Vacuum coating machine for film processing

Abstract

The utility model discloses a vacuum coating machine for film processing, which relates to the technical field of film processing and comprises a processing bin, a discharging mechanism is arranged on one side of an inner cavity of the processing bin, a coating mechanism is arranged in the middle of the inner cavity of the processing bin, and an air inlet mechanism is arranged on the inner wall of the inner cavity at the upper end of the processing bin. And an air exhaust mechanism is arranged on one side of an inner cavity at the upper end of the processing bin. According to the utility model, through the arrangement of the discharging mechanism and the film coating mechanism, in the film coating process, the discharging roller rotates to unfold the film on the surface of the film roller, and after film coating, the rolling assembly can roll the film after film coating, so that the vacuum film coating machine can realize continuous film coating, film coating of the rolled film is more convenient, and the production efficiency is improved. The two film coating mechanisms are arranged on the two sides of the film correspondingly, so that atomic groups or ions evaporated on the surface of the base material can be deposited on the two sides of the film simultaneously when the base material is powered on, film coating on the two faces of the film is completed simultaneously, and the mulching film is higher in efficiency and more convenient to use.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film processing, in particular to a vacuum coating machine for thin film processing. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a high vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. The main idea is to divide it into evaporation and sputtering. Metallized film will be used inside the capacitor, and the metallized film needs to be coated by a vacuum coating machine.

[0003] For example, the Chinese patent publication number CN220057001 U discloses a vacuum coating machine for metallized film processing, including a vacuum coating machine body, a sealed door is hingedly provided on the front of the vacuum coating machine body, a vacuum pump is provided on one side of the vacuum coating machine body, a lifting mechanism is provided at the bottom end of the vacuum coating machine body, vertical rods are symmetrically provided inside the vacuum coating machine body, a sliding sleeve is slidably installed inside the vertical rod, and a support frame is rotatably installed between the two sliding sleeves. The utility model uses the vertical rod, the sliding sleeve, the first bolt and the first bolt to transfer the metallized film to the exchange plate, and the limit bolt is stuck on another limit groove of the sliding sleeve, so that the metallized film is turned over as a whole for coating, avoiding the metallized film being turned over one by one, and improving the efficiency of metallized film coating.

[0004] Although the above example can improve the efficiency of thin film coating by automatically flipping the metal film, only a single piece of film can be flipped during flipping. When the film needs to be rolled up, continuous coating cannot be achieved, and thus the coating of the rolled film cannot be completed. At the same time, the existing vacuum coating machine can only coat one side of the film at a time, and cannot coat both sides of the film at the same time, resulting in low processing efficiency and inconvenience in use. Utility Model Content

[0005] The utility model provides a vacuum coating machine for thin film processing to solve the problems raised in the above background technology.

[0006] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0007] A vacuum coating machine for thin film processing comprises a processing chamber, a material discharge mechanism is arranged on one side of the inner cavity of the processing chamber, a coating mechanism is arranged in the middle of the inner cavity of the processing chamber, an air intake mechanism is arranged on the inner wall of the inner cavity at the upper end of the processing chamber, and an exhaust mechanism is arranged on one side of the inner cavity at the upper end of the processing chamber.

[0008] A further improvement of the technical solution of the utility model is that the discharging mechanism includes a motor 1, the surface of the motor 1 is fixedly connected to the top of the inner cavity at the lower end of the processing chamber, the top of the motor 1 shaft is fixedly connected to a rotating plate, the middle part of the top of the rotating plate is fixedly connected to a discharging roller, and the surface of the discharging roller is overlapped with a film roller.

[0009] A further improvement of the technical solution of the utility model is that a pressure block is overlapped on the top of the film roller, the interior of the pressure block is threadedly connected to the end of the unloading roller away from the rotating plate, a film is overlapped on the surface of the film roller, and a winding assembly is provided at the end of the film away from the film roller.

[0010] A further improvement of the technical solution of the utility model is that the coating mechanism includes a second motor, the top of the second motor is fixedly connected to the top of the inner cavity at the lower end of the processing chamber, the top of the second motor shaft is fixedly connected to a power-on tray, the top of the power-on tray is overlapped with a target material, and the top of the target material is overlapped with a voltage plate.

[0011] A further improvement of the technical solution of the utility model is that: a support rod is fixedly connected to the bottom of the inner cavity in the middle of the processing chamber, a motor three is fixedly connected to the top of the support rod, a threaded rod is fixedly connected to the bottom of the rotating shaft of the motor three, a pressure plate is threadedly connected to the surface of the threaded rod, and the bottom of the pressure plate is rotatably connected to the top of the voltage-carrying plate.

[0012] A further improvement of the technical solution of the utility model is that the air intake mechanism includes a fixed block, the surface of the fixed block is fixedly connected to the bottom of the inner cavity at the upper end of the processing chamber, a fixed chamber is opened inside the fixed block, a spring is fixedly connected to the inner wall of the fixed chamber, and one end of the spring is fixedly connected to a splint.

[0013] A further improvement of the technical solution of the utility model is that an inert gas bottle is overlapped on one side of the splint away from the spring, an air outlet pipe is inserted at one end of the inert gas bottle, a connecting pipe is fixedly connected to one end of the air outlet pipe, and an air outlet is fixedly connected to one end of the connecting pipe.

[0014] A further improvement of the technical solution of the utility model is that the vacuum mechanism includes a vacuum chamber, a vacuum assembly is arranged inside the vacuum chamber, a vacuum pipe is fixedly connected to one side of the inner cavity of the vacuum chamber, and a vacuum port is fixedly connected to one end of the vacuum pipe.

[0015] Due to the adoption of the above technical solution, the utility model has achieved the following technical progress compared with the prior art:

[0016] The utility model provides a vacuum coating machine for thin film processing. Through the arrangement of a feeding mechanism and a coating mechanism, in the process of coating the thin film, the feeding roller can rotate to unfold the thin film on the surface of the thin film roller. After coating, the winding component can wind up the coated thin film, so that the vacuum coating machine can realize continuous coating, which is more convenient for coating rolled thin films. Two sets of coating mechanisms are respectively arranged on both sides of the thin film, so that when the substrate is energized, the atomic groups or ions evaporated on the surface of the substrate can be deposited on both sides of the thin film at the same time, thereby completing the simultaneous coating of both sides of the thin film, making the coating efficiency higher and more convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0018] Figure 2 It is a schematic diagram of the internal structure of the utility model;

[0019] Figure 3 It is a schematic diagram of the structure of the air intake mechanism of the utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the air extraction mechanism of the utility model;

[0021] Figure 5 It is a schematic diagram of the coating mechanism structure of the utility model.

[0022] In the figure: 1. processing chamber; 2. unloading mechanism; 21. motor 1; 22. rotating plate; 23. unloading roller; 24. film roller; 25. pressure block; 26. film; 27. winding assembly; 3. coating mechanism; 31. motor 2; 32. power tray; 33. target material; 34. power plate; 35. support rod; 36. motor 3; 37. threaded rod; 38. pressure plate; 4. air intake mechanism; 41. fixed block; 42. fixed chamber; 43. spring; 44. splint; 45. inert gas bottle; 46. exhaust pipe; 47. connecting pipe; 48. outlet; 5. exhaust mechanism; 51. exhaust chamber; 52. exhaust assembly; 53. exhaust pipe; 54. exhaust port. DETAILED DESCRIPTION

[0023] The present invention is further described in detail below in conjunction with the embodiments:

[0024] Example 1

[0025] like Figure 1-5As shown, the utility model provides a vacuum coating machine for thin film processing, including a processing chamber 1, a discharging mechanism 2 is arranged on one side of the inner cavity of the processing chamber 1, a coating mechanism 3 is arranged in the middle of the inner cavity of the processing chamber 1, an air intake mechanism 4 is arranged on the inner wall of the inner cavity of the upper end of the processing chamber 1, and an exhaust mechanism 5 is arranged on one side of the inner cavity of the upper end of the processing chamber 1. The discharging mechanism 2 includes a motor 21, the surface of the motor 21 is fixedly connected to the top of the inner cavity of the lower end of the processing chamber 1, a rotating plate 22 is fixedly connected to the top of the rotating shaft of the motor 21, a discharging roller 23 is fixedly connected to the middle of the top of the rotating plate 22, a film roller 24 is overlapped on the surface of the discharging roller 23, a pressure block 25 is overlapped on the top of the film roller 24, the interior of the pressure block 25 is threadedly connected to the end of the discharging roller 23 away from the rotating plate 22, a film 26 is overlapped on the surface of the film roller 24, and a winding component 27 is arranged on the end of the film 26 away from the film roller 24.

[0026] In this embodiment, the film roller 24 is inserted into the surface of the unwinding roller 23, and then the pressure block 25 is installed on the upper end of the unwinding roller 23, and the pressure block is rotated so that the film roller 24 is pressed tightly to the surface of the rotating plate 22. During coating, the film 26 is gradually unfolded under the action of the motor 21 for coating, and after coating, the coated film is wound up under the action of the winding component 27.

[0027] Example 2

[0028] like Figure 1-5 As shown, on the basis of Example 1, the utility model provides a technical solution: preferably, the coating mechanism 3 includes a motor 2 31, the top of the motor 2 31 is fixedly connected to the top of the inner cavity at the lower end of the processing chamber 1, the top of the rotating shaft of the motor 2 31 is fixedly connected to a power-on tray 32, the top of the power-on tray 32 is overlapped with a target material 33, the top of the target material 33 is overlapped with a voltage-on plate 34, the bottom of the inner cavity in the middle of the processing chamber 1 is fixedly connected to a support rod 35, the top of the support rod 35 is fixedly connected to a motor 36, the bottom of the rotating shaft of the motor 36 is fixedly connected to a threaded rod 37, the surface of the threaded rod 37 is threadedly connected to a pressure plate 38, and the bottom of the pressure plate 38 is rotatably connected to the top of the voltage-on plate 34.

[0029] In this embodiment, after the target material 33 is placed in the powered tray 32, under the action of the motor 36, the threaded rod 37 rotates to drive the pressure plate 38 to move downward, so that the voltage plate 34 overlaps with the top of the target material 33. During the coating process, the target material 33 is energized through the voltage plate 34 and the powered tray 32. Under the action of the resistor, the surface of the target material 33 evaporates and is deposited on the surface of the film 26, and the surface of the film 26 is coated. At the same time, the two sets of coating mechanisms 3 are set up so that it can coat both sides of the film at the same time, and the coating efficiency is higher.

[0030] Example 3

[0031] like Figure 1-5 As shown, on the basis of Example 1, the utility model provides a technical solution: preferably, the air intake mechanism 4 includes a fixed block 41, the surface of the fixed block 41 is fixedly connected to the bottom of the inner cavity at the upper end of the processing chamber 1, a fixed chamber 42 is opened inside the fixed block 41, the inner wall of the fixed chamber 42 is fixedly connected with a spring 43, one end of the spring 43 is fixedly connected with a clamping plate 44, an inert gas bottle 45 is overlapped on the side of the clamping plate 44 away from the spring 43, an outlet pipe 46 is inserted at one end of the inert gas bottle 45, one end of the outlet pipe 46 is fixedly connected with a connecting pipe 47, one end of the connecting pipe 47 is fixedly connected with an air outlet 48, the exhaust mechanism 5 includes an exhaust chamber 51, an exhaust assembly 52 is arranged inside the exhaust chamber 51, an exhaust pipe 53 is fixedly connected to one side of the inner cavity of the exhaust chamber 51, and one end of the exhaust pipe 53 is fixedly connected to the exhaust port 54.

[0032] In this embodiment, the processing chamber 1 is sealed by closing the chamber door, and then the air in the processing chamber 1 is extracted from the exhaust port 54 along the exhaust pipe 53 under the action of the exhaust assembly 52, so that the air pressure in the processing chamber 1 drops to a predetermined value. Then, under the action of the exhaust pipe 46, the gas in the inert gas bottle 45 enters the processing chamber 1 from the exhaust port 48 along the connecting pipe 47, and then the coating is carried out.

[0033] The following is a detailed description of the working principle of the vacuum coating machine for thin film processing.

[0034] like Figure 1-5 As shown, when coating the thin film, first insert the thin film roller 24 into the surface of the discharge roller 23, then install the pressure block 25 to the upper end of the discharge roller 23, rotate the pressure block so that the pressure block presses the thin film roller 24 to the surface of the rotating plate 22, and place the target material 33 into the power tray 32. Under the action of the motor 36, the threaded rod 37 rotates to drive the pressure plate 38 to move downward, so that the power plate 34 overlaps with the top of the target material 33. After the installation is completed, close the door to make the processing chamber 1 in a sealed state, and then under the action of the exhaust component 52, the air in the processing chamber 1 is extracted from the exhaust port 54 along the exhaust pipe 53, so that the air pressure in the processing chamber 1 drops to the preset pressure. After setting the value, under the action of the outlet pipe 46, the gas in the inert gas bottle 45 enters the processing chamber 1 from the outlet 48 along the connecting pipe 47, and then the coating is carried out. During the coating, under the action of the motor 21, the film 26 is gradually unfolded for coating. After coating, under the action of the winding component 27, the coated film is wound up. During the coating process, the target material 33 is energized through the voltage plate 34 and the power tray 32. Under the action of the resistor, the surface of the target material 33 is evaporated and deposited on the surface of the film 26, and the surface of the film 26 is coated. At the same time, the setting of the two sets of coating mechanisms 3 enables it to coat both sides of the film at the same time, and the coating efficiency is higher.

[0035] The above generally describes the present invention in detail, but it is obvious to a person skilled in the art that some modifications or improvements can be made to the present invention. Therefore, modifications or improvements that do not deviate from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. A vacuum coating machine for thin film processing, comprising a processing chamber (1), characterized in that: A material discharge mechanism (2) is provided on one side of the inner cavity of the processing chamber (1), a coating mechanism (3) is provided in the middle of the inner cavity of the processing chamber (1), an air intake mechanism (4) is provided on the inner wall of the inner cavity at the upper end of the processing chamber (1), and an air exhaust mechanism (5) is provided on one side of the inner cavity at the upper end of the processing chamber (1).

2. A vacuum coating machine for thin film processing according to claim 1, characterized in that: The material discharge mechanism (2) comprises a motor 1 (21), the surface of the motor 1 (21) is fixedly connected to the top of the inner cavity at the lower end of the processing chamber (1), the top of the rotating shaft of the motor 1 (21) is fixedly connected to a rotating plate (22), the middle of the top of the rotating plate (22) is fixedly connected to a material discharge roller (23), and the surface of the material discharge roller (23) is overlapped with a film roller (24).

3. The vacuum coating machine for thin film processing according to claim 2, characterized in that: A pressure block (25) is overlapped on the top of the film roller (24), and the interior of the pressure block (25) is threadedly connected to the end of the unloading roller (23) away from the rotating plate (22). A film (26) is overlapped on the surface of the film roller (24), and a winding assembly (27) is provided at the end of the film (26) away from the film roller (24).

4. The vacuum coating machine for thin film processing according to claim 1, characterized in that: The coating mechanism (3) comprises a second motor (31), the top of which is fixedly connected to the top of the inner cavity at the lower end of the processing chamber (1), the top of the rotating shaft of the second motor (31) is fixedly connected to a power-carrying tray (32), the top of the power-carrying tray (32) is overlapped with a target material (33), and the top of the target material (33) is overlapped with a voltage-carrying plate (34).

5. The vacuum coating machine for thin film processing according to claim 4, characterized in that: A support rod (35) is fixedly connected to the bottom of the inner cavity in the middle of the processing chamber (1), a motor three (36) is fixedly connected to the top of the support rod (35), a threaded rod (37) is fixedly connected to the bottom of the rotating shaft of the motor three (36), a pressure plate (38) is threadedly connected to the surface of the threaded rod (37), and the bottom of the pressure plate (38) is rotatably connected to the top of the voltage-carrying plate (34).

6. The vacuum coating machine for thin film processing according to claim 1, characterized in that: The air intake mechanism (4) comprises a fixed block (41), the surface of the fixed block (41) is fixedly connected to the bottom of the inner cavity at the upper end of the processing chamber (1), a fixed chamber (42) is provided inside the fixed block (41), a spring (43) is fixedly connected to the inner wall of the fixed chamber (42), and one end of the spring (43) is fixedly connected to a clamping plate (44).

7. The vacuum coating machine for thin film processing according to claim 6, characterized in that: An inert gas bottle (45) is overlapped on one side of the clamping plate (44) away from the spring (43); an outlet pipe (46) is inserted at one end of the inert gas bottle (45); a connecting pipe (47) is fixedly connected to one end of the outlet pipe (46); and an outlet port (48) is fixedly connected to one end of the connecting pipe (47).

8. The vacuum coating machine for thin film processing according to claim 1, characterized in that: The air extraction mechanism (5) comprises an air extraction chamber (51), an air extraction assembly (52) is arranged inside the air extraction chamber (51), an air extraction pipe (53) is fixedly connected to one side of the inner cavity of the air extraction chamber (51), and an air extraction port (54) is fixedly connected to one end of the air extraction pipe (53).

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