Guide device for auxiliary chamber in Czochralski single crystal furnace

Abstract

The utility model discloses a guide device for an auxiliary chamber in a czochralski single crystal furnace, which comprises a main furnace chamber and the auxiliary furnace chamber positioned above the main furnace chamber, a first mounting block and a second mounting block are respectively arranged on the peripheries of the main furnace chamber and the auxiliary furnace chamber, a guide post is arranged above the first mounting block, a guide sleeve is arranged below the second mounting block, and a guide sleeve is arranged below the guide post. And the guide column penetrates through the guide sleeve. The guide columns can be accurately positioned in the guide holes, the guide efficiency is improved, smooth completion of automatic feeding is guaranteed, and accidents are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon manufacturing, in particular to a guiding device for a sub-chamber in a CZ single crystal furnace. Background Art

[0002] At present, the promotion of automation has become one of the main tasks of the monocrystalline silicon industry to achieve cost reduction and efficiency improvement. Automatic feeding can save costs and shorten working hours. The main process of automatic feeding is: hanging barrel, auxiliary chamber rotation, and auxiliary chamber descending to the lower limit. However, when the auxiliary chamber is lowered to the lower limit, there is often a deviation between the guide column and the guide hole, resulting in the inability of the auxiliary chamber to descend to the lower limit. In severe cases, it will cause the auxiliary chamber structure to deform, affecting subsequent crystal pulling.

[0003] Therefore, this application is filed. Utility Model Content

[0004] The utility model aims to provide a guide device for a sub-chamber in a CZ single crystal furnace, which solves the above-mentioned problems existing in the prior art by arranging a guide sleeve so that the guide column can accurately locate the guide hole.

[0005] In order to solve the above technical problems, the utility model adopts the following solutions:

[0006] A guide device for a sub-chamber in a CZ single crystal furnace comprises a main furnace chamber and a sub-chamber located above the main furnace chamber, wherein the outer peripheries of the main furnace chamber and the sub-chamber are respectively provided with a first mounting block and a second mounting block, a guide column is provided above the first mounting block, a guide sleeve is provided below the second mounting block, and the guide column passes through the guide sleeve.

[0007] Preferably, the guide sleeve comprises an integrally formed cylindrical first portion and a trumpet-shaped second portion, the first portion is provided with a first through hole of equal diameter, and the second portion is provided with a second through hole of variable diameter.

[0008] Preferably, the second mounting block is provided with a guide hole, and the guide hole has the same diameter as the top ends of the first through hole and the second through hole, respectively.

[0009] Preferably, the first part is provided with a first screw hole, the second mounting block is provided with a second screw hole, a countersunk screw is provided between the second mounting block and the first part, and the bottom end of the countersunk screw passes through the second screw hole and the first screw hole in sequence.

[0010] Preferably, the first screw hole is a blind hole, and the second screw hole is a through hole and a stepped hole.

[0011] Preferably, the guide sleeve is made of tetrafluoroethylene, and the first mounting block and the second mounting block are made of metal.

[0012] Preferably, the bottom of the second part is symmetrically provided with sliding grooves for assembling a sleeve, the sleeve is connected with a piston rod via a spring, a clamping plate is provided at the end of the piston rod away from the spring, and a buffer pad is provided on one side of the clamping plate.

[0013] The utility model has the beneficial effects:

[0014] The utility model mainly performs auxiliary guiding by setting a guide sleeve with a first part in a cylindrical shape and a second part in a trumpet shape. The guide sleeve increases the height of the original second mounting block so that the guide column contacts the second part first to perform a preliminary guiding effect, and then performs auxiliary clamping under the action of the clamping plate so that the guide column sequentially enters the first through hole and the guide hole for positioning, so that the guide column can be accurately positioned in the guide hole, thereby ensuring that automatic feeding is completed smoothly and reducing the occurrence of accidents. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the assembly structure of the utility model;

[0016] Figure 2 It is a cross-sectional structural schematic diagram of the utility model;

[0017] Figure 3 This is a schematic diagram of the structure of the guide sleeve of the utility model;

[0018] Figure 4 This is a top view of the second part of the novel middle guide sleeve used in this invention.

[0019] Figure markings: 1-main furnace chamber, 2-auxiliary furnace chamber, 3-guide sleeve, 30-first part, 300-first screw hole, 301-first through hole, 31-second part, 310-second through hole, 311-slide groove, 312-sleeve, 313-piston rod, 314-spring, 315-clamping plate, 316-buffer pad, 4-first mounting block, 5-second mounting block, 50-second screw hole, 51-guide hole, 6-guide column, 7-countersunk screw. DETAILED DESCRIPTION

[0020] The present invention will be further described in detail below in conjunction with the embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0021] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model.

[0022] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "open", "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] Example 1

[0024] Embodiment 1 of the utility model is a guide device for a sub-chamber in a vertical pulling single crystal furnace, comprising a main furnace chamber 1 and a sub-chamber 2 located above the main furnace chamber 1, wherein the outer peripheries of the main furnace chamber 1 and the sub-chamber 2 are respectively provided with a first mounting block 4 and a second mounting block 5, wherein a guide column 6 is provided above the first mounting block 4, and a guide sleeve 3 is provided below the second mounting block 5, and the guide column 6 passes through the guide sleeve 3.

[0025] In this application, if Figures 1 to 3 As shown, the inner diameter of the bottom end of the guide sleeve 3 is larger than the outer diameter of the guide column 6. When the auxiliary furnace chamber 2 drops to the lower limit, the guide sleeve 3 arranged on the outer periphery of the auxiliary furnace chamber 2 extends the length of the original second mounting block 5, and the inner diameter of the bottom end of the guide sleeve 3 is larger than the outer diameter of the guide column 6. During the guiding positioning, the bottom end of the guide sleeve 3 first contacts the guide column 6, thereby guiding the guide column 6 to return to the correct positioning position, so that the auxiliary furnace chamber 2 is installed above the main furnace chamber 1 without deviation, has no effect on the subsequent crystal pulling, extends the service life of the auxiliary furnace chamber 2, and improves the positioning accuracy of the guide column 6.

[0026] In some preferred embodiments, the guide sleeve 3 includes an integrally formed cylindrical first portion 30 and a trumpet-shaped second portion 31, the first portion 30 is provided with a first through hole 301 of equal diameter, and the second portion 31 is provided with a second through hole 310 of variable diameter. The second mounting block 5 is provided with a guide hole 51, and the guide hole 51 has the same diameter as the top of the first through hole 301 and the top of the second through hole 310, respectively.

[0027] Specifically, refer to Figure 2 and Figure 3 The first part 30 of the guide sleeve 3 is cylindrical, and the second part 31 thereof is trumpet-shaped, and both are hollow inside, and the first through hole 301 of the first part 30 is a hole of equal diameter, and the second through hole 310 of the second part 31 is a hole of variable diameter, wherein the aperture of the bottom end of the second through hole 310 is larger than the aperture of the top end, and the aperture of the top end of the second through hole 310 is consistent with the aperture of the first through hole 301, and the aperture of the first through hole 301 can be larger or slightly larger than the outer diameter of the guide column 6, so that the guide column 6 can pass through the first through hole 301 and the second through hole 310 for positioning. Similarly, the guide hole 51 is equal to or slightly larger than the outer diameter of the guide column 6.

[0028] In some preferred embodiments, the first portion 30 is provided with a first screw hole 300, the second mounting block 5 is provided with a second screw hole 50, a countersunk screw 7 is provided between the second mounting block 5 and the first portion 30, and the bottom end of the countersunk screw 7 passes through the second screw hole 50 and the first screw hole 300 in sequence. Figure 3 The countersunk screw 7 is provided to facilitate installation of the guide sleeve 3 below the second installation block 5, so that the guide sleeve 3 can be easily disassembled and replaced in time when the guide sleeve is damaged.

[0029] In some preferred embodiments, the first screw hole 300 is a blind hole, and the second screw hole 50 is a through hole and a stepped hole. Figure 3 The top diameter of the second screw hole 50 is larger than the bottom diameter, which is conducive to hiding the top of the countersunk screw 7 without affecting the disassembly and assembly of the countersunk screw 7.

[0030] In some preferred embodiments, the guide sleeve 3 is made of tetrafluoroethylene, and the first mounting block 4 and the second mounting block 5 are made of metal. Tetrafluoroethylene has the characteristics of high temperature resistance, which prolongs its service life and has low processing cost. At the same time, the first mounting block 4 and the second mounting block 5 made of metal can be used multiple times, increasing their utilization rate.

[0031] In some preferred embodiments, a slide groove 311 for assembling a sleeve 312 is symmetrically provided at the bottom of the second part 31, a piston rod 313 is connected to the sleeve 312 via a spring 314, a clamping plate 315 is provided at the end of the piston rod 313 away from the spring 314, and a buffer pad 316 is provided on one side of the clamping plate 315.

[0032] Reference Figure 4The piston rod 313 and the sleeve 312 are mainly arranged at the bottom of the second part 31, so as to assist in clamping the outer periphery of the guide column 6 under the action of the spring 314, guide the guide column 6, and improve the guiding efficiency. The buffer pad 316 is made of rubber and other materials, and does not affect the guide column 6 from continuing to move toward the positioning hole during the clamping process. It should be noted that the center between the two piston rods 313 here is the center of the guide hole 51.

[0033] When the utility model is used, auxiliary guidance is mainly performed by setting the first part 30 to be cylindrical and the second part 31 to be trumpet-shaped guide sleeve 3. The guide column 6 first contacts the inner wall of the second part 31 for preliminary guidance, and then contacts the buffer pad 316 in the clamping plate 315 at its bottom during the upward movement. The outer periphery of the guide column 6 makes the piston rod 313 move into the sleeve 312, so that the clamping between the clamping plates 315 is more suitable for the guide column 6; the clamping plate 315 will guide the guide column 6 to move upward, and after passing through the first through hole 301 and the guide hole 51, the installation of the auxiliary furnace chamber 2 is completed. The utility model has simple structure and processing, and is convenient for disassembly and assembly, so that the guide column 6 is accurately positioned to the guide hole 51, ensuring that automatic feeding is completed smoothly and reducing accidents.

[0034] The above is only a preferred embodiment of the utility model and does not limit the utility model in any form. According to the technical essence of the utility model, within the spirit and principles of the utility model, any simple modification, equivalent replacement and improvement made to the above embodiment still falls within the protection scope of the technical solution of the utility model.

Claims

1. A guide device for a sub-chamber in a CZ single crystal pulling furnace, characterized in that: The invention comprises a main furnace chamber (1) and an auxiliary furnace chamber (2) located above the main furnace chamber (1), wherein the outer peripheries of the main furnace chamber (1) and the auxiliary furnace chamber (2) are respectively provided with a first mounting block (4) and a second mounting block (5), a guide column (6) is provided above the first mounting block (4), a guide sleeve (3) is provided below the second mounting block (5), and the guide column (6) passes through the guide sleeve (3).

2. The guide device for the auxiliary chamber in the CZC single crystal furnace according to claim 1, characterized in that: The guide sleeve (3) comprises an integrally formed cylindrical first part (30) and a trumpet-shaped second part (31); the first part (30) is provided with a first through hole (301) of equal diameter, and the second part (31) is provided with a second through hole (310) of variable diameter.

3. The guide device for the auxiliary chamber in the CZC single crystal furnace according to claim 2, characterized in that: The second mounting block (5) is provided with a guide hole (51), and the guide hole (51) has the same diameter as the top ends of the first through hole (301) and the second through hole (310).

4. The guide device for the auxiliary chamber in the CZC single crystal furnace according to claim 2, characterized in that: The first part (30) is provided with a first screw hole (300), the second mounting block (5) is provided with a second screw hole (50), a countersunk screw (7) is provided between the second mounting block (5) and the first part (30), and the bottom end of the countersunk screw (7) passes through the second screw hole (50) and the first screw hole (300) in sequence.

5. The guide device for the auxiliary chamber in the CZC single crystal furnace according to claim 4, characterized in that: The first screw hole (300) is a blind hole, and the second screw hole (50) is a through hole and a stepped hole.

6. The guide device for the auxiliary chamber in the CZC single crystal furnace according to claim 4, characterized in that: The guide sleeve (3) is made of tetrafluoroethylene, and the first mounting block (4) and the second mounting block (5) are made of metal.

7. The guide device for the auxiliary chamber in the CZC single crystal furnace according to claim 4, characterized in that: The bottom of the second part (31) is symmetrically provided with a slide groove (311) for assembling a sleeve (312); a piston rod (313) is connected to the sleeve (312) via a spring (314); a clamping plate (315) is provided at the end of the piston rod (313) away from the spring (314); a buffer pad (316) is provided on one side of the clamping plate (315).

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