Mask repairing machine and fixture for correcting position of mask

Abstract

The utility model provides a mask plate repairing machine fixture for correcting the position of a mask plate, which comprises a linear driving mechanism and two clamping pieces, the two clamping pieces are in transmission connection with the linear driving mechanism, the two clamping pieces are used for clamping the mask plate, the linear driving mechanism is used for being installed on a platform of the repairing machine, and the linear driving mechanism is used for being installed on the platform of the repairing machine. Keeping the mask parallel to the platform of the repairing machine; the linear driving mechanism can output linear motion so as to drive the two clamping pieces to get close to each other or get away from each other. Clamping parts are arranged on the clamping pieces, and the two clamping pieces which are close to each other can clamp the two opposite sides of the mask plate through the clamping parts. According to the mask repairing machine, the two clamping pieces can be driven by the linear driving mechanism to move close to each other, so that the mask is clamped by the two clamping pieces, and the clamped mask can be kept parallel to the platform of the repairing machine, so that the step of correcting the mask is omitted, and the repairing efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of mask repair machines, and in particular relates to a clamp for correcting the position of a mask by the mask repair machine. Background Art

[0002] In the field of integrated circuit manufacturing, photolithography technology can be used to transfer patterns from a photolithography mask containing circuit design information to a wafer. The photolithography mask is a flat plate that is partially transparent to exposure light and has geometric figures that are shading to exposure light. The plate can be used to expose the photoresist on the surface of the wafer to form corresponding patterns.

[0003] However, during the manufacturing process of the photolithography mask, the surface of the light-transmitting substrate in the photolithography mask is easily damaged and defects are formed, causing extra redundant patterns in the exposure process to be transferred to the wafer. Therefore, the mask needs to be repaired.

[0004] In the past, repairs required the mask to be placed parallel to the repair machine platform. This process often required horizontal calibration of the mask coordinate position to find the repair point, which took a long time. At the same time, during the repair process, the mask might be accidentally touched, causing it to move, affecting the quality of the repair. Utility Model Content

[0005] The utility model provides a mask repair machine and a clamp for correcting the position of the mask.

[0006] According to the first aspect of the present application, the present application provides a fixture for correcting the position of a mask plate in a mask repair machine, comprising: a linear drive mechanism and two clamping members, the two clamping members are transmission-connected to the linear drive mechanism, the two clamping members are used to clamp the mask plate, the linear drive mechanism is used to be installed on the platform of the repair machine, and keep the mask plate parallel to the platform of the repair machine; the linear drive mechanism can output linear motion to drive the two clamping members to approach or move away from each other; a clamping portion is provided on the clamping member, and the two clamping members approaching each other can clamp the opposite sides of the mask plate through the clamping portion.

[0007] As a further solution of the clamp for correcting the position of the mask in the mask repair machine provided in the present application, the clamp is provided with a plurality of clamping parts, and the plurality of clamping parts respectively correspond to the side lengths of masks of different sizes.

[0008] As a further solution of the clamp for correcting the position of the mask in the mask repair machine provided in the present application, a plurality of the clamping portions are sequentially arranged on the clamping member along a straight line in a manner of decreasing lengths.

[0009] As a further solution of the clamp for correcting the position of the mask plate in the mask repair machine provided in the present application, the clamping part is a clamping groove, the length of the clamping groove is adapted to the side length of the mask plate, and the clamping grooves of the two clamping members respectively clamp the opposite side edges of the mask plate.

[0010] As a further solution of the clamp for correcting the position of the mask in the mask repair machine provided in the present application, a support portion is further provided at the bottom of the clamping groove, and the support portion is used to support the bottom of the mask.

[0011] As a further solution of the clamp for correcting the position of the mask in the mask repair machine provided in the present application, the support portion includes at least two support plates, and the at least two support plates are arranged at a distance from each other at the bottom of the clamping groove.

[0012] As a further solution of the fixture for correcting the position of the mask plate in the mask repair machine provided in the present application, the linear drive mechanism includes two linear drive components and two linear guide components, the two linear guide components are used to be installed on the platform of the mask plate, the opposite sides of the two clamps are respectively slidably arranged on the two linear guide components, the two linear drive components are respectively arranged on the opposite sides of the two clamps, and the linear drive component can move along a straight line through the output of the linear guide component.

[0013] As a further solution of the clamp for correcting the position of the mask in the mask repair machine provided in the present application, the linear drive component is a linear screw, and thread holes are respectively provided on opposite sides of the clamp, and the linear screw is screwed into the thread holes.

[0014] As a further solution of the clamp for correcting the position of the mask in the mask repair machine provided in the present application, the linear guide assembly is a linear guide rail, and the clamping member is slidably disposed on the linear guide rail.

[0015] According to the second aspect of the present application, the present application provides a mask repair machine, including the clamp for correcting the position of the mask repair machine, and also includes: a laser repairer, and the laser repairer is located above the repair machine platform.

[0016] The utility model provides a mask repair machine and a clamp for correcting the position of the mask thereof. A linear drive mechanism can be used to drive two clamping parts to move closer to each other, so that the two clamping parts clamp the mask, and the clamped mask can be kept in a parallel state with the platform of the repair machine, thereby saving mask correction steps and improving repair efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A top view of a fixture for correcting the position of a mask in a mask repair machine provided in the present application;

[0018] Figure 2 A side view of a clamp for correcting the position of a mask in the mask repair machine provided in the present application, which is installed in the mask repair machine. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is described below in conjunction with the accompanying drawings and embodiments.

[0020] After placing the mask on the repair machine platform, it is necessary to use a microscope to find a long horizontal pattern on the mask and repeatedly perform horizontal movement correction until the pattern is level with the movement direction of the repair machine. This takes a long time and affects the repair efficiency.

[0021] See also Figure 1 and Figure 2 As shown, the fixture for correcting the position of the mask in the mask repair machine provided in this embodiment includes: a linear drive mechanism 10 and two clamping members 20 .

[0022] The two clamping members 20 are connected to the linear drive mechanism 10 in a transmission manner. The two clamping members 20 are used to clamp the mask 100. The linear drive mechanism 10 is used to be installed on the platform of the repair machine 200 and keep the mask 100 parallel to the platform of the repair machine 200. In other words, after the mask 100 is clamped by the two clamping members 20, the mask 100 and the platform of the repair machine 200 remain parallel. Compared with the previous process that requires repeated horizontal calibration, the time cost can be effectively reduced, thereby improving the efficiency of repairing the mask 100. The linear drive mechanism 10 can output linear motion to drive the two clamping members 20 to move closer to or away from each other.

[0023] The clamping member 20 is provided with a clamping portion 21, and two clamping members 20 close to each other can clamp the opposite sides of the mask 100 through the clamping portions 21, thereby clamping the mask 100 and repairing the mask 100. When the repair is completed, the two clamping members 20 are driven away from each other by the linear drive mechanism 10, and the mask 100 can be released to take out the mask 100.

[0024] In this embodiment, the clamping member 20 is provided with a plurality of clamping portions 21 , which respectively correspond to the side lengths of the mask plates 100 of different sizes. In other words, the plurality of clamping portions 21 provided on the clamping member 20 can clamp the mask plates 100 of different sizes.

[0025] In a specific embodiment, the commonly used sizes of the mask plates 100 are divided into 5 inches, 6 inches and 7 inches. In this embodiment, three clamping parts 21 are provided on the clamping member 20. The three clamping parts 21 correspond to the side lengths of the 5-inch, 6-inch and 7-inch mask plates 100 respectively, so that the 5-inch, 6-inch and 7-inch mask plates 100 can be clamped.

[0026] In this embodiment, a plurality of clamping portions 21 are sequentially arranged on the clamping member 20 along a straight line in a manner of decreasing length.

[0027] Specifically, taking the opposite side of the two clamping members 20 as an example, the clamping portion 21 with the longest length is located on the opposite side of the two clamping members 20 facing each other.

[0028] In this embodiment, the clamping portion 21 is a clamping groove 211 , the length of which is adapted to the side length of the mask 100 , and the clamping grooves 211 of the two clamping members 20 clamp opposite side edges of the mask 100 , respectively.

[0029] In one embodiment, the clamping groove 211 is formed by a notch disposed on the clamping member 20 to reduce the difficulty of manufacturing the clamping groove 211 .

[0030] A supporting portion 212 is further provided at the bottom of the clamping groove 211 . The supporting portion 212 is used to support the bottom of the mask 100 to ensure that the mask 100 is stably clamped between the two clamping members 20 .

[0031] In one embodiment of the present application, the support portion 212 includes at least two support plates, and the at least two support plates are arranged at a distance from each other at the bottom of the clamping groove 211 . The at least two support plates can support at least two points on the same side of the mask 100 .

[0032] It should be noted that the support portion 212 on each clamping member 20 can support the mask 100 on a plane parallel to the platform of the repair machine 200 .

[0033] In this embodiment, the linear drive mechanism 10 includes two linear drive components 11 and two linear guide components 12. The two linear guide components 12 are used to be installed on the platform of the mask plate 200. The opposite sides of the two clamping members 20 can be slidably arranged on the two linear guide components 12 respectively. The two linear drive components are respectively arranged on the opposite sides of the two clamping members 20. The linear drive component 11 can move along a straight line through the output of the linear guide component 12, thereby driving the two clamping members 20 to move closer to or away from each other.

[0034] In one embodiment of the present application, the linear drive assembly 11 is a linear screw, and the opposite sides of the clamping member 20 are respectively provided with screw holes, and the linear screw is screwed into the screw holes. Of course, the screw can be driven to rotate by a driving motor or manually, so that the clamping member 20 converts the rotational motion of the linear screw around its axial direction into a linear motion along the axial direction of the linear screw, thereby making the clamping members 20 approach or move away from each other.

[0035] In this embodiment, the linear guide assembly 12 is a linear guide rail, which is installed on the platform of the repair machine 200. The clamping member 20 is slidably disposed on the linear guide rail to guide the moving direction of the clamping member 20 through the linear guide rail.

[0036] This embodiment also provides a mask repair machine, which includes the clamp for correcting the position of the mask repair machine in the above embodiment, such as Figure 2 As shown, it also includes: a laser repairer 300, which is located above the platform of the repair machine 200.

[0037] In actual use, after the mask 100 is clamped by two clamps 20, the zero point position of the mask 100 is found, and the coordinate position of the point to be repaired is input to the repair machine, and the laser repairer 300 can be moved to the end of the defect, saving the mask 100 correction step and thereby improving the repair efficiency.

[0038] To sum up, the mask repair machine and the clamp for correcting the position of the mask provided by the utility model can drive the two clamping parts to move closer to each other through a linear drive mechanism, so that the two clamping parts clamp the mask, and the clamped mask can be kept in a parallel state with the platform of the repair machine, thereby saving the mask correction steps and improving the repair efficiency.

[0039] The above contents are further detailed descriptions of the present application in combination with specific implementation methods, and it cannot be determined that the specific implementation of the present application is limited to these descriptions. For ordinary technicians in the technical field to which the present application belongs, several simple deductions or substitutions can be made without departing from the inventive concept of the present application.

Claims

1. A fixture for calibrating the position of a mask plate in a mask repair machine, characterized in that: include: A linear drive mechanism and two clamping members, the two clamping members are transmission-connected to the linear drive mechanism, the two clamping members are used to clamp the mask, the linear drive mechanism is used to be installed on the platform of the repair machine and keep the mask parallel to the platform of the repair machine; the linear drive mechanism can output linear motion to drive the two clamping members to approach or move away from each other; a clamping part is provided on the clamping member, and the two clamping members approaching each other can clamp the opposite sides of the mask through the clamping part.

2. The fixture for correcting the position of a mask plate in a mask repair machine according to claim 1, characterized in that: The clamping piece is provided with a plurality of clamping parts, and the plurality of clamping parts respectively correspond to the side lengths of mask plates of different sizes.

3. The fixture for correcting the position of a mask plate in a mask repair machine according to claim 2, characterized in that: The plurality of clamping portions are sequentially arranged on the clamping member along a straight line in a manner of sequentially decreasing lengths.

4. The fixture for correcting the position of a mask plate in a mask repair machine according to claim 3, characterized in that: The clamping portion is a clamping groove, the length of which is adapted to the length of the side edge of the mask, and the clamping grooves of the two clamping members clamp the two opposite side edges of the mask respectively.

5. The fixture for correcting the position of a mask plate in a mask repair machine according to claim 4, characterized in that: A supporting portion is also provided at the bottom of the clamping groove, and the supporting portion is used to support the bottom of the mask plate.

6. The fixture for correcting the position of a mask plate in a mask repair machine according to claim 5, characterized in that: The support portion includes at least two support sheets, and the at least two support sheets are arranged at a distance from each other at the bottom of the clamping groove.

7. The fixture for correcting the position of a mask by a mask repair machine according to claim 1, characterized in that: The linear drive mechanism includes two linear drive components and two linear guide components. The two linear guide components are used to be installed on the platform of the mask plate. The opposite sides of the two clamping members are slidably arranged on the two linear guide components. The two linear drive components are respectively arranged on the opposite sides of the two clamping members. The linear drive component can output linear motion through the linear guide component.

8. The fixture for correcting the position of a mask plate in a mask repair machine according to claim 7, characterized in that: The linear drive assembly is a linear screw rod, and thread holes are respectively arranged on opposite sides of the clamping member, and the linear screw rod is screwed into the thread holes.

9. The fixture for correcting the position of a mask plate in a mask repair machine according to claim 7, characterized in that: The linear guide assembly is a linear guide rail, and the clamping member is slidably arranged on the linear guide rail.

10. A mask repair machine, characterized in that: It comprises a fixture for correcting the position of a mask by a mask repair machine as described in any one of claims 1 to 9, and also comprises: a laser repairer, wherein the laser repairer is located above the repair machine platform.

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