Fixing device of heating element for vacuum furnace

Abstract

The utility model provides a fixing device of a heating element for a vacuum furnace, which at least comprises the following components: a vacuum furnace which comprises a furnace wall which is arranged along the gravity direction of the vacuum furnace; the hole is formed in the furnace wall; the heating element is arranged in the vacuum furnace; the graphite electrode is perpendicular to the furnace wall, one end of the graphite electrode is connected with the heating piece, and the other end of the graphite electrode penetrates through the hole; one end of the copper electrode is connected with one end, far away from the heating element, of the graphite electrode, and the other end of the copper electrode extends towards one side far away from the vacuum furnace; the cable is connected with one end, far away from the vacuum furnace, of the copper electrode; the heat preservation structure surrounds the graphite electrode and is arranged in the vacuum furnace; and the adjusting structure surrounds the copper electrode and is arranged outside the vacuum furnace. The fixing device provided by the utility model can release the thermal expansion stress of the heating element and reduce the phenomenon that raw material steam is deposited on the thermal insulation structure and the graphite electrode.

Description

Technical Field

[0001] The utility model relates to the field of single crystal growth equipment, in particular to a fixing device for a heating element for a vacuum furnace. Background Art

[0002] Compared with induction heating, resistance heating can form a uniform and stable thermal field inside the vacuum furnace, which is conducive to obtaining high-quality crystals. In the resistance heating method, the heating element is arranged in the vacuum furnace, fixedly connected to the vertically mounted graphite electrode, and a heat preservation structure is arranged on the outside of the graphite electrode for heat preservation. Therefore, in the current fixing device of the heating element, the raw material vapor in the vacuum furnace is easy to diffuse to the heat preservation structure and the graphite electrode to crystallize, which is easy to cause a short circuit between the graphite electrode and the heat preservation structure, resulting in an unstable thermal field in the vacuum furnace, and even discharge and sparking. Moreover, under high temperature conditions, the heating element is prone to breakage due to thermal expansion. Utility Model Content

[0003] In view of the shortcomings of the prior art mentioned above, the purpose of the utility model is to provide a fixing device for a heating element for a vacuum furnace, which can form a uniform heat field in the vacuum furnace, release the thermal expansion stress of the heating element, avoid breakage of the heating element, and reduce the deposition of raw material steam on the insulation structure and graphite electrode, avoiding short circuit and ignition of the graphite electrode and the insulation structure.

[0004] In order to solve the above technical problems, the utility model is implemented through the following technical solutions.

[0005] The utility model provides a fixing device for a heating element of a vacuum furnace, which at least comprises:

[0006] A vacuum furnace, comprising a furnace wall, wherein the furnace wall is arranged along the gravity direction of the vacuum furnace;

[0007] A hole is provided on the furnace wall;

[0008] A heating element, arranged in the vacuum furnace;

[0009] A graphite electrode is arranged perpendicular to the furnace wall, one end of the graphite electrode is connected to the heating element, and the other end passes through the hole;

[0010] a copper electrode, one end of which is connected to an end of the graphite electrode away from the heating element, and the other end of which extends to a side away from the vacuum furnace;

[0011] A cable connected to an end of the copper electrode away from the vacuum furnace;

[0012] A heat preservation structure, surrounding the graphite electrode, is disposed in the vacuum furnace; and

[0013] The regulating structure surrounds the copper electrode and is arranged outside the vacuum furnace.

[0014] In an embodiment of the utility model, the adjustment structure includes at least two flanges, the first flange surrounds the copper electrode and is fixedly connected to the furnace wall, and the second flange is sleeved on the copper electrode.

[0015] In an embodiment of the present invention, the adjustment structure further includes a slide rail, and the second flange reciprocates on the slide rail.

[0016] In an embodiment of the present invention, the adjustment structure further includes a support rod, and the first flange is fixedly disposed on the support rod.

[0017] In an embodiment of the present invention, the adjustment structure further includes at least one bellows, and the bellows connects the first flange and the second flange.

[0018] In an embodiment of the present invention, the adjustment structure further includes at least one telescopic member, and the telescopic member connects the first flange and the second flange.

[0019] In an embodiment of the present utility model, the adjustment structure further includes an adjustment sheet, and the adjustment sheet is arranged between the telescopic member and the first flange.

[0020] In an embodiment of the present invention, the adjustment structure further includes a sealing component, and the sealing component is arranged between the first flange and the furnace wall.

[0021] In an embodiment of the present invention, the adjustment structure further includes a sealing ring, and the sealing ring is arranged between the second flange and the copper electrode.

[0022] In an embodiment of the present invention, the adjustment structure further includes a support member, and the support member is arranged at an end of the copper electrode away from the graphite electrode.

[0023] In summary, the utility model provides a fixing device for a heating element for a vacuum furnace, which can release the thermal expansion stress of the heating element, avoid the fracture of the heating element, reduce the probability of damage and replacement cycle of the heating element, and reduce the cost of use. Moreover, the fixing device provided by the utility model can reduce the phenomenon of raw material steam in the vacuum furnace being deposited on the insulation structure and the graphite electrode, avoid the waste of raw materials, and avoid the short circuit and ignition of the insulation structure and the graphite electrode, so that the heating element is evenly heated, and a uniform and stable thermal field is formed in the vacuum furnace, which is conducive to the preparation of high-quality crystals.

[0024] Of course, any method of implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 The utility model is a schematic structural diagram of a fixing device for a heating element for a vacuum furnace.

[0027] Description of labels:

[0028] 11. Vacuum furnace; 111. Furnace wall; 12. Holes; 13. Heat-generating element; 14. Graphite electrode; 15. Copper electrode; 16. Insulation structure; 17. Adjustment structure; 171. First flange; 172. Second flange; 173. Sealing ring; 174. Gasket; 175. Sealing assembly; 176. Bellows; 177. Telescopic element; 178. Adjustment sheet; 179. Support element; 1710. Support rod; 1711. Slide rail. DETAILED DESCRIPTION

[0029] The following describes the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0030] It should be understood that the utility model can be implemented in different forms and should not be interpreted as being limited to the embodiments proposed herein. On the contrary, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.

[0031] The technical scheme of the utility model is further described in detail below in conjunction with the embodiments and drawings. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] As a third-generation semiconductor material, silicon carbide has the advantages of large bandgap, strong thermal stability, high thermal conductivity and strong radiation resistance. After epitaxial growth, device manufacturing and other links, it can be made into silicon carbide-based power devices, which are used in semiconductor lighting, smart grid, national defense and military industry, and new energy vehicles. In the process of silicon carbide single crystal substrate, compared with induction heating, resistance heating can form a more uniform thermal field in a vacuum furnace, which helps to obtain high-quality single crystals. However, in a vacuum furnace, the heating element and the electrode are generally installed vertically on the vacuum furnace, and the silicon carbide raw material is very easy to be deposited on the heating element and the insulation structure, which then causes the graphite electrode and the insulation structure to short-circuit, the thermal field is uneven, and even discharge sparks. Moreover, under high temperature conditions, the heating element is prone to breakage due to thermal expansion, resulting in the need to frequently replace the heating element. Through the fixing device of the vacuum furnace heating element provided by the utility model, a uniform and stable thermal field can be formed in the vacuum furnace, the phenomenon of raw material steam in the vacuum furnace being deposited on the graphite electrode and the insulation structure can be reduced, and the thermal expansion stress of the heating element can also be released to avoid the breakage of the heating element.

[0033] See also Figure 1 As shown, the utility model provides a fixing device for a heating element for a vacuum furnace, for example, including a vacuum furnace 11, a heating element 13, a graphite electrode 14, a copper electrode 15, a heat preservation structure 16 and an adjustment structure 17. Among them, the vacuum furnace 11 includes a furnace wall 111 arranged along the gravity direction, the heating element 13 is arranged in the vacuum furnace 11, the graphite electrode 14 is arranged perpendicular to the furnace wall 111, one end of the graphite electrode 14 is fixed to the heating element 13, and the other end is fixed to the copper electrode 15, the heat preservation structure 16 surrounds the graphite electrode 14 and is arranged in the vacuum furnace 11, and the adjustment structure 17 surrounds the copper electrode 15 and is arranged outside the vacuum furnace 11. The fixing device provided by the utility model can reduce the phenomenon of raw material steam in the vacuum furnace 11 being deposited on the heat preservation structure 16 and the graphite electrode 14 by arranging the graphite electrode 14 perpendicularly to the furnace wall 111, avoid short circuit and ignition between the heat preservation structure 16 and the graphite electrode 14, and enable the heating element 13 to generate a uniform heat field. Moreover, by adjusting the structure 17, the fixing device provided by the utility model can release the thermal expansion stress of the heating element 13, avoid the heating element 13 from expansion and fracture, reduce the damage probability and replacement cycle of the heating element 13, and reduce the use cost.

[0034] See also Figure 1As shown, in one embodiment of the utility model, the vacuum furnace 11 is used as a container for various raw materials to undergo physical and chemical changes under high temperature vacuum. The vacuum furnace 11 includes a furnace wall 111, which is arranged along the gravity direction of the vacuum furnace 11, and a hole 12 is arranged on the furnace wall 111. In this embodiment, the vacuum furnace 11 is a cylinder, and the vacuum furnace 11 includes one furnace wall 111. In other embodiments, the vacuum furnace 11 can be a polyhedron such as a tetrahedron or a hexahedron, and the vacuum furnace 11 includes multiple furnace walls 111. The utility model only requires that a hole 12 is arranged on one furnace wall 111.

[0035] See also Figure 1 As shown, in one embodiment of the utility model, the heating element 13 is arranged in the vacuum furnace 11 to provide a uniform heat field in the vacuum furnace 11. The material of the heating element 13 includes one or more high temperature resistant materials such as graphite, tantalum, molybdenum and tungsten. The utility model does not limit the shape of the heating element 13. In this embodiment, the heating element 13 is, for example, an annular graphite element. The outer diameter D of the annular graphite element is, for example, 200mm-1200mm. The flexural strength of the annular graphite element is greater than 30MPa. The relationship between the thermal expansion coefficient α of the annular graphite element and the temperature T is, for example: T is within 20 to 200°C, α is within -0.4×10 -6 ~1.3×10 -6 K -1 , T is between 200 and 1000℃, α is between 1.0×10 -6 ~1.8×10 -6 K -1 , T is between 1000 and 2000℃, α is between 1.6×10 -6 ~3.2×10 -6 K -1 , T is between 2000 and 2500℃, α is between 1.4×10 -6 ~4.2×10 -6 K -1 Moreover, in this embodiment, in the gravity direction of the vacuum furnace 11, the heating element 13 includes a plurality of cross sections, and the cross-sectional area of ​​the cross section is, for example, greater than 100 mm. 2 .

[0036] See also Figure 1 As shown, in one embodiment of the utility model, the graphite electrode 14 is arranged perpendicular to the furnace wall 111, and one end of the graphite electrode 14 is connected to the heating element 13, and the other end passes through the hole 12. The length L of the graphite electrode 14 is, for example, 50 mm to 700 mm. In this embodiment, since the resistance of the graphite electrode 14 is relatively large, the graphite electrode 14 is heated after receiving the current, generating a large amount of heat energy, which is transferred to the heating element 13 to provide heat to the heating element 13.

[0037] See also Figure 1 As shown, in one embodiment of the utility model, one end of the copper electrode 15 is connected to the end of the graphite electrode 14 away from the heating element 13, and the other end extends to the side away from the vacuum furnace 11. In this embodiment, the copper electrode 15 is, for example, a water-cooled copper electrode, that is, cooling water circulates inside the end of the copper electrode 15 away from the graphite electrode 14. By providing the water-cooled copper electrode 15, the current in the copper electrode 15 can be stably transmitted to the graphite electrode 14, ensuring the normal heating of the heating element 13. Moreover, since the vacuum furnace 11 is in a high temperature environment, the copper electrode 15 will be greatly affected by the heat. By providing the water-cooled copper electrode 15 to maintain the temperature of the electrode, the water-cooled copper electrode 15 can dissipate heat in time, protect the water-cooled copper electrode 15 from damage, and thus ensure the stability of the thermal field in the vacuum furnace 11.

[0038] See also Figure 1 As shown, in one embodiment of the utility model, a cable (not shown) is connected to an end of the copper electrode 15 away from the vacuum furnace 11. By setting the cable, the cable, the copper electrode 15 and the graphite electrode 14 are connected to form a loop, and the current in the cable is successively transmitted to the copper electrode 15 and the graphite electrode 14 to heat the heating element 13.

[0039] See also Figure 1 As shown, in one embodiment of the utility model, the heat preservation structure 16 surrounds the graphite electrode 14 and is arranged in the vacuum furnace 11 to perform heat preservation treatment on the graphite electrode 14. Among them, the material of the heat preservation structure 16 includes one or more of high temperature resistant materials such as stainless steel, graphite, tantalum and molybdenum. In this embodiment, the gravity direction of the vacuum furnace 11 is defined as the vertical direction, and the direction perpendicular to the gravity direction of the vacuum furnace 11 is defined as the horizontal direction. In the vertical direction, due to the chimney effect, during the rising process of hot gas, a large amount of raw material steam in the vacuum furnace 11 rises and reaches the vicinity of the heat preservation structure 16 and the graphite electrode 14, while in the horizontal direction, the flow amount of raw material steam is small and the flow speed is slow. Therefore, in the utility model, by horizontally arranging the graphite electrode 14 and the heat preservation structure 16, the phenomenon of raw material steam crystallizing on the heat preservation structure 16 and the graphite electrode 14 can be reduced, so that the heating element 13 can form a uniform thermal field in the vacuum furnace 11, avoiding short circuit and ignition of the heat preservation structure 16 and the graphite electrode 14, and also avoiding the waste of raw materials.

[0040] See also Figure 1As shown, in one embodiment of the utility model, the adjustment structure 17 surrounds the copper electrode 15 and is arranged outside the vacuum furnace 11. Through the adjustment structure 17, the thermal expansion stress generated by the heating element 13 due to the heat can be released, the heating element 13 is prevented from expanding and breaking, the damage probability and replacement cycle of the heating element 13 are reduced, and the use cost is reduced. In this embodiment, the adjustment structure 17 includes, for example, a flange, a support rod 1710, a slide rail 1711, a sealing assembly 175, a bellows 176, a telescopic member 177 and an adjustment sheet 178.

[0041] See also Figure 1 As shown, in one embodiment of the utility model, a flange is arranged around the copper electrode 15. The number of flanges is at least two. In this embodiment, there are two flanges, for example, the two flanges are respectively a first flange 171 and a second flange 172, etc. The first flange 171 surrounds the copper electrode 15 and is fixedly connected to the furnace wall 111, and the second flange 172 is sleeved on the copper electrode 15.

[0042] See also Figure 1 As shown, in one embodiment of the utility model, the adjustment structure 17 further includes a sealing ring 173 and a gasket 174, etc. The gasket 174 is arranged between the second flange 172 and the copper electrode 15, and the sealing ring 173 is arranged in the gasket 174 to seal and fix the second flange 172 and the copper electrode 15. By arranging the sealing ring 173 and the gasket 174, the wear between the second flange 172 and the copper electrode 15 can be reduced, and the service life of the adjustment structure 17 can be extended.

[0043] See also Figure 1 As shown, in one embodiment of the present invention, a sealing assembly 175 is disposed between the first flange 171 and the furnace wall 111 to seal and fix the furnace wall 111 and the first flange 171. By providing the sealing assembly 175, the wear between the furnace wall 111 and the first flange 171 can be reduced, and the service life of the adjustment structure 17 can be extended.

[0044] See also Figure 1 As shown, in one embodiment of the utility model, a bellows 176 is arranged between the flanges. The number of the bellows 176 is, for example, at least one. In this embodiment, the bellows 176 is, for example, one, and the bellows 176 is, for example, connected to the first flange 171 and the second flange 172. The inner diameter of the bellows 176 is, for example, 30-150 mm. The bellows 176 is arranged to absorb vibration energy, and play the role of vibration reduction and noise reduction.

[0045] See also Figure 1 As shown, in one embodiment of the present invention, the support rod 1710 is connected to the flange to fix the flange. In this embodiment, the support rod 1710 is connected to the first flange 171 to fix the first flange 171.

[0046] See also Figure 1 As shown, in one embodiment of the utility model, the slide rail 1711 is connected to the second flange 172, and the second flange 172 can reciprocate on the upper slide rail 1711. In this embodiment, when the heating element 13 is heated and expanded, the thermal expansion stress of the heating element 13 can be transferred to the second flange 172, so that the second flange 172 can move freely on the slide rail 1711, thereby releasing the thermal expansion stress of the heating element 13 and preventing the heating element 13 from breaking.

[0047] See also Figure 1 As shown, in one embodiment of the utility model, a telescopic member 177 is arranged between the flanges. The number of the telescopic member 177 is, for example, at least one. In this embodiment, the number of the telescopic member 177 is, for example, one, and the telescopic member 177 is, for example, arranged on the support rod 1710, connecting the first flange 171 and the second flange 172, and the telescopic member 177 is, for example, a spring. The stiffness coefficient of the telescopic member 177 is, for example, 1-50 kgF / mm.

[0048] See also Figure 1 As shown, in one embodiment of the utility model, an adjusting piece 178 is arranged between the first flange 171 and the telescopic member 177 to adjust the length of the telescopic member 177. Among them, by moving the adjusting piece 178, the telescopic member 177 can be compressed, for example, by 0-20 mm. In this embodiment, when the heating element 13 is in a high temperature state, the heating element 13 has thermal expansion stress, and the thermal expansion stress of the heating element 13 is transferred to the second flange 172, so that the second flange 172 can move freely, and the length of the telescopic member 177 can be adjusted by the adjusting piece 178, so that the telescopic member 177 is further compressed or stretched, thereby further reducing the pressure on the heating element 13 and more effectively protecting the heating element 13. In this embodiment, when the temperature of the heating element 13 reaches 1100°C-2500°C, for example, the adjusting piece 178 can be moved to the side away from the vacuum furnace 11, for example, by 0.5mm-5mm, to further reduce the pressure on the heating element 13.

[0049] See also Figure 1 As shown, in one embodiment of the utility model, the adjustment structure 17 further includes a support member 179, and the support member 179 is, for example, arranged at one end of the copper electrode 15 away from the graphite electrode 14. In this embodiment, the support member 179 is connected to the copper electrode 15, and the two ends of the copper electrode 15 are respectively connected to the graphite electrode 14 and the cable, and the support member 179 can drive the cable, the copper electrode 15 and the graphite electrode 14 to slide in the horizontal direction, for example, by 1-5 mm. In this embodiment, since the end of the copper electrode 15 away from the graphite electrode 14 is conductively connected to the cable, the copper electrode 15 may be subjected to a pulling force in the direction of the cable, and therefore the support member 179 is arranged to support the copper electrode 15 so that the copper electrode 15 can always remain horizontal.

[0050] The technical solution of the utility model is described in detail below through specific embodiments.

[0051] Example 1

[0052] A cylindrical vacuum furnace is provided, and an opening is arranged on the furnace wall of the vacuum furnace. An annular graphite heating element is provided, and the outer diameter D of the annular graphite heating element is 450mm, and the minimum cross-sectional area is 910mm 2 , flexural strength greater than 30MPa, flexural force greater than 273kgF, thermal expansion coefficient (α) and temperature (T) are shown in Table 1. A copper electrode and a graphite electrode are provided, and the length L of the graphite electrode is 80mm. The graphite heating element is set in a vacuum furnace, one end of the graphite electrode is fixed to the graphite heating element, the other end of the graphite electrode is fixed to the copper electrode, the end of the copper electrode away from the graphite electrode is connected to the cable, and cooling water is circulated inside the end of the copper electrode away from the graphite electrode.

[0053] A first flange is arranged between the copper electrode and the furnace wall, and the first flange and the furnace wall are sealed and fixed. A second flange is sleeved on the copper electrode, and the second flange and the copper electrode are sealed and fixed by a sealing ring and a gasket. A bellows is connected between the first flange and the second flange, and the radius R of the bellows is 37.6mm. The second flange can reciprocate on the slide rail, and the first flange is fixed on the support rod. A spring is installed on the support rod. The spring connects the first flange and the second flange, and its stiffness coefficient k is 20kgF / mm. An adjusting plate is arranged between the first flange and the spring. The support is connected to the copper electrode, and the support can drive the cable, copper electrode and graphite electrode to slide horizontally by 3.5mm. The vacuum furnace, heating element, graphite electrode and copper electrode are obtained by the above assembly.

[0054] According to the theoretical calculation formula, when the vacuum furnace is in the vacuum heating state and the adjusting plate is not moved, the force on the heating element can be calculated according to the formula π*R 2 *Calculated by P, P=10 5 Pa, it can be seen that the force on the heating element is 44kgF, which is much smaller than the breaking force of the heating element 273kgF. Therefore, theoretically, even if the length of the spring is not adjusted by the adjusting plate, the annular graphite heating element in the vacuum furnace will not break due to heat.

[0055] Table 1. Relationship between thermal expansion coefficient and temperature of annular graphite heating element

[0056] Temperature(℃) 20-200 200-1000 1000-2000 2000-2500 <![CDATA[Coefficient of thermal expansion (10 -6 / K)]]> 0.2 2.6 3.0 4.2

[0057] The stress conditions of the heating element were tested under different pressures and temperatures, and the test results are shown below.

[0058] When the pressure in the vacuum furnace drops from 0.1MPa to 50-500Pa, move the adjusting plate to the side away from the vacuum furnace so that the spring is compressed by 1.8-2.2mm. At this time, the heating element is subjected to a pressure of 0-4kgF.

[0059] When the pressure in the vacuum furnace is maintained at 50-500Pa and the temperature in the vacuum furnace is raised to 2100-2400℃, the support drives the cable, copper electrode and graphite electrode to move 3.3mm away from the vacuum furnace, and the adjustment plate moves 3.3mm away from the vacuum furnace, keeping the spring compressed by 1.8-2.2mm. At this time, the heating element is subjected to a pressure of 0-4kgF.

[0060] When the pressure in the vacuum furnace is maintained at 50-500Pa, and the temperature in the vacuum furnace drops from 2100-2400℃ to room temperature, the support drives the cable, copper electrode, and graphite electrode to move 3.3mm to the side where the vacuum furnace is located, and the adjustment plate moves 3.3mm to the side where the vacuum furnace is located, keeping the spring compressed by 1.8-2.2mm. At this time, the heating element is subjected to a pressure of 0-4kgF.

[0061] When the pressure in the vacuum furnace rises from 50-500Pa to 0.1MPa, move the adjusting plate to the side where the vacuum furnace is located so that the spring is no longer compressed. At this time, the heating element is subjected to 0kgF.

[0062] Theoretically, even if the adjustment sheet is not moved, the force on the heating element is only 44kgF, which is much lower than the breaking force. According to the test results, by moving the position of the adjustment sheet, the force on the heating element can be further reduced, thereby more effectively protecting the heating element. Therefore, the fixing device for the heating element provided by the utility model can release the thermal expansion stress of the heating element, reduce the replacement cycle of the heating element, and reduce the cost of use.

[0063] In summary, the utility model provides a fixing device for a heating element for a vacuum furnace, which can release the thermal expansion stress of the heating element by adjusting the structure, avoid the fracture of the heating element, reduce the probability of damage and replacement cycle of the heating element, and reduce the cost of use. Moreover, the fixing device provided by the utility model can reduce the phenomenon of raw material steam in the furnace body being deposited on the insulation structure and the graphite electrode, so that the heating element can provide a uniform heat field, avoid short circuit and ignition of the insulation structure and the graphite electrode, and avoid waste of raw materials.

[0064] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A fixing device for a heating element for a vacuum furnace, characterized in that: At least: A vacuum furnace, comprising a furnace wall, wherein the furnace wall is arranged along the gravity direction of the vacuum furnace; A hole is provided on the furnace wall; A heating element, arranged in the vacuum furnace; A graphite electrode is arranged perpendicular to the furnace wall, one end of the graphite electrode is connected to the heating element, and the other end passes through the hole; a copper electrode, one end of which is connected to an end of the graphite electrode away from the heating element, and the other end of which extends to a side away from the vacuum furnace; A cable connected to an end of the copper electrode away from the vacuum furnace; A heat preservation structure, surrounding the graphite electrode, and arranged in the vacuum furnace; as well as The regulating structure surrounds the copper electrode and is arranged outside the vacuum furnace.

2. The fixing device according to claim 1, characterized in that: The regulating structure comprises at least two flanges, wherein the first flange surrounds the copper electrode and is fixedly connected to the furnace wall, and the second flange is sleeved on the copper electrode.

3. The fixing device according to claim 2, characterized in that: The adjustment structure also includes a slide rail, and the second flange reciprocates on the slide rail.

4. The fixing device according to claim 2, characterized in that: The adjustment structure also includes a support rod, and the first flange is fixedly arranged on the support rod.

5. The fixing device according to claim 2, characterized in that: The adjustment structure further includes at least one bellows connecting the first flange and the second flange.

6. The fixing device according to claim 2, characterized in that: The adjustment structure further includes at least one telescopic member, and the telescopic member connects the first flange and the second flange.

7. The fixing device according to claim 6, characterized in that: The adjustment structure further includes an adjustment sheet, and the adjustment sheet is arranged between the telescopic member and the first flange.

8. The fixing device according to claim 2, characterized in that: The regulating structure further includes a sealing assembly disposed between the first flange and the furnace wall.

9. The fixing device according to claim 2, characterized in that: The adjustment structure further includes a sealing ring, which is arranged between the second flange and the copper electrode.

10. The fixing device according to claim 1, characterized in that: The regulating structure further comprises a support member, and the support member is arranged at an end of the copper electrode away from the graphite electrode.

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