Ceramic manipulator full-load test fixture

Abstract

The utility model discloses a ceramic manipulator full load test fixture, which is based on a ceramic manipulator, the cross section of the ceramic manipulator is Y-shaped, the left side and the right side of the top of a Y-shaped fork rod of the ceramic manipulator are respectively provided with two air holes, the ceramic manipulator full load test fixture comprises a bottom plate and four sealing plates, a Y-shaped containing groove corresponding to the ceramic manipulator is formed in the top of the bottom plate, a Y-shaped exhaust groove is formed in the bottom of the containing groove, the ceramic manipulator is embedded in the containing groove, the four sealing plates are all in a square plate shape, the four sealing plates are located at four air holes of the ceramic manipulator respectively, and the four sealing plates are all fixedly connected with the bottom plate. The testing device has the advantages that the service life cycle of the manipulator is verified, the sealing plate can be quickly dismounted and mounted, the testing efficiency is high, and an operator does not need to hold the ceramic manipulator by hand.

Description

Technical Field

[0001] The utility model relates to the field of ceramic manipulator testing, in particular to a fully loaded testing fixture for a ceramic manipulator. Background Art

[0002] Wafer handling robots are used to transport wafers in semiconductor equipment. They are fixed at the end of the robot arm. Robots used in atmospheric environments generally use vacuum adsorption, so the sealing performance of the robot needs to be excellent.

[0003] After the ceramic robot is processed, it is necessary to test its working stability under full load and its service life. Utility Model Content

[0004] The utility model aims to provide a fully loaded test fixture for a ceramic manipulator, which has the advantages of verifying the service life cycle of the manipulator, being able to quickly disassemble and install a sealing plate, having high test efficiency, and not requiring an operator to hold the ceramic manipulator.

[0005] The above technical objectives of the utility model are achieved through the following technical solutions:

[0006] A ceramic manipulator full-load test fixture is based on the ceramic manipulator. The cross section of the ceramic manipulator is in a "Y" shape. Two air holes are respectively arranged on the left and right sides of the top of the "Y"-shaped fork rod of the ceramic manipulator. The fixture is characterized in that: it comprises a bottom plate and four sealing plates. The bottom plate is a square block. A "Y"-shaped placement groove corresponding to the ceramic manipulator is opened on the top of the bottom plate. A "Y"-shaped exhaust groove is opened at the bottom of the placement groove. The ceramic manipulator is embedded in the placement groove.

[0007] The four sealing plates are all square plates, and the four sealing plates are respectively located at the four air holes of the ceramic manipulator. The four sealing plates are all fixedly connected to the bottom plate. A circular through-hole is respectively opened at the diagonal corners of the top of each sealing plate. Positioning pin holes and nut sleeve holes corresponding to the two circular through-holes of each sealing plate are respectively opened on both sides of the placement groove on the top of the bottom plate. A positioning pin is fixedly provided in each positioning pin hole, and a self-clinching stud is fixedly provided in each nut sleeve hole. Each positioning pin and self-clinching stud is inserted into the circular through-hole of the corresponding sealing plate. A bolt is provided in the circular through-hole corresponding to the self-clinching stud of each sealing plate, and each bolt is threadedly connected with the corresponding self-clinching stud;

[0008] A circular groove is formed at the bottom of each sealing plate. Each circular groove is concentric with the corresponding air hole. A sealing O-ring is formed in each groove.

[0009] The preferred solutions are as follows:

[0010] Preferably, the positioning pin is a rivet pin.

[0011] Preferably, the depth of the placement groove is one third of the thickness of the ceramic manipulator, the width of the exhaust groove is two thirds of the width of the placement groove, and the exhaust groove is centrally located in the placement groove.

[0012] Preferably, each of the positioning pins protrudes from the top of its corresponding sealing plate, and the top of each of the self-clinching studs is located at one third of the corresponding sealing plate from bottom to top.

[0013] In summary, the utility model has the following beneficial effects:

[0014] 1. The placement groove of the bottom plate can be set to initially fix the ceramic manipulator, and at the same time, two-thirds of the ceramic manipulator protrudes from the bottom plate, which is convenient for detecting whether the side wall is leaking and for tightening and fixing the sealing plate with bolts;

[0015] 2. By setting the exhaust groove at the bottom of the placement tank, it is convenient to detect whether the bottom of the ceramic manipulator is leaking;

[0016] 3. The setting of positioning pins and rivet studs can achieve the effect of initial positioning of the sealing plate;

[0017] 4. Through the arrangement of the rivet studs and bolts, the bolts can be threadedly connected to the rivet studs, the sealing plate can be pressed downward, the sealing O-ring can be squeezed, and the pores of the ceramic manipulator can be sealed. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the embodiment;

[0019] Figure 2 It is an exploded view of the overall structural modeling schematic diagram of the embodiment;

[0020] Figure 3 is a bottom side view of an exploded view of a schematic diagram of the overall structural shape of the embodiment;

[0021] Figure 4 It is a schematic diagram of the structural modeling of batch testing of multiple ceramic manipulators in an embodiment.

[0022] In the figure, 1, ceramic manipulator; 2, bottom plate; 3, sealing plate; 4, bolt; 111, air hole; 211, placement groove; 212, exhaust groove; 213, positioning pin; 214, rivet stud; 311, circular through hole; 312, groove; 313, sealing O-ring. DETAILED DESCRIPTION

[0023] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0024] The same components are denoted by the same reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to directions in the drawings.

[0025] A ceramic manipulator fully loaded test fixture, such as Figure 1-Figure 3 As shown, based on the ceramic manipulator 1, the cross section of the ceramic manipulator 1 is "Y"-shaped, and two air holes 111 are respectively provided on the left and right sides of the top of the "Y"-shaped fork rod of the ceramic manipulator 1.

[0026] The ceramic manipulator full-load test fixture includes a bottom plate 2 and four sealing plates 3. The bottom plate 2 is a square block. A "Y"-shaped placement groove 211 corresponding to the ceramic manipulator 1 is opened on the top of the bottom plate 2. The ceramic manipulator 1 is embedded in the placement groove 211. The depth of the placement groove 211 is one-third of the thickness of the ceramic manipulator 1, that is, two-thirds of the ceramic manipulator 1 protrudes from the top of the square block. While facilitating the positioning of the ceramic manipulator 1, it is also convenient to detect whether the side wall of the ceramic manipulator 1 is leaking.

[0027] A "Y"-shaped exhaust groove 212 is provided at the bottom of the placement groove 211. The width of the exhaust groove 212 is two-thirds of the width of the placement groove 211. The exhaust groove 212 is centrally located in the placement groove 211. The exhaust groove 212 and the placement groove 211 form a step, and the ceramic manipulator 1 is placed on the step. The setting of the exhaust groove 212 makes it easy to detect whether there is air leakage at the bottom of the ceramic manipulator 1.

[0028] The four sealing plates 3 are all square plates. The four sealing plates 3 are respectively located at the four air holes 111 of the ceramic manipulator 1. The four sealing plates 3 are fixedly connected to the bottom plate 2. A circular groove 312 is opened at the bottom of each sealing plate 3. Each circular groove 312 is concentric with its corresponding air hole 111. A sealing O-ring 313 is provided in each groove 312. The sealing plate 3 is pressed against the ceramic manipulator 1 so that the sealing O-ring 313 is compressed, thereby keeping the four air holes 111 sealed, so as to facilitate the detection of the overall sealing of the ceramic manipulator 1.

[0029] In order to facilitate the fixation of the four sealing plates 3, circular through holes 311 are respectively opened at the diagonal corners of the top of each sealing plate 3, and positioning pin 213 holes and nut sleeve holes corresponding to the two circular through holes 311 of each sealing plate 3 are respectively opened on both sides of the placement groove 211 at the top of the bottom plate 2, and each positioning pin 213 hole is fixed with a positioning pin 213, and each nut sleeve hole is fixed with a rivet stud 214, each positioning pin 213 is a rivet pin, and the rivet stud 214 and the rivet pin are pressed onto the bottom plate 2 by a riveting machine, which saves space for the nut and the positioning pin 213 and prevents the nut and the positioning pin 213 from being lost.

[0030] The outer diameter of the positioning pin 213 is consistent with the outer diameter of the rivet bolt 4 , which can ensure the universal use of the sealing plate 3 .

[0031] Each locating pin 213 and self-clinching stud 214 is inserted into the corresponding circular through-hole 311 of the sealing plate 3, and one-fifth of the upper end of each locating pin 213 protrudes out of the top of the corresponding sealing plate 3. The top of each self-clinching stud 214 is located at one-third of the corresponding sealing plate 3 from bottom to top. The sealing plate 3 is initially limited by the locating pin 213 and the self-clinching stud 214. Bolts 4 are provided in the circular through-holes 311 corresponding to each sealing plate 3 and the self-clinching stud 214. Each bolt 4 is threadedly connected to its corresponding self-clinching stud 214, and the bolt head of the bolt 4 is pressed against the top of the corresponding sealing plate 3. In the process of continuously tightening the bolt 4, the sealing O-ring 313 is continuously compressed, thereby making the sealing effect better.

[0032] like Figure 4 As shown, in this embodiment, the base plate 2 can also be enlarged and manufactured to perform batch testing of multiple ceramic manipulators 1 .

[0033] Specific implementation process:

[0034] Step 1: Place the ceramic robot 1 in the placement groove 211 of the bottom plate 2;

[0035] Step 2: Take out four sealing plates 3. A sealing O-ring 313 is embedded in the groove 312 at the bottom of each sealing plate 3;

[0036] Step 3: The four sealing plates 3 are respectively plugged into the corresponding positioning pins 213 and the rivet studs 214 through the two circular through holes 311 on the sealing plates 3. At this time, the four air holes 111 of the ceramic manipulator 1 are respectively located within the sealing range formed by the four sealing O-rings 313;

[0037] Step 4: Put the bolts 4 into the circular through holes 311 corresponding to the four pressure riveting studs 214, and the four bolts 4 are respectively threadedly connected with the corresponding pressure riveting studs 214, and the four sealing O-rings 313 are compressed;

[0038] Step 5: Connect the ceramic manipulator 1 to the gas pressure recorder, output full-power gas to the ceramic manipulator 1, so that the ceramic manipulator 1 reaches full load, and the gas pressure recorder records the internal gas pressure of the ceramic manipulator 1;

[0039] Step 6: Determine whether the ceramic manipulator 1 is leaking according to the data of the gas pressure recorder;

[0040] Step 7: After the test is completed, disconnect the ceramic manipulator 1 from the gas pressure recorder, remove the bolts 4, take out the four sealing plates 3, and take out the ceramic manipulator 1.

[0041] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A ceramic manipulator full-load test fixture, based on a ceramic manipulator (1), the cross section of the ceramic manipulator (1) is "Y"-shaped, and two air holes (111) are respectively provided on the left and right sides of the top of the "Y"-shaped fork rod of the ceramic manipulator (1), characterized in that: The invention comprises a bottom plate (2) and four sealing plates (3); the bottom plate (2) is a square block; a "Y"-shaped placement groove (211) corresponding to the ceramic manipulator (1) is provided on the top of the bottom plate (2); a "Y"-shaped exhaust groove (212) is provided on the bottom of the placement groove (211); and the ceramic manipulator (1) is embedded in the placement groove (211); The four sealing plates (3) are all in the shape of square plates. The four sealing plates (3) are respectively located at the four air holes (111) of the ceramic manipulator (1). The four sealing plates (3) are fixedly connected to the bottom plate (2). A circular through hole (311) is respectively opened at the diagonal corner of the top of each sealing plate (3). Positioning pin holes and nut sleeve holes corresponding to the two circular through holes (311) of each sealing plate (3) are respectively opened on both sides of the placement groove (211) at the top of the bottom plate (2). A positioning pin (213) is fixedly arranged in each positioning pin hole, a pressure riveting stud (214) is fixedly arranged in each nut sleeve hole, each positioning pin (213) and pressure riveting stud (214) is inserted into a circular through hole (311) of the corresponding sealing plate (3), and a bolt (4) is arranged in a circular through hole (311) of each sealing plate (3) corresponding to the pressure riveting stud (214), and each bolt (4) is threadedly connected to the corresponding pressure riveting stud (214); A circular groove (312) is provided at the bottom of each sealing plate (3), each circular groove (312) is cocentric with its corresponding air hole (111), and a sealing O-ring (313) is provided in each groove (312).

2. A ceramic manipulator fully loaded test fixture according to claim 1, characterized in that: The positioning pin (213) is a pressure riveted pin.

3. A ceramic manipulator fully loaded test fixture according to claim 1, characterized in that: The depth of the placement groove (211) is one third of the thickness of the ceramic manipulator (1), the width of the exhaust groove (212) is two thirds of the width of the placement groove (211), and the exhaust groove (212) is centrally located in the placement groove (211).

4. A ceramic manipulator fully loaded test fixture according to claim 1, characterized in that: Each of the positioning pins (213) protrudes from the top of its corresponding sealing plate (3), and the top of each of the pressure riveting studs (214) is located at one third of the corresponding sealing plate (3) from bottom to top.

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