Evaporation mechanism for vacuum evaporation

Abstract

The utility model discloses an evaporation mechanism for vacuum evaporation, which comprises an evaporation component, the evaporation component comprises an evaporation rack, the top of the evaporation rack is provided with an evaporation tank, positive electrode seats and negative electrode seats are fixed in the evaporation tank at intervals, an evaporation boat is erected between one positive electrode seat and one negative electrode seat, and the positive electrode seats and the evaporation boats are multiple; the feeding part comprises a wire feeding rack, a plurality of wire feeding bases and a material disc, the wire feeding bases and the material disc are fixed to the wire feeding rack, and wire feeders and guide pipes are arranged on the wire feeding bases; the wire feeding rack is arranged on one side of the evaporation tank; the charging tray, the wire feeder, the guide pipe and the evaporation boat are correspondingly arranged, the charging tray is used for winding a filamentous to-be-evaporated film material, and the wire feeder feeds the filamentous to-be-evaporated film material into the evaporation boat after a to-be-evaporated film material wire penetrates into the guide pipe. According to the application, the phenomenon of short circuit between the electrode and the evaporation tank possibly caused by falling of a film material is prevented, the evaporation boat is convenient and rapid to maintain and replace, and the quality and efficiency of evaporation coating are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of conductive film production, in particular to an evaporation mechanism for vacuum evaporation. Background Art

[0002] Conductive film is a polymer material with metal plated on the surface. It is widely used in lithium-ion batteries. It is mainly used as a battery current collector in lithium-ion batteries. Its equivalent carrier free path is small, so compared with the bulk of the same material, the conductivity of the film is smaller, and it is an excellent lithium battery manufacturing material. The most commonly used method for producing conductive films is vacuum evaporation. Vacuum evaporation means that the material to be evaporated is heated and melted under vacuum conditions, and the material to be evaporated is layered on the film in the form of atoms or atomic groups, thereby manufacturing the product.

[0003] In the vacuum evaporation equipment, an electrode is set in the evaporation tank, and an evaporation boat is set on the electrode. The evaporation boat is powered by the electrode, and then the evaporation material on the evaporation boat is heated to make it reach a molten state for evaporation coating. The working current is large and the temperature is high. In the existing equipment, on the one hand, the connection mechanism between the evaporation tank and the electrode generates serious heat, which easily leads to electrode burnout and short service life, thereby affecting the efficiency and quality of coating. In addition, the connection mechanism is not easy to disassemble and assemble, which is not convenient for the maintenance and replacement of the evaporation boat. On the other hand, during the evaporation process, part of the film material may fall into the evaporation tank, resulting in a short circuit between the electrode and the evaporation tank, which affects the evaporation of the film material and thus affects the coating effect. Utility Model Content

[0004] In order to overcome the disadvantage of the prior art that part of the film material may fall into the evaporation tank during the evaporation process, the utility model provides an evaporation mechanism for vacuum evaporation.

[0005] The technical solution of the utility model is as follows:

[0006] An evaporation mechanism for vacuum evaporation, comprising:

[0007] An evaporation component, the evaporation component comprises an evaporation frame, an evaporation tank is arranged on the top of the evaporation frame, a positive electrode seat and a negative electrode seat are fixed in the evaporation tank at intervals, an evaporation boat is arranged between the positive electrode seat and the negative electrode seat, and there are multiple positive electrode seats and evaporation boats;

[0008] A feeding component, the feeding component comprises a wire feeding frame and a plurality of wire feeding bases and a material tray fixed on the wire feeding frame, wherein the wire feeding base is provided with a wire feeding machine and a guide tube;

[0009] The wire feeder rack is arranged on one side of the evaporation tank; the material tray, the wire feeder, the guide tube and the evaporation boat are arranged correspondingly, the material tray is used to wind the filamentary film material to be evaporated, and after the filamentary film material to be evaporated passes into the guide tube, the wire feeder feeds the filamentary film material to be evaporated into the evaporation boat.

[0010] Furthermore, in one embodiment, a pole seat hole is provided on the bottom plate of the evaporation tank, and the positive pole seat is fixed to the bottom plate of the evaporation tank through the pole seat hole. The positive pole seat is a stepped cone with a decreasing diameter from top to bottom and the bottom end extends out of the evaporation tank to facilitate the electrification of the positive pole seat.

[0011] Further, in one embodiment, a plurality of the positive electrode seats are arranged in a row on one side of the negative electrode seat, and the feeding component is one and is arranged on the outer side of the enclosure of the evaporation tank parallel to the long axis of the negative electrode seat.

[0012] Furthermore, in one embodiment, the plurality of positive electrode seats are arranged in two rows on both sides of the negative electrode seat, and the number of the feeding components is two, which are arranged on the outer sides of two enclosures of the evaporation tank parallel to the long axis of the negative electrode seat;

[0013] The evaporation boats are arranged in a staggered manner on the negative electrode seat.

[0014] Furthermore, in one embodiment, a first mounting groove is provided on the positive electrode seat, and a plurality of second mounting grooves are provided on the negative electrode seat. One end of the evaporation boat is placed in the first mounting groove, and the other end is placed in the second mounting groove. When the positive electrode seat and the negative electrode seat are energized, the evaporation boat is heated to melt the film material.

[0015] Furthermore, in one embodiment, graphite sealing sleeves are sleeved on contact surfaces between the two ends of the evaporation boat and the first mounting groove and the second mounting groove, and the graphite sealing sleeves are made of graphite paper.

[0016] Furthermore, in one embodiment, a mica insulating sleeve is provided in the electrode seat hole, and the mica insulating sleeve isolates the bottom plate of the evaporation tank from the positive electrode seat;

[0017] An upper insulating sleeve is sleeved on the positive electrode seat in the evaporation tank, and a lower insulating sleeve is sleeved on the positive electrode seat outside the evaporation tank.

[0018] Furthermore, in one embodiment, an insulating pad is provided at the bottom of the wire feeding base, and the wire feeding base is insulated from the wire feeding frame.

[0019] Furthermore, in one embodiment, cooling water channels are provided in both the positive electrode seat and the negative electrode seat.

[0020] Furthermore, in one embodiment, a plurality of U-shaped grooves are provided on the side panels of the evaporation tank parallel to the negative electrode seat, and the guide tube is arc-shaped and passes through the U-shaped grooves.

[0021] The utility model according to the above scheme has the beneficial effect that, by improving the positive electrode seat, evaporation boat, negative electrode seat and the feeding form of the evaporation film material of the electrode structure, not only the maintenance, replacement and disassembly of the evaporation boat are convenient and quick, but also the filamentary film material allows the film material to completely enter the evaporation boat and will not fall into the evaporation tank, thereby ensuring the quality and efficiency of the evaporation coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of an embodiment of the utility model;

[0023] Figure 2 for Figure 1 A magnified view of part A;

[0024] Figure 3 It is a cross-sectional view of the center position of a positive electrode seat;

[0025] Figure 4 for Figure 1 The main view;

[0026] Figure 5 It is a structural schematic diagram of an embodiment of the utility model;

[0027] Figure 6 for Figure 5 Top view of the .

[0028] In the figure, 100, evaporation component; 110, evaporation tank; 1101, enclosure; 11011, U-shaped groove; 120, positive electrode seat; 130, negative electrode seat; 140, evaporation boat; 150, upper insulating sleeve; 160, lower insulating sleeve; 170, mica insulating sleeve; 200, feeding component; 210, wire feeding frame; 220, wire feeding base; 230, wire feeding machine; 240, guide tube; 250, material tray; 260, insulating pad; 300, film material; 400, evaporation frame. DETAILED DESCRIPTION

[0029] The utility model is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on another element or there can be one or more centered elements therebetween. When an element is described as "connected" to another element, it can be directly connected to another element or there can be one or more centered elements therebetween. The terms "vertical", "horizontal", "left", "right", "inside", "outside" and similar expressions used in this specification are for illustrative purposes only. In the description of the utility model, the terms "first" and "second" are used only for descriptive purposes and cannot be understood as indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, unless otherwise specified, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features; the meaning of "multiple" is two or more. The term "include" and any variation thereof means non-exclusive inclusion, and one or more other features, integers, steps, operations, units, components and / or combinations thereof may be present or added.

[0030] In addition, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediate medium, or a connection between two components. All technical and scientific terms used in this specification have the same meaning as those generally understood by technicians in the technical field of the present utility model. The terms used in the specification of the present utility model are only for the purpose of describing specific embodiments and are not used to limit the present utility model. The term "and / or" used in this specification includes any and all combinations of one or more related listed items.

[0031] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0032] like Figure 1-Figure 4As shown, the present application provides an embodiment of an evaporation mechanism for vacuum evaporation, the evaporation mechanism for vacuum evaporation includes an evaporation component 100 and a feeding component 200, the evaporation component 100 includes an evaporation frame 400, an evaporation tank 110 is provided on the top of the evaporation frame 400, a positive electrode seat 120 and a negative electrode seat 130 are fixed in the evaporation tank 110 at intervals, an evaporation boat 140 is arranged between a positive electrode seat 120 and a negative electrode seat 130, and there are multiple positive electrode seats 120 and evaporation boats 140; multiple positive electrode seats 120 are arranged in a row on one side of the negative electrode seat 130; the feeding component 200 00 includes a wire feeding frame 210 and a plurality of wire feeding bases 220 and a material tray 250 fixed on the wire feeding frame 210, and a wire feeding machine 230 and a guide tube 240 are provided on the wire feeding base 220; the wire feeding frame 210 is arranged on one side of the evaporation tank 110 and is parallel to the negative electrode seat 130; the material tray 250, the wire feeding machine 230, the guide tube 240 and the evaporation boat 140 are arranged in a one-to-one correspondence, and the material tray 250 is used for winding the filamentary film material 300 to be evaporated. After the film material 300 to be evaporated passes into the guide tube 240, the wire feeding machine 230 feeds the filamentary film material 300 to be evaporated into the evaporation boat 140. The present application improves the structure among the positive electrode seat 120, the evaporation boat 140, and the negative electrode seat 130 of the electrode structure, as well as the feeding form of the evaporation film material 300, so that the maintenance, replacement, and disassembly of the evaporation boat 140 are convenient and quick, and the filamentary film material 300 allows the film material 300 to completely enter the evaporation boat 140. The heating of the filamentary film material 300 not only requires a lower temperature but also forms a smaller volume of metal plating solution, which is not easily splashed out of the evaporation boat 140. On the basis of ensuring the quality and efficiency of the evaporation coating, it can prevent the metal film material 300 from falling and accumulating, causing a short circuit between the electrode and the evaporation tank 110.

[0033] like Figure 1 As shown, in this embodiment, the evaporator frame 400 and the wire feeding frame 210 have the same height.

[0034] like Figure 3 As shown, in this embodiment, the bottom plate of the evaporation tank 110 is provided with a pole seat hole, and the positive pole seat 120 is fixed to the bottom plate of the evaporation tank 110 through the pole seat hole. The positive pole seat 120 is a stepped truncated cone with a decreasing diameter from top to bottom, and the bottom end extends out of the evaporation tank 110 to facilitate the power supply of the positive pole seat 120. A mica insulating sleeve 170 is provided in the pole seat hole, and the mica insulating sleeve 170 isolates the bottom plate of the evaporation tank 110 from the positive pole seat 120; inside the evaporation tank 110, the positive pole seat 120 is sleeved with an upper insulating sleeve 150, and outside the evaporation tank 110, the positive pole seat 120 is sleeved with a lower insulating sleeve 160. The mica insulating sleeve 170, the upper insulating sleeve 150 and the lower insulating sleeve 160 wrap the contact position between the positive electrode seat 120 and the evaporation tank 110 and the adjacent contact position to form an insulating layer to protect the positive electrode seat 120 and prevent the metal film material 300 from falling and accumulating, causing a short circuit between the electrode and the evaporation tank 110.

[0035] In addition, in the present embodiment, a plurality of U-shaped grooves are provided on the side enclosure 1101 parallel to the evaporation tank 110 and the negative electrode seat 130. The guide tube 240 is arc-shaped and passes through the U-shaped groove. The U-shaped groove provides a passage for the guide tube 240 and the filamentary film material 300 to enter the evaporation tank 110, so that the enclosure 1101 can have a higher height and better isolate the inside and outside of the evaporation tank 110, so that the evaporation component 100 has a good vacuum evaporation effect and reduces the influence of the feeding component 200 on the evaporation component 100.

[0036] like Figure 3 As shown, in this embodiment, a first mounting groove is provided on the positive electrode seat 120, and a plurality of second mounting grooves are provided on the negative electrode seat 130. One end of the evaporation boat 140 is placed in the first mounting groove and the other end is placed in the second mounting groove. After the positive electrode seat 120 and the negative electrode seat 130 are powered on, the evaporation boat 140 is heated to melt the film material 300. Graphite sealing sleeves are sleeved on the contact surfaces of the two ends of the evaporation boat 140 with the first mounting groove and the second mounting groove, and the graphite sealing sleeves are made of graphite paper. The groove-type fixing method of the first mounting groove and the second mounting groove makes the disassembly and assembly of the evaporation boat 140 simple, convenient and quick, which is conducive to the maintenance and replacement of the evaporation boat 140 and improves work efficiency. The graphite sealing sleeves made of graphite paper at both ends of the evaporation boat 140 not only effectively increase the contact area between the evaporation boat 140 and the positive electrode seat 120 and the negative electrode seat 130, but also tightly fix the evaporation boat 140 on the positive electrode seat 120 and the negative electrode seat 130, which has a better conductive effect and ensures a good heating effect of the evaporation boat 140, which is beneficial to improve the efficiency and quality of the coating.

[0037] like Figure 4 As shown, in this embodiment, an insulating pad 260 is provided at the bottom of the wire feeding base 220, and the wire feeding base 220 is insulated from the wire feeding frame 210. The insulating pad 260 makes the wire feeding base 220, the wire feeding machine 230, and the guide tube 240 all in an insulated state, ensuring that the wire feeding machine 230 operates normally to transport the filamentary film material 300 to the evaporation boat 140 according to the setting, thereby ensuring the stability of the coating quality.

[0038] like Figure 4 As shown, in this embodiment, the insulating spacer 260 is trapezoidal, and the wire feeding base 220 is rectangular. The insulating spacer 260 allows the wire feeding base 220 to be tilted outwardly on the wire feeding machine frame 210, so as to shorten the length of the arc guide tube 240, reduce the working energy consumption of the wire feeding machine 230, and reduce production energy consumption.

[0039] like Figure 5 and Figure 6As shown, the present application provides another embodiment of an evaporation mechanism for vacuum evaporation, which is different from the above embodiment in that a plurality of positive electrode seats 120 are arranged in two rows on both sides of a negative electrode seat 130, and there are two feeding parts 200, which are arranged on the outer sides of two enclosures 1101 of the evaporation tank 110 parallel to the long axis of the negative electrode seat 130; on the negative electrode seat 130, the evaporation boats 140 are staggered. In this embodiment, of the two enclosures 1101 parallel to the evaporation tank 110 and the negative electrode seat 130, one is provided with a plurality of U-shaped grooves, and the other is not provided with a U-shaped groove, wherein the height of the enclosure 1101 provided with the U-shaped groove is higher than the height of the other enclosure 1101. Figure 1 and Figure 5 By comparison, the positive electrode seats 120 arranged in two rows can reduce the volume of the device as much as possible and increase the number of evaporation boats 140. Since the two rows of positive electrode seats 120 share one negative electrode seat 130, the staggered arrangement of the evaporation boats 140 on both sides can set as many evaporation boats 140 connected to the negative electrode seat 130 as possible.

[0040] In one embodiment, cooling water channels are provided in the positive electrode holder 120 and the negative electrode holder 130. The existence of the cooling water channels ensures that the electrode temperature is stable and prevents the electrode temperature from being too high and causing electrode damage.

[0041] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0042] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. An evaporation mechanism for vacuum evaporation, characterized in that: include, An evaporation component, the evaporation component comprises an evaporation frame, an evaporation tank is arranged on the top of the evaporation frame, a positive electrode seat and a negative electrode seat are fixed in the evaporation tank at intervals, an evaporation boat is arranged between the positive electrode seat and the negative electrode seat, and there are multiple positive electrode seats and evaporation boats; A feeding component, the feeding component comprises a wire feeding frame and a plurality of wire feeding bases and a material tray fixed on the wire feeding frame, wherein the wire feeding base is provided with a wire feeding machine and a guide tube; The wire feeder rack is arranged on one side of the evaporation tank; the material tray, the wire feeder, the guide tube and the evaporation boat are arranged correspondingly, the material tray is used to wind the filamentary film material to be evaporated, and after the filamentary film material to be evaporated passes into the guide tube, the wire feeder feeds the filamentary film material to be evaporated into the evaporation boat.

2. The evaporation mechanism for vacuum evaporation according to claim 1, characterized in that: The bottom plate of the evaporation tank is provided with a pole seat hole, and the positive pole seat is fixed to the bottom plate of the evaporation tank through the pole seat hole. The positive pole seat is a stepped frustum with a decreasing diameter from top to bottom and the bottom end extends out of the evaporation tank to facilitate the electrification of the positive pole seat.

3. The evaporation mechanism for vacuum evaporation according to claim 2, characterized in that: A plurality of positive electrode seats are arranged in a row on one side of the negative electrode seat, and there is one feeding component, which is arranged on the outer side of the enclosure of the evaporation tank parallel to the long axis of the negative electrode seat.

4. The evaporation mechanism for vacuum evaporation according to claim 2, characterized in that: The plurality of positive electrode seats are arranged in two rows on both sides of the negative electrode seat, and the number of the feeding components is two, which are arranged on the outer sides of the two enclosures of the evaporation tank parallel to the long axis of the negative electrode seat; The evaporation boats are arranged in a staggered manner on the negative electrode seat.

5. The evaporation mechanism for vacuum evaporation according to claim 1, characterized in that: The positive electrode seat is provided with a first mounting groove, and the negative electrode seat is provided with a plurality of second mounting grooves. One end of the evaporation boat is placed in the first mounting groove and the other end is placed in the second mounting groove. When the positive electrode seat and the negative electrode seat are powered on, the evaporation boat is heated to melt the film material.

6. The evaporation mechanism for vacuum evaporation according to claim 5, characterized in that: Graphite sealing sleeves are sleeved on contact surfaces between the two ends of the evaporation boat and the first mounting groove and the second mounting groove, and the graphite sealing sleeves are made of graphite paper.

7. The evaporation mechanism for vacuum evaporation according to claim 2, characterized in that: A mica insulating sleeve is provided in the electrode seat hole, and the mica insulating sleeve isolates the bottom plate of the evaporation tank from the positive electrode seat; An upper insulating sleeve is sleeved on the positive electrode seat in the evaporation tank, and a lower insulating sleeve is sleeved on the positive electrode seat outside the evaporation tank.

8. The evaporation mechanism for vacuum evaporation according to claim 1, characterized in that: An insulating pad is provided at the bottom of the wire feeding base, and the wire feeding base and the wire feeding frame are insulated.

9. The evaporation mechanism for vacuum evaporation according to claim 1, characterized in that: Cooling water channels are provided in both the positive electrode seat and the negative electrode seat.

10. The evaporation mechanism for vacuum evaporation according to claim 1, characterized in that: A plurality of U-shaped grooves are arranged on the side panels of the evaporation tank parallel to the negative electrode seat, and the guide tube is arc-shaped and passes through the U-shaped grooves.

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