Micro absolute pressure measuring device based on small-range gauge pressure chip

Abstract

The utility model provides a micro absolute pressure measuring device based on a small-range gauge pressure chip, and the device comprises a tube seat which is provided with a small-range gauge pressure chip, and the gauge pressure chip is provided with a positive end and a negative end; the diaphragm capsule is provided with a positive cavity channel; wherein the tube base is installed on the diaphragm capsule, one end of the positive cavity channel is communicated with the positive end of the gauge pressure chip, the other end of the positive cavity channel is suitable for introducing a measured fluid or a pressure guide medium, so that the measured fluid or the pressure guide medium can be introduced to the positive end of the gauge pressure chip, and the negative end of the gauge pressure chip is configured to be in a vacuum state. According to the utility model, micro absolute pressure measurement is realized by using the small-range gauge pressure chip.

Description

Technical Field

[0001] The utility model relates to the technical field of sensor manufacturing, in particular to a micro-absolute pressure measuring device based on a small-range gauge pressure chip. Background Art

[0002] At present, there are the following constraints on the manufacture of micro-absolute pressure chips: 1. The manufacturing process of high-precision chips is complex and costly; 2. Conventional calibration equipment cannot be calibrated to the micro-absolute pressure range, that is, the calibration equipment will stop working when it is close to a vacuum and cannot be accurately calibrated.

[0003] Therefore, how to achieve micro-absolute pressure measurement with simple process and low cost is an urgent problem to be solved. Utility Model Content

[0004] The utility model aims to provide a micro-absolute pressure measuring device based on a small-range gauge pressure chip, so as to measure the micro-absolute pressure by utilizing the small-range gauge pressure chip.

[0005] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions:

[0006] A micro-absolute pressure measuring device based on a small-range gauge pressure chip, the measuring device comprising:

[0007] The pipe seat is provided with a gauge pressure chip with a small range, and the gauge pressure chip has a positive terminal and a negative terminal;

[0008] A membrane box having a positive cavity channel;

[0009] Among them, the tube seat is installed on the diaphragm box, one end of the positive cavity channel is connected to the positive end of the gauge pressure chip, and the other end is suitable for passing the measured fluid or pressure-conducting medium so that the measured fluid or pressure-conducting medium can pass to the positive end of the gauge pressure chip, and the negative end of the gauge pressure chip is configured to be in a vacuum state.

[0010] In some embodiments of the present invention, the membrane box is provided with a mounting groove, and the mounting groove is recessed from the surface of the membrane box toward the inside to accommodate the tube seat.

[0011] In some embodiments of the present invention, one end of the positive cavity channel close to the gauge pressure chip is connected to the bottom of the installation groove.

[0012] In some embodiments of the utility model, the head of the tube seat is sealed and fixedly connected to the bottom of the installation groove, so that the installation groove is sealed and isolated from the positive cavity channel.

[0013] In some embodiments of the utility model, the tail of the tube seat is sealed and fixedly connected to the notch of the installation groove, so that the installation groove is sealed and isolated from the external environment, wherein the interior of the installation groove is in a vacuum state.

[0014] In some embodiments of the utility model, a pressure transmission diaphragm is provided at one end of the positive cavity channel away from the gauge pressure chip, the pressure transmission diaphragm isolates the interior of the positive cavity channel from the external environment, and the interior of the positive cavity channel accommodates a pressure-conducting medium;

[0015] The side of the pressure-transmitting diaphragm facing away from the positive cavity channel is suitable for contacting with the measured fluid.

[0016] Compared with the prior art, the technical solution of the utility model has the following beneficial effects:

[0017] The utility model provides a micro-absolute pressure measuring device based on a small-range gauge pressure chip; the utility model realizes the use of a gauge pressure chip with a small range to measure the micro-absolute pressure data of a measured fluid or a pressure-conducting medium, and its core design concept is to configure the negative end of the gauge pressure chip with a small range to a vacuum state, and connect the positive end of the gauge pressure chip to the measured fluid or the pressure-conducting medium, thereby achieving the purpose of "using the gauge pressure chip to measure micro-absolute pressure", and the solution provided by the utility model has a simple structure and low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some implementation plans of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 A schematic structural diagram of a micro-absolute pressure measuring device provided in one embodiment of the utility model;

[0020] Figure 2 It is a structural schematic diagram of a micro-absolute pressure measuring device in another embodiment of the utility model;

[0021] Figure 3 A schematic flow chart of a method for manufacturing a micro-absolute pressure measuring device provided in one embodiment of the utility model.

[0022] The main reference numerals in the drawings of this application specification are described as follows:

[0023] 1-tube base; 11-head; 12-tail;

[0024] 2-membrane box; 21-positive cavity channel; 22-installation groove; 221-slot; 222-slot bottom; 23-first vacuum pumping pipeline; 24-second vacuum pumping pipeline;

[0025] 3- Conductive tube. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention. It should be understood that the specific implementation methods described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0027] Any specific numerical value disclosed herein (including the endpoint of the numerical range) is not limited to the exact value of the numerical value, but should be understood to also cover values ​​close to the exact value, such as all possible numerical values ​​within the range of ±5% of the exact value. In addition, for the disclosed numerical range, the endpoint values ​​of the range, the endpoint values ​​and the specific point values ​​in the range, and the specific point values ​​can be arbitrarily combined to obtain one or more new numerical ranges, and these new numerical ranges should also be regarded as specifically disclosed herein.

[0028] Unless otherwise specified, the terms used herein have the same meaning as commonly understood by those skilled in the art. If a term is defined herein and its definition is different from the commonly understood meaning in the art, the definition herein shall prevail.

[0029] First aspect

[0030] See also Figure 1 and Figure 2 A micro-absolute pressure measuring device based on a small-range gauge pressure chip, the measuring device comprising: a tube seat 1, provided with a gauge pressure chip with a small range, the gauge pressure chip having a positive end and a negative end; a diaphragm box 2, provided with a positive cavity channel 21; wherein, the tube seat 1 is mounted on the diaphragm box 2, one end of the positive cavity channel 21 is communicated with the positive end of the gauge pressure chip, and the other end is suitable for passing the measured fluid or pressure-conducting medium, so that the measured fluid or pressure-conducting medium can pass to the positive end of the gauge pressure chip, and the negative end of the gauge pressure chip is configured to be in a vacuum state.

[0031] The utility model realizes the use of a gauge pressure chip with a small range to measure the absolute pressure data of a measured fluid or a pressure-conducting medium. Its core design concept is to configure the negative end of the gauge pressure chip with a small range to a vacuum state, and connect the positive end of the gauge pressure chip to the measured fluid or the pressure-conducting medium, thereby achieving the purpose of "using the gauge pressure chip to measure micro-absolute pressure"; and, because the manufacturing technology of the gauge pressure chip and the gauge pressure chip with a small range is relatively mature and the cost is relatively low, the absolute pressure measurement solution provided by the utility model also has the advantages of simple structure and low cost.

[0032] It should be emphasized that the "micro" in "micro absolute pressure" recorded in the specification of the utility model refers to a small range, and the "small range" recorded in the specification of the utility model refers to a measurement range between 0 and 6 kPa, and the micro absolute pressure measuring device provided by the utility model has a range between 0 and 1 kPa.

[0033] It is worth noting that the "measured fluid" in the specification of the utility model includes any one of gas and liquid.

[0034] See also Figure 1 and Figure 2 In some embodiments of the present invention, the membrane box 2 is provided with a mounting groove 22, and the mounting groove 22 is recessed from the surface of the membrane box 2 to the inside to accommodate the tube seat 1. It is understandable that the specific form and parameters of the mounting groove 22 can be adjusted or modified according to the actual application scenario and design standards.

[0035] See also Figure 1 and Figure 2 In some embodiments of the present invention, one end of the positive cavity channel 21 close to the gauge chip is connected to the bottom 222 of the mounting groove 22; Figure 1 As shown, the head 11 of the tube seat 1 is located at the bottom 222 of the groove, and the positive cavity channel 21 can be connected with the head 11 of the tube seat 1 at this time; in some embodiments of the utility model, the positive end of the gauge pressure chip is located at the head 11 of the tube seat 1 to be connected with the positive cavity channel 21, so as to sense the pressure of the measured fluid or pressure-conducting medium located in the positive cavity channel 21.

[0036] See also Figure 1 and Figure 2 In some embodiments of the present invention, the head 11 of the tube seat 1 is sealed and fixedly connected to the bottom of the mounting groove 22, so that the mounting groove 22 is sealed and isolated from the positive cavity channel 21. It can be understood that the specific shapes and parameters of the head 11 and the bottom of the mounting groove 22 can be selected and adjusted according to actual application requirements and design standards.

[0037] See also Figure 1 and Figure 2 In some embodiments of the present invention, the tail portion 12 of the tube seat 1 is sealed and fixedly connected to the notch 221 of the mounting groove 22, so that the mounting groove 22 is sealed and isolated from the external environment, wherein the interior of the mounting groove 22 is in a vacuum state. It is understandable that the specific shapes and parameters of the tail portion 12 and the notch 221 can be selected and adjusted according to actual application requirements and design standards.

[0038] See also Figure 1 and Figure 2In some embodiments of the utility model, a pressure-transmitting diaphragm is provided at one end of the positive cavity channel 21 away from the gauge pressure chip, and the pressure-transmitting diaphragm isolates the interior of the positive cavity channel 21 from the external environment, and a pressure-conducting medium is accommodated in the interior of the positive cavity channel 21; the side of the pressure-transmitting diaphragm away from the positive cavity channel 21 is suitable for contacting the measured fluid. Specifically, the measured fluid located outside the pressure-transmitting diaphragm contacts and squeezes the pressure-transmitting diaphragm because of its certain pressure, so that the pressure-transmitting diaphragm is deformed and squeezes the pressure-conducting medium located inside the inner side of the pressure-transmitting diaphragm and the positive cavity channel 21, and the pressure-conducting medium can then transmit the pressure change to the positive end of the gauge pressure chip.

[0039] Second aspect

[0040] See also Figures 1 to 3 , a manufacturing method of the above-mentioned micro-absolute pressure measuring device based on a small-range gauge pressure chip, comprising the following steps: S1, providing the tube seat 1 and the diaphragm box 2; S2, installing the tube seat 1 in the installation groove 22 of the diaphragm box 2; S3, using a vacuum pump to evacuate the installation groove 22 so that the negative end of the gauge pressure chip is in a vacuum state. Through the above method, the utility model achieves the effect of "using the gauge pressure chip to measure absolute pressure".

[0041] See also Figures 1 to 3 In some embodiments of the utility model, in the step S2, the head 11 of the tube seat 1 is located at the bottom 222 of the installation groove 22, and the tail 12 of the tube seat 1 is located at the notch 221 of the installation groove 22, so that the positive end of the gauge pressure chip is located at the bottom 222 of the groove, and the negative end of the gauge pressure chip is located at the notch 221.

[0042] See also Figures 1 to 3 In some embodiments of the present invention, in step S2, the head 11 of the tube seat 1 is welded to the bottom 222 of the mounting groove 22 by energy storage welding to seal and fix, so that the mounting groove 22 and the positive cavity channel 21 are sealed and isolated. It can be understood that the specific process condition parameters of the energy storage welding can be selected and adjusted according to the actual application scenario.

[0043] In some embodiments of the utility model, a circle of smaller flanges can be processed along the circumference of the groove bottom 222. The small flange can melt quickly during the energy storage welding process due to its smaller structural size, and can then be welded and fixed to the outer periphery of the head 11.

[0044] See also Figures 1 to 3In some embodiments of the present invention, in step S2, the tail portion 12 of the tube seat 1 is welded to the notch 221 of the mounting groove 22 by argon arc welding to seal and fix the notch 221, so that the mounting groove 22 is sealed and isolated from the external environment. It is understandable that the specific process condition parameters of argon arc welding can be selected and adjusted according to the actual application scenario.

[0045] See also Figures 1 to 3 In some embodiments of the utility model, in step S1, the membrane box 2 is provided with a first vacuum pipe 23, one end of the first vacuum pipe 23 is connected to the negative end of the gauge pressure chip, and the other end is used to connect to the vacuum pump; in step S3, the first vacuum pipe 23 is vacuumed by the vacuum pump to make the negative end of the gauge pressure chip in a vacuum state. It can be understood that the specific shape and size of the first vacuum pipe 23 can be selected and adjusted according to the actual application scenario and design standards.

[0046] See also Figures 1 to 3 In some embodiments of the present invention, in step S3, after the negative end of the gauge pressure chip is in a vacuum state, the first vacuum pipe 23 is welded and sealed (see Figure 2 The upper end of the first vacuum pipe 23 in the vacuum pump is then removed.

[0047] See also Figures 1 to 3 In some embodiments of the utility model, step S4 is further followed by step S3, and step S4 includes: using the vacuum pump to evacuate the positive cavity channel 21 to calibrate the zero point of the gauge pressure chip. It is worth noting that when the port of the positive cavity channel 21 away from the positive end of the gauge pressure chip is not provided with any blocking structure such as a pressure transmission diaphragm, the above method can be used to directly evacuate the positive cavity channel 21 through this port to calibrate the zero point of the gauge pressure chip; and, this design of the positive cavity channel 21 port without blocking can directly allow the measured fluid to enter the positive cavity channel 21 and pass to the positive end of the gauge pressure chip, thereby directly measuring the absolute pressure data of the measured fluid.

[0048] See also Figures 1 to 3In some embodiments of the utility model, there is a step S4 after the step S3, and the step S4 includes: using the vacuum pump to evacuate the positive cavity channel 21 through the second vacuum tube 24 connected to the positive cavity pipeline 21, so as to calibrate the zero point of the gauge pressure chip. It is worth noting that in this scheme, a pressure transmission diaphragm is provided at the port of the positive cavity channel 21 away from the positive end of the gauge pressure chip, so as to isolate the measured fluid located on the outside of the pressure transmission diaphragm from the pressure-conducting medium located on the inside of the pressure transmission diaphragm and inside the positive cavity pipeline 21; therefore, after the pressure transmission diaphragm is welded to the above-mentioned port, the above-mentioned "evacuation to calibrate the zero point" operation is performed through the second vacuum tube 24.

[0049] See also Figures 1 to 3 In some embodiments of the present invention, step S4 is followed by step S5, wherein step S5 comprises: after completing the zero point calibration, the pressure-conducting medium is poured into the positive cavity channel 21 through the second vacuum pipe 24, and then the second vacuum pipe 24 is welded and sealed (for details, see Figure 2 It is worth noting that, in this solution, a pressure transmission diaphragm is provided at the port of the positive cavity channel 21 away from the positive end of the gauge pressure chip to isolate the measured fluid located outside the pressure transmission diaphragm from the pressure-conducting medium located inside the pressure transmission diaphragm and inside the positive cavity channel 21; therefore, after the pressure transmission diaphragm is welded to the above-mentioned port, the above-mentioned "injection of pressure-conducting medium" operation is performed through the second vacuum tube 24.

[0050] In some embodiments of the present invention, a long drift experiment can be used to perform zero point calibration.

[0051] In addition, it should be noted that see Figure 2 The tail 12 of the differential pressure sensor tube base 1 is provided with a plurality of conductive tubes 3; specifically, a plurality of contacts are provided on the gauge pressure chip in the tube base 2, and these contacts are welded to the lower end of the conductive tube 3, i.e., the connection between the conductive tube 3 and the tail 12 of the tube base 1, through gold wires, while the upper end of the conductive tube 3 is led out through a general wire and connected to the electronic components on the circuit board. Figure 2 It should be emphasized that Figure 2 The conductive tube 3 and the second vacuum pipe 24 are only overlapped in the picture, and the two are not related, and there is no necessary connection relationship between the two.

[0052] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited to this. Any technician familiar with the technical field can easily think of changes or replacements within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model shall be based on the protection scope of the claims. In addition, the specification uses specific examples to illustrate the principles and implementation methods of the utility model. The description of the above embodiments is only used to help understand the method and core ideas of the utility model. The content of this specification should not be understood as a limitation on the utility model.

Claims

1. A micro-absolute pressure measuring device based on a small-range gauge pressure chip, characterized in that: The measuring device comprises: The pipe seat (1) is provided with a gauge pressure chip with a small range, wherein the gauge pressure chip has a positive terminal and a negative terminal; The membrane box (2) is provided with a positive cavity channel (21); The tube seat (1) is installed on the membrane box (2), one end of the positive cavity channel (21) is connected to the positive end of the gauge pressure chip, and the other end is suitable for passing the measured fluid or pressure-conducting medium so that the measured fluid or pressure-conducting medium can pass to the positive end of the gauge pressure chip, and the negative end of the gauge pressure chip is configured to be in a vacuum state.

2. The micro-absolute pressure measuring device according to claim 1, characterized in that: The membrane box (2) is provided with a mounting groove (22), and the mounting groove (22) is recessed from the surface of the membrane box (2) toward the inside to accommodate the tube seat (1).

3. The micro-absolute pressure measuring device according to claim 2, characterized in that: One end of the positive cavity channel (21) close to the gauge pressure chip is connected to the groove bottom (222) of the installation groove (22).

4. The micro-absolute pressure measuring device according to claim 2, characterized in that: The head portion (11) of the tube seat (1) is sealed and fixedly connected to the bottom of the installation groove (22), so that the installation groove (22) and the positive cavity channel (21) are sealed and isolated.

5. The micro-absolute pressure measuring device according to claim 4, characterized in that: The tail portion (12) of the tube seat (1) is sealed and fixedly connected to the notch (221) of the installation groove (22), so that the installation groove (22) is sealed and isolated from the external environment, wherein the interior of the installation groove (22) is in a vacuum state.

6. The micro-absolute pressure measuring device according to any one of claims 1 to 5, characterized in that: A pressure transmission diaphragm is provided at one end of the positive cavity channel (21) away from the gauge pressure chip, the pressure transmission diaphragm isolates the interior of the positive cavity channel (21) from the external environment, and a pressure-conducting medium is accommodated in the interior of the positive cavity channel (21); The side of the pressure transmission diaphragm facing away from the positive cavity channel (21) is suitable for contacting with the measured fluid.

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