Heat screen suspension assembly and single crystal furnace

Abstract

The utility model discloses a heat insulation screen suspension assembly and a single crystal furnace. The heat insulation screen comprises a first heat insulation hole, a heat insulation side wall and a second heat insulation hole which are sequentially connected along a first direction, the counter weight is sleeved with the heat insulation screen, the first heat insulation hole is fixedly connected with the first end, or the inner wall of the first heat insulation hole is attached to the outer wall of the first end, and on the basis that the structure of an existing single crystal furnace is not changed, the heat insulation screen is connected with the counter weight, the first end is fixedly connected with the first heat insulation hole, and the structural stability is enhanced; the inner wall of the first heat insulation hole is attached to the outer wall of the first end, so that the heat insulation screen is convenient to disassemble, clean or replace, and the cost is controlled; in the process of producing and manufacturing the crystal bar, heat in the single crystal furnace is reflected by the heat insulation side wall when reaching the heat insulation screen, so that the lost heat is reduced, the leading and discharging power is reduced, the shouldering decreasing amplitude is reduced, the interruption rate is reduced, the oxygen content is reduced, and the production efficiency of the crystal bar is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon production, and more specifically, to a heat insulation screen suspension component and a single crystal furnace. Background Art

[0002] In the process of growing solar and semiconductor-grade silicon single crystals, most of them are made by the Czochralski method. This method is to load high-purity polycrystalline silicon raw materials into a quartz crucible according to certain requirements, then heat the quartz crucible to melt the polycrystalline raw materials, and finally grow high-quality qualified single products through a series of steps such as seed crystal welding, seeding, shouldering, equal diameter growth, and finishing. In the above-mentioned process of growing single products, improving crystal pulling efficiency and reducing energy consumption have always been the focus of research.

[0003] In the prior art, a heat shield is mostly installed in the thermal system of a single crystal furnace. However, the larger the size of the pulled crystal rod is, the larger the opening of the heat shield will be, and the more serious the heat leakage of the thermal field will be, which will cause the lead-in power to increase and the shoulder drop to increase. At the same time, the wire breakage rate will increase, which will affect the crystal rod yield.

[0004] Therefore, there is an urgent need to provide a heat insulation screen suspension assembly and a single crystal furnace that can solve the above problems. Utility Model Content

[0005] In view of this, on the one hand, the utility model provides a heat insulation screen suspension assembly, including: a heat insulation screen, a weight;

[0006] The weight includes a first end and a second end that are arranged opposite to each other along a first direction, and the first direction is an extension direction of the weight;

[0007] The heat insulation screen comprises a first heat insulation hole, a heat insulation side wall and a second heat insulation hole which are sequentially connected along a first direction; the heat insulation screen is sleeved on the weight, the first heat insulation hole is fixedly connected to the first end, or the inner wall of the first heat insulation hole is fitted to the outer wall of the first end.

[0008] Optionally, a plurality of air flow channels are provided on the heat-insulating side wall, and the air flow channels penetrate the heat-insulating side wall along the thickness direction of the heat-insulating side wall.

[0009] Optionally, along the second direction, the width of the airflow channel is w, 5mm≤w≤10mm, and the second direction is perpendicular to the first direction.

[0010] Optionally, along the second direction, the aperture of the first thermal insulation hole is smaller than the aperture of the second thermal insulation hole, and the second direction is perpendicular to the first direction.

[0011] Optionally, along the second direction, the aperture of the first thermal insulation hole is R1, 30mm≤R1≤70mm; the aperture of the second thermal insulation hole is R2, 220mm≤R2≤260mm.

[0012] Optionally, the thickness of the heat insulation screen is d, 5mm≤d≤10mm.

[0013] Optionally, the material of the heat shield is one or more of carbon-carbon, graphite, molybdenum, and zirconium oxide.

[0014] On the other hand, the utility model also provides a single crystal furnace, including the above-mentioned heat insulation screen suspension assembly, and also including a graphite chuck, one end of the graphite chuck is detachably connected to the second end; it also includes a tungsten wire rope, the first end is connected to one end of the tungsten wire rope; it also includes a crucible, when the single crystal furnace is working, the crucible contains silicon liquid; the graphite chuck clamps the seed crystal, and the seed crystal is in contact with the silicon liquid.

[0015] Optionally, it also includes a heat shield and a heat exchanger. The heat exchanger is placed in the single crystal furnace, the heat shield is hung on the heat exchanger, and the heat insulation shield and the heavy hammer are located in the accommodation space formed by the heat shield.

[0016] Optionally, the fixed connection is welding.

[0017] Compared with the prior art, the heat shield suspension assembly and single crystal furnace provided by the utility model achieve at least the following beneficial effects:

[0018] The utility model provides a heat insulation screen suspension component and a single crystal furnace, wherein the heat insulation screen comprises a first heat insulation hole, a heat insulation side wall and a second heat insulation hole which are sequentially connected along a first direction; the heat insulation screen is tapered as a whole, and the arrangement of the tapered heat insulation screen enables the first heat insulation hole to be adaptively installed with the first end of a weight, thereby enhancing the stability of the structure in the single crystal furnace; the heat insulation screen is sleeved on the weight, and the first heat insulation hole is fixedly connected with the first end, or the inner wall of the first heat insulation hole is fitted with the outer wall of the first end, and the heat insulation screen is connected with the weight without changing the existing structure of the single crystal furnace, and the first end is fixedly connected with the first heat insulation hole, thereby enhancing the structural stability; the inner wall of the first heat insulation hole is fitted with the outer wall of the first end, thereby facilitating the disassembly, cleaning or replacement of the heat insulation screen, thereby controlling the cost; in the process of manufacturing crystal rods, the heat radiation is reflected by the heat insulation side wall when it reaches the heat insulation screen, thereby reducing the loss of heat, lowering the lead power, reducing the shoulder drop amplitude, and accompanied by a reduced intermittent rate, and reducing the oxygen content, thereby improving the production efficiency of the crystal rods.

[0019] Of course, any product implementing the present utility model does not necessarily need to achieve all of the above-mentioned technical effects at the same time.

[0020] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present invention and, together with the description, serve to explain the principles of the present invention.

[0022] Figure 1 It is a schematic diagram of the internal structure of a single crystal furnace in the prior art;

[0023] Figure 2 It is a schematic diagram of the structure of the heat insulation screen suspension assembly provided by the utility model;

[0024] Figure 3 It is a structural schematic diagram of the single crystal furnace provided by the utility model;

[0025] Figure 4 yes Figure 2 Schematic diagram of the middle insulation screen;

[0026] 1-heat shield, 11-first heat insulation hole, 12-heat insulation side wall, 13-second heat insulation hole, 14-air flow channel, 2-weight, 21-first end, 22-second end, 3-graphite chuck, 4-tungsten wire rope, 5-heat shield, 6-seed crystal, 7-crucible, 8-silicon liquid, y-first direction, x-second direction. DETAILED DESCRIPTION

[0027] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0028] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.

[0029] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0030] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0031] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0032] Reference Figure 1 In the single crystal furnace thermal system of the prior art, a heat shield 5 is installed, a tungsten wire rope 4 is connected to a heavy hammer 2, and a graphite chuck 3 is connected under the heavy hammer 2. The heat generated during the crystal rod pulling process is dissipated through the opening of the heat shield 5. The larger the crystal rod pulled, the more serious the heat leakage of the thermal field will be, which will cause the lead-in power to become higher and the shoulder drop to become larger. At the same time, the wire breakage rate will increase, which will affect the crystal rod yield.

[0033] Reference Figure 2 The utility model provides a heat insulation screen suspension assembly, comprising: a heat insulation screen 1, a weight 2;

[0034] The weight 2 includes a first end 21 and a second end 22 arranged opposite to each other along a first direction y, wherein the first direction is an extension direction of the weight;

[0035] The heat insulation screen 1 comprises a first heat insulation hole 11, a heat insulation side wall 12 and a second heat insulation hole 13 which are sequentially connected along a first direction y; the heat insulation screen 1 is sleeved on the weight 2, the first heat insulation hole 11 is fixedly connected to the first end 21, or the inner wall of the first heat insulation hole 11 is fitted to the outer wall of the first end 21.

[0036] Specifically, refer to Figure 2-Figure 4 The utility model provides a heat insulation screen suspension assembly, comprising: a heat insulation screen 1, a weight 2; the weight 2 comprises a first end 21 and a second end 22 arranged opposite to each other along a first direction y, and the second end 22 is provided with a thread; the first direction y is the extension direction of the weight 2, and when the heat insulation screen suspension assembly is applied to a single crystal furnace, the first direction y is the direction from the bottom of the single crystal furnace to the top of the furnace; the second end 22 of the weight 2 is provided with a thread, which provides a certain installation foundation for the subsequent connection with the graphite chuck 3, and the heat insulation screen 1 comprises a first heat insulation hole 11, a heat insulation side wall 12 and a second heat insulation hole 13 connected in sequence along the first direction y; the heat insulation screen 1 is tapered as a whole, and the arrangement of the tapered heat insulation screen 1 makes the first heat insulation hole 11 and the first end 22 of the weight 2 1 Adaptive installation enhances the stability of the structure in the single crystal furnace; in the process of manufacturing the crystal rod, the heat radiation is reflected by the heat insulating side wall 12 when it contacts the second heat insulating hole 13, and the second heat insulating hole 13 and the heat insulating side wall 12 can block more heat loss; the heat insulating screen 1 is sleeved on the heavy hammer 2, the first heat insulating hole 11 is fixedly connected to the first end 21, or the inner wall of the first heat insulating hole 11 is fitted with the outer wall of the first end 21, and on the basis of not changing the existing single crystal furnace structure, the heat insulating screen 1 is connected to the heavy hammer 2, and the first end 21 is fixedly connected to the first heat insulating hole 11, so as to enhance the structural stability; the inner wall of the first heat insulating hole 11 is fitted with the outer wall of the first end 21, so as to facilitate the disassembly, cleaning or replacement of the heat insulating screen 1 and control the cost.

[0037] It can be understood that the utility model provides a heat insulation screen suspension assembly, the heat insulation screen 1 includes a first heat insulation hole 11, a heat insulation side wall 12 and a second heat insulation hole 13 connected in sequence along a first direction y; the heat insulation screen 1 is tapered as a whole, and the setting of the tapered heat insulation screen 1 enables the first heat insulation hole 11 to be adaptively installed with the first end 21 of the weight 2, thereby enhancing the stability of the structure in the single crystal furnace; the heat insulation screen 1 is sleeved on the weight 2, the first heat insulation hole 11 is fixedly connected with the first end 21, or the inner wall of the first heat insulation hole 11 is attached to the outer wall of the first end 21 On the basis of not changing the existing single crystal furnace structure, the heat insulation screen 1 is connected to the weight 2, and the first end 21 is fixedly connected to the first heat insulation hole 11, so as to enhance the structural stability; the inner wall of the first heat insulation hole 11 is fitted with the outer wall of the first end 21, so as to facilitate the disassembly, cleaning or replacement of the heat insulation screen 1 and control the cost; in the process of manufacturing the crystal rod, the heat radiation is reflected when it reaches the heat insulation screen 1, so the heat loss is reduced, the lead power is lowered, the shoulder reduction amplitude is reduced, and the intermittent rate is reduced, the oxygen content is lowered, and the crystal rod production efficiency is improved.

[0038] In some optional embodiments, referring to Figure 2 and Figure 4 A plurality of airflow channels 14 are provided on the heat-insulating side wall 12. The airflow channels 14 penetrate the heat-insulating side wall 12 along the thickness direction of the heat-insulating side wall 12.

[0039] It should be noted that an air flow channel 14 is provided on the insulating side wall 12 and penetrates the insulating side wall 12 along the thickness direction of the insulating side wall 12. On the basis of ensuring the effect of the insulating screen 1 in reducing heat dissipation, the air pressure around the insulating screen 1 in the single crystal furnace is balanced through the air flow channel 14 to avoid unstable temperature and air pressure in the single crystal furnace, which affects thermal uniformity and leads to unsatisfactory crystal growth quality.

[0040] In some optional embodiments, along the second direction x, the width of the air flow channel 14 is w, 5 mm≤w≤10 mm, and the second direction x is perpendicular to the first direction y.

[0041] It should be noted that the second direction x is perpendicular to the first direction y. When the heat insulation screen suspension assembly is applied to a single crystal furnace, the second direction x is parallel to the plane where the bottom of the single crystal furnace is located.

[0042] Optionally, along the second direction x, the width w of the airflow channel 14 can be 5mm, 5.2mm, 5.4mm, 5.6mm, 5.8mm, 6mm, 6.3mm, 6.5mm, 6.8mm, 7mm, 7.1mm, 7.3mm, 7.5mm, 7.9mm, 8mm, 8.5mm, 8.7mm, 8.9mm, 9mm, 9.4mm, 9.6mm, 9.8mm and 10mm; when w<5mm, along the second direction x, the width w of the airflow channel 14 is too small, and the heat dissipation effect is relatively poor. When w>10mm, the width w of the air flow channel 14 along the second direction x is too large, which affects the effect of the heat insulation screen 1 on reducing heat dissipation. Therefore, when 5mm≤w≤10mm, the width w of the air flow channel 14 along the second direction x is moderate, which can not only ensure the effect of the heat insulation screen 1 on reducing heat dissipation, but also balance the air pressure in the single crystal furnace, ensure the quality of crystal growth, and at the same time ensure the safety of the single crystal furnace equipment, thereby improving the safety of the production process.

[0043] Optionally, along the second direction x, the width w of the airflow channel 14 may specifically be 5 mm≤w≤6.5 mm, 5.8 mm≤w≤6.9 mm, 6.65 mm≤w≤7.3 mm, 7.1 mm≤w≤7.9 mm, 7.8 mm≤w≤8.6 mm, 8.3 mm≤w≤9.5 mm and 9.2 mm≤w≤10 mm.

[0044] In some optional embodiments, along the second direction x, the aperture of the first thermal insulation hole 11 is smaller than the aperture of the second thermal insulation hole 13 , and the second direction x is perpendicular to the first direction y.

[0045] It should be noted that the aperture of the first insulation hole 11 of the insulation screen 1 is smaller than the aperture of the second insulation hole 13, that is, the insulation screen 1 is conical. Compared with other shapes, the conical insulation screen 1 is more conducive to collecting heat. The heat generated in the crystal rod production process rises to the insulation screen 1. The cone can effectively collect most of the heat, minimize heat loss, reduce the lead-in power, reduce the shoulder drop, and at the same time, the intermittent rate is reduced, the oxygen content is lowered, and the crystal rod production efficiency is improved; the aperture of the first insulation hole 11 is smaller than the aperture of the second insulation hole 13, which is convenient for the insulation screen 1 to be connected to the first end 21 of the weight 2. The insulation screen 1 can be set without changing the structure of the existing single crystal furnace to reduce heat loss; the aperture of the second insulation hole 13 is smaller than the inner diameter of the heat exchanger and the heat screen 5 of the existing single crystal furnace, which provides a certain space basis for the operation and movement of the insulation screen 1 in the heat exchanger of the single crystal furnace.

[0046] In some optional embodiments, referring to Figure 4Along the second direction x, the aperture of the first thermal insulation hole 11 is R1, 30mm≤R1≤70mm; the aperture of the second thermal insulation hole 13 is R2, 220mm≤R2≤260mm.

[0047] Optionally, along the second direction x, the aperture R1 of the first thermal insulation hole 11 can be 30 mm, 31.5 mm, 32 mm, 32.6 mm, 33 mm, 33.8 mm, 34 mm, 34.7 mm, 35 mm, 35.6 mm, 36 mm, 36.4 mm, 37 mm, 37.5 mm, 38 mm, 38.5 mm, 39 mm, 39.3 mm, 40 mm, 40.4 mm, 41mm, 41.3mm, 42mm, 43.5mm, 44mm, 44.6mm, 45mm, 48mm, 49.6mm, 51mm, 53.5mm, 55mm, 56.7 mm, 57.9mm, 59mm, 60.3mm, 61mm, 62.7mm, 63mm, 65.5mm, 66.7mm, 67mm, 67.4mm, 68mm, 68.4 When R1 is less than 30 mm, the aperture R1 of the first thermal insulation hole 11 along the second direction x is too small, the thermal insulation screen 1 is connected to the weight 2, and the fit between the first thermal insulation hole 11 and the first end 21 is poor, which affects the stability of the structure in the single crystal furnace; when R1 is greater than 70 mm, when the thermal insulation screen 1 is connected to the weight 2, the fit between the first thermal insulation hole 11 and the first end 21 is poor, and the thermal insulation screen 1 is easy to shake, which on the one hand easily affects the safety of the crystal production process, and on the other hand has a greater impact on the performance of the thermal insulation screen 1 in reducing heat loss; therefore, when 30 mm ≤ R1 ≤ 70 mm, the aperture R1 of the first thermal insulation hole 11 along the second direction x is appropriate, which can be connected to the first end 21 of the weight 2, and has good fit, and can also ensure that the thermal insulation screen 1 is at a moderate height in the single crystal furnace, further improving the effect of the thermal insulation screen 1 in reducing heat loss.

[0048] Optionally, along the second direction x, the aperture R1 of the first thermal insulation hole 11 may specifically be 30 mm≤R1≤38.8 mm, 35 mm≤R1≤45.3 mm, 42 mm≤R1≤50.7 mm, 48 mm≤R1≤63.2 mm, 55.7 mm≤R1≤65 mm and 63.4 mm≤R1≤70 mm.

[0049] Optionally, along the second direction x, the aperture R2 of the second thermal insulation hole 13 can be 220mm, 223mm, 223.6mm, 224mm, 225.3mm, 226.7mm, 228mm, 229.6mm, 230mm, 230.5mm, 231.8mm, 233mm, 235.8mm, 236mm, 237.9mm, 239mm, 240mm, 244.7mm, 245mm, 247.2mm, 250mm, 253mm, 255.3mm, 256mm, 258.4mm and 260mm; when R2<220mm, along the second direction x, the aperture R2 of the second thermal insulation hole 13 is too small, which can block If too little heat is blocked, more heat will be lost, and the heat leakage of the thermal field will be more serious, which will cause the lead-in power to become higher and the shoulder drop to become larger. At the same time, the wire breakage rate will increase, which will affect the crystal rod output; when R2>260mm, along the second direction x, the aperture R2 of the second thermal insulation hole 13 is too large, and the operation and actuation of the heat insulation screen 1 in the single crystal furnace are easily affected, and it is easy to affect the heat dissipation effect in the single crystal furnace, causing excessive pressure in the furnace and thermal uniformity, which affects the quality of the produced products; therefore, when 220mm≤R2≤260mm, along the second direction x, the aperture R2 of the second thermal insulation hole 13 is of appropriate size, which on the one hand improves the effect of the heat insulation screen 1 on reducing heat loss, and on the other hand can also improve the safety of the operation of the heat insulation screen 1 in the single crystal furnace.

[0050] Optionally, along the second direction x, the aperture R2 of the second thermal insulation hole 13 may specifically be 220mm≤R2≤235.5mm, 225mm≤R2≤240mm, 236.7mm≤R2≤247.8mm, 245.4mm≤R2≤253.6mm, 252mm≤R2≤258mm and 256.3mm≤R2≤260mm.

[0051] In some optional embodiments, the thickness of the heat insulation shield 1 is d, 5 mm ≤ d ≤ 10 mm.

[0052] Optionally, the thickness d of the heat shield 1 can be 5mm, 5.3mm, 5.5mm, 6.3mm, 6.7mm, 7.2mm, 7.6mm, 8mm, 8.5mm, 8.8mm, 9mm, 9.3mm, 9.8mm and 10mm; when d < 5mm, the thickness of the heat shield 1 is relatively small, and it is inevitable that there will be some loss during use, which will affect the service life of the heat shield 1, affecting the safety performance of the crystal rod production process and the stability of the structure in the single crystal furnace; when d > 10mm, the thickness of the heat shield 1 is too large, and along the second direction x, the thickness of the heat shield 1 occupies a certain space in the single crystal furnace, which will cause the aperture of the second heat insulation hole 13 of the heat shield 1 to be too small, affecting the effect of the heat shield 1 in preventing excessive heat loss; therefore, when 5mm ≤ d ≤ 10mm, the thickness of the heat shield 1 is appropriate, which can not only ensure the quality of the heat shield 1 and extend the service life to a certain extent, but also ensure the effect of the heat shield 1 in preventing excessive heat loss.

[0053] In some optional embodiments, the material of the heat shield 1 is one or more of carbon-carbon, graphite, molybdenum, and zirconium oxide.

[0054] It should be noted that carbon-carbon composite materials have good heat resistance and high-temperature stability. In applications, carbon-carbon composite materials are usually made into porous materials. Since the porous structure can reduce the efficiency of heat transfer, it can have a good heat insulation effect. In addition, carbon-carbon composite materials can also be used in the production of heat insulation coatings. Through a special process, the carbon-carbon composite material is coated on the surface of the object that needs to be insulated to achieve a heat insulation effect, so the carbon-carbon material can be used for a long time in a high-temperature environment.

[0055] It should be noted that graphite is a material with a layered structure and a crystal structure, and has good thermal conductivity. Compared with metals, graphite has a lower thermal conductivity and a weaker bonding force between graphite sheets. Therefore, during the heat conduction process, heat needs to be conducted through interlayer jumps, which results in a decrease in thermal conductivity. Therefore, graphite has certain thermal insulation properties and is one of the preferred materials for manufacturing the heat shield 1.

[0056] It should be noted that molybdenum has the characteristics of high purity, corrosion resistance, good oxidation resistance, small thermal expansion coefficient, good electrical and thermal conductivity; molybdenum material is very resistant to high temperatures and can remain stable under high temperature conditions.

[0057] It should be noted that zirconia has extremely high thermal stability and corrosion resistance, and can maintain stability in harsh environments such as high temperature, high pressure, acid and alkali; the hardness and strength of zirconia are very high, exceeding most metal and ceramic materials; zirconia has a smooth surface, no pores or cracks, has extremely high hardness and wear resistance, and can be used under harsh conditions such as high temperature.

[0058] On the other hand, the utility model provides a single crystal furnace, referring to Figure 2-Figure 3 , including the above-mentioned heat insulation screen suspension assembly, and also including a graphite chuck 3, one end of the graphite chuck 3 is detachably connected to the second end 22; also including a tungsten wire rope 4, the first end 21 is connected to one end of the tungsten wire rope 4; also including a crucible 7, when the single crystal furnace is working, the crucible 7 contains silicon liquid 8; the graphite chuck 3 clamps the seed crystal 6, and the seed crystal 6 is in contact with the silicon liquid 8.

[0059] It should be noted that the single crystal furnace provided by the utility model also includes a graphite chuck 3, one end of which is provided with a thread and is detachably connected to the second end 22 of the weight 2. The graphite chuck 3 is used to clamp the seed crystal 6. Since the thermal expansion coefficient of the contact point of the graphite chuck 3 is small, it is not easy to change even when used in a high temperature environment; the surface of the contact point of the graphite chuck 3 is smooth and will not cause scratches or damage to the surface of the seed crystal 6; the contact point of the graphite chuck 3 is resistant to high temperature and will not cause failure of the clamp due to the high temperature environment in the single crystal furnace, which can further improve the safety of the single crystal furnace during the production of crystal rods.

[0060] It should be noted that the single crystal furnace provided by the utility model also includes a tungsten wire rope 4, and the first end 21 is connected to one end of the tungsten wire rope 4; the connection between the tungsten wire rope 4 and the first end 21 provides a certain installation basis for the heat insulation screen 1 to be directly sleeved on the heavy hammer 2; tungsten has a very high melting point and thermal stability, and can maintain good mechanical properties and chemical stability at high temperatures, so the tungsten wire rope 4 can withstand the thermal expansion and thermal stress in the high temperature environment of the single crystal furnace, and is not easy to deform or break; in the single crystal furnace, the tungsten wire rope 4 is used as a heating element, and needs to be heated by electric current to provide a heat source; the conductive property of the tungsten wire rope 4 can effectively convert electrical energy into thermal energy, providing a stable heating effect.

[0061] It should be noted that the single crystal furnace provided by the utility model also includes a crucible 7. When the single crystal furnace is working, the crucible 7 contains silicon liquid 8; the graphite chuck 3 clamps the seed crystal 6, and the seed crystal 6 is in contact with the silicon liquid 8, providing a certain basis for the subsequent production of crystal rods.

[0062] In some optional embodiments, referring to Figure 2-Figure 3 , and also includes a heat shield 5 and a heat exchanger (not shown in the figure). The heat exchanger is placed in the single crystal furnace, the heat shield 5 is hung on the heat exchanger, and the heat insulation shield 1 and the heavy hammer 2 are located in the accommodation space formed by the heat shield 5.

[0063] It should be noted that the single crystal furnace provided by the utility model includes a heat shield 5 and a heat exchanger. The heat exchanger is placed in the single crystal furnace. During the production process of the crystal rod, a large amount of energy needs to be continuously consumed in the single crystal furnace. Therefore, a radiator is required to dissipate the excess heat. The heat exchanger is an important radiator. The heat exchanger is generally composed of a group of pipes. The medium flows into it. The heat exchange on the surface of the pipe is used to exchange the internal heat into external energy, thereby playing a role in heat dissipation. In the single crystal furnace, the temperature of the furnace body is reduced by circulating water cooling. The heat exchanger is hung on the heat exchanger. The heat shield 5 is also a radiator. Since the high-temperature melt in the single crystal furnace is easy to splash, in order to avoid it from contaminating the single crystal silicon material, a heat shield 5 is required to isolate the splashing material; at the same time, the heat shield 5 can also play a role in heat preservation and reduce the heat loss of the furnace body; the heat shield 1 and the heavy hammer 2 are located in the hollow oblique cylindrical accommodation space formed by the suspended heat shield 5. The heat shield 1 further reduces the heat loss, the heat loss is reduced, the lead-in power becomes lower, the shoulder drop becomes smaller, and the intermittent rate is reduced, the oxygen content is lowered, and the crystal rod production efficiency is improved.

[0064] In some optional embodiments, the fixed connection is welding.

[0065] It should be noted that the connection method between the first insulation hole 11 of the insulation screen 1 and the first end 21 of the weight 2 can be welding; compared with other connection methods, welding has very low energy consumption, and the operation is relatively simple and the connection stability is high, which can better ensure the connection strength and stability. The welding connection method has high compressive resistance and can extend the service life of the single crystal furnace.

[0066] It can be seen from the above embodiments that the heat shield suspension assembly and single crystal furnace provided by the utility model achieve at least the following beneficial effects:

[0067] The utility model provides a heat insulation screen suspension assembly and a single crystal furnace, wherein the heat insulation screen 1 comprises a first heat insulation hole 11, a heat insulation side wall 12 and a second heat insulation hole 13 which are sequentially connected along a first direction y; the heat insulation screen 1 is tapered as a whole, and the arrangement of the tapered heat insulation screen 1 enables the first heat insulation hole 11 to be adaptively installed with a first end 21 of a weight 2, thereby enhancing the stability of the structure inside the single crystal furnace; the heat insulation screen 1 is sleeved on the weight 2, and the first heat insulation hole 11 is fixedly connected with the first end 21, or the inner wall of the first heat insulation hole 11 is fitted with the outer wall of the first end 21, On the basis of not changing the existing single crystal furnace structure, the heat insulation screen 1 is connected to the weight 2, and the first end 21 is fixedly connected to the first heat insulation hole 11, so as to enhance the structural stability; the inner wall of the first heat insulation hole 11 is fitted with the outer wall of the first end 21, so as to facilitate the disassembly, cleaning or replacement of the heat insulation screen 1 and control the cost; in the process of manufacturing the crystal rod, the heat radiation is reflected when it reaches the heat insulation screen 1, so the heat loss is reduced, the lead-in power is lowered, the shoulder reduction amplitude is smaller, and at the same time, the intermittent rate is reduced, the oxygen content is lowered, and the crystal rod production efficiency is improved.

[0068] Although some specific embodiments of the present invention have been described in detail through examples, those skilled in the art should understand that the above examples are only for illustration rather than for limiting the scope of the present invention.

[0069] It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A heat shield suspension assembly, characterized in that: include: Heat shield, heavy hammer; The weight comprises a first end and a second end arranged opposite to each other along a first direction, wherein the first direction is an extending direction of the weight; The heat insulation screen comprises a first heat insulation hole, a heat insulation side wall and a second heat insulation hole which are sequentially connected along the first direction; the heat insulation screen is sleeved on the weight, the first heat insulation hole is fixedly connected to the first end, or the inner wall of the first heat insulation hole is in contact with the outer wall of the first end.

2. The heat shield suspension assembly according to claim 1, characterized in that: A plurality of airflow channels are arranged on the heat-insulating side wall, and the airflow channels penetrate the heat-insulating side wall along the thickness direction of the heat-insulating side wall.

3. The heat shield suspension assembly according to claim 2, characterized in that: Along the second direction, the width of the air flow channel is w, 5mm≤w≤10mm, and the second direction is perpendicular to the first direction.

4. The heat shield suspension assembly according to claim 1, characterized in that: Along the second direction, the aperture of the first thermal insulation hole is smaller than the aperture of the second thermal insulation hole, and the second direction is perpendicular to the first direction.

5. The heat shield suspension assembly according to claim 4, characterized in that: Along the second direction, the aperture of the first thermal insulation hole is R1, 30 mm ≤ R1 ≤ 70 mm; the aperture of the second thermal insulation hole is R2, 220 mm ≤ R2 ≤ 260 mm.

6. The heat shield suspension assembly according to claim 1, characterized in that: The thickness of the heat insulation screen is d, 5mm≤d≤10mm.

7. The heat shield suspension assembly according to claim 1, characterized in that: The material of the heat shield is one or more of carbon-carbon, graphite, molybdenum and zirconium oxide.

8. A single crystal furnace, comprising the heat shield suspension assembly according to any one of claims 1 to 7, characterized in that: It also includes a graphite chuck, one end of which is detachably connected to the second end; it also includes a tungsten wire rope, the first end is connected to one end of the tungsten wire rope; it also includes a crucible, when the single crystal furnace is working, the crucible contains silicon liquid; The graphite chuck clamps the seed crystal, and the seed crystal is in contact with the silicon liquid.

9. The single crystal furnace according to claim 8, characterized in that: It also includes a heat shield and a heat exchanger. The heat exchanger is placed in the single crystal furnace. The heat shield is hung on the heat exchanger. The heat insulation shield and the weight are located in the accommodation space formed by the heat shield.

10. The single crystal furnace according to claim 8, characterized in that: The fixed connection is welding.

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