Magnetron sputtering cylindrical target shielding device and magnetron sputtering coating machine

Abstract

The utility model discloses a magnetron sputtering cylindrical target shielding device and a magnetron sputtering coating machine, and the device comprises a first fluted disc which is provided with a first shielding cover; the second fluted disc is provided with a second shielding cover, the second fluted disc is matched and meshed with the first fluted disc, and the first shielding cover and the second shielding cover are located on the same side of the first fluted disc and the second fluted disc; the driving mechanism is connected with the second fluted disc and drives the first fluted disc to rotate reversely when driving the second fluted disc to rotate; when the driving mechanism drives the second fluted disc to rotate towards a first direction, the first shielding cover and the second shielding cover are close to each other; when the driving mechanism drives the second fluted disc to rotate in the second direction, the first shielding cover and the second shielding cover are away from each other. According to the utility model, the two shielding covers can be folded when the cylindrical target is cleaned, so that the cylindrical target is separated from a product to be coated, the product pollution in the target cleaning process is avoided, and the coating quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, and further relates to a magnetron sputtering cylindrical target shielding device and a magnetron sputtering coating machine. Background Art

[0002] At present, magnetron sputtering coating technology is widely used due to its advantages such as simple processing, convenient installation, dense coating layer, high bonding strength, and long-term mass production. The working principle of magnetron sputtering is that electrons collide with argon atoms in the process of flying toward the substrate under the action of the electric field E, causing them to ionize and produce Ar positive ions and new electrons; new electrons fly toward the substrate, and Ar ions are accelerated to fly toward the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to be sputtered. Among the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film.

[0003] The coating machine can automatically and continuously perform low vacuum exhaust, arc ion bombardment pre-treatment, high vacuum exhaust, aluminum evaporation, anti-oxidation film coating and other processes in a vacuum. Among them, the product hanger to be coated is fixed on the tooling plate of the rotating cage. The product hanger can rotate on its own and co-rotate, and the rotation speed can be adjusted. After the coating program is started, the sputtered atoms escaping from the target material can be directly sputtered onto the product to be coated on the outer wall of the rotating cage, so that a film can be deposited on the surface of the product to be coated. However, the magnetron sputtering target will absorb impurities in the air, so it is necessary to wash the target before coating, but the target washing process is likely to cause product contamination and affect the coating quality.

[0004] Therefore, it is necessary to design a magnetron sputtering cylindrical target shielding device and a magnetron sputtering coating machine to solve the above problems. Summary of the invention

[0005] In view of the above technical problems, the purpose of the utility model is to provide a magnetron sputtering cylindrical target shielding device and a magnetron sputtering coating machine, which can close the two shielding covers when cleaning the cylindrical target to separate the cylindrical target from the product to be coated, thereby avoiding product contamination caused by the target washing process and improving the coating quality.

[0006] In order to achieve the above object, the utility model provides a magnetron sputtering cylindrical target shielding device, comprising:

[0007] a first toothed disc, wherein a first shielding cover is disposed on the first toothed disc;

[0008] a second toothed disc, on which a second shielding cover is disposed, the second toothed disc is adapted to mesh with the first toothed disc, and the first shielding cover and the second shielding cover are located on the same side of the first toothed disc and the second toothed disc;

[0009] A driving mechanism connected to the second toothed disc, wherein when the driving mechanism drives the second toothed disc to rotate, the second toothed disc drives the first toothed disc to rotate in the opposite direction;

[0010] When the driving mechanism drives the second toothed disc to rotate in the first direction, the first shielding cover and the second shielding cover approach each other;

[0011] When the driving mechanism drives the second toothed disc to rotate in the second direction, the first shielding cover and the second shielding cover move away from each other.

[0012] In some embodiments, a transmission ratio between the first toothed disc and the second toothed disc is 1:1, and a diameter of the first toothed disc is the same as a diameter of the second toothed disc.

[0013] In some embodiments, the first toothed disc and the second toothed disc have the same structure.

[0014] In some embodiments, the first shielding cover is an arc-shaped cover, and the bottom of the first shielding cover is fixed on the first toothed disc;

[0015] The second shielding cover is an arc-shaped cover, and the bottom of the second shielding cover is fixed on the second gear disc.

[0016] In some embodiments, the diameter of the first shielding cover is substantially the same as the diameter of the first toothed disc, and the circumference of the arc-shaped cross section of the first shielding cover is 1 / 4-1 / 2 of the circumference of the first toothed disc;

[0017] The diameter of the second shielding cover is substantially the same as the diameter of the second toothed disc, and the circumference of the arc-shaped cross section of the second shielding cover is 1 / 4-1 / 2 of the circumference of the second toothed disc.

[0018] In some embodiments, the driving mechanism comprises:

[0019] A transmission shaft, wherein a first gear and a second gear are respectively disposed at both ends of the transmission shaft, and the first gear is adapted to mesh with the second gear disc;

[0020] A driving motor, wherein a driving gear is disposed on a driving shaft of the driving motor, and the driving gear and the second gear are located in the same plane and separated by a preset distance;

[0021] A transmission chain is adapted to be mounted on the driving gear and the second gear, so that the driving motor can drive the transmission shaft to rotate through the transmission chain.

[0022] In some embodiments, the driving mechanism further comprises:

[0023] A mounting plate is used to be fixed on the magnetron sputtering coating machine, the mounting plate is located on one side of the transmission chain, a first sensor and a second sensor arranged at intervals are arranged on the mounting plate, a sensing bar is arranged on the transmission chain, the sensing bar is located between the first sensor and the second sensor, and when the sensing bar moves to the first sensor or the second sensor, the driving motor stops working.

[0024] In some embodiments, the driving mechanism further comprises:

[0025] A mounting seat, used to be fixed on a magnetron sputtering coating machine, wherein the mounting plate is fixed on one side of the mounting seat;

[0026] The driving motor is fixed with a connecting plate, one end of the connecting plate is provided with a U-shaped groove, and the other end of the connecting plate is provided with a connecting hole;

[0027] The mounting seat is provided with a mounting hole and a connecting block, the connecting block is provided with a through hole, the first bolt passes through the mounting hole, the U-shaped groove and is threadedly connected with the first nut in sequence, the second bolt passes through the connecting hole, the through hole and is threadedly connected with the second nut in sequence, so as to fix the connecting plate on the mounting seat, wherein the first bolt and the second bolt are vertically arranged.

[0028] In some embodiments, the driving mechanism further comprises:

[0029] A shaft sleeve, wherein a bearing is arranged in the shaft sleeve, the bearing sleeve is arranged on the transmission shaft, and the shaft sleeve is used to be fixed on the magnetron sputtering coating machine;

[0030] The first gear and the second gear plate are located on the same plane, and the first gear is located on a side of the second gear plate away from the first gear plate.

[0031] According to another aspect of the utility model, the utility model further provides a magnetron sputtering coating machine, comprising the magnetron sputtering cylindrical target shielding device described in any one of the above, and further comprising:

[0032] Cylindrical target;

[0033] A tooling plate, used for fixing the product to be coated, wherein the tooling plate is spaced apart from the cylindrical target;

[0034] The first shielding cover and the second shielding cover are arranged between the cylindrical target and the tooling plate;

[0035] When the first shielding cover and the second shielding cover are close to each other to a preset position, the cylindrical target and the tooling plate are separated;

[0036] When the first shielding cover and the second shielding cover are moved away from each other to a preset position, there is no shielding between the cylindrical target and the tooling plate.

[0037] Compared with the prior art, the magnetron sputtering cylindrical target shielding device and magnetron sputtering coating machine provided by the utility model have the following beneficial effects:

[0038] In the utility model, a first shielding cover and a second shielding cover that can be opened and closed are arranged between the cylindrical target and the product to be coated. When the product needs to be coated, the driving mechanism drives the first shielding cover and the second shielding cover to separate so as to open the cylindrical target and the product to be coated. When the cylindrical target needs to be cleaned, the driving mechanism drives the first shielding cover and the second shielding cover to close so as to separate the cylindrical target from the product to be coated, thereby avoiding product contamination caused by the target washing process and improving the coating quality. The driving mechanism adopts a chain to drive the transmission shaft to achieve driving, and the driving motor and the chain mechanism can be installed on the outside of the bottom of the frame without occupying the internal space, while avoiding impurities generated by the driving mechanism during operation to contaminate the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The preferred implementation modes will be described below in a clear and understandable manner with reference to the accompanying drawings to further illustrate the above-mentioned characteristics, technical features, advantages and implementation methods of the present utility model.

[0040] Figure 1 It is a structural schematic diagram of a magnetron sputtering cylindrical target shielding device according to a preferred embodiment of the utility model;

[0041] Figure 2 It is a partial structural diagram of a magnetron sputtering cylindrical target shielding device according to a preferred embodiment of the utility model;

[0042] Figure 3 It is a front view of a magnetron sputtering cylindrical target shielding device according to a preferred embodiment of the utility model;

[0043] Figure 4 It is a side view of a magnetron sputtering cylindrical target shielding device according to a preferred embodiment of the utility model;

[0044] Figure 5 It is a structural schematic diagram of a driving mechanism of a preferred embodiment of the utility model;

[0045] Figure 6 It is a structural schematic diagram of the driving mechanism of the preferred embodiment of the utility model from another perspective.

[0046] Description of Figure Numbers:

[0047] First toothed disc 1, first shielding cover 11, second toothed disc 2, second shielding cover 21, driving mechanism 3, transmission shaft 31, first gear 311, second gear 312, driving motor 32, driving gear 321, connecting plate 322, U-shaped groove 323, transmission chain 33, induction strip 331, mounting plate 34, first sensor 341, second sensor 342, mounting seat 35, connecting block 351, first bolt 352, first nut 353, second bolt 354, second nut 355, sleeve 36. DETAILED DESCRIPTION

[0048] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the specific implementation methods of the utility model will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings and other implementation methods can be obtained based on these drawings without creative work.

[0049] In order to simplify the drawings, only the parts related to the utility model are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically drawn or marked. In this article, "one" not only means "only one", but also means "more than one".

[0050] It should be further understood that the term “and / or” used in the specification and appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0051] In this article, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0052] In addition, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0053] In one embodiment, the reference specification Figure 1 , Figure 2The utility model provides a magnetron sputtering cylindrical target shielding device, comprising: a first toothed disc 1, a second toothed disc 2 and a driving mechanism 3. A first shielding cover 11 is arranged on the first toothed disc 1; a second shielding cover 21 is arranged on the second toothed disc 2, the second toothed disc 2 is adapted to mesh with the first toothed disc 1, and the first shielding cover 11 and the second shielding cover 21 are located on the same side of the first toothed disc 1 and the second toothed disc 2. The driving mechanism 3 is connected to the second toothed disc 2. When the driving mechanism 3 drives the second toothed disc 2 to rotate, the second toothed disc 2 drives the first toothed disc 1 to rotate in the opposite direction. When the driving mechanism 3 drives the second toothed disc 2 to rotate in the first direction, the first shielding cover 11 and the second shielding cover 21 are close to each other; when the driving mechanism 3 drives the second toothed disc 2 to rotate in the second direction, the first shielding cover 11 and the second shielding cover 21 are away from each other.

[0054] Specifically, Figure 2 As shown, when the driving mechanism 3 drives the second toothed disc 2 to rotate counterclockwise, the second toothed disc 2 drives the first toothed disc 1 to rotate clockwise, and the first shielding cover 11 and the second shielding cover 21 approach each other until they are closed; when the driving mechanism 3 drives the second toothed disc 2 to rotate clockwise, the second toothed disc 2 drives the first toothed disc 1 to rotate counterclockwise, and the first shielding cover 11 and the second shielding cover 21 move away from each other until they are fully open. Of course, the driving mechanism 3 can also be connected to the first toothed disc 1, and the second toothed disc 2 can be driven to rotate by driving the first toothed disc 1 to rotate. The driving method is similar to the above, and no further description is given here.

[0055] In the present embodiment, a first shielding cover 11 and a second shielding cover 21 that can be opened and closed are provided between the cylindrical target and the product to be coated. When the product needs to be coated, the driving mechanism 3 drives the first shielding cover 11 and the second shielding cover 21 to separate so as to open the space between the cylindrical target and the product to be coated. When the cylindrical target needs to be cleaned, the driving mechanism 3 drives the first shielding cover 11 and the second shielding cover 21 to close so as to separate the cylindrical target from the product to be coated, thereby avoiding product contamination caused by the target washing process and improving the coating quality.

[0056] In one embodiment, the reference specification Figure 1 , Figure 2 The transmission ratio of the first toothed disc 1 to the second toothed disc 2 is 1:1, and the diameter of the first toothed disc 1 is the same as the diameter of the second toothed disc 2. This structure can keep the opening and closing of the first shielding cover 11 and the second shielding cover 21 symmetrical. Preferably, the first toothed disc 1 and the second toothed disc 2 have the same structure, so that the first toothed disc 1 and the second toothed disc 2 can be used interchangeably, and the types of required parts are reduced.

[0057] The first shielding cover 11 is an arc-shaped cover, and the bottom of the first shielding cover 11 is fixed on the first toothed disc 1; the second shielding cover 21 is an arc-shaped cover, and the bottom of the second shielding cover 21 is fixed on the second toothed disc 2. By setting the first shielding cover 11 and the second shielding cover 21 as arc-shaped covers, it is convenient to completely shield the cylindrical target.

[0058] Furthermore, the diameter of the first shielding cover 11 is substantially the same as the diameter of the first toothed disc 1, and the circumference of the arc-shaped cross-section of the first shielding cover 11 is 1 / 4-1 / 2 of the circumference of the first toothed disc 1, such as 1 / 3, etc.; the diameter of the second shielding cover 21 is substantially the same as the diameter of the second toothed disc 2, and the circumference of the arc-shaped cross-section of the second shielding cover 21 is 1 / 4-1 / 2 of the circumference of the second toothed disc 2, such as 1 / 3, etc.

[0059] In one embodiment, the reference specification Figures 3 to 6 The driving mechanism 3 includes: a transmission shaft 31, a driving motor 32 and a transmission chain 33. The first gear 311 and the second gear 312 are respectively provided at both ends of the transmission shaft 31. The first gear 311 is adapted to mesh with the second gear disc 2. The first gear 311 and the second gear disc 2 are located on the same plane, and the first gear 311 is located on the side of the second gear disc 2 away from the first gear disc 1. A driving gear 321 is provided on the driving shaft of the driving motor 32. The driving gear 321 and the second gear 312 are located on the same plane and are separated by a preset distance; the transmission chain 33 is adapted to be arranged on the driving gear 321 and the second gear 312, so that the driving motor 32 can drive the transmission shaft 31 to rotate through the transmission chain 33.

[0060] Furthermore, the driving mechanism also includes a sleeve 36, in which a bearing is arranged. The bearing sleeve is arranged on the transmission shaft 31, and the sleeve 36 is used to be fixed on the bottom of the frame of the magnetron sputtering coating machine, so that the transmission shaft 31 passes through the bottom of the frame and maintains a rotational connection with the bottom of the frame.

[0061] In this embodiment, the driving mechanism 3 uses a transmission chain 33 to drive the transmission shaft 31 to achieve driving. The driving motor 32 and the transmission chain 33 can be installed on the outside of the bottom of the frame without occupying the internal space, while avoiding the generation of impurities during operation of the driving mechanism to contaminate the product.

[0062] In one embodiment, the reference specification Figures 3 to 6The driving mechanism 3 also includes: a mounting plate 34, which is used to be fixed on the magnetron sputtering coating machine, and is located on one side of the transmission chain 33. The mounting plate 34 is provided with a first sensor 341 and a second sensor 342 arranged at intervals, and the transmission chain 33 is provided with a sensing bar 331, which is located between the first sensor 341 and the second sensor 342. When the sensing bar 331 moves to the first sensor 341 with the transmission chain 33, the first shielding cover 11 and the second shielding cover 21 are just closed, and the driving motor 32 stops working at this time; when the sensing bar 331 moves to the second sensor 342 with the transmission chain 33, the first shielding cover 11 and the second shielding cover 21 are completely opened, and the driving motor 32 stops working at this time. By setting the first sensor 341 and the second sensor 342, the opening and closing angles of the first shielding cover 11 and the second shielding cover 21 can be controlled, and the control accuracy is high.

[0063] Furthermore, the driving mechanism 3 also includes: a mounting seat 35, the mounting seat 35 is used to be fixed on the magnetron sputtering coating machine, and the mounting plate 34 is fixed on one side of the mounting seat 35. The driving motor 32 is fixed with a connecting plate 322, one end of the connecting plate 322 is provided with a U-shaped groove 323, and the other end of the connecting plate 322 is provided with a connecting hole. The mounting seat 35 is provided with a mounting hole and a connecting block 351, and the connecting block 351 is provided with a through hole. The first bolt 352 passes through the mounting hole and the U-shaped groove 323 in sequence and is threadedly connected with the first nut 353, and the second bolt 354 passes through the connecting hole and the through hole in sequence and is threadedly connected with the second nut 355 to fix the connecting plate 322 on the mounting seat 35, wherein the first bolt 352 and the second bolt 354 are arranged vertically. This structure can realize a stable connection between the driving motor 32 and the mounting seat 35, and is easy to install, can improve the shear resistance in the horizontal and vertical directions, and effectively avoid the situation where the bolts are broken due to excessive force.

[0064] According to another aspect of the utility model, the utility model further provides a magnetron sputtering coating machine, including the magnetron sputtering cylindrical target shielding device described in any one of the above items, and also including: a cylindrical target and a tooling plate, the tooling plate is used to fix the product to be coated, and the tooling plate and the cylindrical target are arranged at intervals; a first shielding cover 11 and a second shielding cover 21 are arranged between the cylindrical target and the tooling plate.

[0065] When the first shielding cover 11 and the second shielding cover 21 are close to each other to a preset position, the cylindrical target is separated from the tooling plate; when the first shielding cover 11 and the second shielding cover 21 are away from each other to a preset position, there is no shielding between the cylindrical target and the tooling plate.

[0066] In the present embodiment, a first shielding cover 11 and a second shielding cover 21 that can be opened and closed are provided between the cylindrical target and the tooling plate. When the product needs to be coated, the driving mechanism 3 drives the first shielding cover 11 and the second shielding cover 21 to separate so as to open the space between the cylindrical target and the product to be coated. When the cylindrical target needs to be cleaned, the driving mechanism 3 drives the first shielding cover 11 and the second shielding cover 21 to close so as to separate the cylindrical target from the product to be coated, thereby avoiding product contamination caused by the target washing process and improving the coating quality.

[0067] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0068] It should be noted that the above embodiments can be freely combined as needed. The above are only preferred implementations of the utility model. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the utility model, and these improvements and modifications should also be regarded as the protection scope of the utility model.

Claims

1. A magnetron sputtering cylindrical target shielding device, characterized in that: include: a first toothed disc, wherein a first shielding cover is disposed on the first toothed disc; a second toothed disc, on which a second shielding cover is disposed, the second toothed disc is adapted to mesh with the first toothed disc, and the first shielding cover and the second shielding cover are located on the same side of the first toothed disc and the second toothed disc; A driving mechanism connected to the second toothed disc, wherein when the driving mechanism drives the second toothed disc to rotate, the second toothed disc drives the first toothed disc to rotate in the opposite direction; When the driving mechanism drives the second toothed disc to rotate in the first direction, the first shielding cover and the second shielding cover approach each other; When the driving mechanism drives the second toothed disc to rotate in the second direction, the first shielding cover and the second shielding cover move away from each other.

2. The magnetron sputtering cylindrical target shielding device according to claim 1, characterized in that: The transmission ratio of the first toothed disc to the second toothed disc is 1:1, and the diameter of the first toothed disc is the same as the diameter of the second toothed disc.

3. The magnetron sputtering cylindrical target shielding device according to claim 2, characterized in that: The first gear disc and the second gear disc have the same structure.

4. The magnetron sputtering cylindrical target shielding device according to claim 1, characterized in that: The first shielding cover is an arc-shaped cover, and the bottom of the first shielding cover is fixed on the first toothed disc; The second shielding cover is an arc-shaped cover, and the bottom of the second shielding cover is fixed on the second gear disc.

5. The magnetron sputtering cylindrical target shielding device according to claim 4, characterized in that: The diameter of the first shielding cover is substantially the same as the diameter of the first toothed disc, and the circumference of the arc-shaped cross section of the first shielding cover is 1 / 4-1 / 2 of the circumference of the first toothed disc; The diameter of the second shielding cover is substantially the same as the diameter of the second toothed disc, and the circumference of the arc-shaped cross section of the second shielding cover is 1 / 4-1 / 2 of the circumference of the second toothed disc.

6. The magnetron sputtering cylindrical target shielding device according to any one of claims 1 to 5, characterized in that: The driving mechanism comprises: A transmission shaft, wherein a first gear and a second gear are respectively disposed at both ends of the transmission shaft, and the first gear is adapted to mesh with the second gear disc; A driving motor, wherein a driving gear is disposed on a driving shaft of the driving motor, and the driving gear and the second gear are located in the same plane and separated by a preset distance; A transmission chain is adapted to be mounted on the driving gear and the second gear, so that the driving motor can drive the transmission shaft to rotate through the transmission chain.

7. The magnetron sputtering cylindrical target shielding device according to claim 6, characterized in that: The driving mechanism further comprises: A mounting plate is used to be fixed on the magnetron sputtering coating machine, the mounting plate is located on one side of the transmission chain, a first sensor and a second sensor arranged at intervals are arranged on the mounting plate, a sensing bar is arranged on the transmission chain, the sensing bar is located between the first sensor and the second sensor, and when the sensing bar moves to the first sensor or the second sensor, the driving motor stops working.

8. The magnetron sputtering cylindrical target shielding device according to claim 7, characterized in that: The driving mechanism further comprises: A mounting seat, used to be fixed on a magnetron sputtering coating machine, wherein the mounting plate is fixed on one side of the mounting seat; The driving motor is fixed with a connecting plate, one end of the connecting plate is provided with a U-shaped groove, and the other end of the connecting plate is provided with a connecting hole; The mounting seat is provided with a mounting hole and a connecting block, the connecting block is provided with a through hole, the first bolt passes through the mounting hole, the U-shaped groove and is threadedly connected with the first nut in sequence, the second bolt passes through the connecting hole, the through hole and is threadedly connected with the second nut in sequence, so as to fix the connecting plate on the mounting seat, wherein the first bolt and the second bolt are vertically arranged.

9. The magnetron sputtering cylindrical target shielding device according to claim 6, characterized in that: The driving mechanism further comprises: A shaft sleeve, wherein a bearing is arranged in the shaft sleeve, the bearing sleeve is arranged on the transmission shaft, and the shaft sleeve is used to be fixed on the magnetron sputtering coating machine; The first gear and the second gear plate are located on the same plane, and the first gear is located on a side of the second gear plate away from the first gear plate.

10. A magnetron sputtering coating machine, characterized in that: The magnetron sputtering cylindrical target shielding device comprises the device according to any one of claims 1 to 9, further comprising: Cylindrical target; A tooling plate, used for fixing the product to be coated, wherein the tooling plate is spaced apart from the cylindrical target; The first shielding cover and the second shielding cover are arranged between the cylindrical target and the tooling plate; When the first shielding cover and the second shielding cover are close to each other to a preset position, the cylindrical target and the tooling plate are separated; When the first shielding cover and the second shielding cover are moved away from each other to a preset position, there is no shielding between the cylindrical target and the tooling plate.

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