Testing device for sacrificial layer of micro-electro-mechanical system
By designing a sacrificial layer test device of a microelectronic mechanical system including arc-shaped clamps and limiting mechanism, the problem of insufficient position shift and linkage during the test process is solved, and stable fixation and high linkage of the object to be tested is achieved.
Patent Information
- Application Number
- CN202420288006.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-07
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-02-07
AI Technical Summary
In the prior art, the sacrificial layer of the microelectronic mechanical system is prone to position deviation during the test, and a simple fixing device cannot achieve multiple linkages, reducing overall linkage.
Design a test device including a base, a fixing frame, a telescopic cylinder, a detection device, a curved clamp, a moving mechanism and a limiting mechanism, and contact and fix the object to be tested through multiple clamps, and use bevel gears and worm gears to improve the device. Linkage.
It effectively avoids the positional deviation of the object to be tested during the test process, improves the accuracy of the test results, and achieves high linkage of the device through the power motor.
Smart Images
Figure CN222259280U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of micro-electro-mechanical systems, in particular to a testing device for a sacrificial layer of a micro-electro-mechanical system. Background Art
[0002] Micro-electromechanical systems refer to controllable and movable micro-electromechanical devices with sizes below the millimeter level and unit sizes in the micrometer and nanometer levels. They are systems that integrate micro-mechanisms, micro-sensors, micro-actuators, and signal processing and control functions. Different countries have different names for micro-electromechanical systems.
[0003] In order to protect the micro-electromechanical system, the prior art generally sets a sacrificial layer on the micro-electromechanical system. In order to ensure the quality of the sacrificial layer, it is generally tested, but it is not fixed during the sub-test process. Therefore, position displacement and the like are likely to occur during the test process, which will have a certain impact on the test results. Some simple fixing devices cannot achieve multiple linkages, thereby reducing the overall linkage of the device. Utility Model Content
[0004] The purpose of the utility model is to solve the shortcomings existing in the prior art. By making multiple clamping plates contact with the four sides of the object to be tested respectively, the object to be tested is fixed, and the position of the object to be tested is avoided from being shifted during the test process, which affects the test results. A testing device for the sacrificial layer of a micro-electromechanical system is proposed.
[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0006] A testing device for a sacrificial layer of a micro-electromechanical system comprises a base, a fixed frame is provided at the upper end of the base, a telescopic cylinder is penetrated through the upper end of the fixed frame, a detection device is provided at the telescopic end of the telescopic cylinder, a groove is opened at the upper end of the base, the groove is located in the fixed frame, a plurality of circumferentially arranged clamping plates are arranged in the groove, the plurality of clamping plates are all arranged in an arc shape, a moving mechanism for moving the clamping plates is provided between the groove and the plurality of side walls of the base, and a plurality of limiting mechanisms for limiting the position of the clamping plates are provided on the inner wall of the groove.
[0007] Preferably, the moving mechanism passes through an internal threaded tube rotatably connected between the groove and the side wall of the base, and a plurality of the internal threaded tubes are threadedly connected with a threaded rod, and one end of the threaded rod is connected to the side wall of the clamping plate.
[0008] Preferably, the limiting mechanism comprises a plurality of pairs of symmetrically arranged strip grooves provided on the inner wall of the groove, the plurality of pairs of strip grooves are all penetrated by limiting rods which are slidably connected, and the ends of the plurality of pairs of limiting rods are respectively connected to a plurality of clamping plates.
[0009] Preferably, the multiple side walls of the base are each provided with two symmetrically arranged fixed blocks, a rotating rod is rotatably connected to each other through the two fixed blocks, the outer walls of the multiple rotating rods are each provided with a worm, the outer walls of the multiple internal threaded tubes are each provided with a worm wheel matching the worm, and the ends of the multiple rotating rods are each provided with a bevel gear, which is meshed with the two bevel gears.
[0010] Preferably, a supporting plate is commonly provided at the lower ends of two adjacent fixed blocks, a power motor is provided at the upper end of the supporting plate, and one end of the rotating rod is connected to the end of the output shaft of the power motor.
[0011] Preferably, the number of the plurality of pairs of limit rods is four, the plurality of clamping plates and the grooves are elastically connected via a plurality of springs, and the plurality of springs are respectively sleeved on the outer walls of the plurality of limit rods.
[0012] Beneficial effects of the utility model:
[0013] 1. By making multiple clamps contact with the four sides of the object to be tested respectively, the object to be tested can be fixed to avoid the position of the object to be tested being shifted during the test process, which may affect the test results.
[0014] 2. By setting the meshing of multiple bevel gears and the cooperation of multiple pairs of worms and worm wheels, when the power motor drives one of the rotating rods to rotate, the rotation of multiple internal threaded pipes can be realized, thereby improving the overall linkage of the device. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a left side schematic diagram of the overall structure of the utility model;
[0016] Figure 2 It is a right side schematic diagram of the overall structure of the utility model;
[0017] Figure 3 It is a schematic top view of the overall structure of the utility model;
[0018] Figure 4 For this utility model Figure 2 A schematic diagram of the enlarged structure in FIG.
[0019] In the figure: 1 base, 2 fixed frame, 3 telescopic cylinder, 4 detection equipment, 5 groove, 6 clamping plate, 7 internal threaded tube, 8 threaded rod, 9 worm gear, 10 worm, 11 fixed block, 12 rotating rod, 13 power motor, 14 bevel gear, 15 strip groove, 16 limit rod, 17 spring. DETAILED DESCRIPTION
[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.
[0021] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.
[0022] Reference Figure 1-4 A test device for a sacrificial layer of a micro-electromechanical system comprises a base 1, a fixed frame 2 is provided at the upper end of the base 1, a telescopic cylinder 3 is penetrated at the upper end of the fixed frame 2, a detection device 4 is provided at the end of the telescopic end of the telescopic cylinder 3, a groove 5 is opened at the upper end of the base 1, the groove 5 is located in the fixed frame 2, a plurality of circumferentially arranged clamping plates 6 are arranged in the groove 5, and the plurality of clamping plates 6 are all arranged in an arc shape, and a moving mechanism for moving the clamping plates 6 is provided between the groove 5 and the plurality of side walls of the base 1, and the moving mechanism penetrates an internal threaded tube 7 rotatably connected between the groove 5 and the side wall of the base 1, and a threaded rod 8 is threadedly connected in the plurality of internal threaded tubes 7, and one end of the threaded rod 8 is connected to the side wall of the clamping plate 6, and the plurality of clamping plates 6 are respectively contacted with the four sides of the object to be tested, so as to realize the fixation of the object to be tested, and avoid the position displacement of the object to be tested during the test process, which affects the test result.
[0023] The inner wall of the groove 5 is provided with a plurality of limiting mechanisms for limiting the clamping plate 6, and the limiting mechanisms include a plurality of pairs of symmetrically arranged strip grooves 15 opened on the inner wall of the groove 5, and the plurality of pairs of strip grooves 15 are all penetrated by limiting rods 16 that are slidably connected, and the ends of the plurality of pairs of limiting rods 16 are respectively connected to the plurality of clamping plates 6.
[0024] Multiple side walls of the base 1 are each provided with two symmetrically arranged fixed blocks 11, and a rotating rod 12 is rotatably connected to each other between the two fixed blocks 11. The outer walls of the multiple rotating rods 12 are each provided with a worm 10, and the outer walls of the multiple internally threaded tubes 7 are each provided with a worm wheel 9 that matches the worm 10. The ends of the multiple rotating rods 12 are each provided with a bevel gear 14, which meshes with the two bevel gears 14. By setting the meshing of multiple bevel gears 14 and the cooperation of multiple pairs of worms 10 and worm wheels 9, when the power motor 13 drives one of the rotating rods 12 to rotate, the rotation of the multiple internally threaded tubes 7 can be realized, thereby improving the overall linkage of the device.
[0025] The lower ends of two adjacent fixed blocks 11 are provided with a supporting plate, and the upper end of the supporting plate is provided with a power motor 13. The end of one rotating rod 12 is connected to the end of the output shaft of the power motor 13 to provide power for the entire device.
[0026] The number of the plurality of pairs of limiting rods 16 is four, and the plurality of clamping plates 6 and the grooves 5 are elastically connected via a plurality of springs 17 , and the plurality of springs 17 are respectively sleeved on the outer walls of the plurality of limiting rods 16 .
[0027] When the utility model is used, when testing the sacrificial layer, the object to be tested is placed in the groove 5, and the power motor 13 is started, so that the power motor 13 drives one of the rotating rods 12 to rotate, and the meshing action of the multiple pairs of bevel gears 14 between the multiple rotating rods 12 is utilized to make the multiple rotating rods 12 rotate at the same time, so that the worm 10 on the outer wall of the multiple rotating rods 12 rotates, and the cooperation between the worm 10 and the worm wheel 9 is utilized to make the internal threaded tube 7 rotate, and through the threaded connection between the internal threaded tube 7 and the threaded rod 8, and the limiting action of the multiple limiting rods 16 on the clamping plate 6, the multiple threaded rods 8 are moved to push the multiple clamping plates 6 to move, so that the multiple clamping plates 6 are respectively in contact with the four sides of the object to be tested (the thread rotation directions are opposite to the two threaded rods 8), so as to fix the object to be tested, avoid the position of the object to be tested being shifted during the test process, and affect the test result, and then start the telescopic cylinder 3, so that the telescopic end of the telescopic cylinder 3 moves down with the detection equipment 4 to perform the test operation.
[0028] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.
Claims
1. A test device for a sacrificial layer of a micro-electromechanical system, comprising a base (1), characterized in that: The upper end of the base (1) is provided with a fixed frame (2), the upper end of the fixed frame (2) is penetrated by a telescopic cylinder (3), the telescopic end of the telescopic cylinder (3) is provided with a detection device (4), the upper end of the base (1) is provided with a groove (5), the groove (5) is located in the fixed frame (2), a plurality of circumferentially arranged clamping plates (6) are arranged in the groove (5), the plurality of clamping plates (6) are all arranged in an arc shape, a moving mechanism for moving the clamping plates (6) is arranged between the groove (5) and the plurality of side walls of the base (1), and a plurality of limiting mechanisms for limiting the position of the clamping plates (6) are arranged on the inner wall of the groove (5).
2. The test device for the sacrificial layer of a micro-electromechanical system according to claim 1, characterized in that: The moving mechanism penetrates an internal threaded tube (7) rotatably connected between the groove (5) and the side wall of the base (1), and a plurality of the internal threaded tubes (7) are threadedly connected with threaded rods (8), one end of the threaded rods (8) is connected to the side wall of the clamping plate (6).
3. The test device for the sacrificial layer of a micro-electromechanical system according to claim 2, characterized in that: The limiting mechanism comprises a plurality of pairs of symmetrically arranged strip grooves (15) formed on the inner wall of the groove (5), wherein the plurality of pairs of strip grooves (15) are all penetrated by limiting rods (16) which are slidably connected, and the ends of the plurality of pairs of limiting rods (16) are respectively connected to a plurality of clamping plates (6).
4. The test device for the sacrificial layer of a micro-electromechanical system according to claim 3, characterized in that: The base (1) is provided with two symmetrically arranged fixed blocks (11) on multiple side walls, and a rotating rod (12) is rotatably connected to and penetrates between the two relatively fixed blocks (11). The outer walls of the rotating rods (12) are provided with a worm (10), and the outer walls of the internally threaded tubes (7) are provided with a worm wheel (9) matched with the worm (10). The ends of the rotating rods (12) are provided with bevel gears (14), and the relatively two bevel gears (14) are meshed with each other.
5. The test device for the sacrificial layer of a micro-electromechanical system according to claim 4, characterized in that: The lower ends of two adjacent fixed blocks (11) are provided with a supporting plate, the upper end of the supporting plate is provided with a power motor (13), and the end of one of the rotating rods (12) is connected to the end of the output shaft of the power motor (13).
6. The test device for the sacrificial layer of a micro-electromechanical system according to claim 5, characterized in that: The number of the plurality of pairs of limit rods (16) is four, and the plurality of clamping plates (6) and the grooves (5) are elastically connected via a plurality of springs (17), and the plurality of springs (17) are respectively sleeved on the outer walls of the plurality of limit rods (16).