the above problems and to provide at least the advantages which will be described below.

[0005] Another object of the present utility model is to provide a cooling device for a vacuum coating machine, whose cooling mode takes into account both economy and environmental protection, and the cooling device for the vacuum coating machine can be used in transit and is convenient for maintenance.

[0006] In order to achieve these purposes and other advantages according to the utility model, a vacuum coating machine cooling device is provided, comprising:

[0007] A U-shaped base, which is arranged upward, comprises vertical parts arranged at both ends and a groove arranged between the two vertical parts;

[0008] A heat dissipation component is disposed in the groove and includes a plurality of heat conducting sheets vertically disposed parallel to the width direction of the groove;

[0009] The coating machine body is arranged on the heat dissipation assembly, the coating machine body is square and a workpiece tray is arranged on the top of its inner cavity;

[0010] A water cooling assembly, comprising a water inlet tank and a water return tank respectively arranged on two vertical parts, wherein the water inlet tank and the water return tank are connected through a U-shaped water pipe portion, and the U-shaped water pipe portion covers the coating machine body from the top downward;

[0011] Wherein, the return water tank includes a return water outer box and a return water inner box arranged in the middle and upper part of the return water outer box, the return water inner box is provided with a seepage hole connected with the return water outer box, and a cooling fan is provided on the top of the return water inner box, the U-shaped water pipe part connects the water inlet tank and the return water outer box, the return water inner box and the water inlet tank are connected through a return pipe, the return pipe is located between the U-shaped base and the heat dissipation component, and a delivery pump is provided on the U-shaped water pipe part and the return pipe.

[0012] Preferably, the U-shaped water pipe portion includes a first row of pipes, a second row of pipes and a third row of pipes respectively arranged on both sides and the top of the coating machine body, the water inlet of the first row of pipes is connected to the water inlet box through a first connecting pipe, the water outlet is connected to the water inlet of the third row of pipes through a second connecting pipe, the water inlet of the second row of pipes is connected to the water outlet of the third row of pipes through a third connecting pipe, and the water outlet is connected to the return water outer box through a fourth connecting pipe.

[0013] Preferably, the first row of tubes, the second row of tubes and the third row of tubes are all integrally formed continuous curved tubes, and the curved tubes are S-shaped.

[0014] Preferably, the cooling device of the vacuum coating machine also includes an adjusting component, which includes a group of first lifting brackets connected to the bottom of the first row of pipes and a group of second lifting brackets connected to the bottom of the second row of pipes, the first lifting brackets and the second lifting brackets are respectively installed on horizontal telescopic rods, and the horizontal telescopic rods are arranged on the heat dissipation component.

[0015] Preferably, connecting ends are provided at the water inlet and outlet of the first row of pipes, the water inlet and outlet of the second row of pipes, and the water inlet and outlet of the third row of pipes to flexibly connect the first connecting pipe, the second connecting pipe, the third connecting pipe and the fourth connecting pipe.

[0016] Preferably, the water inlet tank is provided with a connecting straight pipe connected to the first connecting pipe, the connecting straight pipe is provided with a first solenoid valve, the return pipe is provided with a second solenoid valve, and the return water inner box is provided with a water level sensor.

[0017] The utility model at least includes the following beneficial effects: the cooling device of the vacuum coating machine provided by the utility model sets a water cooling component on the outer wall of the cavity in the area where the workpiece disk is located according to the temperature difference in the inner cavity of the vacuum coating machine to quickly cool down the cavity in the area where the workpiece disk is located, and sets a heat dissipation component at the bottom of the cavity to cool down the cavity away from the area where the workpiece disk is located from the bottom of the cavity, thereby greatly improving the economy of the cooling device of the vacuum coating machine on the basis of meeting the cooling needs of the vacuum coating machine; the heat dissipation component includes a plurality of heat conductive sheets vertically arranged parallel to the width direction of the groove, the heat conductive sheet is a metal sheet or a metal alloy sheet with high thermal conductivity, and the plurality of heat conductive sheets arranged in parallel provide a heat conduction area increased by orders of magnitude, which can meet the cooling needs of the vacuum coating machine. The cooling requirement of the cavity of the film machine away from the workpiece disk area greatly saves the energy consumption of the cooling device of the vacuum coating machine compared to the air cooling structure; the water-cooling component makes the height and length of the U-shaped water pipe part of the water-cooling component adjustable through the horizontal telescopic rod, the first lifting bracket and the second lifting bracket, which can adapt to the sizes of different vacuum coating machines; a return water cooling structure is arranged in the return water tank of the water-cooling component, which can cool the return water in time, reduce the use of circulating water of the water-cooling component, and improve the economy and environmental protection of the cooling device of the vacuum coating machine; the U-shaped base, heat dissipation component, water cooling component of the cooling device of the vacuum coating machine provided by the utility model are detachable from the coating machine body, so that the cooling device of the vacuum coating machine is easy to maintain and transfer.

[0018] Other advantages, objectives and features of the present invention will be embodied in part through the following description, and in part will be understood by those skilled in the art through research and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of a cooling device for a vacuum coating machine in a technical solution of the utility model;

[0020] Figure 2 This is a layout diagram of the heat dissipation assembly and the horizontal telescopic rod in another technical solution of the utility model;

[0021] Figure 3This is a layout diagram of the horizontal telescopic rod and the first lifting bracket (or the second lifting bracket) in another technical solution of the utility model. DETAILED DESCRIPTION

[0022] The present invention will be further described in detail below in conjunction with the accompanying drawings so that those skilled in the art can implement the invention with reference to the description.

[0023] It should be understood that the terms such as “having”, “including” and “comprising” used herein do not exclude the existence or addition of one or more other elements or combinations thereof.

[0024] like Figures 1 to 3 As shown, the utility model provides a cooling device for a vacuum coating machine, comprising:

[0025] A U-shaped base 10, which is arranged upward, includes vertical parts arranged at both ends and a groove arranged between the two vertical parts;

[0026] A heat dissipation component 9, which is arranged in the groove and includes a plurality of heat conducting sheets vertically arranged parallel to the width direction of the groove;

[0027] The coating machine body 1 is arranged on the heat dissipation assembly 9, the coating machine body 1 is square and a workpiece plate 3 is arranged on the top of its inner cavity;

[0028] A water cooling assembly, comprising a water inlet tank 5 and a water return tank respectively arranged on two vertical parts, wherein the water inlet tank 5 and the water return tank are connected through a U-shaped water pipe portion, and the U-shaped water pipe portion covers the coating machine body 1 from the top downward;

[0029] Among them, the return water tank includes a return water outer box 11 and a return water inner box 12 arranged in the middle and upper part of the return water outer box 11, the return water inner box 12 is provided with a seepage hole connected to the return water outer box 11, and a cooling fan 17 is provided on the top of the return water inner box 12, the U-shaped water pipe part connects the water inlet tank 5 and the return water outer box, the return water inner box 12 and the water inlet tank 5 are connected through a return pipe 8, the return pipe 8 is located between the U-shaped base 10 and the heat dissipation component 9, the U-shaped water pipe part is provided with a delivery pump 4, and the return pipe 8 is provided with a delivery pump 7.

[0030] In the above technical solution, the cooling device of the vacuum coating machine includes a U-shaped base 10, a heat dissipation component 9, a water cooling component and a coating machine body 1, wherein the heat dissipation component 9 is arranged in a groove of the U-shaped base 10, and the size of the heat dissipation component 9 is adapted to the size of the groove of the U-shaped base 10. The vacuum coating machine body 1 is arranged on the heat dissipation component 9. In order to adapt to vacuum coating machine bodies 1 of different sizes, the length of the groove of the U-shaped base 10 is set to be larger, that is, the length of the groove obtained by the U-shaped base is greater than the length of the general vacuum coating machine body 1. The heat dissipation component includes a plurality of vertically arranged heat conducting plates, and the arrangement direction of the heat conducting plates is parallel to the width direction of the U-shaped base. The greater the arrangement density of the heat conducting plates, the greater the heat conducting area thereof, and the greater the height of the heat conducting plates, the greater the heat conducting area thereof. In order to obtain a better heat dissipation effect, the height of the heat dissipation component 9 can be higher than the height of the vertical part of the U-shaped base. The heat conducting plates are metal plates or metal alloy plates with high thermal conductivity, such as copper metal plates, aluminum nitride alloy plates, etc. The water cooling assembly includes a water inlet box 5, a return water box and a U-shaped water pipe part connecting the water inlet box 5 and the return water box, which are arranged on a U-shaped base 10. The U-shaped water pipe part covers the vacuum coating machine body 1, that is, the U-shaped water pipe part is in contact with the top of the vacuum coating machine body 1 and the two sides facing the water inlet box 5 and the return water box. The cooling water enters the U-shaped water pipe part from the water inlet box 5 and finally returns to the return water outer box 11 of the return water box, thereby cooling the cavity in the area where the workpiece disk 3 is located. In order to cool the cavity in the area where the workpiece disk is located, the height of the vertical part of the U-shaped water pipe part should not be lower than the distance between the workpiece disk 3 and the top of the inner cavity of the vacuum coating machine 1, and the greater the height of the vertical part of the U-shaped water pipe part, the better the water cooling effect; the return water tank includes a return water outer box 11 and a return water inner box 12, the return water inner box 12 is arranged in the middle and upper part of the inner cavity of the return water outer box 11, and the return water inner box 12 is provided with a seepage Water hole, when the return water level in the return water outer box 11 is greater than the height of the seepage hole, the return water in the return water outer box 11 enters the return water inner box 12, and a cooling fan 17 is provided on the top of the return water inner box 12 to cool the return water in the return water inner box 12 in time. A connecting return pipe 8 is provided between the return water inner box 12 and the water inlet tank 5 to transport the cooling water in the return water inner box 12 back to the water inlet tank 5 for recycling; the return pipe 8 is arranged between the U-shaped base groove and the heat dissipation component 9, that is, the return pipe 8 is also U-shaped. When the total heat dissipation area of ​​the heat dissipation component 9 is sufficient, the heat dissipation component 9 absorbs the heat from the bottom of the vacuum coating machine body and dissipates it into the air, and a very small part of the heat is transferred to the return pipe 8. In order to ensure that the cooling water temperature in the return pipe 8 is low enough, a layer of thermal insulation cotton is wrapped on the outer surface of the return pipe 8, which can not only prevent the heat dissipation component 9 from exchanging heat with the return pipe 8, but also play a buffering role to protect the return pipe 8.

[0031] In the above technical scheme, the installation method of the cooling device of the vacuum coating machine is as follows: a water inlet tank 5 and a water return tank are arranged on the vertical part of the U-shaped base 10, a return pipe 8 is installed between the water inlet tank 5 and the return water inner box 12, and then a heat dissipation component 9 is installed, and then a vacuum coating machine body 1 is installed on the heat dissipation component 9, and finally a U-shaped water pipe part is installed on the vacuum coating machine body 1, and the two ends of the U-shaped water pipe part are connected to the water inlet tank 5 and the return water outer box 11 respectively.

[0032] like Figure 1 As shown in one of the technical solutions, the U-shaped water pipe part includes a first row of pipes 2, a second row of pipes 13 and a third row of pipes 18 respectively arranged on both sides and the top of the coating machine body 1, the water inlet of the first row of pipes 2 is connected to the water inlet box 5 through the first connecting pipe 6, the water outlet is connected to the water inlet of the third row of pipes 18 through the second connecting pipe, the water inlet of the second row of pipes 13 is connected to the water outlet of the third row of pipes 18 through the third connecting pipe, and the water outlet is connected to the return water outer box 11 through the fourth connecting pipe 14, forming a water inlet from the water inlet box 5 through the U-shaped water pipe part to the return water outer box 11. The cooling water channel of the water outer box 11 cools the cavity of the vacuum coating machine body 1 facing the workpiece disk 3, wherein the third row of pipes 18 is connected to the first row of pipes 2 and the second row of pipes 13 respectively through the second connecting pipe and the third connecting pipe, and the second connecting pipe and the third connecting pipe can be replaced with pipes of different lengths, thereby realizing the adjustability of the length direction of the U-shaped water pipe part, and the first connecting pipe 6 and the fourth connecting pipe 14 can be replaced with pipes of different lengths, thereby realizing the adjustability of the length direction and height direction of the U-shaped water pipe part, so as to adapt to vacuum coating machine bodies 1 of different sizes.

[0033] like Figure 1 In one of the technical solutions, the first row of tubes 2, the second row of tubes 13, and the third row of tubes 18 are all integrally formed continuous curved tubes, and the curved tubes are S-shaped, which increases the contact area between the cooling water and the vacuum coating machine body 1 and achieves a better cooling effect.

[0034] like Figures 1 to 3As shown, in one of the technical solutions, the vacuum coating machine cooling device also includes an adjustment component, which includes a group of first lifting brackets 16 connected to the bottom of the first row of pipes 2 and a group of second lifting brackets connected to the bottom of the second row of pipes 13. The first lifting bracket and the second lifting bracket are respectively installed on a horizontal telescopic rod 15, and the horizontal telescopic rod 15 is arranged on the heat dissipation component 9. The horizontal telescopic rod 15 includes a horizontal telescopic outer rod 151 and a horizontal telescopic inner rod 152. The horizontal telescopic inner rod 152 can be horizontally telescopic relative to the horizontal telescopic outer rod 151, and is used to adjust the distance between the U-shaped water pipe part and the vacuum coating machine body. When replacing the vacuum coating machine body 1 of different sizes, it is always ensured that the first row of pipes 2 and the second row of pipes 13 are close to the side of the vacuum coating machine body. The first lifting bracket 16 includes a lifting first bracket 162 and a lifting second bracket 161. The lifting second bracket 161 can move up and down relative to the lifting first bracket 162. The second lifting bracket structure is the same as the first lifting bracket structure. When replacing the vacuum coating machine body 1 of different sizes, it is ensured that the third row of pipes 18 is close to the top of the vacuum coating machine body 1.

[0035] like Figure 1 As shown, in one of the technical solutions, connecting ends are provided at the water inlet and outlet of the first row of pipes 2, the water inlet and outlet of the second row of pipes 13, and the water inlet and outlet of the third row of pipes 18 to flexibly connect the first connecting pipe 6, the second connecting pipe, the third connecting pipe and the fourth connecting pipe 14, so as to facilitate the replacement of the first connecting pipe 6, the second connecting pipe, the third connecting pipe and the fourth connecting pipe 14, so that the vacuum coating machine cooling device is adaptable to vacuum coating machine bodies 1 of different sizes.

[0036] In one of the technical solutions, the water inlet tank 5 is provided with a connecting straight pipe connected to the first connecting pipe 6, the connecting straight pipe is provided with a first solenoid valve, the return pipe 8 is provided with a second solenoid valve, and the return water inner box 11 is provided with a water level sensor. The first solenoid valve controls the opening and closing of the cooling water, and the second solenoid valve controls the opening and closing of the return water. When the water level in the return water inner box 12 reaches a preset value, the second solenoid valve on the return pipe 8 opens, and the return water is transported from the return water inner box 12 to the water inlet tank 5. When the water level in the return water inner box 12 is lower than the preset value, the return water stops being transported and is placed in the return water inner box 12 for cooling.

[0037] As described above, according to the present invention, the present invention at least includes the following beneficial effects:

[0038] Firstly, the cooling device for a vacuum coating machine provided by the utility model is provided with a water cooling component on the outer wall of the cavity where the workpiece disk is located to quickly cool down the cavity where the workpiece disk is located, and a heat dissipation component is provided at the bottom of the cavity to cool down the cavity away from the workpiece disk from the bottom of the cavity, based on the temperature difference in the inner cavity of the vacuum coating machine. The economic efficiency of the cooling device for the vacuum coating machine is greatly improved on the basis of meeting the cooling requirements of the vacuum coating machine.

[0039] Second, the heat dissipation assembly includes a plurality of heat conducting sheets vertically arranged parallel to the width direction of the groove, and the heat conducting sheets are metal sheets or metal alloy sheets with high thermal conductivity. The plurality of heat conducting sheets arranged in parallel provide a heat conducting area increased by an order of magnitude, which can meet the cooling requirements of the cavity of the vacuum coating machine away from the workpiece disk area, and greatly save the energy consumption of the cooling device of the vacuum coating machine compared to the air cooling structure;

[0040] Thirdly, the water cooling assembly is capable of adjusting the height and length of the U-shaped water pipe part of the water cooling assembly through the horizontal telescopic rod, the first lifting bracket and the second lifting bracket, so as to adapt to the sizes of different vacuum coating machines;

[0041] Fourthly, a return water cooling structure is provided in the return water tank of the water cooling component, which can cool the return water in time, reduce the usage of circulating water of the water cooling component, and improve the economy and environmental protection of the cooling device of the vacuum coating machine;

[0042] Fifthly, the U-shaped base, heat dissipation assembly, water cooling assembly and the coating machine body of the vacuum coating machine cooling device provided by the utility model are detachable, so that the vacuum coating machine cooling device is easy to maintain and transfer.

[0043] The number of devices and processing scale described here are used to simplify the description of the utility model. The application, modification and variation of the vacuum coating machine cooling device of the utility model are obvious to those skilled in the art.

[0044] Although the implementation scheme of the utility model has been disclosed as above, it is not limited to the applications listed in the specification and implementation modes. It can be fully applied to various fields suitable for the utility model. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the utility model is not limited to the specific details and the illustrations shown and described herein.

Claims

1. A cooling device for a vacuum coating machine, characterized in that: include: A U-shaped base, which is arranged upward, comprises vertical parts arranged at both ends and a groove arranged between the two vertical parts; A heat dissipation component is disposed in the groove and includes a plurality of heat conducting sheets vertically disposed parallel to the width direction of the groove; The coating machine body is arranged on the heat dissipation assembly, the coating machine body is square and a workpiece tray is arranged on the top of its inner cavity; A water cooling assembly, comprising a water inlet tank and a water return tank respectively arranged on two vertical parts, wherein the water inlet tank and the water return tank are connected through a U-shaped water pipe portion, and the U-shaped water pipe portion covers the coating machine body from the top downward; Wherein, the return water tank includes a return water outer box and a return water inner box arranged in the middle and upper part of the return water outer box, the return water inner box is provided with a seepage hole connected with the return water outer box, and a cooling fan is provided on the top of the return water inner box, the U-shaped water pipe part connects the water inlet tank and the return water outer box, the return water inner box and the water inlet tank are connected through a return pipe, the return pipe is located between the U-shaped base and the heat dissipation component, and a delivery pump is provided on the U-shaped water pipe part and the return pipe.

2. The cooling device of the vacuum coating machine according to claim 1, characterized in that: The U-shaped water pipe part includes a first row of pipes, a second row of pipes and a third row of pipes which are respectively arranged on both sides and the top of the coating machine body. The water inlet of the first row of pipes is connected to the water inlet box through a first connecting pipe, and the water outlet is connected to the water inlet of the third row of pipes through a second connecting pipe. The water inlet of the second row of pipes is connected to the water outlet of the third row of pipes through a third connecting pipe, and the water outlet is connected to the return water outer box through a fourth connecting pipe.

3. The cooling device of the vacuum coating machine according to claim 2, characterized in that: The first row of tubes, the second row of tubes and the third row of tubes are all integrally formed continuous curved tubes, and the curved tubes are S-shaped.

4. The cooling device of the vacuum coating machine according to claim 3, characterized in that: It also includes an adjustment component, which includes a group of first lifting brackets connected to the bottom of the first row of tubes and a group of second lifting brackets connected to the bottom of the second row of tubes, the first lifting brackets and the second lifting brackets are respectively installed on a horizontal telescopic rod, and the horizontal telescopic rod is set on the heat dissipation component.

5. The cooling device for a vacuum coating machine according to claim 4, characterized in that: The water inlet and outlet of the first row of pipes, the water inlet and outlet of the second row of pipes, and the water inlet and outlet of the third row of pipes are all provided with connecting ends to flexibly connect the first connecting pipe, the second connecting pipe, the third connecting pipe, and the fourth connecting pipe.

6. The cooling device of the vacuum coating machine according to claim 5, characterized in that: The water inlet tank is provided with a connecting straight pipe connected to the first connecting pipe, the connecting straight pipe is provided with a first electromagnetic valve, the return pipe is provided with a second electromagnetic valve, and the return water inner box is provided with a water level sensor.

Images