Welding system

The described welding system addresses inefficiencies in electron beam welding by enabling simultaneous welding of multiple positions on a workpiece using a vacuum chamber with multiple welding machines and a conveying mechanism, thereby enhancing efficiency.

CN222243064UActive Publication Date: 2024-12-27PIONEER FILM MATERIALS (ANHUI) CO LTD
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Patent Information

Application Number
CN202421028513.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-13
Publication Date
2024-12-27
Estimated Expiration
2034-05-13

AI Technical Summary

Technical Problem

Existing electron beam welding machines require multiple welding positions to be welded one by one, leading to inefficient welding processes.

Method used

A welding system with a vacuum chamber containing at least two welding machines and a conveying mechanism that allows simultaneous welding of multiple positions on a workpiece without repositioning, utilizing a bearing assembly and supporting rollers to facilitate movement and adjustment of the workpiece within the vacuum chamber.

Benefits of technology

Enhances welding efficiency by allowing simultaneous welding of multiple positions on a workpiece, reducing the overall welding time and improving productivity.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a welding system. The welding system comprises a vacuum chamber, a conveying mechanism and at least two welding machines. The vacuum chamber has a vacuum cavity; the conveying mechanism comprises a bearing assembly capable of reciprocating in the first direction, and the bearing assembly can enter and exit from the vacuum cavity in the reciprocating process. The at least two welding machines are arranged in the vacuum chamber at intervals, and welding heads of the welding machines extend into the vacuum cavity; at least two welding machines are arranged in the vacuum chamber at intervals in the first direction. During welding, a workpiece is firstly placed on the bearing assembly in the first direction, then the bearing assembly moves into the vacuum cavity, the two welding machines arranged in the first direction correspond to the two ends of the workpiece, and the workpiece in the vacuum cavity is welded through welding heads of the welding machines. And after welding is completed, the bearing assembly is moved out of the vacuum cavity, and the workpiece is discharged. Due to the fact that the two welding machines correspond to the two ends of the workpiece, the two ends of the workpiece can be welded at the same time without being moved out and turned, the welding time is shortened, and the welding efficiency is improved.
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Description

Technical Field

[0001] The present application belongs to the technical field of target welding, and specifically relates to a welding system. Background Art

[0002] Electron beam welding is a relatively precise welding equipment that uses the principle of high-speed electron beam to bombard the workpiece for welding. During the welding process, vacuum electron beam welding uses a directional high-speed electron beam to hit the workpiece to convert kinetic energy into heat energy to melt the workpiece and form a weld. When existing electron beam welding machines are used to weld a workpiece, if there are multiple welding positions on the workpiece, each position needs to be welded one by one, which is inefficient. Utility Model Content

[0003] The technical problem to be solved by the present application is that the welding efficiency of the existing electron beam welding machine is low, and a welding system with high welding efficiency is provided.

[0004] The technical solution proposed in this application is:

[0005] A welding system, comprising:

[0006] A vacuum chamber having a vacuum cavity;

[0007] The conveying mechanism comprises a bearing assembly capable of reciprocating along a first direction, wherein the bearing assembly can enter and exit the vacuum chamber during the reciprocating movement;

[0008] At least two welding machines are arranged in the vacuum chamber at intervals, and the welding heads of the welding machines extend into the vacuum chamber;

[0009] There are at least two welding machines arranged in the vacuum chamber at intervals along the first direction.

[0010] Furthermore, the supporting assembly includes a movable table and two groups of supporting rollers, the movable table can move back and forth along the first direction, and the movable table can enter and exit the vacuum chamber during the reciprocating movement, the two groups of supporting rollers are arranged on the movable table at intervals along the second direction, and each group of supporting rollers can rotate around an axis parallel to the second direction.

[0011] Further, the two groups of support rollers can move closer to and farther away from each other.

[0012] Furthermore, the bearing assembly further comprises an adjusting unit, which is disposed on the moving platform and connected to the two groups of supporting rollers to drive the two groups of supporting rollers to move closer to and away from each other.

[0013] Furthermore, the adjustment unit includes an adjustment rod, a first movable block and a second movable block, the first movable block and the second movable block are respectively connected to the two groups of support rollers, and the adjustment rod is threadedly connected to the first movable block and the second movable block.

[0014] Furthermore, the adjustment unit also includes an adjustment handle, and the adjustment handle is connected to the adjustment rod.

[0015] Furthermore, the adjustment unit further includes a rotation-stopping member, which is disposed on the adjustment handle and is detachably connected to the moving platform.

[0016] Further, the bearing assembly further comprises a clamping unit and a pressing unit, the clamping unit and the pressing unit are both arranged on the moving platform, and the clamping unit and the pressing unit are arranged at intervals along the first direction, and the two groups of support rollers are located between the clamping unit and the pressing unit in the first direction;

[0017] The clamping unit can clamp one end of the workpiece, the pressing unit can press against the other end of the workpiece, and the two groups of supporting rollers are used to support the workpiece.

[0018] Furthermore, the vacuum chamber is also provided with an opening communicating with the vacuum cavity, and the carrying assembly can enter and exit the vacuum cavity through the opening during movement;

[0019] A sealing door and a driving mechanism for driving the sealing door to move back and forth are provided at the opening of the vacuum chamber, and the sealing door can open and close the opening during the movement.

[0020] Furthermore, the vacuum chamber is also provided with an observation port communicating with the vacuum cavity, and a transparent member is provided at the observation port, and the transparent member is used to seal the observation port.

[0021] With the above-mentioned welding system, the workpiece is first placed on the supporting assembly along the first direction, and then the supporting assembly is moved into the vacuum chamber. The two welding machines arranged along the first direction correspond to the two ends of the workpiece, and the workpiece in the vacuum chamber is welded by the welding heads of the welding machines. After welding is completed, the supporting assembly is moved out of the vacuum chamber, and the workpiece can be unloaded. Since there are two welding machines corresponding to the two ends of the workpiece, the two ends of the workpiece can be welded at the same time without moving out and turning, which shortens the welding time and improves the welding efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings are used to provide further understanding of the present application and constitute a part of the specification. They are used to explain the present application together with the embodiments of the present application and do not constitute a limitation of the present application.

[0023] Figures 1 to 3A schematic diagram of the structure of a welding system provided in multiple angles according to an embodiment of the present application;

[0024] Figures 4 to 6 for Figure 1 Schematic diagram of the structure of some load-bearing components in the welding system at multiple angles.

[0025] Description of labels:

[0026] 100. welding system; 200. workpiece; 110. vacuum chamber; 120. welding machine; 130. bearing assembly; 111. vacuum chamber; 112. opening; 113. sealing door; 114. driving mechanism; 115. observation port; 140. conveying assembly; 131. moving table; 132. supporting roller; 1331. first movable block; 1332. second movable block; 1333. adjusting rod; 1334. adjusting handle; 134. adjusting seat; 135. supporting seat; 1341. supporting step; 136. clamping unit; 137. clamping unit; 150. vacuum mechanism. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0028] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0029] In order to facilitate understanding of the technical solution of the present application, the defects of the existing electron beam welder are explained here: when the existing electron beam welder is performing welding, if there are multiple welding positions on the workpiece, for example, there are welding positions at both ends of the workpiece, it is necessary to weld one end first, then remove the workpiece and turn it 180°, and then put the workpiece into the beam welder to weld the other end, which is inefficient.

[0030] like Figures 1 to 3As shown, an embodiment of the present application provides a welding system 100 , including a vacuum chamber 110 , a conveying mechanism and at least two welding machines 120 .

[0031] The vacuum chamber 110 has a vacuum cavity 111, and the conveying mechanism includes a bearing assembly 130 that can reciprocate along a first direction, and the bearing assembly 130 is used to carry the workpiece 200, and the bearing assembly 130 can enter and exit the vacuum cavity 111 during the reciprocating movement. At least two welding machines 120 are arranged in the vacuum chamber 110 at intervals, and the welding heads of the welding machines 120 extend into the vacuum cavity 111 to weld the workpiece 200.

[0032] Further, among the at least two welding machines 120, at least two welding machines 120 are arranged in the vacuum chamber 110 at intervals along the first direction. The workpieces 200 on the supporting assembly 130 are arranged along the first direction. After the workpieces 200 are input into the vacuum chamber 111 along the first direction, the two welding machines 120 correspond to the two ends of the workpiece 200, so as to directly weld the two ends of the workpiece 200, further improving the welding efficiency.

[0033] With the above-mentioned welding system, the workpiece 200 is first placed on the bearing assembly 130 along the first direction, and then the bearing assembly 130 is moved into the vacuum chamber 111. The two welding machines 120 arranged along the first direction correspond to the two ends of the workpiece 200, and the workpiece 200 in the vacuum chamber 111 is welded by the welding heads of the welding machines 120. After the welding is completed, the bearing assembly 130 is moved out of the vacuum chamber 111, and the workpiece 200 can be unloaded. Since there are two welding machines 120 corresponding to the two ends of the workpiece 200, the two ends of the workpiece 200 can be welded at the same time without moving out and turning, which shortens the welding time and improves the welding efficiency.

[0034] In addition, other welding machines 120 may be arranged for welding at other welding positions of the workpiece 200 to further improve welding efficiency, or welding machines 120 may be arranged correspondingly for workpieces 200 arranged in other directions to be suitable for welding different workpieces 200 .

[0035] It should be noted that when processing a longer workpiece 200 , the size of the vacuum chamber 111 can be increased as required.

[0036] In one embodiment, the vacuum chamber 110 is further provided with an opening 112 communicating with the vacuum cavity 111, and the bearing assembly 130 can enter and exit the vacuum cavity 111 through the opening 112 during the movement. Further, a sealing door 113 is provided at the opening 112 of the vacuum chamber 110, and the sealing door 113 is reciprocatingly arranged, and the opening 112 can be opened and closed during the reciprocating movement of the sealing door 113. It can be understood that the vacuum cavity 111 needs to maintain a vacuum during the welding process of the welding machine 120, so the opening 112 is closed by the sealing door 113 during welding, and then the vacuum cavity 111 is evacuated.

[0037] In one embodiment, a driving mechanism 114 is further provided at the opening 112 of the vacuum chamber 110. The driving mechanism 114 is connected to the sealing door 113 and is used to drive the sealing door 113 to move back and forth, thereby realizing automatic opening and closing of the sealing door 113. Compared with manual opening and closing of the sealing door 113, setting up the driving mechanism 114 is more convenient and improves work efficiency.

[0038] In practical applications, a door beam is provided at the top of the opening 112 , a slide rail is provided on the door beam, and the sealing door 113 is slidably arranged on the slide rail.

[0039] It should be noted that, in this embodiment, an emergency pull rope is provided in the vacuum chamber 111, and an emergency stop switch is also provided outside the vacuum chamber 110. The welding system can be stopped urgently by pulling the emergency pull rope or pressing the emergency stop switch, and the sealing door 113 can be opened.

[0040] In addition, the driving mechanism 114 includes a driving cylinder and a travel switch. The driving cylinder is connected to the sealing door 113 to drive the sealing door 113 to move. The travel switch is arranged on the sealing door 113 and / or the door beam to detect the position of the sealing door 113 and ensure that the sealing door 113 moves into place.

[0041] Of course, a limit block may also be provided on the door beam, and the limit block may limit the moving stroke of the sealing door 113 to prevent the sealing door 113 from being separated from the door beam.

[0042] In one embodiment, the vacuum chamber 110 is further provided with an observation port 115 connected to the vacuum cavity 111 , and a transparent member is provided at the observation port 115 , which is used to seal the observation port 115 , thereby facilitating an operator to observe the internal situation through the observation port 115 and conveniently controlling the welding operation in the vacuum cavity 111 .

[0043] In one embodiment, the conveying mechanism further includes a conveying assembly 140, which is connected to the bearing assembly 130 and is used to drive the bearing assembly 130 to reciprocate along the first direction. It should be noted that the conveying assembly 140 is a conventional structure and will not be described in detail herein.

[0044] In one embodiment, the bearing assembly 130 includes a moving platform 131 and two groups of supporting rollers 132. The conveying assembly 140 is connected to the moving platform 131 to drive the moving platform 131 to reciprocate along the first direction. During the reciprocating movement of the moving platform 131, the moving platform 131 can enter and exit the vacuum chamber 111 through the opening 112. The two groups of supporting rollers 132 are arranged on the moving platform 131 at intervals along the second direction, and each group of supporting rollers 132 can rotate around an axis parallel to the second direction.

[0045] It should be noted that, in the present embodiment, the workpiece 200 is a cylindrical target material, and the target material needs to be rotated during the welding process, so the target material is supported by two sets of support rollers 132 to enable the target material to rotate.

[0046] Optionally, each group of support rollers 132 includes at least two support rollers 132, and the at least two support rollers 132 in each group are arranged at intervals along the second direction to improve the stability of supporting the workpiece 200. Figure 1 As shown, each group may also be provided with a supporting roller 132, which is not limited here. Of course, the following description is made by taking the example of providing each group with a supporting roller 132.

[0047] In one embodiment, the two groups of support rollers 132 can move closer to and farther from each other, so that the bearing assembly 130 can support workpieces 200 of different radial sizes. Further, the bearing assembly 130 includes an adjustment unit, which is disposed on the moving platform 131 and connected to the two groups of support rollers 132 to drive the two groups of support rollers 132 to move closer to and farther from each other.

[0048] Please also see Figures 4 to 6 In one embodiment, the adjustment unit includes a first movable block 1331, a second movable block 1332 and an adjustment rod 1333. The first movable block 1331 and the second movable block 1332 are respectively connected to the two groups of support rollers 132. The adjustment rod 1333 is threadedly connected to the first movable block 1331 and the second movable block 1332, thereby driving the first movable block 1331 and the second movable block 1332 to approach and move away from each other along the second direction during rotation, thereby driving the two groups of support rollers 132 to approach and move away from each other.

[0049] It should be explained that the first movable block 1331 and the second movable block 1332 are arranged at intervals along the second direction, the adjustment rod 1333 is rotatably mounted on the movable platform 131 through a bearing, and the adjustment rod 1333 extends along the second direction and is respectively connected to the first movable block 1331 and the second movable block 1332. The adjustment rod 1333 is provided with two threaded sections, and the thread directions of the two threaded sections are opposite, and the two threaded sections are respectively threadedly matched with the first movable block 1331 and the second movable block 1332, so that the first movable block 1331 is driven to move in opposite directions during the rotation process, so that the first movable block 1331 and the second movable block 1332 are moved closer to and farther from each other.

[0050] In addition, it should be noted that each supporting roller 132 can be disposed on the movable platform 131 via a base, the supporting roller 132 can be rotatably disposed on the base, and the first movable block 1331 and the second movable block 1332 are respectively connected to the corresponding base.

[0051] Preferably, the adjustment unit further includes an adjustment handle 1334 , which is connected to the adjustment rod 1333 and is located at one end of the adjustment rod 1333 to facilitate the rotation of the adjustment rod 1333 .

[0052] It should be noted that the adjustment unit also includes a stopper, which is provided on the adjustment handle 1334 and is detachably connected to the movable table 131, so as to limit the rotation of the adjustment handle 1334 when connected to the movable table 131, thereby preventing the adjustment handle 1334 from continuing to rotate after the workpiece 200 is placed, and preventing relative movement between the two groups of support rollers 132. Of course, a method of limiting the movement of the first movable block 1331 and / or the second movable block 1332 can also be adopted, such as providing a locking member, which is connected between the movable block (the first movable block 1331 or the second movable block 1332) and the movable table 131, and is detachably connected to the movable table 131, so as to fix the movable block when connected to the movable table 131.

[0053] In one embodiment, the supporting assembly 130 further includes two adjustment seats 134 and a support seat 135 . The two adjustment seats 134 are arranged at intervals on the moving platform 131 to jointly support the support seat 135 . The adjustment unit and the support roller 132 are both disposed on the support seat 135 .

[0054] Furthermore, a plurality of corresponding supporting steps 1341 are provided on the opposite sides of the two adjustment seats 134, and the heights of the plurality of supporting steps 1341 on each adjustment seat 134 are different. At least one of the two adjustment seats 134 can adjust its position relative to the moving platform 131 so that the two adjustment seats 134 can move closer to or farther from each other.

[0055] The two adjustment seats 134 have multiple bearing positions in the process of approaching and moving away from each other. When the two adjustment seats 134 are located at any bearing position, the support seat 135 is supported on the corresponding support step 1341. In this way, the height of the workpiece 200 on the support roller 132 can be further adjusted.

[0056] In one embodiment, the supporting assembly 130 further includes a clamping unit 136 and a pressing unit 137. Both the clamping unit 136 and the pressing unit 137 are disposed on the movable platform 131 and are arranged at intervals along the first direction. The two groups of supporting rollers 132 are located between the clamping unit 136 and the pressing unit 137 in the first direction.

[0057] The clamping unit 136 can clamp one end of the workpiece 200, and the pressing unit 137 can press against the other end of the workpiece 200 away from the clamping unit 136, so as to fix the workpiece 200 in the first direction. It can be seen that after the two groups of support rollers 132 support the workpiece 200, the clamping unit 136 clamps one end of the workpiece 200, and the pressing unit 137 presses against the other end of the workpiece 200, and then drives the workpiece 200 to rotate, and the workpiece 200 is welded by the welding machine 120 during the rotation.

[0058] In practical applications, the clamping unit 136 includes a mounting seat and a clamping member, the mounting seat is disposed on the moving platform 131, the clamping member is rotatably disposed on the mounting seat, and the clamping member is used to clamp the workpiece 200. In addition, the pressing unit 137 includes a connecting seat and a top head, the connecting seat is connected to the moving platform 131 and can adjust the position along the first direction, the top head is rotatably connected to the connecting seat, and the top head can press against the other end of the workpiece 200 away from the clamping unit 136 during the process of the connecting seat moving along the first direction. In this way, it is ensured that the workpiece 200 can rotate after clamping the workpiece 200.

[0059] Optionally, the clamping member is an electric three-jaw chuck.

[0060] In combination with the above embodiment, it is necessary to further explain that the height of the clamping member and the plug is constant. For workpieces 200 of different sizes, in order to ensure that the electric three-turn chuck can clamp the workpiece 200 and ensure that the plug is pressed against the center of the end face of the workpiece 200, it is necessary to make the central axis of the workpiece 200 correspond to the clamping member and the plug, so it is necessary to adjust the height of the central axis of the workpiece 200 on the support roller 132. In the present application, by adjusting the spacing between the two groups of support rollers 132, the height of the central axis of the workpiece 200 on the support roller 132 is adjusted to ensure that the workpiece 200 on the support roller 132 can be clamped by the clamping member, and at the same time, the plug is pressed against the center of the end face of the workpiece 200.

[0061] In addition, when the size of the workpiece 200 changes greatly, the height of the workpiece 200 can also be adjusted by adjusting the seat 134 and the support seat 135. However, it is preferred to adjust the spacing between the support rollers 132.

[0062] Specific to Figure 1 In the illustrated embodiment, the welding machines 120 include two welding machines 120 , and both welding machines 120 are beam welding machines.

[0063] In one embodiment, the welding system further includes a vacuum mechanism 150 , which is connected to the vacuum chamber 110 and is used to evacuate and break the vacuum chamber 111 .

[0064] In one embodiment, the welding system further includes a rotation drive unit, which can drive the workpiece 200 to rotate. It should be noted that, according to the above embodiment, the workpiece 200 can rotate after being carried by the bearing assembly 130, and the rotation drive unit can be arranged in the vacuum chamber 111, and contact the surface of the workpiece 200 through the driving wheel, thereby driving the workpiece 200 to rotate. In other embodiments, the rotation drive unit can also be arranged on the moving table 131, and connected to the clamping member to drive the clamping member to rotate, thereby driving the workpiece 200 to rotate.

[0065] In order to facilitate the technical solution of this application, Figure 1 The working process of the welding system in the above embodiment is described as follows:

[0066] First, the movable table 131 is moved out of the vacuum chamber 111, and then the workpiece 200 is placed on the two sets of support rollers 132, and then the spacing between the two sets of support rollers 132 is adjusted according to the size of the workpiece 200. After the adjustment is completed, one end of the workpiece 200 is clamped by the clamping member, and the other end is pressed by the head. Then the conveying assembly 140 conveys the movable table 131 into the vacuum chamber 111, and the driving mechanism 114 drives the sealing door 113 to close the opening 112. Next, the vacuum chamber 111 is evacuated by the vacuum mechanism 150. After the vacuum degree reaches the requirement, the rotating driving member drives the workpiece 200 to rotate, and then the two welding machines 120 start to weld the workpiece 200. After the welding is completed, the welding machine 120 and the rotating driving member stop moving, the vacuum mechanism 150 breaks the vacuum of the vacuum chamber 111, and then the driving mechanism 114 drives the sealing door 113 to open, and the conveying assembly 140 drives the movable table 131 to move out of the vacuum chamber 111, and the welded workpiece 200 can be unloaded.

[0067] Although the embodiments of the present application have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A welding system, characterized in that: include: A vacuum chamber having a vacuum cavity; The conveying mechanism comprises a bearing assembly capable of reciprocating along a first direction, wherein the bearing assembly can enter and exit the vacuum chamber during the reciprocating movement; At least two welding machines are arranged in the vacuum chamber at intervals, and the welding heads of the welding machines extend into the vacuum chamber; There are at least two welding machines arranged in the vacuum chamber at intervals along the first direction.

2. The welding system according to claim 1, characterized in that The bearing assembly includes a movable table and two groups of supporting rollers. The movable table can move back and forth along the first direction, and the movable table can enter and exit the vacuum chamber during the reciprocating movement. The two groups of supporting rollers are arranged on the movable table at intervals along the second direction, and each group of supporting rollers can rotate around an axis parallel to the second direction.

3. The welding system according to claim 2, characterized in that: The two sets of support rollers can move closer to and farther from each other.

4. The welding system according to claim 3, characterized in that The bearing assembly further comprises an adjusting unit, which is arranged on the moving platform and connected to the two groups of supporting rollers to drive the two groups of supporting rollers to move closer to and away from each other.

5. The welding system according to claim 4, characterized in that The adjusting unit comprises an adjusting rod, a first movable block and a second movable block. The first movable block and the second movable block are respectively connected to the two groups of supporting rollers. The adjusting rod is threadedly connected to the first movable block and the second movable block.

6. The welding system according to claim 5, characterized in that The adjusting unit further comprises an adjusting handle, and the adjusting handle is connected to the adjusting rod.

7. The welding system according to claim 6, characterized in that The adjusting unit further comprises a rotation-stopping member, which is arranged on the adjusting handle and is detachably connected to the moving platform.

8. The welding system according to claim 2, characterized in that: The bearing assembly further comprises a clamping unit and a pressing unit, wherein the clamping unit and the pressing unit are both arranged on the moving platform, and the clamping unit and the pressing unit are arranged at intervals along a first direction, and the two groups of supporting rollers are located between the clamping unit and the pressing unit in the first direction; The clamping unit can clamp one end of the workpiece, the pressing unit can press against the other end of the workpiece, and the two groups of supporting rollers are used to support the workpiece.

9. The welding system according to claim 1, characterized in that: The vacuum chamber is also provided with an opening communicating with the vacuum cavity, and the carrying assembly can enter and exit the vacuum cavity through the opening during movement; A sealing door and a driving mechanism for driving the sealing door to move back and forth are provided at the opening of the vacuum chamber, and the sealing door can open and close the opening during the movement.

10. The welding system according to claim 1, characterized in that The vacuum chamber is also provided with an observation port communicating with the vacuum cavity, and a transparent member is provided at the observation port, and the transparent member is used to seal the observation port.