Full-automatic silicon single crystal rod cleaning equipment
Through the fully automatic single crystal silicon rod cleaning equipment, the brush roller and water pump are used to clean the chucking brush, and the single crystal silicon rod is pushed through the transmission assembly, which solves the problem of low cleaning efficiency in the existing technology and achieves high efficiency and automation cleaning effect.
Patent Information
- Application Number
- CN202420115524.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-16
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-01-16
AI Technical Summary
The existing single-crystal silicon rod cleaning methods are inefficient, unable to achieve efficient and automated cleaning, and lack equipment that can fully wipe and pickle.
A fully automatic single crystal silicon rod cleaning equipment is designed, including a cleaning tank and a cleaning spray assembly. The brush roller and water pump are used to clean the spiral brush, and the single crystal silicon rod is pushed through the transmission assembly to avoid collision and achieve automation. soak and remove.
The thorough cleaning of single crystal silicon rods is achieved, the cleaning efficiency and automation are improved, and the cleaning effect and the compactness of the equipment are ensured.
Smart Images
Figure CN222241636U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon rod cleaning equipment, in particular to a full-automatic single crystal silicon rod cleaning equipment. Background Art
[0002] Single crystal silicon rods are long rod-shaped products made of high-purity silicon materials through processes such as melting, crystallization and stretching. It has the characteristics of high purity, complete crystal structure, no impurities and defects, and is widely used in the process of preparing semiconductor materials and devices. Single crystal silicon rods can be used to prepare various materials such as silicon wafers, silicon wafer substrates and silicon wafer substrates, and are important raw materials in the semiconductor industry. In the production process of new energy batteries, single crystal silicon needs to be pickled to remove impurities, glue spots and oil stains on the surface during the production process of single crystal silicon. Existing single crystal silicon rods are cleaned by manually wiping the surface or soaking in pickling liquid. Both methods are inefficient and cannot adapt to efficient and automated single crystal silicon rod processing. The existing means lack a device that can fully wipe and pickle the surface of the single crystal silicon rod; in view of this, the present application proposes a fully automatic single crystal silicon rod cleaning device. Summary of the invention
[0003] The utility model aims to provide a fully automatic single crystal silicon rod cleaning device in view of the problems existing in the background technology.
[0004] The technical solution of the utility model is: a fully automatic single crystal silicon rod cleaning device, comprising a cleaning pool for containing cleaning liquid, wherein a cleaning spray assembly for wiping and flushing the single crystal silicon rod is rotatably installed inside the cleaning pool;
[0005] A transmission assembly located inside the cleaning tank is also installed below the cleaning spray assembly, and the transmission assembly includes a push plate for pushing the single crystal silicon rod.
[0006] Optionally, the cleaning spray assembly includes a first brush roller, a second brush roller and a third brush roller, the first brush roller and the second brush roller are arranged with an upward slope, and one end of the second brush roller and the first brush roller is provided with a driving mechanism installed on the outer wall of the cleaning pool.
[0007] Optionally, sliding holes are provided on both the front and rear surfaces of the cleaning pool, and a driving motor located on the outer wall of the cleaning pool is installed at one end of the third brush roller, and the output end of the driving motor passes through the sliding hole and is slidably arranged with the inner wall of the sliding hole.
[0008] Optionally, the cleaning spray assembly also includes a water pump installed on the bottom inner wall of the cleaning pool, the water outlet of the water pump is connected to a water pipe, and multiple groups of nozzles are installed below the water pipe, and the nozzles are located above the first brush roller, the second brush roller and the third brush roller.
[0009] Optionally, the outer ring of the output end of the driving motor is also installed with a fixed ring frame through a bearing rotating sleeve, the bottom of the fixed ring frame is connected to a rack, a gear is arranged below the rack, the inner ring of the gear is fixedly penetrated by a rotating shaft, and one end of the rotating shaft is connected to a servo motor.
[0010] Optionally, the rotating shaft and the cleaning tank are rotatably mounted via a bearing, and a cam is sleeved on an outer ring of the rotating shaft. A contact plate is provided on one side of the cam, and one side of the contact plate is connected to a vertically arranged push plate.
[0011] Optionally, a guide block is fixedly connected to the bottom of the push plate, a guide groove is provided on the inner wall of the cleaning tank, the guide block is slidably arranged in the guide groove, a spring is connected to one side of the guide block, and the other end of the spring is connected to the inner wall of one end of the guide groove.
[0012] Optionally, a limiting rod is fixedly connected to one side of the fixed ring frame, a limiting ring is fixedly connected to the front outer wall of the cleaning tank, and the limiting rod penetrates the limiting ring and slides horizontally along the inner wall of the limiting ring.
[0013] Optionally, the side wall of the cleaning tank is also provided with a material taking port for taking out the single crystal silicon rods, and a disassembly plate is installed in the material taking port.
[0014] Compared with the prior art, the utility model has the following beneficial technical effects:
[0015] The utility model enables the single crystal silicon rod to roll down while being brushed and wiped by the second brush rollers by means of two groups of second brush rollers arranged obliquely, and the outer surface of the single crystal silicon rod is fully scrubbed by the third brush roller and the lower group of second brush rollers, and is simultaneously cleaned by spraying with a water pipe, so that the cleaning of the single crystal silicon rod is more thorough, and at the same time, the single crystal silicon rod can be unloaded by the third brush roller away from the second brush roller and immersed in the cleaning tank again, so that the impurities remaining on the outer surface can be fully immersed, softened and cleaned, and the cleaning of the single crystal silicon rod is more thorough;
[0016] Furthermore, by setting the transmission component, the single crystal silicon rods that fall into the bottom of the cleaning tank are pushed aside to avoid the upper and lower collisions caused by unloading the single crystal silicon rods one by one, and to avoid damage to the single crystal silicon rods. After cleaning, the single crystal silicon rods are opened and taken out uniformly through the disassembly plate, thereby improving the automation of the cleaning of the single crystal silicon rods, achieving good cleaning effect and high efficiency.
[0017] In summary, the utility model has a compact and novel structure, and has comprehensive cleaning functions such as wiping, showering, and soaking of single crystal silicon rods, with good cleaning effect, high efficiency, and high degree of automation. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 Provide a stereogram of the utility model;
[0019] Figure 2 A schematic diagram of the exploded structure of the transmission assembly and the third brush roller in the utility model is given;
[0020] Figure 3 Given Figure 2 Schematic diagram of the middle push plate from another angle;
[0021] Figure 4 Given Figure 1 Schematic diagram of the cross-section at AA in the middle.
[0022] Reference numerals:
[0023] 1. Cleaning tank; 11. Slide hole; 12. Guide groove;
[0024] 2. Cleaning spray assembly; 21. First brush roller; 22. Second brush roller; 23. Third brush roller; 24. Water pump; 25. Water pipe; 26. Spray head; 27. Driving mechanism; 28. Driving motor;
[0025] 3. Transmission assembly; 31. Servo motor; 32. Gear; 33. Rack; 34. Fixed ring frame; 35. Rotating shaft; 36. Cam; 37. Contact plate; 38. Push plate; 39. Guide block; 310. Spring; 311. Limit rod;
[0026] 4. Remove the board. DETAILED DESCRIPTION
[0027] The technical solution of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments.
[0028] The components of the embodiments of the present disclosure generally described and shown in the drawings herein may be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present disclosure provided in the drawings is not intended to limit the scope of the present disclosure claimed, but merely represents selected embodiments of the present disclosure.
[0029] Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present disclosure.
[0030] In the description of the present disclosure, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.
[0031] In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.
[0032] Example 1
[0033] like Figure 1 As shown, the utility model proposes a fully automatic single crystal silicon rod cleaning equipment, including a cleaning tank 1 for containing cleaning liquid, the interior of the cleaning tank 1 is rotatably installed with a cleaning spray assembly 2 for wiping and flushing the single crystal silicon rod; the side wall of the cleaning tank 1 is also provided with a feeding port for taking the single crystal silicon rod, and a disassembly plate 4 is installed in the feeding port, and the disassembly plate 4 is assembled and sealed with the feeding port by a sealing strip, and the single crystal silicon rod after cleaning can be taken out by opening the disassembly plate 4.
[0034] like Figure 1 and Figure 4As shown, the cleaning spray assembly 2 includes a first brush roller 21, a second brush roller 22 and a third brush roller 23. The first brush roller 21 and the second brush roller 22 are arranged at an upper and lower slope. The first brush roller 21 and the second brush roller 22 convey and brush the monocrystalline silicon rods. The cleaning spray assembly 2 also includes a water pump 24 installed on the inner wall of the bottom of the cleaning pool 1. The water outlet of the water pump 24 is connected to a water pipe 25. A plurality of groups of nozzles 26 are installed below the water pipe 25. The nozzles 26 are located above the first brush roller 21, the second brush roller 22 and the third brush roller 23. The nozzles 26 spray the monocrystalline silicon rods on the first brush roller 21 and the second brush roller 22, the second brush roller 22 and the third brush roller 23. Flushing, combined with the setting of the brush, can make flushing and wiping at the same time, and the cleaning of the single crystal silicon rod is more thorough; the second brush roller 22 and one end of the first brush roller 21 are provided with a driving mechanism 27 installed on the outer wall of the cleaning tank 1, and the driving mechanism 27 is used to drive the first brush roller 21 and the second brush roller 22 to rotate; the front and rear surfaces of the cleaning tank 1 are provided with sliding holes 11, and one end of the third brush roller 23 is installed with a driving motor 28 located on the outer wall of the cleaning tank 1, and the output end of the driving motor 28 passes through the sliding hole 11 and is slidably arranged with the inner wall of the sliding hole 11. The setting of the sliding hole 11 is used to pull the driving motor 28 and its output end horizontally to achieve operation away from or close to the second brush roller 22.
[0035] In this embodiment, the single crystal silicon rod is placed between the first brush roller 21 and the second brush roller 22. By driving the driving mechanism 27 and starting the water pump 24, the first brush roller 21 and the second brush roller 22 rinse and rub the outer surface of the single crystal silicon rod, so that the cleaning of the single crystal silicon rod is more thorough. At the same time, since there is a certain slope between the first brush roller 21 and the second brush roller 22, the single crystal silicon rod is transferred downward to between the second brush roller 22 and the third brush roller 23, and the second brush roller 22 and the third brush roller 23 scrub the outer surface of the single crystal silicon rod again. The setting of the water pump 24 reuses the cleaning liquid used for cleaning, and circulates it through the water pipe 25 and the nozzle 26 to maximize the utilization and achieve the purpose of energy saving.
[0036] Example 2
[0037] like Figure 1-4As shown, based on the embodiment 1, a transmission assembly 3 located inside the cleaning pool 1 is further installed below the cleaning spray assembly 2, and a fixed ring frame 34 is installed on the outer ring of the output end of the driving motor 28 through a bearing rotation sleeve. The setting of the fixed ring frame 34 will not affect the rotation of the third brush roller 23. A rack 33 is connected to the bottom of the fixed ring frame 34, and a gear 32 is arranged below the rack 33. The gear 32 and the rack 33 are meshed for transmission. A rotating shaft 35 is fixedly installed through the inner ring of the gear 32, and one end of the rotating shaft 35 is connected to a servo motor. The servo motor 31 is assembled and connected with the outer wall of the cleaning tank 1 through a mounting bracket; the transmission assembly 3 includes a push plate 38 for pushing the single crystal silicon rod, and the rotating shaft 35 and the cleaning tank 1 are rotatably mounted through a bearing to realize the rotation setting of the rotating shaft 35. The outer ring of the rotating shaft 35 is also sleeved with a cam 36, and a contact plate 37 is provided on one side of the cam 36. An arc groove is provided at one end of the contact plate 37 close to the cam 36, which is used to make the cam 36 fit along the arc groove, and one side of the contact plate 37 is connected to the vertically arranged push plate 38.
[0038] like Figure 4 As shown, a guide block 39 is fixedly connected to the bottom of the push plate 38, a guide groove 12 is provided on the inner wall of the cleaning tank 1, the guide block 39 is slidably arranged in the guide groove 12, a spring 310 is connected to one side of the guide block 39, and the other end of the spring 310 is connected to the inner wall of one end of the guide groove 12, the guide block 39 is slidably arranged in the guide groove 12 to ensure the stable pushing of the push plate 38, and the setting of the spring 310 is used to ensure that the tip arc surface of the cam 36 rebounds when it contacts the contact plate 37, so that the guide block 39 rebounds to Figure 4 Status shown.
[0039] like Figure 1 As shown, a limiting rod 311 is fixedly connected to one side of the fixed ring frame 34, and a limiting ring is fixedly connected to the front outer wall of the cleaning tank 1. The limiting rod 311 penetrates the limiting ring and slides horizontally along the inner wall of the limiting ring.
[0040] In this embodiment, the servo motor 31 is started to rotate the output end of the servo motor 31, the gear 32 and the shaft 35. When the gear 32 rotates, the gear 32 meshes with the rack 33 above, so that the rack 33 and the fixed ring frame 34 are pulled horizontally along the limiting ring and the limiting rod 311, so that the drive motor 28 and the third brush roller 23 are pulled along the sliding hole 11 to the side away from the second brush roller 22, so that the single crystal silicon rod located between the second brush roller 22 and the third brush roller 23 falls to the bottom of the cleaning tank 1 for immersion, and at the same time, the cam 36 rotates when the shaft 35 rotates. Since the cam 36 is a special-shaped cam, when When the large arc surface of the cam 36 is constantly in contact with the arc surface groove of the contact plate 37, since the cam 36 is an eccentric structure, the contact plate 37 will be pushed by the large arc surface of the cam 36, so as to achieve the purpose of pushing the push plate 38 along the guide block 39 and the guide groove 12. At this time, the fallen single crystal silicon rod is pushed to one side, which will not affect the fall of the next single crystal silicon rod. Under the dimensional rotation of the cam 36, when the tip arc surface of the cam 36 contacts the contact plate 37, the spring 310 will also rebound, so that the push plate 38 is reset; the whole device realizes reciprocating dropping and pushing, and after a batch of single crystal silicon rods are cleaned and soaked, the disassembly plate 4 is opened to take out the single crystal silicon rods.
[0041] The above-mentioned specific embodiments are only several optional embodiments of the present invention. Based on the technical solution of the present invention and the relevant inspiration of the above-mentioned embodiments, those skilled in the art can make various alternative improvements and combinations to the above-mentioned specific embodiments.
Claims
1. A fully automatic single crystal silicon rod cleaning device, comprising a cleaning tank (1) for containing a cleaning liquid, characterized in that: A cleaning spray assembly (2) for wiping and flushing the single crystal silicon rods is rotatably installed inside the cleaning pool (1); A transmission assembly (3) located inside the cleaning pool (1) is also installed below the cleaning spray assembly (2), and the transmission assembly (3) includes a pushing plate (38) for pushing the single crystal silicon rod.
2. The fully automatic single crystal silicon rod cleaning equipment according to claim 1, characterized in that: The cleaning spray assembly (2) comprises a first brush roller (21), a second brush roller (22) and a third brush roller (23); the first brush roller (21) and the second brush roller (22) are arranged with a slope in an upper and lower direction; one end of the second brush roller (22) and the first brush roller (21) is provided with a driving mechanism (27) installed on the outer wall of the cleaning tank (1).
3. The fully automatic single crystal silicon rod cleaning equipment according to claim 2, characterized in that: The front and rear surfaces of the cleaning pool (1) are both provided with sliding holes (11); one end of the third brush roller (23) is provided with a driving motor (28) located on the outer wall of the cleaning pool (1); the output end of the driving motor (28) passes through the sliding hole (11) and is slidably arranged with the inner wall of the sliding hole (11).
4. The fully automatic single crystal silicon rod cleaning equipment according to claim 3, characterized in that: The cleaning spray assembly (2) further comprises a water pump (24) mounted on the inner wall of the bottom of the cleaning pool (1); a water outlet of the water pump (24) is connected to a water pipe (25); a plurality of groups of spray heads (26) are mounted below the water pipe (25); the spray heads (26) are located above the first brush roller (21), the second brush roller (22) and the third brush roller (23).
5. The fully automatic single crystal silicon rod cleaning equipment according to claim 3, characterized in that: The outer ring of the output end of the driving motor (28) is also provided with a fixed ring frame (34) through a bearing rotatable sleeve, the bottom of the fixed ring frame (34) is connected with a rack (33), a gear (32) is arranged below the rack (33), a rotating shaft (35) is fixedly installed through the inner ring of the gear (32), and one end of the rotating shaft (35) is connected with a servo motor (31).
6. The fully automatic single crystal silicon rod cleaning equipment according to claim 5, characterized in that: The rotating shaft (35) is rotatably mounted on the cleaning tank (1) via a bearing. A cam (36) is sleeved on the outer ring of the rotating shaft (35). A contact plate (37) is provided on one side of the cam (36). One side of the contact plate (37) is connected to a vertically arranged push plate (38).
7. The fully automatic single crystal silicon rod cleaning equipment according to claim 6, characterized in that: A guide block (39) is fixedly connected to the bottom of the push plate (38), a guide groove (12) is provided on the inner wall of the cleaning tank (1), the guide block (39) is slidably arranged in the guide groove (12), a spring (310) is connected to one side of the guide block (39), and the other end of the spring (310) is connected to the inner wall of one end of the guide groove (12).
8. The fully automatic single crystal silicon rod cleaning device according to claim 6, characterized in that: A limiting rod (311) is also fixedly connected to one side of the fixed ring frame (34), and the front outer wall of the cleaning tank (1) is fixedly connected to the limiting ring, and the limiting rod (311) passes through the limiting ring and slides horizontally along the inner wall of the limiting ring.
9. The fully automatic single crystal silicon rod cleaning equipment according to claim 1, characterized in that: The side wall of the cleaning pool (1) is also provided with a material taking port for taking out the single crystal silicon rods, and a disassembly plate (4) is installed in the material taking port.