Planar full-decoupling positioning platform

Abstract

The utility model provides a planar full-decoupling positioning platform which comprises a working table, a movable platform arranged in the center of the working table and driving parts symmetrically arranged on the outer side of the movable platform in pairs. The driving part comprises a first-stage amplification mechanism, second-stage amplification mechanisms symmetrically arranged on the two sides of the first-stage amplification mechanism and piezoelectric ceramics connected with an input plate of the first-stage amplification mechanism, and output rods of the two second-stage amplification mechanisms are both connected with the side edge of the moving platform. The planar full-decoupling positioning platform solves the problems that in the prior art, a positioning platform is low in precision and small in stroke.

Description

Technical Field

[0001] The utility model relates to the technical field of precision positioning, in particular to a planar fully decoupled positioning platform. Background Art

[0002] Precision micro-positioning technology is an important part of advanced manufacturing technology and one of the key technologies of nanotechnology. In recent years, my country has increasingly urgent needs for independently developed high-end and precision instruments in the fields of biomedical engineering, semiconductors, nano-functional materials, and chip manufacturing. High-speed, high-precision measuring instruments represented by atomic force microscopes are a very important part of high-end precision manufacturing, and the accuracy and performance of these high-precision instruments largely depend on the accuracy and performance of the nano-positioning platform behind them. Research on high-precision nano-positioning platforms is extremely important for the research and development of high-precision measuring instruments.

[0003] However, the positioning platform in the prior art usually adopts servo motors and precision screws for power drive, but this transmission scheme has problems of thread gaps and transmission friction, so that the positioning accuracy of the positioning platform can only reach the micron level, and the positioning accuracy is not high enough. In addition, the existing positioning platform that can move in both the X-axis and Y-axis directions has a small stroke due to the small driving force of the driving structure and the heavy weight of the platform to be driven. Utility Model Content

[0004] Based on this, the purpose of the utility model is to provide a planar fully decoupled positioning platform, aiming to solve the problems of low precision and small stroke of the positioning platform in the prior art.

[0005] The planar fully decoupled positioning platform proposed in the utility model comprises a workbench, a mobile platform arranged at the center of the workbench, and driving components symmetrically arranged on the outside of the mobile platform in pairs, wherein the driving components comprise a primary amplifying mechanism, secondary amplifying mechanisms symmetrically arranged on both sides of the primary amplifying mechanism, and piezoelectric ceramics connected to the input plate of the primary amplifying mechanism, and the output rods of the two secondary amplifying mechanisms are both connected to the side of the mobile platform.

[0006] The above-mentioned planar fully decoupled positioning platform, by setting piezoelectric ceramics to drive driving components at different positions, allows the mobile platform to move independently in the two directions of the X and Y axes, thereby overcoming the thread gap and transmission friction caused by the transmission of servo motors and precision screws, which leads to the problem of low precision of the positioning platform. In addition, by setting secondary amplification mechanisms on both sides of the primary amplification mechanism, the mobile platform is pushed by two output rods, and the movement precision of the mobile platform is higher than that of one output rod, and the two output rods are controlled simultaneously by a piezoelectric ceramic to ensure the synchronization of the movement of the two output rods, and further ensure the movement precision of the mobile platform. In addition, by setting a primary amplification mechanism and a secondary amplification mechanism, the driving force is further amplified, so that the driving force is large enough, and then the travel of the mobile platform is large enough. Therefore, the utility model solves the problem of low precision and small travel of the positioning platform in the prior art.

[0007] In addition, the planar fully decoupled positioning platform proposed by the utility model may also have the following additional technical features:

[0008] Preferably, the first-stage amplification mechanism includes the input plate arranged on one side of the piezoelectric ceramic, the bridge arms and output blocks symmetrically arranged on both sides of the piezoelectric ceramic, the first hinges are provided on both sides of the input plate for connecting the workbench, the first hinges are provided on both sides of the bridge arms for connecting the input plate and the output block respectively, and the second hinge is provided at one end of the output block for connecting to the second-stage amplification mechanism.

[0009] Preferably, the secondary amplification mechanism includes an output plate and a connecting rod, one end of the output plate is connected to the output block and the connecting rod respectively through two second hinges, and the other end is connected to the side of the mobile platform through the output rod, and the end of the connecting rod away from the output plate is connected to the workbench through the second hinge.

[0010] Preferably, the primary amplifying mechanism further comprises a fixing block arranged on the other side of the piezoelectric ceramic, and the fixing block is provided with screw holes so as to fix the primary amplifying mechanism on the workbench.

[0011] Preferably, two first hinges are further provided on a side of the output block away from the bridge arm, for respectively connecting the fixed block and the workbench.

[0012] Preferably, the output plate comprises a horizontal portion and a vertical portion, the two sides of the horizontal portion are respectively connected to the output block and the connecting rod through the second hinge, and the vertex of one side of the vertical portion away from the horizontal portion is connected to the moving platform through the output rod.

[0013] Preferably, the middle portion of the input plate protrudes outwards for connection with the piezoelectric ceramic.

[0014] Preferably, a hollow groove is provided on the movable platform.

[0015] Preferably, the output rod comprises two short rod portions arranged in parallel and a long rod portion for connecting the two short rod portions, the long rod portion is perpendicular to the short rod portions, and the two short rod portions are respectively used to connect the moving platform and the output plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the planar fully decoupled positioning platform proposed in the first embodiment of the utility model;

[0017] Figure 2 for Figure 1 A local enlarged view at point A;

[0018] Figure 3 This is a structural schematic diagram of a planar fully decoupled positioning platform proposed in the second embodiment of the present utility model;

[0019] Description of main component symbols:

[0020]

[0021]

[0022] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0023] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0024] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0026] See also Figure 1 to Figure 2 , shown is a planar fully decoupled positioning platform in the first embodiment of the utility model, including a workbench 10, a mobile platform 20 arranged at the center of the workbench 10, and driving components 30 symmetrically arranged on the outside of the mobile platform 20, the driving components 30 include a primary amplifying mechanism 31, secondary amplifying mechanisms 32 symmetrically arranged on both sides of the primary amplifying mechanism 31, and a piezoelectric ceramic 40 connected to the input plate 311 of the primary amplifying mechanism 31, and the output rods 321 of the two secondary amplifying mechanisms 32 are both connected to the side of the mobile platform 20.

[0027] It can be understood that by setting the piezoelectric ceramic 40 to drive the driving components 30 at different positions, the mobile platform 20 can move independently in the two directions of the X and Y axes, thereby overcoming the thread gap and transmission friction caused by the transmission of the servo motor and the precision lead screw, which leads to the problem of low precision of the positioning platform. In addition, by setting the secondary amplification mechanism 32 on both sides of the primary amplification mechanism 31, the mobile platform 20 is pushed by two output rods 321. Compared with one output rod 321, the movement precision of the mobile platform 20 is higher, and the two output rods 321 are controlled simultaneously by a piezoelectric ceramic 40 to ensure the synchronization of the movement of the two output rods 321, and further ensure the movement precision of the mobile platform 20. In addition, by setting the primary amplification mechanism 31 and the secondary amplification mechanism 32, the driving force is further amplified twice, so that the driving force is large enough, and then the travel of the mobile platform 20 is large enough. Therefore, the utility model solves the problem of low precision and small travel of the positioning platform in the prior art.

[0028] It should be noted that in actual use, the piezoelectric ceramics 20 of the models PSt150 / 7 / 20VS12, PSt150 / 10 / 20VS15, etc. can be used. In addition, the material of the mobile platform 20 can be 7075 aviation aluminum, which can ensure the structural strength of the mobile platform 20 and make the mobile platform 20 lighter, so that the driving component 30 can more easily push the mobile platform 20, thereby increasing the travel of the positioning platform.

[0029] Specifically, the primary amplification mechanism 31 includes an input plate 311 disposed on one side of the piezoelectric ceramic 40, a bridge arm 312 and an output block 313 symmetrically disposed on both sides of the piezoelectric ceramic 40, a first hinge 314 is disposed on both sides of the input plate 311 for connecting the workbench 10, a first hinge 314 is disposed on both sides of the bridge arm 312 for connecting the input plate 311 and the output block 313, and a second hinge 315 is disposed at one end of the output block 313 for connecting to the secondary amplification mechanism 32. In addition, the middle portion of the input plate 311 protrudes outward for connecting to the piezoelectric ceramic 40. In specific implementation, when the mobile platform 20 needs to move in the X-axis, the piezoelectric ceramics 40 on one side of the X-axis work, and the other piezoelectric ceramics 40 do not work. The piezoelectric ceramics 40 transmit the displacement to the input plate 311. The two ends of the input plate 311 are respectively connected to the bridge arm 312 through the first hinge 314. The rotation of the first hinge 314 drives the bridge arm 312 to rotate. Since the other side of the bridge arm 312 is connected to the output block 313 through the first hinge 314, the rotation of the bridge arm 312 will drive the output block 313 to transmit the displacement to the secondary amplification mechanism 32 through the first hinge 314. The secondary amplification mechanism 32 performs secondary amplification on the displacement and pushes the mobile platform 20 through the output rod 321, so that the mobile platform 20 moves in the X-axis. Then, according to different moving directions, different piezoelectric ceramics 40 are made to work, so that the movement of the mobile platform 20 on the X-axis and Y-axis can be realized. In addition, the first hinge 314 and the second hinge 315 are both flexible hinges, wherein the first hinge 314 is a straight beam type flexible hinge, and the second hinge 315 is a perfect circle type flexible hinge. The flexible hinge is provided to further amplify the driving displacement.

[0030] In addition, the secondary amplification mechanism 32 includes an output plate 322 and a connecting rod 323, one end of the output plate 322 is connected to the output block 313 and the connecting rod 323 respectively through two second hinges 315, and the other end is connected to the side of the mobile platform 20 through the output rod 321, and the end of the connecting rod 323 away from the output plate 322 is connected to the workbench 10 through the second hinge 315. When the X-axis is moved, the output block transfers the displacement to the output plate through the second hinge, and the output plate transfers the displacement to the connecting rod on one side through the second hinge, and transfers the displacement to the mobile platform through the output rod on the other side, so that the mobile platform moves in the X-axis. The connecting rod is used to limit the displacement direction, and the direction of the output force of the driving mechanism is accurate.

[0031] Specifically, the primary amplifying mechanism 31 also includes a fixing block 316 disposed on the other side of the piezoelectric ceramic 40, and a screw hole 317 is provided on the fixing block 316 to fix the primary amplifying mechanism 31 on the workbench 10. The primary amplifying mechanism 31 is fixed to the workbench 10 by screws cooperating with the screw holes 317 on the fixing block 316, and is connected to the workbench 10 through the first hinges 314 on the components of the primary amplifying mechanism 31, so that the components of the primary amplifying mechanism 31 are fixed on the workbench 10 and the direction of the driving displacement is limited.

[0032] In addition, two first hinges 314 are provided on the side of the output block 313 away from the bridge arm 312, which are used to respectively connect the fixed block 316 and the workbench 10. The output block 313 is respectively connected to the fixed block 316 and the workbench 10 by providing two first hinges 314 at the output end, so that the displacement direction of the output end of the output block 313 is constrained, so that the primary amplification mechanism 31 can output displacement in an accurate direction, thereby ensuring the accuracy of the displacement of the mobile platform 20.

[0033] Specifically, the output plate 322 includes a horizontal portion and a vertical portion, the two sides of the horizontal portion are respectively connected to the output block 313 and the connecting rod 323 through the second hinge 315, and the vertical portion is connected to the mobile platform 20 through the output rod 321 at the vertex of one side away from the horizontal portion. The horizontal portion of the output plate 322 is respectively connected to the output block 313 and the connecting rod 323 through two second hinges 315, so that the displacement is amplified twice in the horizontal portion, and then passes through the tail end of the vertical portion through the output rod 321 to push the mobile platform 20 to move.

[0034] In addition, a hollow groove 21 is provided on the mobile platform 20. Since the secondary amplification mechanism is symmetrically arranged on both sides of the primary amplification mechanism 31, and both are provided with output rods 321 for driving the mobile platform 20, the length of one side of the mobile platform 20 depends on the distance between the two output rods 321, and due to the structure and principle of the secondary amplification mechanism 32 itself, the output rods 321 are all arranged on the outside, and thus the distance between the two output rods 321 is large, making the mobile platform 20 larger, so it is necessary to open a hollow groove 21 on the mobile platform 20 to reduce the weight of the mobile platform 20, so that the mobile platform 20 can move a larger distance under the same driving force, thereby increasing the stroke of the positioning platform.

[0035] See also Figure 3 , shown is a planar fully decoupled positioning platform in the second embodiment of the utility model. The second embodiment is consistent with the first embodiment in basic structure, except that the output rod 321 includes two short rods 3211 arranged in parallel and a long rod 3212 for connecting the two short rods 3211, the long rod 3212 is perpendicular to the short rod 3211, and the two short rods 3211 are respectively used to connect the mobile platform 20 and the output plate 313. By forming a Z-shaped output rod 321 by the short rod 3211 and the long rod 3212, the output ends of the two output rods 321 are closer, thereby making the size of the mobile platform 20 smaller. Although the volume of the output rod 321 is increased, the volume of the mobile platform 20 can be reduced a lot, so the overall volume and weight of the output rod 321 and the mobile platform 20 are reduced, thereby making the mobile platform 20 move a larger distance under the same driving force, thereby increasing the stroke of the positioning platform.

[0036] In summary, the planar fully decoupled positioning platform in the above embodiment of the utility model drives the driving components 30 at different positions by setting piezoelectric ceramics 40 so that the mobile platform 20 can move independently in the two directions of the X and Y axes, thereby overcoming the thread gap and transmission friction caused by the transmission of the servo motor and the precision lead screw, which leads to the problem of low precision of the positioning platform. In addition, by setting the secondary amplification mechanism 32 on both sides of the primary amplification mechanism 31, the mobile platform 20 is pushed by two output rods 321. Compared with one output rod 321, the movement precision of the mobile platform 20 is higher, and the two output rods 321 are controlled simultaneously by a piezoelectric ceramic 40 to ensure the synchronization of the movement of the two output rods 321, and further ensure the movement precision of the mobile platform 20. In addition, by setting the primary amplification mechanism 31 and the secondary amplification mechanism 32, the driving force is further amplified twice, so that the driving force is large enough, and then the travel of the mobile platform 20 is large enough. Therefore, the utility model solves the problem of low precision and small travel of the positioning platform in the prior art.

[0037] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0038] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A planar fully decoupled positioning platform, characterized in that: It includes a workbench, a mobile platform arranged at the center of the workbench, and driving components symmetrically arranged on the outside of the mobile platform in pairs, the driving components include a primary amplifying mechanism, secondary amplifying mechanisms symmetrically arranged on both sides of the primary amplifying mechanism, and piezoelectric ceramics connected to the input plate of the primary amplifying mechanism, and the output rods of the two secondary amplifying mechanisms are connected to the side of the mobile platform.

2. The planar fully decoupled positioning platform according to claim 1, characterized in that: The primary amplification mechanism includes the input plate arranged on one side of the piezoelectric ceramic, the bridge arms and output blocks symmetrically arranged on both sides of the piezoelectric ceramic, the first hinges are provided on both sides of the input plate for connecting the workbench, the first hinges are provided on both sides of the bridge arms for connecting the input plate and the output block respectively, and a second hinge is provided at one end of the output block for connecting with the secondary amplification mechanism.

3. The planar fully decoupled positioning platform according to claim 2, characterized in that: The secondary amplification mechanism includes an output plate and a connecting rod, one end of the output plate is connected to the output block and the connecting rod respectively through two second hinges, and the other end is connected to the side of the mobile platform through the output rod, and the end of the connecting rod away from the output plate is connected to the workbench through the second hinge.

4. The planar fully decoupled positioning platform according to claim 2, characterized in that: The primary amplifying mechanism further comprises a fixing block arranged on the other side of the piezoelectric ceramic, and the fixing block is provided with screw holes so as to fix the primary amplifying mechanism on the workbench.

5. The planar fully decoupled positioning platform according to claim 4, characterized in that: The output block is further provided with two first hinges on a side away from the bridge arm, which are used to connect the fixed block and the workbench respectively.

6. The planar fully decoupled positioning platform according to claim 3, characterized in that: The output plate includes a horizontal portion and a vertical portion. Both sides of the horizontal portion are respectively connected to the output block and the connecting rod through the second hinge, and a vertex of a side of the vertical portion away from the horizontal portion is connected to the moving platform through the output rod.

7. The planar fully decoupled positioning platform according to claim 1, characterized in that: The middle portion of the input plate protrudes outwards for connection with the piezoelectric ceramic.

8. The planar fully decoupled positioning platform according to claim 1, characterized in that: The movable platform is provided with a hollow groove.

9. The planar fully decoupled positioning platform according to claim 3, characterized in that: The output rod comprises two short rod parts arranged in parallel and a long rod part for connecting the two short rod parts, the long rod part is perpendicular to the short rod parts, and the two short rod parts are respectively used to connect the moving platform and the output plate.

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