Pressing rod structure, material box positioning tool, wafer loading equipment and material box loading device

Abstract

The utility model relates to the technical field of wafer detection, and provides a pressing rod structure, a material box positioning tool, wafer loading equipment and a material box loading device. The pressing rod structure comprises a guide rod, a top contact rod, a trigger rod and a linkage pressing rod. The guide rod, the top feeler lever and the trigger rod are all connected to the linkage pressing rod and are arranged at intervals in the first direction, and the guide rod and the trigger rod are arranged on the two sides of the top feeler lever in the first direction respectively; the top contact rod is provided with a top contact end for pressing the material box; the top touch rod is configured to move in the second direction in response to pressing of the material box so as to drive the trigger rod and the guide rod to move synchronously through the linkage pressing rod, and the trigger rod is used for triggering the sensor. The pressing rod structure is high in structural reliability, not prone to abrasion and suitable for being used for a long time.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to a pressure rod structure, a material box positioning tool, a wafer loading device and a material box loading apparatus. Background Art

[0002] At present, in order to ensure the safety during the wafer handling process, each type of wafer is matched with a corresponding material box. When performing operations such as wafer loading, the material box needs to be positioned to ensure the stability of the wafer. However, there are many types of wafers, and there are also many types of corresponding material boxes. When positioning the material box, different positioning tooling needs to be adapted; and when the material box is in place relative to the positioning tooling, it needs to be detected to determine the position of the material box and the type of the material box.

[0003] In the related art, the weight of the material box is usually used to act on the pressure rod to push the pressure rod downward to trigger the corresponding sensor. However, when the position of the material box does not correspond to the position of the sensor, a transmission structure is required to connect the pressure rod and the sensor. Since there is an offset between the downward pressure position and the sensor position, this method will cause wear after long-term use. Utility Model Content

[0004] Based on this, it is necessary to provide a pressure rod structure with high structural reliability, not prone to wear and tear, and suitable for long-term use.

[0005] A pressure rod structure for detecting the arrival of a material box, comprising a guide rod, a top-touch rod, a trigger rod and a linked pressure rod; the guide rod, the top-touch rod and the trigger rod are all connected to the linked pressure rod and are arranged at intervals along a first direction, and the guide rod and the trigger rod are respectively arranged on both sides of the top-touch rod along the first direction; the top-touch rod has a top-touch end for pressing the material box; the top-touch rod is configured to move along a second direction in response to the pressing of the material box, so as to drive the trigger rod and the guide rod to move synchronously through the linked pressure rod, and the trigger rod is used to trigger a sensor; wherein the second direction is arranged at an angle to the first direction.

[0006] It is understandable that when the top-touch rod moves downward under the gravity of the material box, the guide rod and the trigger rod are driven to move downward synchronously through the linkage pressure rod. At this time, due to the separate arrangement of the guide rod and the trigger rod relative to the top-touch rod, both sides of the top-touch rod along the first direction have a bearing force arm, thereby balancing the moment on the trigger rod side, ensuring that the top-touch rod is subjected to balanced force during the downward movement, improving structural reliability, reducing wear, and facilitating long-term use.

[0007] In some embodiments, a pressing end is constructed at one end of the top-touch rod away from the top-touch end along the second direction, and the pressing end is used to trigger a sensor on a material box loading device, and the trigger rod is used to trigger a sensor on a wafer loading device; or, the trigger rod includes a first trigger rod and a second trigger rod, which are arranged at intervals along the first direction and are both arranged on a side of the top-touch rod away from the guide rod along the first direction, one of the first trigger rod and the second trigger rod is arranged close to the top-touch rod and used to trigger the sensor on the wafer loading device, and the other is arranged away from the top-touch rod and used to trigger the sensor on the material box loading device.

[0008] In some embodiments, the linkage pressure rod is configured with a plurality of assembly holes spaced apart along the first direction, and the top-touch rod, the guide rod and the trigger rod are respectively passed through one of the assembly holes and connected to the linkage pressure rod.

[0009] In some embodiments, the number of the trigger rod is one, and the axes of the plurality of assembly holes are collinear; or, the number of the trigger rod is at least two, and at least two of the trigger rods are spaced apart along the first direction on a side of the top contact rod away from the guide rod, and the axes of the assembly holes are not collinear.

[0010] In some embodiments, the distance between the trigger rod and the top-touch rod is greater than the distance between the guide rod and the top-touch rod, and a hollow hole is configured on the portion of the linkage pressure rod between the top-touch rod and the trigger rod.

[0011] In some embodiments, the pressure rod structure also includes an elastic member and a fixed seat, the fixed seat is connected to an end of the top contact rod facing away from the top contact end, the fixed seat is configured with a first guide hole for the top contact rod to pass through, the elastic member is connected between the fixed seat and the linked pressure rod, and the elastic member is used to apply a force to the linked pressure rod to move toward the top contact end.

[0012] The present application also provides a material box positioning tool, including a tooling platform constructed with a second guide hole and the above-mentioned pressure rod structure, the pressure rod structure is connected to the tooling platform and is arranged on the opposite side of the support surface of the tooling platform, the top contact rod in the pressure rod structure is passed through the second guide hole, and the top contact end of the top contact rod protrudes from the support surface of the tooling platform.

[0013] In some embodiments, the material box positioning tool also includes a first positioning component and a second positioning component, the first positioning component and the second positioning component are arranged at an interval, and the first positioning component is located on the outside of the second positioning component, and the first positioning component and the second positioning component can be selectively connected to different wafer carrying devices.

[0014] In some embodiments, the first positioning assembly includes at least one pair of first positioning blocks and at least one pair of fixed blocks, two of the first positioning blocks in a pair are arranged opposite to each other and spaced apart along a first direction and are both connected to the tooling platform, two of the fixed blocks in a pair are arranged opposite to each other and spaced apart along a first direction and are both connected to the tooling platform, and at least one pair of the fixed blocks and at least one pair of the first positioning blocks are spaced apart along a third direction; wherein the first direction, the second direction and the third direction are arranged at angles in pairs; and / or, the second positioning assembly includes a fixed clamp block and a plurality of second positioning blocks, the fixed clamp block and the plurality of second positioning blocks are both connected to the tooling platform, the fixed clamp block is located in the middle or near the middle of the tooling platform, and the plurality of second positioning blocks are spaced apart and are all arranged around the outside of the fixed clamp block.

[0015] In some embodiments, the material box positioning tooling also includes at least two groups of positioning identification components arranged at intervals, and the first positioning component and the second positioning component respectively correspond to at least one group of the positioning identification components; wherein the positioning identification component includes at least one pair of identification columns, and the two identification columns in a pair are arranged at intervals along the first direction.

[0016] The present application also provides a wafer loading device, including the above-mentioned material box positioning tooling.

[0017] The present application also provides a material box loading device, including the above-mentioned material box positioning tooling. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 A first schematic diagram of a compression rod structure provided in this application;

[0020] Figure 2 for Figure 1 An exploded view of the strut structure is provided;

[0021] Figure 3 A second schematic diagram of the compression rod structure provided in this application;

[0022] Figure 4 for Figure 3 An exploded view of the strut structure is provided;

[0023] Figure 5A first schematic diagram of the material box positioning tooling provided in this application;

[0024] Figure 6 A second schematic diagram of the material box positioning tool provided in this application;

[0025] Figure 7 A third schematic diagram of the material box positioning tool provided in this application;

[0026] Figure 8 A schematic diagram of the material box positioning tooling provided in this application for positioning a material box.

[0027] Figure numerals: 10, pressure rod structure; 11, guide rod; 1101, first limiting surface; 111, first locking cap; 112, first connector; 12, top contact rod; 1201, top contact end; 1202, second assembly surface; 1203, pressing end; 121, top contact part; 122, guide part; 123, second connector; 13, trigger rod; 13a, first trigger rod; 13b, second trigger rod; 131, second locking cap; 1301, third limiting surface; 132, third connector; 14, linkage pressure rod; 1401, assembly hole; 1402, hollow hole; 15, elastic member; 16, fixing seat; 16 01, first assembly groove; 1602, first guide hole; 20, tooling platform; 201, second guide hole; 202, positioning hole; 203, second assembly groove; 30, first positioning component; 31, first positioning block; 32, fixed block; 311, first hook back; 40, second positioning component; 41, fixed clamp block; 42, second positioning block; 411, second hook back; 50, positioning identification component; 51, identification column; 60, clamping positioning component; 61, clamping seat; 50a, first positioning identification component; 50b, second positioning identification component; 70, handle; 100, material box positioning tooling; 200, material box. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0029] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may also be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0031] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediate medium. Moreover, a first feature being “above”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0032] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more related listed items.

[0033] See also Figures 1 to 4, an embodiment of the present application provides a pressure rod structure 10 for detecting the arrival of a material box. The pressure rod structure 10 includes a guide rod 11, a top-touch rod 12, a trigger rod 13 and a linkage pressure rod 14. The guide rod 11, the top-touch rod 12 and the trigger rod 13 are all connected to the linkage pressure rod 14 and are arranged at intervals along a first direction, and the guide rod 11 and the trigger rod 13 are respectively arranged on both sides of the top-touch rod 12 along the first direction. The top-touch rod 12 has a top-touch end 1201 for pressing the material box. The top-touch rod 12 is configured to move along a second direction in response to the pressing of the material box, so as to drive the trigger rod 13 and the guide rod 11 to move synchronously through the linkage pressure rod 14, and the trigger rod 13 is used to trigger the sensor. The second direction is set at an angle to the first direction.

[0034] It should be noted in advance that the second direction is along the gravity direction of the material box, that is, the vertical direction (Z-axis direction), and the first direction can be the horizontal X-axis direction or the horizontal Y-axis direction.

[0035] It is understandable that when the top-touch rod 12 moves downward under the gravity of the magazine, the guide rod 11 and the trigger rod 13 are driven to move downward synchronously through the linkage pressure rod 14. At this time, due to the separate arrangement of the guide rod 11 and the trigger rod 13 relative to the top-touch rod 12, both sides of the top-touch rod 12 along the first direction have a bearing force arm, thereby balancing the moment on the side of the trigger rod 13, ensuring that the top-touch rod 12 is balanced in force during the downward movement, thereby improving the structural reliability, reducing the wear of the top-touch rod 12, and facilitating long-term use.

[0036] Since wafers have many different models, it is necessary to match the appropriate wafer carrier according to the wafer model during the manufacturing process. When adapting different wafer carriers, in order to ensure that the material box is in place or the model of the wafer material box is known in time, a sensor is set on the wafer carrier. Among them, taking the wafer carrier including the wafer loading device and the material box loading device as an example, the wafer loading device is installed with a first sensor, and the material box loading device is installed with a second sensor.

[0037] Please combine Figure 3 and Figure 4 , illustratively, the end of the top-touch rod 12 away from the top-touch end 1201 along the second direction is configured with a pressing end 1203. When the top-touch rod 12 moves downward under the gravity of the material box, the pressing end 1203 can be used to trigger the second sensor; and when the top-touch rod 12 drives the trigger rod 13 to move downward through the linkage pressure rod 14, the trigger rod 13 can be used to trigger the first sensor; in this way, the in-place triggering of different types of wafers and compatible wafer carrying equipment can be satisfied, so that users can make timely feedback.

[0038] like Figure 1 and Figure 2As shown, alternatively, when there are two trigger rods 13, namely the first trigger rod 13a and the second trigger rod 13b, the two trigger rods 13 are arranged at intervals along the first direction and are both connected to the linkage pressure rod 14. The two trigger rods 13 can be both arranged on the side of the top-touch rod 12 away from the guide rod 11 along the first direction (i.e., arranged on the same side), or can be arranged on both sides of the top-touch rod 12 along the first direction (i.e., arranged on opposite sides). In some specific embodiments, the first trigger rod 13a and the second trigger rod 13b are arranged on the same side, the first trigger rod 13a is arranged close to the top-touch rod 12 to trigger the second sensor, and the second trigger rod 13b is arranged away from the top-touch rod 12 to trigger the first sensor. Of course, in this embodiment, the top-touch rod 12 can also have a pressing end 1203 to trigger a sensor on another wafer carrier.

[0039] Of course, the number of the trigger rods 13 may be three, four, etc. For example, when there are three trigger rods 13, one of the trigger rods 13 may be arranged on the same side of the guide rod 11, and the other two trigger rods 13 may be arranged on the opposite sides of the guide rod 11. It is sufficient to ensure that the force on the top contact rod 12 is as balanced as possible.

[0040] It is worth noting that no matter how many different types of sensors on wafer carrying devices the pressure rod structure 10 can be applied to, the guide rod 11 is always in a state of balanced torque during the triggering process to ensure that the top contact rod 12 is subjected to balanced force during the downward movement to avoid wear.

[0041] See also Figure 2 and Figure 4 In an optional embodiment, the linkage pressure rod 14 is configured with a plurality of assembly holes 1401 arranged at intervals along the first direction, and the top-touch rod 12, the guide rod 11 and the trigger rod 13 are respectively provided in an assembly hole 1401 and connected to the linkage pressure rod 14. In other words, the linkage pressure rod 14 is directly connected to the top-touch rod 12, the guide rod 11 and the trigger rod 13 by means of the opening of the hole, which is convenient for production and manufacturing. Among them, the top-touch rod 12, the guide rod 11 and the trigger rod 13 can be plugged into the corresponding assembly holes 1401, or fixed by means of the matching method of the card slot and the card convex, or by the method of thread matching. It is sufficient as long as the top-touch rod 12, the guide rod 11 and the trigger rod 13 can be reliably connected to the linkage pressure rod 14 and the assembly is stable.

[0042] The axis of the top contact rod 12, the axis of the guide rod 11 and the axis of the trigger rod 13 are all arranged in parallel. For ease of description, the side of the linkage pressure rod 14 facing the top contact end 1201 is the first side, and the side away from the top contact end 1201 along its own thickness direction is the second side. As for the guide rod 11, a first connector 112 is convexly provided at one end of the guide rod 11 along its own axial direction, and a first limiting surface 1101 is constructed at this end. The first connector 112 is penetrated through the corresponding assembly hole 1401 and is screwed with the first locking cap 111, so that the first limiting surface 1101 abuts against the second side of the linkage pressure rod 14, so that the guide rod 11 is assembled relative to the linkage pressure rod 14. At the same time, as for the top contact rod 12, the top contact rod 12 includes a top contact portion 121 and a guide portion 122, and the two are arranged on opposite sides of the linkage pressure rod 14 along the second direction. The guide portion 122 is provided with a second connecting head 123 at one end along its own axial direction, and a second assembly surface 1202 is constructed at the end. The second connecting head 123 is passed through the corresponding assembly hole 1401 and is threadedly tightened with the top contact portion 121, so that the second assembly surface 1202 abuts against the second side of the linkage pressure rod 14, thereby realizing the assembly of the top contact rod 12 relative to the linkage pressure rod 14; wherein, the end of the top contact portion 121 away from the guide portion 122 serves as the top contact end 1201. In addition, as for the trigger rod 13, the assembly is basically similar to the above-mentioned guide rod 11. The third connecting head 132 on the trigger rod 13 is threadedly tightened with the second locking cap 131, so that the third limiting surface 1301 of the trigger rod 13 abuts against the second side of the linkage pressure rod 14, thereby realizing the assembly of the trigger rod 13 relative to the linkage pressure rod 14.

[0043] In some embodiments, the guide rod 11 , the top-touch rod 12 , and the trigger rod 13 are all constructed with a hollow structure to meet the requirements of lightweight design.

[0044] In some of the embodiments, the number of trigger rods 13 is one, and the axes of the multiple assembly holes 1401 are colinear. At this time, since the number of trigger rods 13 is small, the triggering of sensors on different wafer carrying devices can be achieved by the cooperation of the trigger rod 13 and the top touch rod 12. Therefore, such a setting is easier to assemble and manufacture. At the same time, in this case, in order to avoid the force arm corresponding to the guide rod 11 being too long and interfering with other structures, the distance between the trigger rod 13 and the top touch rod 12 can be set to be greater than the distance between the guide rod 11 and the top touch rod 12. At this time, a hollow hole 1402 can be constructed on the part of the linkage pressure rod 14 located between the top touch rod 12 and the trigger rod 13 to reduce the force on the linkage pressure rod 14 on the trigger rod 13 side, thereby further improving the torque balance effect.

[0045] In some other embodiments, the number of trigger rods 13 is at least two, and at least two trigger rods 13 are arranged at intervals along the first direction on the side of the top-touch rod 12 away from the guide rod 11, and the axes of the assembly holes 1401 are not collinear. At this time, the top-touch rod 12 may not participate in the triggering of the sensor on the wafer carrier. At this time, in order to meet the torque balance and structural avoidance, the linkage pressure rod 14 can be set to a broken line shape, that is, the axes of the assembly holes 1401 are not collinear, thereby reducing the force arm of the trigger rod 13 from the top-touch rod 12, thereby weakening the torque effect and improving the structural stability.

[0046] Please continue reading Figures 1 to 4 In an optional embodiment, the pressure rod structure 10 further includes an elastic member 15 and a fixing seat 16. The fixing seat 16 is connected to one end of the top contact rod 12 away from the top contact end 1201, and the fixing seat 16 is configured with a first guide hole 1602 for the top contact rod 12 to pass through. The elastic member 15 is connected between the fixing seat 16 and the linkage pressure rod 14, and the elastic member 15 is used to apply a force to the linkage pressure rod 14 to move toward the top contact end 1201.

[0047] It can be understood that the arrangement of the fixing seat 16 and the cooperation between the fixing seat 16 and the top-touch rod 12 can meet the assembly of the pressure rod structure 10 relative to the magazine positioning tool 100, that is, the fixing seat 16 can be installed on the tooling platform 20 in the magazine positioning tool 100 by means of screws and other structures; and such cooperation can guide the movement of the top-touch rod 12 in the vertical direction, avoiding the top-touch rod 12 from moving and deviating under the gravity of the magazine, further ensuring the force stability and reducing wear. When the magazine acting on the top-touch rod 12 is withdrawn, the linkage pressure rod 14 can drive the top-touch rod 12, the trigger rod 13 and the guide rod 11 to move upward to restore the initial state under the action of the elastic member 15 to wait for triggering again.

[0048] The elastic member 15 is sleeved on the outer side of the guide portion 122 in the top contact rod 12. At this time, in order to ensure the installation stability of the elastic member 15, a first assembly groove 1601 can be recessed at the edge of one end of the first guide hole 1602 facing the linkage pressure rod 14, and the bottom of the elastic member 15 is accommodated in the first assembly groove 1601 to achieve assembly positioning.

[0049] Please combine Figures 5 to 8As shown, another embodiment of the present application provides a material box positioning tool 100 for positioning a wafer material box 200. The material box positioning tool 100 can be installed on different wafer carrying devices for detecting the wafer material box 200 in place. The material box positioning tool 100 includes a pressure rod structure 10 and a tool platform 20 having a second guide hole 201. The pressure rod structure 10 is connected to the tool platform 20 and arranged on the opposite side of the support surface of the tool platform 20. The top contact rod 12 in the pressure rod structure 10 is inserted into the second guide hole 201, and the top contact end 1201 of the top contact rod 12 protrudes from the support surface of the tool platform 20.

[0050] It can be understood that the support surface of the tooling platform 20 is a side for supporting the material box 200. Therefore, the arrangement of the pressure rod structure 10 on the opposite side of the support surface not only reduces the assembly interference of the pressure rod structure 10, but also makes full use of the space of the tooling platform 20 away from the support surface, thereby improving the compactness of the material box positioning tool 100. The second guide hole 201 is provided to facilitate the top contact rod 12 in the pressure rod structure 10 to extend to the support surface side to interact with the material box 200.

[0051] like Figure 5 and Figure 8 As shown, further, the material box positioning tool 100 also includes a clamping positioning assembly 60 installed on the tooling platform 20, which is used to position the material box 200. The clamping positioning assembly 60 includes at least one pair of clamping seats 61, and the two clamping seats 61 in one pair are arranged oppositely and spaced along the first direction to clamp the two sides of the material box 200 along the first direction. In some specific embodiments, two pairs of clamping seats 61 can be provided, and the two pairs of clamping seats 61 are arranged spaced along the third direction, and a limiting plate is provided at the tail end of the tooling platform 20 to limit the material box 200 and prevent the material box 200 from shaking. The first direction is the X-axis direction, and the third direction is the Y-axis direction. The setting of two pairs of clamping seats 61 is used to improve the clamping positioning stability. The pressure rod structure 10 can be installed between two pairs of clamping seats 61, and two pressure rod structures 10 are provided and arranged at intervals along the X-axis direction. The two sides of the material box 200 along the X-axis direction act on the top contact rod 12 in the pressure rod structure 10 on the same side to improve the triggering accuracy. At this time, the top contact rod 12 in each pressure rod structure 10 corresponds to a second guide hole 201.

[0052] The Y-axis direction may be used as the direction in which the material box 200 moves in and out relative to the material box positioning tool 100 .

[0053] Please combine Figure 6 and Figure 7Furthermore, a second assembly groove 203 is recessed along the thickness direction of the tooling platform 20 on one side away from the support surface, and part of the pressure rod structure 10 can be accommodated in the second assembly groove 203, further improving the utilization rate of the bottom space of the tooling platform 20, reducing the size of the material box positioning tool 100 along the thickness direction of the tooling platform 20, avoiding interference with other structures, and improving the compactness of the structure. Among them, the cross section of the second assembly groove 203 along the horizontal direction is compatible with the cross section of the linkage pressure rod 14, and the fixing seat 16 in the pressure rod structure 10 is fixed to the tooling platform 20.

[0054] Since the magazine positioning tool 100 needs to be installed on different wafer carrying devices, to ensure that it is properly assembled. Figures 5 to 8 Exemplarily, the material box positioning tool 100 also includes a first positioning component 30 and a second positioning component 40. The first positioning component 30 and the second positioning component 40 are arranged at an interval, and the first positioning component 30 is located on the outside of the second positioning component 40. The first positioning component 30 and the second positioning component 40 can be selectively connected to different wafer carrying devices.

[0055] For example, the wafer carrying equipment includes a wafer loader and a material box loading device, and the material box positioning tool 100 needs to be installed on the wafer loader, or installed on the material box loading device. The first positioning component 30 is used for positioning connection with the wafer loader, and the second positioning component 40 is used for positioning connection with the material box loading device; or, the first positioning component 30 is used for positioning connection with the material box loading device, and the second positioning component 40 is used for positioning connection with the wafer loader.

[0056] Please continue reading Figures 5 to 7 , further, take the first positioning assembly 30 positioning and connecting the material box loading device as an example. The first positioning assembly 30 includes at least one pair of first positioning blocks 31 and at least one pair of fixed blocks 32, the two first positioning blocks 31 in a pair are arranged oppositely and spaced along the first direction, and are both connected to the tooling platform 20, and the two fixed blocks 32 in a pair are arranged oppositely and spaced along the first direction, and are both connected to the tooling platform 20. Among them, at least one pair of fixed blocks 32 and at least one pair of first positioning blocks 31 are spaced along the third direction. The first positioning block 31 can be clamped and positioned relative to the material box loading device, and the fixed block 32 can be positioned on the clamping and positioning seat on the material box loading device to realize the assembly of the material box positioning tool 100 relative to the material box loading device. In some specific embodiments, two pairs of fixed blocks 32 are provided, and are spaced along the Y-axis direction, and a pair of first positioning blocks 31 are provided, and are arranged close to one of the pairs of fixed blocks 32.

[0057] In some specific embodiments, the material box loading device includes two pairs of clamping and positioning seats arranged at intervals along the Y-axis direction, two clamping and positioning seats in one pair are arranged at intervals along the X-axis direction, and two pairs of fixing blocks 32 correspond to one pair of clamping and positioning seats respectively. The first positioning block 31 is provided with a first hooking portion 311 at one end away from the tooling platform 20 along the Z-axis, and the two first positioning blocks 31 are clamped on the side of the corresponding clamping and positioning seat away from the corresponding fixing block 32, so as to realize the positioning connection between the material box positioning tool 100 and the material box loading device.

[0058] Please continue reading Figures 5 to 7 , further, the second positioning assembly 40 includes a fixed clamping block 41 and a plurality of second positioning blocks 42. The fixed clamping block 41 and the plurality of second positioning blocks 42 are both connected to the tooling platform 20, the fixed clamping block 41 is located in the middle or near the middle of the tooling platform 20, and the plurality of second positioning blocks 42 are arranged at intervals and are all arranged around the outside of the fixed clamping block 41. The second positioning assembly 40 is connected to the wafer loader, and at this time, the wafer loader includes a support platform and a positioning clamping arm and a positioning column installed on the support platform. The extended end of the fixed clamping block 41 is configured with a second hook back portion 411 to be clamped and fixed with the positioning clamping arm; and each second positioning block 42 is configured with a socket to be inserted and positioned with the corresponding positioning column. In this way, the positioning connection between the material box positioning tool 100 and the wafer loader can be realized. In addition, the arrangement of the fixed acceleration and the plurality of second positioning blocks 42 can avoid interference with the first positioning assembly 30 to avoid interference when the material box positioning tool 100 is connected with different wafer carrying devices.

[0059] The tooling platform 20 is configured with a positioning hole 202 , and a portion of the fixing clamp 41 extends into the positioning hole 202 and is fixed to the tooling platform 20 .

[0060] In some specific embodiments, the number of the second positioning blocks 42 is three, and they are respectively distributed as three vertices of a triangle to improve the connection stability.

[0061] Please continue reading Figures 5 to 7 In an optional embodiment, the magazine positioning tool 100 further includes at least two groups of positioning identification components 50 arranged at intervals, and the first positioning component 30 and the second positioning component 40 respectively correspond to at least one group of positioning identification components 50. The positioning identification component 50 includes at least one pair of identification columns 51, and the two identification columns 51 in one pair are arranged at intervals along the first direction and avoid the first positioning component 30 and the second positioning component 40.

[0062] It can be understood that the positioning and identification component 50 is used to identify the corresponding wafer-carrying tooling to avoid the mismatch of the material box positioning tooling 100 relative to different wafer-carrying tooling. The first positioning component 30 corresponds to the first positioning and identification component 50a, and the second positioning component 40 corresponds to the second positioning and identification component 50b. The first positioning and identification component 50a is arranged at a position close to the first positioning block 31, and the second positioning and identification component 50b is arranged at a position away from the first positioning block 31 along the Y-axis direction to avoid recognition interference between the two. Among them, each group of positioning and identification components 50 includes a pair of identification columns 51, and each identification column 51 can be inserted into a corresponding identification hole to improve the recognition accuracy. In actual use, when the material box positioning tooling 100 needs to be adapted to one of the wafer-carrying devices, the positioning and identification component 50 corresponding to the other wafer-carrying device can be removed first to avoid interference.

[0063] Please continue reading Figures 5 to 8 In some embodiments, the magazine positioning tool 100 further includes a handle 70, which is mounted on the tooling platform 20, so that the operator can manually hold the handle 70 to move the magazine positioning tool 100. Two handles 70 are provided, and are arranged oppositely and at intervals along the X-axis direction, avoiding the arrangement of the above-mentioned clamping seat 61 to avoid interference.

[0064] Another embodiment of the present application provides a wafer loading device, including the above-mentioned magazine positioning tool 100. The wafer loading device also includes a support platform and a positioning clamping arm and a positioning column installed on the support platform, so that the positioning clamping arm and the positioning column are respectively matched with the second positioning component 40 in the magazine positioning tool 100 to achieve positioning connection with the magazine positioning tool 100, so as to be used for wafer detection.

[0065] The present application also provides a material box loading device, including the above-mentioned material box positioning tool 100. The material box loading device includes a loading platform and a clamping and positioning seat installed on the loading platform, and the clamping and positioning seat is provided with two pairs, and the clamping and positioning seats are arranged at intervals along the Y-axis direction, and the two clamping and positioning seats in a pair are arranged at intervals along the X-axis direction. The clamping and positioning seat cooperates with the fixed block 32 in the material box positioning tool 100, and the two first positioning blocks 31 are respectively clamped on the side of the clamping and positioning seat on the same side away from the fixed block 32.

[0066] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0067] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the scope of patent protection of the present application shall be subject to the attached claims.

Claims

1. A compression rod structure, characterized in that: Used for detecting the arrival of a material box (200), the pressure rod structure (10) comprises a guide rod (11), a top contact rod (12), a trigger rod (13) and a linkage pressure rod (14); The guide rod (11), the top-touch rod (12) and the trigger rod (13) are all connected to the linkage pressure rod (14) and are arranged at intervals along a first direction, and the guide rod (11) and the trigger rod (13) are respectively arranged on both sides of the top-touch rod (12) along the first direction; the top-touch rod (12) has a top-touch end (1201) for pressing the material box (200); The top-touch rod (12) is configured to move along a second direction in response to the pressing of the material box (200) so as to drive the trigger rod (13) and the guide rod (11) to move synchronously through the linked pressure rod (14), and the trigger rod (13) is used to trigger the sensor; wherein the second direction is set at an angle to the first direction.

2. The compression rod structure according to claim 1, characterized in that: The end of the top contact rod (12) away from the top contact end (1201) along the second direction is configured with a pressing end (1203), the pressing end (1203) is used to trigger a sensor on a material box loading device, and the trigger rod (13) is used to trigger a sensor on a wafer loading device; or, The trigger rod (13) comprises a first trigger rod (13a) and a second trigger rod (13b), which are arranged at intervals along the first direction and are both arranged on a side of the top-touch rod (12) away from the guide rod (11) along the first direction; one of the first trigger rod (13a) and the second trigger rod (13b) is arranged close to the top-touch rod (12) and is used to trigger a sensor on a wafer loading device, and the other is arranged away from the top-touch rod (12) and is used to trigger a sensor on a material box loading device.

3. The compression rod structure according to claim 1, characterized in that: The linkage pressure rod (14) is constructed with a plurality of assembly holes (1401) arranged at intervals along a first direction, and the top contact rod (12), the guide rod (11) and the trigger rod (13) are respectively inserted into one of the assembly holes (1401) and connected to the linkage pressure rod (14).

4. The compression rod structure according to claim 3, characterized in that: The number of the trigger rod (13) is one, and the axes of the plurality of assembly holes (1401) are collinear; or, the number of the trigger rod (13) is at least two, and at least two of the trigger rods (13) are arranged at intervals along the first direction on a side of the top contact rod (12) away from the guide rod (11), and the axes of the respective assembly holes (1401) are not collinear.

5. The compression rod structure according to any one of claims 1 to 4, characterized in that: The pressure rod structure (10) also includes an elastic member (15) and a fixing seat (16); The fixing seat (16) is connected to one end of the top contact rod (12) away from the top contact end (1201), and the fixing seat (16) is configured with a first guide hole (1602) for the top contact rod (12) to pass through. The elastic member (15) is connected between the fixing seat (16) and the linkage pressure rod (14), and the elastic member (15) is used to apply a force to the linkage pressure rod (14) to move it toward the top contact end (1201).

6. A material box positioning tool, characterized in that: The material box positioning tool (100) comprises: The tooling platform (20) is configured with a second guide hole (201); The pressure rod structure according to any one of claims 1 to 5, wherein the pressure rod structure (10) is connected to the tooling platform (20) and is arranged on the opposite side of the support surface of the tooling platform (20), the top contact rod (12) in the pressure rod structure (10) is passed through the second guide hole (201), and the top contact end (1201) of the top contact rod (12) protrudes from the support surface of the tooling platform (20).

7. The material box positioning tool according to claim 6, characterized in that: The material box positioning tool (100) also includes a first positioning component (30) and a second positioning component (40), wherein the first positioning component (30) and the second positioning component (40) are arranged at an interval, and the first positioning component (30) is located on the outside of the second positioning component (40), and the first positioning component (30) and the second positioning component (40) can be selectively connected to different wafer carrying devices.

8. The material box positioning tool according to claim 7, characterized in that: The first positioning assembly (30) comprises at least one pair of first positioning blocks (31) and at least one pair of fixing blocks (32); two of the first positioning blocks (31) in a pair are arranged opposite to each other and spaced apart along a first direction and are both connected to the tooling platform (20); two of the fixing blocks (32) in a pair are arranged opposite to each other and spaced apart along the first direction and are both connected to the tooling platform (20); and at least one pair of the fixing blocks (32) and at least one pair of the first positioning blocks (31) are arranged spaced apart along a third direction; wherein the first direction, the second direction and the third direction are arranged at an angle in pairs; and / or, The second positioning assembly (40) comprises a fixed clamp block (41) and a plurality of second positioning blocks (42); the fixed clamp block (41) and the plurality of second positioning blocks (42) are both connected to the tooling platform (20), the fixed clamp block (41) is located in the middle of the tooling platform (20) or at a position close to the middle, and the plurality of second positioning blocks (42) are arranged at intervals and are all arranged around the outside of the fixed clamp block (41).

9. The material box positioning tool according to claim 7, characterized in that: The material box positioning tool (100) further comprises at least two groups of positioning identification components (50) arranged at intervals, and the first positioning component (30) and the second positioning component (40) respectively correspond to at least one group of the positioning identification components (50); The positioning identification component (50) comprises at least one pair of identification columns (51), and two identification columns (51) in a pair are arranged at intervals along a first direction and avoid the first positioning component (30) and the second positioning component (40).

10. A wafer loading device, characterized in that: The wafer loading equipment comprises the material box positioning tool as described in any one of claims 6 to 9.

11. A material box loading device, characterized in that: The material box loading device includes the material box positioning tooling according to any one of claims 6 to 9.

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