Spraying assembly for waste gas treatment in electronic-grade sulfuric acid production

Abstract

The utility model relates to an electronic grade sulfuric acid production waste gas treatment spraying assembly in the field of spraying assemblies, which comprises a spraying tower, a plurality of spraying pipe frames are fixedly connected to the inner end of the spraying tower, a motor is fixedly connected to the lower end of each spraying pipe frame, an auxiliary plate frame is fixedly connected to the output end of each motor, and the auxiliary plate frame is located under the spraying pipe frames. A plurality of liquid outlets are fixedly connected to the lower end of the auxiliary plate frame, a plurality of electric fan blades are fixedly connected to the lower end of the auxiliary plate frame, and an extended stirring rod is fixedly connected to the middle of the lower end of each electric fan blade. The electric fan blades are arranged in the spray tower, gas can be mixed and stirred more uniformly in the spray tower, the extended stirring rods below the electric fan blades extend downwards along with autorotation of the electric fan blades to be in contact with the gas and stir the gas at the same time, so that the gas flow can be dispersed more uniformly in the spray tower, and the spray effect of the gas can be improved.

Description

Technical Field

[0001] The utility model relates to a spray component for treating waste gas from the production of electronic grade sulfuric acid, in particular to a spray component for treating waste gas from the production of electronic grade sulfuric acid applied in the field of spray components. Background Art

[0002] Electronic-grade sulfuric acid, also known as high-purity sulfuric acid and ultra-pure sulfuric acid, is an ultra-clean and high-purity reagent. It is an indispensable key basic chemical reagent in the development of microelectronics technology. It is widely used in the assembly and processing of semiconductors and ultra-large-scale integrated circuits. It is mainly used for cleaning and etching of silicon wafers, and can effectively remove impurity particles, inorganic residues and carbon deposits on the wafers. The purity and cleanliness of electronic-grade sulfuric acid have an important influence on the yield, electrical properties and reliability of electronic components. The production and preparation of electronic-grade sulfuric acid is prone to produce industrial waste gas that is harmful to the environment.

[0003] In order to solve the problem of environmentally harmful industrial waste gas generated during the production of electronic-grade sulfuric acid, the electronic-grade sulfuric acid production in the market can use the spray method to effectively treat its waste gas, which has a certain market share.

[0004] In the existing market, electronic-grade sulfuric acid production can use the spray method to effectively treat its waste gas. However, the mixing degree of the waste gas and the spray water is not uniform enough, which will lead to poor waste gas treatment effect. Therefore, it is necessary to design an electronic-grade sulfuric acid production waste gas treatment spray component with airflow mixing function to solve the above problems. Utility Model Content

[0005] In view of the above-mentioned prior art, the technical problem to be solved by the utility model is that when the electronic grade sulfuric acid production in the existing market can be effectively treated by the spraying method, the mixing degree of the waste gas and the spraying water is not uniform enough, which will lead to poor waste gas treatment effect.

[0006] To solve the above problems, the utility model provides an electronic-grade sulfuric acid production waste gas treatment spray assembly, including a spray tower, the inner end of the spray tower is fixedly connected to a plurality of spray pipe racks, the lower end of the spray pipe rack is fixedly connected to a motor, the output end of the motor is fixedly connected to an auxiliary disc rack, the auxiliary disc rack is located directly below the spray pipe rack, the lower end of the auxiliary disc rack is fixedly connected to a plurality of liquid outlets, the lower end of the auxiliary disc rack is fixedly connected to a plurality of electric fan blades, and the middle part of the lower end of the electric fan blade is fixedly connected to an extended stirring rod.

[0007] In the above-mentioned electronic-grade sulfuric acid production waste gas treatment spray assembly, the electric fan blades under the auxiliary disk frame of this scheme are started, which can mix and stir the gas more evenly in the spray tower. The extended stirring rod under the electric fan blades follows the rotation of the electric fan blades and extends downward to contact the gas and stir it at the same time, which can make the airflow dispersed more evenly in the spray tower, which is beneficial to improve the spraying effect of the gas.

[0008] As a further improvement of the present application, a plurality of protective cover tubes are fixedly connected to one end of the auxiliary disc rack close to the spray pipe rack, and the plurality of protective cover tubes cooperate with the corresponding liquid outlets.

[0009] As a further improvement of the present application, a plurality of annular front plates are fixedly connected to the front end of the spray tower, and the annular front plates are made of visible material.

[0010] As a further improvement of the present application, an air inlet pipe is fixedly connected to the lower side of the left end of the spray tower, and an air outlet pipe is fixedly connected to the upper end of the spray tower.

[0011] As another improvement of the present application, a water pipe is fixedly connected to the upper side of the right end of the spray pipe rack, and the water pipe is externally connected to a water tank.

[0012] As another improved supplement of the present application, the spray pipe rack is filled with electronic grade sulfuric acid production waste gas, and the electronic grade sulfuric acid production waste gas is matched with the extended stirring rod.

[0013] In summary, the electric fan blades under the auxiliary disk rack of this scheme are started, which can mix and stir the gas more evenly in the spray tower. The extended stirring rod under the electric fan blades extends downward along with the rotation of the electric fan blades, contacts the gas and stirs it at the same time, so that the airflow can be dispersed more evenly in the spray tower, which is beneficial to improving the spraying effect of the gas and ensuring the gas treatment efficiency. At the same time, after the spraying operation is completed, the protective cover is set directly below the corresponding liquid outlet, so that the liquid outlet is in a temporarily closed state, which effectively ensures the subsequent smooth flow of the liquid outlet. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a front view of a spray tower according to a first embodiment of the present application;

[0015] Figure 2 This is a top view of a spray tower according to the first embodiment of the present application;

[0016] Figure 3 For the first implementation of this application Figure 2 Partial cutaway view of the middle spray pipe rack.

[0017] Description of the numbers in the figure:

[0018] 2. Spray pipe rack; 3. Liquid outlet; 4. Auxiliary plate rack; 5. Protective cover tube; 6. Extended stirring rod; 7. Electric fan blades; 8. Motor; 9. Spray tower; 10. Annular front plate; 11. Air inlet pipe; 12. Water pipe; 13. Air outlet pipe. DETAILED DESCRIPTION

[0019] An implementation of the present application is described in detail below with reference to the accompanying drawings.

[0020] The first implementation method:

[0021] Figure 1-3 It is shown that it includes a spray tower 9, the inner end of the spray tower 9 is fixedly connected to a plurality of spray pipe racks 2, the lower end of the spray pipe rack 2 is fixedly connected to a motor 8, the output end of the motor 8 is fixedly connected to an auxiliary disc rack 4, the auxiliary disc rack 4 is located directly below the spray pipe rack 2, the lower end of the auxiliary disc rack 4 is fixedly connected to a plurality of liquid outlets 3, the lower end of the auxiliary disc rack 4 is fixedly connected to a plurality of electric fan blades 7, and the middle part of the lower end of the electric fan blade 7 is fixedly connected to an extended stirring rod 6.

[0022] Figure 1-3 It is shown that one end of the auxiliary disc rack 4 close to the spray pipe rack 2 is fixedly connected with multiple protective cover tubes 5, and the multiple protective cover tubes 5 are matched with the corresponding liquid outlets 3. The front end of the spray tower 9 is fixedly connected with multiple annular front plates 10, and the annular front plates 10 are made of visible material. The lower side of the left end of the spray tower 9 is fixedly connected with an air inlet pipe 11, and the upper end of the spray tower 9 is fixedly connected with an air outlet pipe 13. The upper side of the right end of the spray pipe rack 2 is fixedly connected with a water pipe 12, and the water pipe 12 is externally connected to a water tank. The spray pipe rack 2 is filled with electronic grade sulfuric acid production waste gas, and the electronic grade sulfuric acid production waste gas is matched with the extended stirring rod 6.

[0023] Figure 1-3 It is shown that in this scheme, the electronic-grade sulfuric acid production waste gas is passed into the spray tower 9 through the air inlet pipe 11, and then the gas is sprayed from multiple liquid outlets 3 through the spray pipe rack 2. At the same time, the electric fan blades 7 under the auxiliary disc rack 4 are started, and the gas can be mixed and stirred more evenly in the spray tower 9. The extended stirring rod 6 under the electric fan blade 7 follows the rotation of the electric fan blade 7 and extends downward to contact the gas and stir at the same time, so that the airflow can be dispersed more evenly in the spray tower 9, which is beneficial to improving the spraying effect of the gas and ensuring the gas treatment efficiency. At the same time, after the spraying operation is completed, the auxiliary disc rack 4 is driven by the motor 8 to rotate as a whole to the bottom of the spray pipe rack 2, and then the protective cover tube 5 is set directly below the corresponding liquid outlet 3, so that the liquid outlet 3 is in a temporarily closed state, effectively ensuring the subsequent smoothness of the liquid outlet 3, and avoiding foreign matter from falling into the liquid outlet 3 when the filler in the spray tower 9 is replaced, which is beneficial to ensuring the operation efficiency of the liquid outlet 3.

[0024] In view of current practical needs, the protection scope of the above-mentioned implementation mode adopted in this application is not limited to this. Various changes made within the knowledge scope of technical personnel in this field without departing from the concept of this application still fall within the protection scope of this utility model.

Claims

1. A spray assembly for treating waste gas from electronic grade sulfuric acid production, characterized in that: The invention comprises a spray tower (9), wherein the inner end of the spray tower (9) is fixedly connected to a plurality of spray pipe racks (2), the lower end of the spray pipe rack (2) is fixedly connected to a motor (8), the output end of the motor (8) is fixedly connected to an auxiliary rack (4), the auxiliary rack (4) is located directly below the spray pipe rack (2), the lower end of the auxiliary rack (4) is fixedly connected to a plurality of liquid outlets (3), the lower end of the auxiliary rack (4) is fixedly connected to a plurality of electric fan blades (7), and the middle part of the lower end of the electric fan blade (7) is fixedly connected to an extended stirring rod (6).

2. The electronic grade sulfuric acid production waste gas treatment spray assembly according to claim 1, characterized in that: A plurality of protective cover tubes (5) are fixedly connected to one end of the auxiliary disc frame (4) close to the spray pipe frame (2), and the plurality of protective cover tubes (5) are matched with corresponding liquid outlets (3).

3. The electronic grade sulfuric acid production waste gas treatment spray assembly according to claim 1, characterized in that: A plurality of annular front plates (10) are fixedly connected to the front end of the spray tower (9), and the annular front plates (10) are made of visible material.

4. The electronic grade sulfuric acid production waste gas treatment spray assembly according to claim 1, characterized in that: An air inlet pipe (11) is fixedly connected to the lower left end of the spray tower (9), and an air outlet pipe (13) is fixedly connected to the upper end of the spray tower (9).

5. The electronic grade sulfuric acid production waste gas treatment spray assembly according to claim 1, characterized in that: A water pipe (12) is fixedly connected to the upper side of the right end of the spray pipe rack (2), and the water pipe (12) is externally connected to a water tank.

6. The electronic grade sulfuric acid production waste gas treatment spray assembly according to claim 1, characterized in that: The spray pipe rack (2) is filled with electronic grade sulfuric acid production waste gas, and the electronic grade sulfuric acid production waste gas is matched with the extended stirring rod (6).

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