Polycrystalline silicon reduction reaction furnace

Abstract

The utility model discloses a polycrystalline silicon reduction reaction furnace which comprises a base, an air inlet pipe penetrates through the bottom end of the base, the top end of the air inlet pipe is sleeved with an aeration plate, a plurality of silicon core rods are fixedly installed at the top end of the base, the tops of the silicon core rods are covered with a furnace cover, and a rotating motor is fixedly installed at the top end of the furnace cover. A rotating shaft is clamped to the output end of the rotating motor, scraping strips are arranged on the inner side of the furnace cover, blades are arranged on the top of the inner side of the furnace cover, a circulating pipe penetrates through one side of the top end of the furnace cover, and the bottom end of the circulating pipe is sleeved with a clamping plate. By arranging a series of structures, the accumulation of silicon dust and various pollutants on the inner wall of the furnace cover can be effectively reduced, and the temperature in the furnace can be uniformly distributed, so that the adverse effect of the furnace cover on the temperature distribution in the furnace is reduced, and the content of dust impurities and pollutants in gas is reduced; and the adverse effect on the quality of the polycrystalline silicon is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon production equipment, in particular to a polysilicon reduction reaction furnace. Background Art

[0002] The polysilicon reduction reactor is the core equipment in the crystalline silicon preparation process. Usually, a certain ratio of trichlorosilane and hydrogen is sprayed into the mixer from the bottom air inlet, and a gas phase reduction reaction occurs in the reduction furnace. The silicon generated by the reaction is directly deposited on the surface of the silicon core in the furnace. As the reaction continues, the silicon rods continue to grow and eventually meet the product requirements.

[0003] The reduction furnace bell of the existing polysilicon reduction reactor plays a key role in protection and reaction. However, long-term use will cause silicon dust, reactants and other pollutants to accumulate on the inner wall of the bell. If these pollutants are not cleaned in time, they will easily affect the temperature distribution in the furnace. In addition, when the existing reduction reactor is in use, the gas that has been introduced into the furnace but not completely reacted is usually re-introduced into the furnace for reaction after being treated. Since the incompletely reacted gas will be mixed with impurities such as dust or pollutants in the furnace, and the mixed dust and pollutants are not removed during the treatment process, more and more impurities are present in the furnace, and they are easily attached to the silicon core, which is more likely to have an adverse effect on the quality of the generated polysilicon. Utility Model Content

[0004] The purpose of the utility model is to provide a polysilicon reduction reaction furnace to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a polysilicon reduction reaction furnace, comprising a base, an air inlet pipe passing through the bottom end of the base, an aeration plate sleeved on the top end of the air inlet pipe, a plurality of silicon core rods fixedly installed on the top end of the base, a furnace hood provided on the top cover of the silicon core rods, a rotating motor fixedly installed on the top end of the furnace hood, a rotating shaft engaged with the output end of the rotating motor, a scraper strip provided on the inner side of the furnace hood, a blade provided on the top of the inner side of the furnace hood, a circulation pipe passing through one side of the top end of the furnace hood, a clamping plate sleeved on the bottom end of the clamping plate, a sleeve provided on the bottom of the sleeve, a filter screen engaged with the inner wall of the sleeve, and a vertical pipe provided at the bottom of the sleeve.

[0006] Preferably, the vertical pipe is connected through one end of the air intake pipe, and a check valve is installed at the junction of the vertical pipe and the air intake pipe.

[0007] Preferably, a slide plate is provided on the top of the vertical pipe, and a support plate is fixedly connected to the outer wall of the top of the vertical pipe.

[0008] Preferably, the outer wall movable sleeve of the vertical tube is provided with a spring, the top and bottom ends of the spring are respectively fixedly connected to the bottom end of the slide plate and the top end of the support plate, and the slide plate is connected to the vertical tube movable sleeve via the spring and the support plate.

[0009] Preferably, a bottom end of the clamping plate and a top end of the slide plate are both provided with clamping grooves, and the sleeve is movably engaged with the clamping plate and the slide plate respectively through the clamping grooves.

[0010] Preferably, the sleeve is movably connected to the vertical pipe via a slide plate.

[0011] Preferably, the scraper strip is snap-connected to the middle portion of the rotating shaft, the blade is snap-connected to the bottom end of the rotating shaft, and both the scraper strip and the blade are movably connected to the furnace hood via the rotating shaft.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. The polysilicon reduction reaction furnace can timely scrape the silicon dust accumulated on the inner wall of the furnace hood by means of the rotating shaft and the scraper, thereby reducing the accumulation of silicon dust and various pollutants on the inner wall of the furnace hood and reducing the adverse effect of the furnace hood on the temperature distribution in the furnace. In combination with the blades, the blades can blow the heat accumulated on the top of the furnace hood to the bottom, so that the heat in the furnace can form an internal circulation, and the temperature in the furnace can be evenly distributed, thereby further reducing the adverse effect of the furnace hood on the temperature distribution in the furnace.

[0014] 2. The polysilicon reduction reactor uses a circulation pipe, a sleeve, a filter and a vertical pipe to allow the recycled gas to be initially filtered through the filter in the sleeve when it is output from the furnace, so that the dust impurities and pollutants mixed in the gas can be adsorbed on the filter, thereby reducing the content of dust impurities and pollutants in the gas, making it difficult for the gas to re-introduce the original impurities when it enters the furnace again, thereby avoiding the situation where more and more impurities are in the reactor and reducing the adverse effects on the quality of polysilicon. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the sleeve and filter structure of the utility model;

[0017] Figure 3 This is a schematic diagram of the scraper strip and circulation pipe structure of the utility model;

[0018] Figure 4 This is a schematic diagram of the structure of the clamping plate and the furnace cover of the utility model.

[0019] In the figure: 1. furnace hood; 2. rotating motor; 3. circulation pipe; 4. clamping plate; 5. sleeve; 6. slide plate; 7. spring; 8. support plate; 9. vertical pipe; 10. air inlet pipe; 11. base; 12. scraper; 13. blade; 14. rotating shaft; 15. silicon core rod; 16. aeration plate; 17. filter; 18. check valve; 19. clamping groove. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0022] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] like Figures 1 to 4As shown, the polysilicon reduction reactor of this embodiment includes a base 11, and electrodes for heating silicon core rods 15 and other electrical components required to maintain the normal operation of the reduction reactor are installed inside the base 11. An air inlet pipe 10 runs through the bottom end of the base 11. The function of the air inlet pipe 10 is to pass a mixed gas of trichlorosilane and hydrogen so that the mixed gas can undergo a gas phase reduction reaction in the furnace, thereby generating polysilicon and attaching it to the silicon core rods 15. An aeration plate 16 is sleeved on the top of the air inlet pipe 10, and a plurality of holes are opened on the aeration plate 16, so that the mixed gas introduced from the base 11 can be dispersed when entering the furnace cover 1, thereby facilitating mixing. The gas is evenly distributed in the furnace cover 1 for reaction. A plurality of silicon core rods 15 are fixedly installed on the top of the base 11. The function of the silicon core rods 15 is to collect the generated polysilicon. The top cover of the silicon core rods 15 is provided with a furnace cover 1. A rotating motor 2 is fixedly installed on the top of the furnace cover 1. A rotating shaft 14 is engaged with the output end of the rotating motor 2. The rotating shaft 14 can be driven to rotate by the energized rotating motor 2, so that the rotating shaft 14 drives the scraper 12 and the blade 13. A scraper 12 is provided on the inner side of the furnace cover 1. The cross section of the scraper 12 is an inverted "U" shape, so that one side wall of the scraper 12 can fit the inner wall of the furnace cover 1. When the scraper 12 rotates, it can The silicon dust and various impurities attached to the inside of the furnace hood 1 are quickly scraped off, thereby reducing the dust impurities attached to the inner wall of the furnace hood 1 and reducing the adverse effects of the furnace hood 1 on the temperature distribution in the furnace. The top of the inner side of the furnace hood 1 is provided with blades 13. The blades 13 rotate at the top of the inner side of the furnace hood 1 under the drive of the rotating shaft 14, so that the heat at the top of the furnace hood 1 can be blown to the bottom, so that the heat can circulate in the furnace hood 1, thereby facilitating the uniform distribution of the temperature in the furnace hood 1. A circulation pipe 3 is passed through one side of the top of the furnace hood 1. The function of the circulation pipe 3 is to pass the incompletely reacted gas out of the furnace hood 1 for further treatment. The bottom end of the circulation pipe 3 is sleeved with The card plate 4 has a diameter the same as that of the sleeve 5. The bottom of the card plate 4 is provided with a sleeve 5. The top and bottom of the sleeve 5 are not closed, so that the gas entering from the circulation pipe 3 can smoothly pass through and out of the sleeve 5, and then enter the vertical pipe 9. The inner wall of the sleeve 5 is engaged with a filter screen 17. The filter screen 17 is made of porous carbon material and can absorb impurities such as dust particles in the gas passing into the sleeve 5, thereby filtering the unreacted gas. The bottom of the sleeve 5 is provided with a vertical pipe 9. The function of the vertical pipe 9 is to allow the treated gas to re-enter the air inlet pipe 10, and then enter the reactor through the air inlet pipe 10 for reaction.

[0024] Specifically, the vertical pipe 9 is connected with one end of the intake pipe 10, and a check valve 18 is installed at the intersection of the vertical pipe 9 and the intake pipe 10. The check valve 18 prevents unreacted gas in the intake pipe 10 from entering the vertical pipe 9, thereby reducing interference with the outflow of gas from the vertical pipe 9.

[0025] Furthermore, a slide plate 6 is provided at the top of the vertical pipe 9, and a support plate 8 is fixedly connected to the outer wall of the top of the vertical pipe 9. The slide plate 6 can support the bottom of the sleeve 5 so that the sleeve 5 can be temporarily fixed between the circulation pipe 3 and the vertical pipe 9, thereby realizing the connection between the sleeve 5 and the circulation pipe 3 and the vertical pipe 9.

[0026] Furthermore, a spring 7 is movably sleeved on the outer wall of the vertical pipe 9, and the top and bottom ends of the spring 7 are fixedly connected to the bottom end of the slide plate 6 and the top end of the support plate 8 respectively. The slide plate 6 is movably sleeved and connected to the vertical pipe 9 through the spring 7 and the support plate 8. The function of the spring 7 is to facilitate the removal of the sleeve 5 from between the circulation pipe 3 and the vertical pipe 9, thereby facilitating the cleaning and replacement of the filter screen 17 in the sleeve 5 to ensure the filtering effect of the filter screen 17.

[0027] Furthermore, a slot 19 is provided at the bottom of the card plate 4 and the top of the slide plate 6, and the sleeve 5 is movably engaged with the card plate 4 and the slide plate 6 respectively through the slot 19. The sleeve 5 can be more stably connected with the card plate 4 and the slide plate 6 through the slot 19.

[0028] Furthermore, the sleeve 5 is movably connected to the vertical pipe 9 through the slide plate 6. When the slide plate 6 is pressed down, the top of the sleeve 5 will be separated from the groove 19 at the bottom end of the clamping plate 4, thereby realizing the separation of the sleeve 5 and the circulation pipe 3.

[0029] Furthermore, the scraper bar 12 is snap-connected to the middle part of the rotating shaft 14, and the blade 13 is snap-connected to the bottom end of the rotating shaft 14. The scraper bar 12 and the blade 13 are movably connected to the furnace hood 1 through the rotating shaft 14. The scraper bar 12 is driven by the rotating shaft 14 to scrape along the inner wall of the furnace hood 1, so that silicon dust and various impurities are not easily accumulated on the inner wall of the furnace hood 1. The blade 13 is driven by the rotating shaft 14 to evenly distribute the heat in the furnace hood 1.

[0030] The method of using the present embodiment is as follows: when using the polysilicon reduction reactor, the reactor is connected to an external power supply, and then the electrodes in the reactor heat the silicon core rod 15, so that the temperature in the furnace is increased, and then a mixture of trichlorosilane and hydrogen is introduced into the air inlet pipe 10, and then the mixture enters the furnace cover 1 through the aeration plate 16, and a gas phase reduction reaction occurs in the furnace cover 1, and the generated silicon crystals will adhere to the silicon core rod 15. While the reaction is in progress, the rotating motor 2 needs to be started, so that the rotating motor 2 drives the rotating shaft 14 to rotate, and drives the scraper 12 to fit the furnace cover 1. The inner wall is scraped so that the silicon dust and pollutants accumulated on the inner wall of the furnace hood 1 are quickly separated from the inner wall of the furnace hood 1. At the same time, the blades 13 blow the heat accumulated on the top of the inner side of the furnace hood 1 to the bottom of the inner side of the furnace hood 1, so that the temperature distribution in the furnace hood 1 is uniform, and the incompletely reacted gas will enter the sleeve 5 through the circulation pipe 3. When passing through the filter 17 on the inner side of the sleeve 5, the dust and pollutants contained in the gas will be adsorbed on the filter 17, and the gas will pass through the sleeve 5 into the vertical pipe 9, and then pass through the check valve 18 between the vertical pipe 9 and the air inlet pipe 10 to re-enter the air inlet pipe 10.

[0031] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A polysilicon reduction reactor, comprising a base (11), characterized in that: An air inlet pipe (10) passes through the bottom end of the base (11), an aeration plate (16) is sleeved on the top end of the air inlet pipe (10), a plurality of silicon core rods (15) are fixedly mounted on the top end of the base (11), a furnace cover (1) is provided on the top cover of the silicon core rods (15), a rotating motor (2) is fixedly mounted on the top end of the furnace cover (1), a rotating shaft (14) is engaged with the output end of the rotating motor (2), a scraper (12) is provided on the inner side of the furnace cover (1), a blade (13) is provided on the top of the inner side of the furnace cover (1), a circulation pipe (3) passes through one side of the top end of the furnace cover (1), a clamping plate (4) is sleeved on the bottom end of the circulation pipe (3), a sleeve (5) is provided at the bottom of the clamping plate (4), a filter screen (17) is engaged with the inner wall of the sleeve (5), and a vertical pipe (9) is provided at the bottom of the sleeve (5).

2. A polysilicon reduction reactor according to claim 1, characterized in that: The vertical pipe (9) is connected to one end of the air intake pipe (10) through a through hole, and a check valve (18) is installed at the intersection of the vertical pipe (9) and the air intake pipe (10).

3. The polysilicon reduction reactor according to claim 1, characterized in that: A slide plate (6) is provided on the top of the vertical pipe (9), and a support plate (8) is fixedly connected to the outer wall of the top of the vertical pipe (9).

4. The polysilicon reduction reactor according to claim 3, characterized in that: The outer wall of the vertical tube (9) is movably sleeved with a spring (7), the top and bottom ends of the spring (7) are respectively fixedly connected to the bottom end of the slide plate (6) and the top end of the support plate (8), and the slide plate (6) is movably sleeved with the vertical tube (9) via the spring (7) and the support plate (8).

5. The polysilicon reduction reactor according to claim 4, characterized in that: A clamping groove (19) is provided at the bottom end of the clamping plate (4) and the top end of the slide plate (6), and the sleeve (5) is movably clamped and connected to the clamping plate (4) and the slide plate (6) respectively through the clamping groove (19).

6. The polysilicon reduction reactor according to claim 5, characterized in that: The sleeve (5) is movably connected to the vertical pipe (9) via a slide plate (6).

7. The polysilicon reduction reactor according to claim 1, characterized in that: The scraper strip (12) is snap-fitted to the middle of the rotating shaft (14), the blade (13) is snap-fitted to the bottom end of the rotating shaft (14), and both the scraper strip (12) and the blade (13) are movably connected to the furnace cover (1) via the rotating shaft (14).

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