Dimension inspection jig for wafer holder

Abstract

The utility model relates to the technical field of dimension detection jigs, in particular to a dimension inspection jig for a wafer holder, which is characterized in that a conveying assembly conveys a chuck to a position right below a detector assembly, so that the detector assembly detects the dimension of the chuck, and after the detection is finished, the conveying assembly conveys the chuck to a material guide groove; unqualified chucks are screened out through the screening assembly, and screening is achieved while continuous size detection of the chucks is achieved; comprising a working table, a groove, a controller and a material guide groove, the groove is formed in the top end of the working table, the right end of the groove is flush with the right end of the working table, the controller is arranged at the front end of the working table, the conveying assembly is arranged in the groove, and the detector assembly is arranged at the top end of the working table. A feeding assembly is arranged on the left portion of the top end of the workbench, a screening assembly is arranged on the guide groove, and the detector assembly, the conveying assembly, the feeding assembly and the screening assembly are all electrically connected with the controller.

Description

Technical Field

[0001] The utility model relates to the technical field of size detection jigs, in particular to a wafer clamper size inspection jig. Background Art

[0002] Wafer holder, also known as wafer chuck, is a device used to carry and position semiconductor wafers. It is usually composed of an outer ring, an inner ring, a chuck and a transmission mechanism. In the semiconductor manufacturing process, the wafer chuck can accurately clamp and position the wafer. Therefore, the dimensional accuracy of the wafer holder has an important influence on the positioning and clamping of the wafer, so the chuck needs to be dimensionally inspected.

[0003] In the prior art, the patent document with application number 202111535396.6 discloses a fixture device and detection equipment suitable for detecting the dimensions of workpieces of different specifications, including: a frame on which a conveying assembly is provided; a first adjustment plate located on one side above the conveying assembly; a first drive mechanism; a second adjustment plate; and a second drive mechanism.

[0004] During use, it was found that the above-mentioned device uses the first driving mechanism to drive the first adjustment plate to move, and uses the second driving mechanism to drive the second adjustment plate to move, and the first adjustment plate and the second adjustment plate are used to clamp the workpiece for size detection. However, continuous detection is not possible, and the detection efficiency is low. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides a wafer holder size inspection jig which improves the detection efficiency.

[0006] The utility model discloses a wafer clamp size inspection jig, comprising a workbench, a groove, a controller and a material guide trough, wherein the top of the workbench is provided with a groove, the right end of the groove is flush with the right end of the workbench, the front end of the workbench is provided with a controller, the right end of the workbench is provided with a material guide trough, and the utility model further comprises a feeding component, a detector component, a screening component and a conveying component, wherein the conveying component is provided in the groove, the top of the workbench is provided with a detector component, the left part of the top of the workbench is provided with a feeding component, the material guide trough is provided with a screening component, the detector component, the conveying component, the feeding component and the screening component are all electrically connected with the controller; a chuck is placed on the feeding component, the feeding component conveys multiple groups of chucks to the conveying component in sequence, the conveying component conveys the chuck to the bottom of the detector component, so that the detector component performs size inspection on the chuck, after the inspection is completed, the conveying component conveys the chuck to the material guide trough, and unqualified chucks are screened out through the screening component, so that continuous size inspection of the chuck is realized while screening is realized.

[0007] Preferably, the loading assembly includes a support rod, a barrel, a support frame, an electric cylinder, a push plate and a V-shaped mouth, two groups of support rods are arranged at the bottom end of the barrel, the bottom ends of the two groups of support rods are connected to the top end of the workbench, a support frame is arranged at the left end of the workbench, an electric cylinder is mounted on the support frame, a push plate is arranged at the right movable end of the electric cylinder, the top end of the push plate contacts with the bottom end of the barrel, the bottom end of the push plate contacts with the top end of the workbench, a V-shaped mouth is arranged at the end of the push plate away from the support frame, and the electric cylinder is electrically connected to the controller; the electric cylinder extends, so that the push plate pushes the first group of chuck parts to the conveying assembly through the V-shaped mouth, and then the electric cylinder shortens, and the second group of chuck parts falls onto the workbench, and then the electric cylinder extends again, so as to convey the second group of chuck parts to the conveying assembly, so as to realize the continuity of the chuck parts, and the controller can set the time interval of extension and shortening of the electric cylinder.

[0008] Preferably, the conveying assembly includes rollers, auxiliary rollers, a motor and a conveyor belt. Two groups of rollers are rotatably arranged in the groove. Multiple groups of auxiliary rollers are rotatably arranged in the groove. The multiple groups of auxiliary rollers are between the two groups of rollers. A motor is arranged at the front end of the workbench. The motor is connected to the front end of a group of rollers. Conveyor belts are sleeved on the outsides of the two groups of rollers. The motor is electrically connected to the controller. The motor is started by the controller, so that the two groups of rollers rotate the conveyor belts with the cooperation of the multiple groups of auxiliary rollers. The conveyor belt stops when it transports the chuck to the bottom of the detector assembly, and continues to rotate after the detector assembly completes the detection of the size of the chuck.

[0009] Preferably, the screening component includes a hinge, a sealing plate, an axle pin and an electric push rod, an opening is provided on the material guide trough, the sealing plate is movably arranged on the material guide trough by the hinge, the sealing plate seals the opening, one end of the electric push rod is hinged to the right end of the workbench through a group of axle pins, the other end of the electric push rod is hinged to the left end of the sealing plate through another group of axle pins, and the electric push rod is electrically connected to the controller; when the detector component detects that the chuck part is unqualified, the conveying component conveys the unqualified chuck part to the material guide trough and slides down, the electric push rod is shortened, thereby making the sealing plate away from the opening, and the unqualified chuck part falls through the opening, and when the chuck part is a suitable product, the electric push rod is not shortened.

[0010] Preferably, the detector assembly includes a bracket, an electrical box, a scanner and a detector. A bracket is arranged on the top of the workbench, an electrical box is installed on the top of the bracket, and a scanner and a detector are respectively arranged on the bottom of the electrical box. The conveyor belt conveys the chuck part, and when the chuck part moves to the bottom of the electrical box, the scanner and the detector cooperate with each other to perform size detection on the chuck part, thereby improving the detection efficiency.

[0011] Preferably, a stopper is further included, and the inner end of the sealing plate is provided with a stopper; when the electric push rod is extended, the sealing plate seals the opening, and the stopper limits the sealing plate.

[0012] Preferably, it also includes a lighting lamp, and the bottom end of the electrical box is provided with a lighting lamp; turning on the lighting lamp improves the accuracy of the scanner and the detector in detecting the size of the chuck.

[0013] Compared with the prior art, the utility model has the following beneficial effects: the chuck parts are placed on the loading assembly, the loading assembly conveys multiple groups of chuck parts to the conveying assembly in sequence, the conveying assembly conveys the chucks to the bottom of the detector assembly, so that the detector assembly performs size detection on the chucks, and after the detection is completed, the conveying assembly conveys the chucks to the material guide trough, and unqualified chucks are screened out by the screening assembly, thereby realizing continuous size detection of the chuck parts and screening at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the axonometric structure of the utility model;

[0015] Figure 2 It is an enlarged structural diagram of the barrel and electric cylinder;

[0016] Figure 3 It is an enlarged schematic diagram of the structure of the electric box and scanner;

[0017] Figure 4 It is an enlarged structural diagram of the motor and conveyor belt and other structures;

[0018] Figure 5 It is an enlarged structural diagram of the electric push rod, material guide chute and other structures.

[0019] Markings in the attached drawings: 1. workbench; 2. groove; 3. controller; 4. material guide trough; 5. support rod; 6. barrel; 7. support frame; 8. electric cylinder; 9. push plate; 10. V-shaped mouth; 11. roller; 12. auxiliary roller; 13. motor; 14. conveyor belt; 15. hinge; 16. sealing plate; 17. axle pin; 18. electric push rod; 19. bracket; 20. electric box; 21. scanner; 22. detector; 23. block; 24. lighting lamp. DETAILED DESCRIPTION

[0020] In order to facilitate the understanding of the utility model, the utility model will be described more comprehensively below with reference to the relevant drawings. The utility model can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the utility model more thorough and comprehensive.

[0021] Example 1

[0022] like Figure 1As shown, a wafer clamp size inspection jig of the utility model includes a workbench 1, a groove 2, a controller 3 and a material guide trough 4, the top of the workbench 1 is provided with a groove 2, the right end of the groove 2 is flush with the right end of the workbench 1, the front end of the workbench 1 is provided with a controller 3, the right end of the workbench 1 is provided with a material guide trough 4, and also includes a feeding component, a detector component, a screening component and a conveying component, the groove 2 is provided with a conveying component, the top of the workbench 1 is provided with a detector component, the left part of the top of the workbench 1 is provided with a feeding component, and the material guide trough 4 is provided with a screening component, and the detector component, the conveying component, the feeding component and the screening component are all electrically connected to the controller 3;

[0023] like Figure 1 and Figure 2 As shown, the feeding assembly includes a support rod 5, a barrel 6, a support frame 7, an electric cylinder 8, a push plate 9 and a V-shaped mouth 10. Two groups of support rods 5 are arranged at the bottom end of the barrel 6. The bottom ends of the two groups of support rods 5 are connected to the top of the workbench 1. A support frame 7 is arranged at the left end of the workbench 1. The electric cylinder 8 is installed on the support frame 7. A push plate 9 is arranged at the right moving end of the electric cylinder 8. The top end of the push plate 9 contacts the bottom end of the barrel 6, and the bottom end of the push plate 9 contacts the top end of the workbench 1. A V-shaped mouth 10 is arranged at the end of the push plate 9 away from the support frame 7. The electric cylinder 8 is electrically connected to the controller 3.

[0024] like Figure 1 and Figure 4 As shown, the conveying assembly includes rollers 11, auxiliary rollers 12, a motor 13 and a conveyor belt 14. Two groups of rollers 11 are rotatably arranged in the groove 2. Multiple groups of auxiliary rollers 12 are rotatably arranged in the groove 2. The multiple groups of auxiliary rollers 12 are between the two groups of rollers 11. A motor 13 is arranged at the front end of the workbench 1. The motor 13 is connected to the front end of a group of rollers 11. The conveyor belt 14 is mounted on the outer side of the two groups of rollers 11. The motor 13 is electrically connected to the controller 3.

[0025] In this embodiment, the electric cylinder 8 is extended, so that the push plate 9 pushes the first group of chuck parts to the conveyor belt 14 through the V-shaped mouth 10, and then the electric cylinder 8 is shortened, and the second group of chuck parts falls onto the workbench 1, and then the electric cylinder 8 is extended again, so that the second group of chuck parts are conveyed to the conveyor belt 14, so as to realize the continuity of the chuck parts, and the controller 3 can set the extension and shortening time interval of the electric cylinder 8, and start the motor 13 through the controller 3, so that the two groups of rollers 11 make the conveyor belt 14 rotate with the cooperation of multiple groups of auxiliary rollers 12, and the conveyor belt 14 stops when the chuck parts are conveyed to the bottom of the detector component, and waits for the detector component to complete the size detection of the chuck parts. After the detection is completed, the conveyor belt 14 conveys the chucks to the guide trough 4, and unqualified chucks are screened out by the screening component, so as to realize the continuous size detection of the chuck parts and the screening at the same time.

[0026] Example 2

[0027] like Figure 1 As shown, a wafer clamp size inspection jig of the utility model includes a workbench 1, a groove 2, a controller 3 and a material guide trough 4, the top of the workbench 1 is provided with a groove 2, the right end of the groove 2 is flush with the right end of the workbench 1, the front end of the workbench 1 is provided with a controller 3, the right end of the workbench 1 is provided with a material guide trough 4, and also includes a feeding component, a detector component, a screening component and a conveying component, the groove 2 is provided with a conveying component, the top of the workbench 1 is provided with a detector component, the left part of the top of the workbench 1 is provided with a feeding component, and the material guide trough 4 is provided with a screening component, and the detector component, the conveying component, the feeding component and the screening component are all electrically connected to the controller 3;

[0028] like Figure 1 and Figure 2 As shown, the feeding assembly includes a support rod 5, a barrel 6, a support frame 7, an electric cylinder 8, a push plate 9 and a V-shaped mouth 10. Two groups of support rods 5 are arranged at the bottom end of the barrel 6. The bottom ends of the two groups of support rods 5 are connected to the top of the workbench 1. A support frame 7 is arranged at the left end of the workbench 1. The electric cylinder 8 is installed on the support frame 7. A push plate 9 is arranged at the right moving end of the electric cylinder 8. The top end of the push plate 9 contacts the bottom end of the barrel 6, and the bottom end of the push plate 9 contacts the top end of the workbench 1. A V-shaped mouth 10 is arranged at the end of the push plate 9 away from the support frame 7. The electric cylinder 8 is electrically connected to the controller 3.

[0029] like Figure 1 and Figure 4 As shown, the conveying assembly includes rollers 11, auxiliary rollers 12, a motor 13 and a conveyor belt 14. Two groups of rollers 11 are rotatably arranged in the groove 2. Multiple groups of auxiliary rollers 12 are rotatably arranged in the groove 2. The multiple groups of auxiliary rollers 12 are between the two groups of rollers 11. A motor 13 is arranged at the front end of the workbench 1. The motor 13 is connected to the front end of a group of rollers 11. The conveyor belt 14 is sleeved on the outer side of the two groups of rollers 11. The motor 13 is electrically connected to the controller 3.

[0030] like Figure 1 and Figure 5 As shown, the screening assembly includes a hinge 15, a sealing plate 16, an axle pin 17 and an electric push rod 18. The material guide trough 4 is provided with an opening. The sealing plate 16 is movably arranged on the material guide trough 4 through the hinge 15. The sealing plate 16 seals the opening. One end of the electric push rod 18 is hinged to the right end of the workbench 1 through a set of axle pins 17. The other end of the electric push rod 18 is hinged to the left end of the sealing plate 16 through another set of axle pins 17. The electric push rod 18 is electrically connected to the controller 3.

[0031] like Figure 1 and Figure 3As shown, the screening assembly includes a hinge 15, a sealing plate 16, an axle pin 17 and an electric push rod 18. The material guide trough 4 is provided with an opening. The sealing plate 16 is movably arranged on the material guide trough 4 through the hinge 15. The sealing plate 16 seals the opening. One end of the electric push rod 18 is hinged to the right end of the workbench 1 through a set of axle pins 17. The other end of the electric push rod 18 is hinged to the left end of the sealing plate 16 through another set of axle pins 17. The electric push rod 18 is electrically connected to the controller 3.

[0032] like Figure 3 and Figure 5 As shown, it also includes a stopper 23 and a lighting lamp 24 . The inner end of the sealing plate 16 is provided with a stopper 23 , and the bottom end of the electrical box 20 is provided with a lighting lamp 24 .

[0033] In this embodiment, the electric cylinder 8 is extended, so that the push plate 9 pushes the first group of chuck parts to the conveyor belt 14 through the V-shaped mouth 10, and then the electric cylinder 8 is shortened, and the second group of chuck parts falls onto the workbench 1, and then the electric cylinder 8 is extended again, so that the second group of chuck parts are conveyed to the conveyor belt 14, so as to realize the continuity of the chuck parts. The controller 3 can set the extension and shortening time interval of the electric cylinder 8, and the motor 13 is started by the controller 3, so that the two groups of rollers 11 rotate the conveyor belt 14 with the cooperation of multiple groups of auxiliary rollers 12. When the chuck parts move to the bottom of the electrical box 20, the scanner 21 and the detector 22 cooperate with each other to detect the size of the chuck parts. After the detection is completed, the conveyor belt 14 conveys the chucks to the material guide trough 4. When unqualified chuck parts are conveyed to the material guide trough 4 and slide down, the electric push rod 18 is shortened, so that the sealing plate 16 is away from the opening, and the unqualified chuck parts fall through the opening. When the chuck parts are suitable products, the electric push rod 18 is not shortened.

[0034] The controller 3, electric cylinder 8, motor 13, electric push rod 18, electric box 20, scanner 21 and detector 22 of the wafer clamp size inspection fixture of the utility model are purchased on the market. The technicians in this industry only need to install and operate them according to the accompanying instruction manual, without the need for the technicians in this field to make creative labor.

[0035] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A wafer holder size inspection jig, comprising a workbench (1), a groove (2), a controller (3) and a material guide trough (4), wherein the top of the workbench (1) is provided with a groove (2), the right end of the groove (2) is flush with the right end of the workbench (1), the front end of the workbench (1) is provided with a controller (3), and the right end of the workbench (1) is provided with a material guide trough (4), characterized in that: It also includes a feeding component, a detector component, a screening component and a conveying component. The conveying component is arranged in the groove (2), the detector component is arranged at the top of the workbench (1), the feeding component is arranged at the left part of the top of the workbench (1), and the screening component is arranged on the guide trough (4). The detector component, the conveying component, the feeding component and the screening component are all electrically connected to the controller (3).

2. A wafer holder size inspection jig as claimed in claim 1, characterized in that: The feeding assembly comprises a support rod (5), a barrel (6), a support frame (7), an electric cylinder (8), a push plate (9) and a V-shaped mouth (10). Two groups of support rods (5) are arranged at the bottom end of the barrel (6). The bottom ends of the two groups of support rods (5) are connected to the top end of the workbench (1). A support frame (7) is arranged at the left end of the workbench (1). An electric cylinder (8) is installed on the support frame (7). A push plate (9) is arranged at the right movable end of the electric cylinder (8). The top end of the push plate (9) contacts the bottom end of the barrel (6), and the bottom end of the push plate (9) contacts the top end of the workbench (1). A V-shaped mouth (10) is arranged at the end of the push plate (9) away from the support frame (7). The electric cylinder (8) is electrically connected to the controller (3).

3. A wafer holder size inspection jig as claimed in claim 1, characterized in that: The conveying assembly comprises rollers (11), auxiliary rollers (12), a motor (13) and a conveyor belt (14); two groups of rollers (11) are rotatably arranged in the groove (2); multiple groups of auxiliary rollers (12) are rotatably arranged in the groove (2); the multiple groups of auxiliary rollers (12) are between the two groups of rollers (11); a motor (13) is arranged at the front end of the workbench (1); the motor (13) is connected to the front end of one group of rollers (11); the conveyor belt (14) is sleeved on the outer sides of the two groups of rollers (11); and the motor (13) is electrically connected to the controller (3).

4. A wafer holder size inspection jig as claimed in claim 1, characterized in that: The screening assembly comprises a hinge (15), a sealing plate (16), an axle pin (17) and an electric push rod (18); an opening is arranged on the material guide trough (4); the sealing plate (16) is movably arranged on the material guide trough (4) through the hinge (15); the sealing plate (16) seals the opening; one end of the electric push rod (18) is hinged to the right end of the workbench (1) through a group of axle pins (17); the other end of the electric push rod (18) is hinged to the left end of the sealing plate (16) through another group of axle pins (17); and the electric push rod (18) is electrically connected to the controller (3).

5. The wafer holder size inspection jig according to claim 1, characterized in that: The detector assembly comprises a bracket (19), an electric box (20), a scanner (21) and a detector (22); the bracket (19) is arranged at the top of the workbench (1), the electric box (20) is installed at the top of the bracket (19), and the scanner (21) and the detector (22) are arranged at the bottom of the electric box (20).

6. A wafer holder dimension inspection jig as claimed in claim 4, characterized in that: It also comprises a stopper (23), and the inner end of the sealing plate (16) is provided with the stopper (23).

7. A wafer holder dimension inspection jig as claimed in claim 5, characterized in that: It also includes a lighting lamp (24), and the bottom end of the electrical box (20) is provided with the lighting lamp (24).

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