Auxiliary positioning device

Abstract

The utility model discloses an auxiliary positioning device, and relates to the field of photovoltaic technology, and the auxiliary positioning device is used for auxiliary positioning when a bottom thermal field is installed in a single crystal furnace. The auxiliary positioning device comprises a first positioning device and a second positioning device, the first positioning device is used for carrying out auxiliary positioning when the furnace bottom heat preservation felt is installed, and the second positioning device is used for carrying out auxiliary positioning when the lower heat preservation barrel is installed; an opening penetrating through the furnace bottom heat preservation felt is formed in the furnace bottom heat preservation felt, the first positioning device comprises a first guide structure corresponding to the opening, and the maximum outer diameter of the first positioning device is smaller than the inner diameter of the opening; the second positioning device comprises a second guide structure corresponding to the inner wall of the lower heat preservation cylinder, and the maximum outer diameter of the second positioning device is smaller than the inner diameter of the lower heat preservation cylinder. Through positioning deviation correction of the auxiliary positioning device, errors generated when the bottom thermal field is automatically installed are eliminated as much as possible, and the purposes of saving manpower and improving the automatic disassembly and assembly efficiency are achieved.

Description

Technical Field

[0001] The present application relates to the field of photovoltaic technology, and more specifically, to an auxiliary positioning device. Background Art

[0002] The thermal field of a single crystal furnace refers to the entire system that is used to melt silicon materials and keep the single crystal growth at a certain temperature. The quality of the thermal field has a great impact on the quality of single crystal silicon. Therefore, configuring the best thermal field is a very important CZ single crystal process technology.

[0003] At present, in the process of automatically installing the single crystal furnace heat field, the robot will have installation errors under the centering of the visual camera. After the bottom heat field is installed, manual correction is still required, which cannot achieve the purpose of saving manpower and improving the efficiency of automatic disassembly and assembly. Utility Model Content

[0004] In view of this, the present application provides an auxiliary positioning device, which is used to eliminate the errors generated during the automatic installation of the bottom thermal field as much as possible through the positioning and correction of the auxiliary positioning device, so as to achieve the purpose of saving manpower and improving the efficiency of automatic disassembly and assembly.

[0005] In a first aspect, the present application provides an auxiliary positioning device for assisting positioning when installing a bottom heat field in a single crystal furnace; the bottom heat field of the single crystal furnace includes a furnace bottom insulation felt and a lower insulation cylinder located above the furnace bottom insulation felt;

[0006] The auxiliary positioning device includes a first positioning device and a second positioning device, the first positioning device is used for auxiliary positioning when installing the furnace bottom insulation felt, and the second positioning device is used for auxiliary positioning when installing the lower insulation tube;

[0007] The furnace bottom insulation felt is provided with an opening penetrating the furnace bottom insulation felt, the first positioning device comprises a first guide structure corresponding to the opening, and the maximum outer diameter of the first positioning device is smaller than the inner diameter of the opening;

[0008] The second positioning device includes a second guide structure corresponding to the inner wall of the lower heat-insulating cylinder, and the maximum outer diameter of the second positioning device is smaller than the inner diameter of the lower heat-insulating cylinder.

[0009] Optionally, where:

[0010] The first guide structure is a frustum-shaped guide structure, and the angle between the generatrix of the first guide structure and the rotation axis is α, 20°≤α≤30°.

[0011] Optionally, where:

[0012] A weight-reducing hole extending along the rotation axis of the first guide structure is provided in the first guide structure, and the weight-reducing hole is symmetrical with respect to any plane including the rotation axis of the first guide structure.

[0013] Optionally, where:

[0014] The first positioning device also includes a connecting part and an electrode plug, one end of the connecting part is fixedly connected to the end of the first guide structure with the largest outer diameter, and the end of the connecting part away from the first guide structure is fixedly connected to one end of the electrode plug.

[0015] Optionally, where:

[0016] The electrode plug is provided with threads.

[0017] Optionally, where:

[0018] The second guide structure is a conical annular guide structure, and the angle between the generatrix of the outer conical surface of the second guide structure and the rotation axis is β, 20°≤β≤30°.

[0019] Optionally, where:

[0020] The second positioning device also includes an annular support portion connected to an end of the second guide structure having a maximum outer diameter.

[0021] Optionally, where:

[0022] The outer diameter of the annular support portion is equal at any position.

[0023] Optionally, where:

[0024] At least two through holes are evenly distributed on the side wall of the second guide structure.

[0025] Optionally, where:

[0026] The auxiliary positioning device also includes a disassembly device for disassembling the second positioning device, and one end of the disassembly device has a clamping portion corresponding to the through hole.

[0027] Compared with the prior art, the auxiliary positioning device provided by the present application achieves at least the following beneficial effects:

[0028] When installing the furnace bottom insulation felt, the first positioning device can be used to position the opening of the furnace bottom insulation felt, thereby realizing auxiliary positioning of the furnace bottom insulation felt; when placing the furnace bottom insulation felt, the first guide structure can guide the opening, which is beneficial to the alignment between the furnace bottom insulation felt and the first positioning device. When installing the lower insulation tube, the second positioning device can be used to position the inner ring of the lower insulation tube, thereby realizing auxiliary positioning of the lower insulation tube; when placing the lower insulation tube, the second guide structure can guide the inner wall of the lower insulation tube, which is beneficial to the alignment between the lower insulation tube and the second positioning device. It can be seen that the auxiliary positioning device provided in the present application can guide and position the furnace bottom insulation felt and the lower insulation tube, and eliminate the errors caused by visual and mechanical reasons when automatically installing the thermal field at the bottom of the single crystal furnace as much as possible, and ensure the centering of the bottom thermal field, thereby saving manpower and improving the efficiency of automatic disassembly and assembly.

[0029] Of course, any product implementing this application does not necessarily need to achieve all of the technical effects described above at the same time.

[0030] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the application and, together with the description, serve to explain the principles of the application.

[0032] Figure 1 Shown is a schematic structural diagram of a first positioning device provided in an embodiment of the present application;

[0033] Figure 2 It is a schematic diagram of assembling the first positioning device, the furnace bottom insulation felt and the graphite electrode provided in the embodiment of the present application;

[0034] Figure 3 Shown is a schematic structural diagram of a second positioning device provided in an embodiment of the present application;

[0035] Figure 4 It is a schematic diagram of assembling the second positioning device, the furnace bottom insulation felt and the lower insulation cylinder provided in the embodiment of the present application;

[0036] Figure 5 Shown is a structural schematic diagram of a disassembly device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0037] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present application.

[0038] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present application, its application, or uses.

[0039] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0040] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0041] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0042] The thermal field of a single crystal furnace refers to the entire system that is used to melt silicon materials and keep the single crystal growth at a certain temperature. The quality of the thermal field has a great impact on the quality of single crystal silicon. Therefore, configuring the best thermal field is a very important CZ single crystal process technology.

[0043] The thermal field of the single crystal furnace includes heaters, upper, middle and lower insulation tubes, insulation covers, electrodes and other components. Among them, the furnace bottom insulation felt and the lower insulation tube are set at the bottom of the single crystal furnace thermal field, which has a great influence on the centering of the single crystal furnace thermal field. Whether the single crystal furnace thermal field is centered also has a great influence on the quality of single crystal silicon. A seriously misaligned thermal field may cause the crystal rod to hit the water cooling screen, causing abnormal accidents such as crystal rod explosion and silicon leakage.

[0044] The existing automatic disassembly and assembly device uses a robot to participate in the installation of the single crystal furnace heat field. However, in the current automatic installation of the single crystal furnace heat field, the robot will have an installation error of 3mm to 5mm under the centering of the visual camera. The existence of this error will require human intervention for manual correction during the installation of the bottom heat field and relative fine-tuning after installation, which cannot achieve the purpose of saving manpower and improving the efficiency of automatic disassembly and assembly.

[0045] In order to solve the above technical problems, the present application proposes an auxiliary positioning device, which is used to eliminate the errors generated during the automatic installation of the bottom thermal field as much as possible through the positioning and correction of the auxiliary positioning device, so as to achieve the purpose of saving manpower and improving the efficiency of automatic disassembly and assembly.

[0046] The following is a detailed description with reference to the accompanying drawings and specific embodiments.

[0047] Figure 1 Shown is a schematic structural diagram of a first positioning device provided in an embodiment of the present application; Figure 2 It is a schematic diagram of assembling the first positioning device, the furnace bottom insulation felt and the graphite electrode provided in the embodiment of the present application; Figure 3 Shown is a schematic structural diagram of a second positioning device provided in an embodiment of the present application;

[0048] Figure 4 Shown is an assembly schematic diagram of the second positioning device, furnace bottom insulation felt and lower insulation tube provided in an embodiment of the present application.

[0049] like Figure 1 to Figure 4 As shown, the embodiment of the present application provides an auxiliary positioning device for assisting positioning when installing a bottom heat field in a single crystal furnace; the bottom heat field of the single crystal furnace includes a furnace bottom insulation felt 1 and a lower insulation cylinder 2 located above the furnace bottom insulation felt 1;

[0050] The auxiliary positioning device includes a first positioning device 30 and a second positioning device 40, wherein the first positioning device 30 is used for auxiliary positioning when installing the furnace bottom insulation felt 1, and the second positioning device 40 is used for auxiliary positioning when installing the lower insulation tube 2;

[0051] The furnace bottom insulation felt 1 is provided with an opening 11 penetrating the furnace bottom insulation felt 1, the first positioning device 30 comprises a first guide structure 301 corresponding to the opening 11, and the maximum outer diameter of the first positioning device 30 is smaller than the inner diameter of the opening 11;

[0052] The second positioning device 40 includes a second guide structure 401 corresponding to the inner wall of the lower heat-insulating cylinder 2 , and the maximum outer diameter of the second positioning device 40 is smaller than the inner diameter of the lower heat-insulating cylinder 2 .

[0053] When implementing it, Figure 1 to Figure 4 As shown, the first positioning device 30 is first installed on the bottom of the single crystal furnace. Under the gripping of the robot, the opening 11 on the furnace bottom insulation felt 1 passes through the first guide structure 301 of the first positioning device 30, and the furnace bottom insulation felt 1 is installed on the bottom of the single crystal furnace with a small positioning error, and then the first positioning device 30 is removed. Then the second positioning device 40 is placed above the furnace bottom insulation felt 1. Under the gripping and placement of the robot of the automatic disassembly and assembly device, the lower insulation cylinder 2 is sleeved on the outside of the second positioning device 40 through the second guide structure 401, and is installed above the furnace bottom insulation felt 1 with a small positioning error, and then the second positioning device 40 is taken out.

[0054] It can be seen from the composition structure and specific implementation process of the above auxiliary positioning device that Figure 1 to Figure 4As shown, the first positioning device 30 has a first guide structure 301 corresponding to the opening 11 on the furnace bottom insulation felt 1, and the maximum outer diameter of the first positioning device 30 is smaller than the inner diameter of the opening 11. Therefore, when installing the furnace bottom insulation felt 1, the first positioning device 30 can be used to position the opening 11 of the furnace bottom insulation felt 1, thereby realizing auxiliary positioning of the furnace bottom insulation felt 1; when placing the furnace bottom insulation felt 1, the first guide structure 301 can guide the opening 11, which is beneficial to the alignment between the furnace bottom insulation felt 1 and the first positioning device 30, and further improves the positioning accuracy of the furnace bottom insulation felt 1 during installation. The second positioning device 40 has a second guide structure 401 corresponding to the inner wall of the lower insulation tube 2, and the maximum outer diameter of the second positioning device 40 is smaller than the inner diameter of the lower insulation tube 2. Therefore, when installing the lower insulation tube 2, the second positioning device 40 can be used to position the inner circle of the lower insulation tube 2, thereby realizing auxiliary positioning of the lower insulation tube 2; when placing the lower insulation tube 2, the second guide structure 401 can play a guiding role on the inner wall of the lower insulation tube 2, which is beneficial to the alignment between the lower insulation tube 2 and the second positioning device 40, and further improves the positioning accuracy of the lower insulation tube 2 during installation. It can be seen that the auxiliary positioning device provided in the embodiment of the present application can guide and position the furnace bottom insulation felt 1 and the lower insulation tube 2, and eliminate the errors caused by visual and mechanical reasons when automatically installing the thermal field of the bottom of the single crystal furnace as much as possible, and ensure the centering of the bottom thermal field, thereby achieving the purpose of saving manpower and improving the efficiency of automatic disassembly and assembly; at the same time, the bottom thermal field is accurately centered, which is beneficial to the accurate centering of other components of the single crystal furnace installed thereon, and is beneficial to improving the quality of the crystal rod. In addition, the auxiliary positioning device provided in the embodiment of the present application has a simple structure, is easy to use, and has a low manufacturing cost.

[0055] In some examples, in the actual single crystal furnace thermal field structure, after the second positioning device is placed, the second positioning device also has components such as solid ring felt (not shown in the figure), which can position the outer wall of the lower insulation tube. On this basis, the second positioning device can position the inner wall of the lower insulation tube, which can further improve the positioning accuracy of the lower insulation tube.

[0056] In some examples, when placing the furnace bottom insulation felt, a gap of 0 to 3 mm may be left between the first positioning device and the opening of the furnace bottom insulation felt. Furthermore, along the diameter direction of the opening of the furnace bottom insulation felt, a distance of 0 to 3 mm may be left between the position where the first positioning device has the maximum outer diameter and the inner wall of the opening of the furnace bottom insulation felt. This is only an example and is not specifically limited.

[0057] Exemplarily, along the diameter direction of the opening of the furnace bottom insulation felt, the distance between the position of the first positioning device with the maximum outer diameter and the inner wall of the opening of the furnace bottom insulation felt can be between 0 and 1 mm, 1 mm to 2 mm, or 2 mm to 3 mm, etc. For example, along the diameter direction of the opening of the furnace bottom insulation felt, the distance between the position of the first positioning device with the maximum outer diameter and the inner wall of the opening of the furnace bottom insulation felt can be 0.5 mm, 1 mm, 1.5 mm, 2 mm, 2.5 mm or 3 mm, etc. This is just an example and is not specifically limited.

[0058] As a possible implementation, Figure 1 and Figure 2 As shown, the first guide structure 301 is a frustum-shaped guide structure, and the angle between the generatrix of the first guide structure 301 and the rotation axis is α, 20°≤α≤30°.

[0059] Based on this, Figure 1 and Figure 2 As shown, the first guide structure 301 of the frustum shape has an upper bottom surface with a smaller area and a lower bottom surface with a larger area, and the side wall of the first guide structure 301 is an inclined side wall. After the first guide structure 301 is fixed to the bottom of the single crystal furnace, the upper bottom surface with a smaller area of ​​the first guide structure 301 of the frustum shape is conducive to being aligned with the opening 11 of the furnace bottom insulation felt 1, and the inclined side wall facilitates the opening 11 of the furnace bottom insulation felt 1 to slide down along the inclined surface, thereby playing a guiding role in the automatic installation process of the furnace bottom insulation felt 1, further reducing the positioning accuracy difference of the furnace bottom insulation felt 1 in the automatic installation process, further saving manpower, improving the efficiency of automatic disassembly and assembly, and at the same time facilitating the further precise centering of the bottom thermal field of the single crystal furnace. When the angle α between the busbar of the first guide structure 301 and the rotation axis is between 20° and 30°, it can play a good guiding role when the furnace bottom insulation felt 1 is installed, and has a long service life. If the angle α between the busbar of the first guide structure 301 and the rotation axis is too small, with the long-term use of various equipment and components in the single crystal furnace, large deviations may occur in accuracy. At this time, an angle α that is too small will hardly play a good guiding role; if the angle α between the busbar of the first guide structure 301 and the rotation axis is too large, it will also be difficult to play a good guiding role.

[0060] In some examples, when the first guide structure is a frustum-shaped guide structure, the angle α between the generatrix of the first guide structure and the rotation axis can range from 20° to 23°, 23° to 26°, or 26° to 30°, etc. This is only an example and is not specifically limited.

[0061] Exemplarily, when the first guide structure is a frustum-shaped guide structure, the angle α between the generatrix of the first guide structure and the rotation axis can be 20°, 21°, 22°, 23°, 24°, 25°, 26°, 27°, 28°, 29° or 30°, etc. This is only an example and is not specifically limited.

[0062] As a possible implementation, Figure 1 As shown, the first positioning device 30 also includes a connecting portion 302 and an electrode plug 303 , one end of the connecting portion 302 is fixedly connected to an end of the first guide structure 301 having a maximum outer diameter, and the end of the connecting portion 302 away from the first guide structure 301 is fixedly connected to one end of the electrode plug 303 .

[0063] like Figure 1 As shown, the connection part 302 can ensure that the opening 11 of the furnace bottom insulation felt 1 passes smoothly. Figure 1 and Figure 2 As shown, the bottom thermal field of the single crystal furnace also includes a graphite electrode 5 arranged at the bottom of the single crystal furnace, and the opposite ends of the graphite electrode 5 have a first screw hole 51 and a second screw hole 52 respectively, and the first screw hole 51 corresponds to the electrode plug 303 of the first positioning device 30. Before installing the furnace bottom insulation felt 1, it is necessary to first fix the first positioning device 30 on the bottom of the single crystal furnace. The bottom of the single crystal furnace is fixed with a copper electrode column. Before placing the first positioning device 30, the graphite electrode 5 is first inserted into the copper electrode column, and the graphite electrode 5 is threadedly connected with the copper electrode column through the second screw hole 52. Then the first positioning device 30 is fixed to the end of the graphite electrode 5 away from the copper electrode column, and further, the electrode plug 303 of the first positioning device 30 is inserted into the first screw hole 51 of the graphite electrode 5 and fixed. Afterwards, the furnace bottom insulation felt 1 is grasped by the manipulator and positioned by the first positioning device 30, and is placed on the bottom of the single crystal furnace with a small positioning error. When placed, the opening 11 of the furnace bottom insulation felt 1 passes through the first guide structure 301 and the connecting part 302 of the first positioning device 30 in sequence, and falls to the bottom of the single crystal furnace. Finally, the electrode plug 303 of the first positioning device 30 is removed from the graphite electrode 5, the first positioning device 30 is taken out, and other components of the single crystal furnace are installed. Based on this, the first positioning device 30 can be directly fixed on the original components of the single crystal furnace to guide and position the furnace bottom insulation felt 1, and then removed from the single crystal furnace. While minimizing the positioning accuracy difference of the furnace bottom insulation felt 1, saving manpower and improving the efficiency of automatic disassembly and assembly, there is no need to change the structure of the single crystal furnace itself, which is more convenient to use.

[0064] Exemplarily, the first positioning device may be installed and removed manually.

[0065] In practical applications, the first screw hole of the graphite electrode also corresponds to the graphite bolt connecting the graphite heater and the graphite electrode.

[0066] In some examples, the electrode plug has threads. In this case, the electrode plug can be threadedly connected to the first screw hole of the graphite electrode, so that the first positioning device can be threadedly fixed on the graphite electrode, which improves the stability of the first positioning device during the installation of the furnace bottom insulation felt, and is conducive to further reducing the positioning accuracy difference of the furnace bottom insulation felt, thereby further ensuring the precise centering of the thermal field at the bottom of the single crystal furnace, and achieving the purpose of saving manpower and improving the efficiency of automatic disassembly and assembly.

[0067] As a possible implementation, Figure 1 As shown, a weight-reducing hole 304 extending along the rotation axis of the first guide structure 301 is opened in the first guide structure 301 , and the weight-reducing hole 304 is symmetrical about any plane including the rotation axis of the first guide structure 301 .

[0068] Based on this, Figure 1 As shown, the weight-reducing hole 304 can reduce the weight and center of gravity height of the first positioning device 30 as much as possible, so that the overall structure of the first positioning device 30 is more stable, thereby improving the stability when installing the furnace bottom insulation felt 1. In addition, since the first positioning device 30 requires manual assistance for installation and disassembly, excessive weight is not conducive to manual operation. Therefore, the provision of the weight-reducing hole 304 can also reduce the pressure of manual operation and further save manpower. The extension direction of the weight-reducing hole 304 is the same as the extension direction of the rotation axis of the first guide structure 301, and the weight-reducing hole 304 is symmetrical about any plane including the rotation axis of the first guide structure 301, which is conducive to ensuring the stability of the overall structure of the first positioning device 30.

[0069] For example, the embodiment of the present application does not limit the shape of the weight-reducing hole, which can be as follows: Figure 1 The cylindrical hole shown may also be in other shapes, which are not listed here one by one.

[0070] In practical applications, such as Figure 2 As shown, the furnace bottom insulation felt 1 has a plurality of openings 11 penetrating the furnace bottom insulation felt 1, and a portion of the openings 11 is for the graphite electrode 5 to pass through. When the furnace bottom insulation felt 1 is actually installed, only one first positioning device 30 may be used for guiding and positioning, or multiple first positioning devices 30 may be used for guiding and positioning at the same time, and each first positioning device 30 corresponds to a different opening 11, which is not limited in the embodiment of the present application.

[0071] In some examples, in the direction of the central axis of the first positioning device, the overall height of the first positioning device may be between 150 mm and 200 mm to facilitate manual operation.

[0072] Exemplarily, in the direction of the central axis of the first positioning device, the overall height of the first positioning device can be between 150mm and 165mm, 165mm and 180mm, or 180mm and 200mm, etc. For example, in the direction of the central axis of the first positioning device, the overall height of the first positioning device can be 150mm, 160mm, 165mm, 170mm, 180mm, 190mm or 200mm, etc. This is just an example and is not specifically limited.

[0073] In some examples, the material of the first positioning device can be selected from high temperature resistant materials, such as high temperature resistant metals or alloys, etc. In addition, since the first positioning device needs to be in contact with the graphite electrode, it needs to have good conductivity to avoid short circuits during use due to long-term wear and tear. Exemplarily, the material of the first positioning device can be selected from aluminum alloy, which is only used as an example and is not specifically limited.

[0074] As a possible implementation, Figure 3 As shown, the second guide structure 401 is a conical annular guide structure, and the angle between the generatrix of the outer conical surface of the second guide structure 401 and the rotation axis is β, 20°≤β≤30°.

[0075] Based on this, Figure 3 As shown, the conical annular second guide structure 401 has two annular surfaces with different diameters and arranged opposite to each other, and the side wall 4011 connecting the two annular surfaces is an inclined side wall, and the inner surface and the outer surface of the side wall 4011 are both conical annular surfaces. Figure 3 and Figure 4 As shown, after the second guide structure 401 is placed above the furnace bottom insulation felt 1 installed in the single crystal furnace, the lower insulation tube 2 can slide down along the inclined side wall 4011 and fall on the furnace bottom insulation felt 1, so that during the installation of the lower insulation tube 2, the second guide structure 401 can play a guiding role on the inner side of the lower insulation tube 2, further reducing the positioning accuracy difference of the lower insulation tube 2 during the automatic installation process, further saving manpower, improving the efficiency of automatic disassembly and assembly, and at the same time facilitating the further precise centering of the bottom thermal field of the single crystal furnace. When the angle β between the generatrix of the conical annular surface on the outside of the second guide structure 401 and the rotation axis is between 20° and 30°, it can play a good guiding role when the lower insulation tube 2 is installed, and has a long service life. If the angle β between the generatrix of the conical annular surface outside the second guide structure 401 and the rotation axis is too large or too small, the second guide structure 401 will not be able to play a good guiding role. If the angle β between the generatrix of the conical annular surface outside the second guide structure 401 and the rotation axis is too small, the gap between the lower insulation tube 2 and the second positioning device 40 after falling is too small, and it is difficult to remove the second positioning device 40.

[0076] In some examples, when the second guide structure is a conical annular guide structure, the angle β between the generatrix of the outer cone surface of the second guide structure and the rotation axis can range from 20° to 23°, 23° to 26° or 26° to 30°, etc. This is only an example and is not specifically limited.

[0077] Exemplarily, when the second guide structure is a conical annular guide structure, the angle β between the generatrix of the outer cone surface of the second guide structure and the rotation axis can be 20°, 21°, 22°, 23°, 24°, 25°, 26°, 27°, 28°, 29° or 30°, etc. This is only an example and is not specifically limited.

[0078] As a possible implementation, Figure 3 As shown, the second positioning device 40 further includes an annular support portion 402 connected to an end of the second guide structure 401 having the largest outer diameter.

[0079] like Figure 3 and Figure 4 As shown, in the actual single crystal furnace structure, the furnace bottom insulation felt 1 includes many layers, forming circles of different sizes at the center position, and there is a gap of a certain width in the middle of these circles of different sizes. When the second positioning device 40 is placed, the annular support portion 402 can be stuck in the formed gap, realizing the centering of the second positioning device 40 and the furnace bottom insulation felt 1, and then the positioning correction and precise centering of the lower insulation tube 2 can be realized through the guiding and positioning effect of the second positioning device 40, and the positioning error when the lower insulation tube 2 is automatically installed can be eliminated as much as possible, so as to save manpower and improve the efficiency of automatic disassembly and assembly. In addition, the second positioning device 40 is placed on the furnace bottom insulation felt 1 through the annular support portion 402, which can improve the stability of the second positioning device 40, thereby improving the stability of the lower insulation tube 2 during installation, so that the positioning accuracy of the lower insulation tube 2 is higher.

[0080] In some examples, such as Figure 3 As shown, the outer diameter of the annular support portion 402 is equal at any position. Figure 3 and Figure 4 As shown, the annular support portion 402 is an equal-diameter structure. When it contacts the furnace bottom insulation felt 1, it can be more firmly stuck in the annular gap of the furnace bottom insulation felt 1, further improving the stability of the second positioning device 40, thereby further improving the stability of the lower insulation tube 2 during installation, making the positioning accuracy of the lower insulation tube 2 higher.

[0081] In some examples, along the diameter direction of the lower heat-insulating cylinder, when the lower heat-insulating cylinder is sleeved on the outside of the second positioning device, the spacing between the inner wall of the lower heat-insulating cylinder and the position where the second positioning device has the largest outer diameter can be 0 to 1 mm, which is only an example and not specifically limited. If the lower heat-insulating cylinder is too close to the second positioning device, it is difficult to remove the second positioning device.

[0082] Exemplarily, along the diameter direction of the lower insulation tube, when the lower insulation tube is sleeved on the outside of the second positioning device, the spacing between the inner wall of the lower insulation tube and the position of the second positioning device with the maximum outer diameter can be between 0 and 0.3mm, 0.3mm to 0.6mm or 0.6mm to 1mm, etc. For example, along the diameter direction of the lower insulation tube, when the lower insulation tube is sleeved on the outside of the second positioning device, the spacing between the inner wall of the lower insulation tube and the position of the second positioning device with the maximum outer diameter can be 0.1mm, 0.3mm, 0.4mm, 0.5mm, 0.6mm, 0.8mm or 1mm, etc. This is just an example and is not specifically limited.

[0083] As a possible implementation, Figure 3 As shown, at least two through holes 403 are evenly distributed on the side wall 4011 of the second guide structure 401. Based on this, Figure 3 and Figure 4 As shown, after the lower heat-insulating tube 2 is installed, the second positioning device 40 can be taken out from the inner side of the lower heat-insulating tube 2 by using the through hole 403, which can reduce the positioning accuracy difference of the lower heat-insulating tube 2 as much as possible, save manpower and improve the efficiency of automatic disassembly and assembly, without changing the structure of the single crystal furnace itself, making it more convenient to use. In addition, the through holes 403 evenly distributed on the second guide structure 401 can also reduce the weight of the second positioning device 40, making it easier to install and remove.

[0084] Exemplarily, when the second positioning device is taken out, it can be operated manually.

[0085] In some examples, such as Figure 3 and Figure 4 As shown, 4, 6 or more through holes 403 may be evenly distributed on the side wall 4011 of the second guide structure 401, which can not only further reduce the weight of the second positioning device 40, but also make the operator's position more convenient when the second positioning device 40 needs to be disassembled in actual production.

[0086] Figure 5 Shown is a structural schematic diagram of a disassembly device provided in an embodiment of the present application.

[0087] As a possible implementation, Figure 3 to Figure 5As shown, the auxiliary positioning device also includes a disassembly device 6 for disassembling the second positioning device 40, and one end of the disassembly device 6 has a clamping portion 61 corresponding to the through hole 403. Based on this, after the lower heat-insulating cylinder 2 is installed, when the second positioning device 40 located on the inner side of the lower heat-insulating cylinder 2 needs to be taken out, the clamping portion 61 on the disassembly device 6 is used to clamp the through hole 403, so that the second positioning device 40 is taken out from the inner side of the lower heat-insulating cylinder 2, and the operation is simple and convenient.

[0088] Exemplarily, when the disassembly device 6 is used to remove the second positioning device 40 , two operators may simultaneously use the disassembly device 6 at two opposite through holes 403 of the second positioning device 40 to remove the second positioning device 40 , so that the disassembly process is more stable.

[0089] Exemplarily, the disassembly device 6 may be Figure 5 The disassembly hook shown in the figure has a rod-shaped body 62, one end of the rod-shaped body 62 has a clamping portion 61, and the other end has a handle 63. The clamping portion 61 can include two sheet metal parts 610 spaced apart to facilitate subsequent maintenance. The sheet metal part 610 has a recessed portion 6101, so that the entire clamping portion 61 is hook-shaped, as shown in FIG. Figure 3 to Figure 5 As shown, when the disassembly device 6 is used to disassemble the second positioning device 40, the position of the recessed portion 6101 can facilitate the disassembly device 6 to hook the through hole 403 of the second positioning device 40. The disassembly device 6 can also be other structures that can achieve the function of disassembling the second positioning device 40. Here, only the distance is made, and it is not specifically limited.

[0090] In some examples, the overall height of the second positioning device in the direction of the central axis of the second positioning device may be between 70 mm and 100 mm. If the overall height of the second positioning device is too high, the weight and cost of the second positioning device will be too large; if the overall height of the second positioning device is too low, it will be inconvenient to remove it from the lower insulation cylinder.

[0091] Illustratively, in the direction of the central axis of the second positioning device, the overall height of the second positioning device can be between 70mm and 80mm, 80mm and 90mm, or 90mm and 100mm, etc. For example, in the direction of the central axis of the second positioning device, the overall height of the second positioning device can be 70mm, 75mm, 80mm, 85mm, 90mm, 95mm or 100mm, etc. This is just an example and is not specifically limited.

[0092] In some examples, the material of the second positioning device can be selected to be a high temperature resistant material, such as a high temperature resistant metal or alloy, a high temperature resistant inorganic material, etc.; illustratively, the second positioning device is a carbon-carbon composite material, which is only used as an example and is not specifically limited.

[0093] In summary, the auxiliary positioning device provided by the present application achieves at least the following beneficial effects:

[0094] When installing the furnace bottom insulation felt, the first positioning device can be used to position the opening of the furnace bottom insulation felt, thereby realizing auxiliary positioning of the furnace bottom insulation felt; when placing the furnace bottom insulation felt, the first guide structure can guide the opening, which is beneficial to the alignment between the furnace bottom insulation felt and the first positioning device. When installing the lower insulation tube, the second positioning device can be used to position the inner ring of the lower insulation tube, thereby realizing auxiliary positioning of the lower insulation tube; when placing the lower insulation tube, the second guide structure can guide the inner wall of the lower insulation tube, which is beneficial to the alignment between the lower insulation tube and the second positioning device. It can be seen that the auxiliary positioning device provided in the present application can guide and position the furnace bottom insulation felt and the lower insulation tube, and eliminate the errors caused by visual and mechanical reasons when automatically installing the thermal field at the bottom of the single crystal furnace as much as possible, and ensure the centering of the bottom thermal field, thereby saving manpower and improving the efficiency of automatic disassembly and assembly.

[0095] Although some specific embodiments of the present application have been described in detail by way of example, it should be understood by those skilled in the art that the above examples are only for illustration, not for limiting the scope of the present application. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present application. The scope of the present application is defined by the appended claims.

Claims

1. An auxiliary positioning device, characterized in that: Used for auxiliary positioning when installing the bottom heat field in the single crystal furnace; the bottom heat field of the single crystal furnace includes a furnace bottom insulation felt and a lower insulation cylinder located above the furnace bottom insulation felt; The auxiliary positioning device includes a first positioning device and a second positioning device, wherein the first positioning device is used for auxiliary positioning when installing the furnace bottom insulation felt, and the second positioning device is used for auxiliary positioning when installing the lower insulation tube; The furnace bottom insulation felt is provided with an opening penetrating the furnace bottom insulation felt, the first positioning device comprises a first guide structure corresponding to the opening, and the maximum outer diameter of the first positioning device is smaller than the inner diameter of the opening; The second positioning device includes a second guide structure corresponding to the inner wall of the lower heat-insulating cylinder, and the maximum outer diameter of the second positioning device is smaller than the inner diameter of the lower heat-insulating cylinder.

2. The auxiliary positioning device according to claim 1, characterized in that: The first guide structure is a frustum-shaped guide structure, and the angle between the generatrix of the first guide structure and the rotation axis is α, 20°≤α≤30°.

3. The auxiliary positioning device according to claim 2, characterized in that: A weight-reducing hole extending along the rotation axis of the first guide structure is provided in the first guide structure, and the weight-reducing hole is symmetrical with respect to any plane including the rotation axis of the first guide structure.

4. The auxiliary positioning device according to claim 1, characterized in that: The first positioning device also includes a connecting portion and an electrode plug, wherein one end of the connecting portion is fixedly connected to an end of the first guide structure having a maximum outer diameter, and an end of the connecting portion away from the first guide structure is fixedly connected to one end of the electrode plug.

5. The auxiliary positioning device according to claim 4, characterized in that: The electrode plug post is provided with threads.

6. The auxiliary positioning device according to claim 1, characterized in that: The second guide structure is a conical annular guide structure, and the angle between the generatrix of the outer conical surface of the second guide structure and the rotation axis is β, 20°≤β≤30°.

7. The auxiliary positioning device according to claim 1, characterized in that: The second positioning device also includes an annular support portion connected to an end of the second guide structure having a maximum outer diameter.

8. The auxiliary positioning device according to claim 7, characterized in that: The outer diameter of the annular support portion is equal at any position.

9. The auxiliary positioning device according to claim 1, characterized in that: At least two through holes are evenly distributed on the side wall of the second guide structure.

10. The auxiliary positioning device according to claim 9, characterized in that: The auxiliary positioning device also includes a disassembly device for disassembling the second positioning device, and one end of the disassembly device has a clamping portion corresponding to the through hole.

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