High-precision liquid feeding device in semiconductor industry

Abstract

The utility model discloses a high-precision liquid feeding device in the semiconductor industry. The high-precision liquid feeding device comprises a liquid ton barrel, a weighing platform, a gettering filter, a screw pump, a mass flow meter and an electric proportioning valve, the liquid ton barrel is placed on a weighing platform, a weighing sensor is arranged on the weighing platform, the weighing sensor is connected with a weighing sensor controller, a liquid outlet of the liquid ton barrel is connected with an air eliminating filter through a pipeline, the air eliminating filter is connected with an inlet of a screw pump through a pipeline, and the screw pump is connected with the weighing sensor controller through a pipeline. An outlet of the screw pump is connected with the tank body through a pipeline, and the mass flow meter and the electric proportioning valve are sequentially arranged on the pipeline between the screw pump and the tank body. The screw pump is selected and used, and the screw pump can convey high-viscosity and high-solid-content materials and is high in adaptability to media; weighing feeding and mass flow meter metering are adopted, the two measuring modes verify each other, the situation that due to the fact that the sensor is damaged and errors become large, the feeding precision is not enough is prevented, and the feeding precision is high.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid feeding, in particular to a high-precision liquid feeding device in the semiconductor industry. Background Art

[0002] Liquid feeding refers to the process of transporting liquid raw materials or products to the target location, involving multiple links such as liquid storage, transportation, metering and control. Liquid feeding technology is widely used in chemical, pharmaceutical, food, beverage, automobile manufacturing, battery manufacturing, automated production and other fields to achieve automatic feeding, precise metering and automated control of liquid materials, and improve production efficiency and product quality. The development trends of liquid feeding technology include: intelligence, precision, automation, green environmental protection, safety and reliability. In the future, liquid feeding technology will continue to innovate and improve to meet the needs of different industries and fields. According to the characteristics of liquids, the problems that liquid feeding devices need to solve are: (1) high liquid viscosity; (2) high feeding accuracy requirements; (3) fully automatic feeding control. Utility Model Content

[0003] The present application provides a high-precision liquid feeding device for the semiconductor industry to solve the problems of high liquid viscosity, high feeding accuracy requirements and how to achieve fully automatic feeding control in liquid feeding.

[0004] In an embodiment of the present application, a high-precision liquid feeding device for the semiconductor industry is provided, the device comprising a liquid ton barrel, a weighing platform, a degassing filter, a screw pump, a mass flow meter and an electric proportional control valve;

[0005] The liquid ton barrel is placed on a weighing platform, a weighing sensor is arranged on the weighing platform, the weighing sensor is connected to a weighing sensor controller, the liquid outlet of the liquid ton barrel is connected to a degassing filter through a pipeline, the degassing filter is connected to an inlet of a screw pump through a pipeline, the outlet of the screw pump is connected to a tank body through a pipeline, and the mass flow meter and the electric proportional regulating valve are sequentially arranged on the pipeline between the screw pump and the tank body.

[0006] Furthermore, a ton barrel pallet is arranged under the liquid ton barrel.

[0007] Furthermore, the mass flow meter is connected to a PLC controller.

[0008] Furthermore, the electric proportional control valve is connected to a PLC controller.

[0009] Furthermore, an electric ball valve is provided on the pipeline between the degassing filter and the inlet of the screw pump.

[0010] The present application provides a high-precision liquid feeding device for the semiconductor industry, the device includes a liquid barrel, a weighing platform, a degassing filter, a screw pump, a mass flow meter and an electric proportional control valve; the liquid barrel is placed on the weighing platform, a weighing sensor is arranged on the weighing platform, the weighing sensor is connected to the weighing sensor controller, the liquid outlet of the liquid barrel is connected to the degassing filter through a pipeline, the degassing filter is connected to the inlet of the screw pump through a pipeline, the outlet of the screw pump is connected to the tank body through a pipeline, and the mass flow meter and the electric proportional control valve are arranged on the pipeline between the screw pump and the tank body in sequence. The present application uses a screw pump, which can transport high viscosity and high solid content and has strong adaptability to the medium; weighing feeding and mass flow meter measurement are adopted, and the two measurement methods are mutually verified to prevent the sensor from being damaged and the error from becoming larger, thereby causing insufficient feeding accuracy, and the feeding accuracy is high; automatic feeding can be achieved by controlling the operation of components such as pumps, control valves and sensors. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 A structural diagram of a high-precision liquid feeding device for the semiconductor industry provided by one embodiment of the utility model;

[0012] Figure 2 Another structural diagram of a high-precision liquid feeding device for the semiconductor industry provided by an embodiment of the utility model.

[0013] In the figure: liquid ton barrel 1, weighing sensor 2, weighing platform 3, degassing filter 4, ton barrel pallet 5, screw pump 6, electric proportional control valve 7, mass flow meter 8, weighing sensor controller 9. DETAILED DESCRIPTION

[0014] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0015] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0016] The first embodiment of the utility model provides a high-precision liquid feeding device for the semiconductor industry, which includes a liquid barrel 1, a weighing platform 3, a degassing filter 4, a screw pump 6, an electric proportional control valve 7 and a mass flow meter 8.

[0017] The liquid ton barrel 1 is placed on the weighing platform 3. In this embodiment, a ton barrel pallet 5 is arranged below the liquid ton barrel 1. A weighing sensor 2 is arranged on the weighing platform 3, and the weighing sensor 2 is connected to the weighing sensor controller 9. The liquid outlet of the liquid ton barrel 1 is connected to the degassing filter 4 through a pipeline, and the degassing filter 4 is connected to the inlet of the screw pump 6 through a pipeline. The outlet of the screw pump 6 is connected to the tank body through a pipeline, and the mass flow meter 8 and the electric proportional control valve 7 are arranged on the pipeline between the screw pump 6 and the tank body in sequence. In this embodiment, the mass flow meter 8 is connected to the PLC controller. The electric proportional control valve 7 is connected to the PLC controller. An electric ball valve 9 is arranged on the pipeline between the degassing filter 4 and the inlet of the screw pump 6.

[0018] This embodiment proposes a high-precision liquid feeding device for the semiconductor industry, and the liquid feeding process is as follows:

[0019] Connect the pipeline and open the electric proportional control valve 7;

[0020] The screw pump 6 is started, and the liquid passes through the degassing filter 4 to filter out the gas in the liquid; and then passes through the mass flow meter 8 to enter the tank;

[0021] During the feeding process, the liquid feeding mass is first set, and the feeding value is determined according to the mass change of the weighing platform 3. When 90% of the feeding is completed, the electric proportional regulating valve 7 is adjusted to be closed, the speed of the pump is reduced, the flow rate is reduced, and the feeding accuracy is increased;

[0022] The degassing filter 4 filters the gas in the liquid to prevent the gas from entering the mass flow meter 8, which would increase the measurement error of the mass flow meter 8. The system then performs calibration based on the value of the mass flow meter 8 and the value change of the weighing platform 3 to achieve high-precision liquid loading. This also prevents damage to the weighing sensor module or large errors that would cause changes in the accuracy of liquid loading.

[0023] The above specific examples are used to illustrate the present invention, which are only used to help understand the present invention and are not intended to limit the present invention. For those skilled in the art of the present invention, some simple deductions, deformations or substitutions can be made based on the idea of ​​the present invention.

Claims

1. A high-precision liquid feeding device for the semiconductor industry, characterized in that: The device comprises a liquid ton barrel, a weighing platform, a degassing filter, a screw pump, a mass flow meter and an electric proportional regulating valve; The liquid ton barrel is placed on a weighing platform, a weighing sensor is arranged on the weighing platform, the weighing sensor is connected to a weighing sensor controller, the liquid outlet of the liquid ton barrel is connected to a degassing filter through a pipeline, the degassing filter is connected to an inlet of a screw pump through a pipeline, the outlet of the screw pump is connected to a tank body through a pipeline, and the mass flow meter and the electric proportional regulating valve are sequentially arranged on the pipeline between the screw pump and the tank body.

2. A high-precision liquid feeding device for the semiconductor industry as claimed in claim 1, characterized in that: A ton barrel pallet is arranged below the liquid ton barrel.

3. A high-precision liquid feeding device for the semiconductor industry as claimed in claim 1, characterized in that: The mass flow meter is connected to a PLC controller.

4. A high-precision liquid feeding device for the semiconductor industry as claimed in claim 1, characterized in that: The electric proportional regulating valve is connected to a PLC controller.

5. A high-precision liquid feeding device for the semiconductor industry as claimed in claim 1, characterized in that: An electric ball valve is arranged on the pipeline between the degassing filter and the inlet of the screw pump.

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