Unidirectional movement exposure mechanism of double-sided exposure machine

Abstract

The utility model discloses a one-way movement exposure mechanism of a double-sided exposure machine, which comprises a fixed plate and is characterized in that the upper end and the lower end of the front side of the fixed plate are respectively and fixedly connected with a limiting groove rod, one end of a sliding rod is arranged in a sliding groove of each limiting groove rod, and each sliding rod is respectively matched with the sliding groove of the corresponding limiting groove rod; the outer end of each sliding rod is fixedly connected with one end of an extending arm, and the other end of each extending arm is fixedly connected with the center of one side of a supporting rod. And a group of uniformly distributed LED lamps are fixed in the center of the other side of the supporting rod. The utility model relates to the technical field of photoetching equipment, in particular to a one-way moving exposure mechanism of a double-sided exposure machine, which is convenient for moving and adjusting an LED (light-emitting diode) lamp for exposure of the exposure machine.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography equipment, in particular to a unidirectional movable exposure mechanism of a double-sided exposure machine. Background Art

[0002] Double-sided exposure machine is an important equipment in lithography technology, which is widely used in semiconductor manufacturing, printed circuit board (PCB) production and other fields. Traditional exposure machines usually use a one-way movable exposure mechanism, which has problems of low efficiency and insufficient precision when performing double-sided exposure. The position of the exposure lamp cannot be adjusted. In order to improve the exposure efficiency and accuracy, a new type of one-way movable exposure mechanism is needed, which can ensure the exposure quality while improving the stability of the equipment operation and the convenience of operation. Utility Model Content

[0003] The utility model provides a one-way movable exposure mechanism of a double-sided exposure machine, which is convenient for moving and adjusting an LED lamp used for exposure of the exposure machine.

[0004] A one-way movable exposure mechanism of a double-sided exposure machine comprises a fixed plate, characterized in that: the upper end and the lower end of the front side of the fixed plate are respectively fixedly connected to a limit groove rod, one end of a slide rod is arranged in the slide groove of the limit groove rod, and each of the slide rods is respectively matched with the slide groove of the limit groove rod;

[0005] The outer end of each of the sliding rods is respectively fixedly connected to one end of the extending arm, and the other end of each of the extending arms is respectively fixedly connected to the center of one side of the supporting rod;

[0006] A group of evenly arranged LED lights are fixed at the center of the other side of the support rod.

[0007] As a further limitation of the present technical solution, one side of each of the support rods is hinged to one end of a symmetrical connecting rod, and the other end of each pair of connecting rods is hinged to two sides of a U-shaped plate, and a moving block is fixed on one side of the U-shaped plate, and the moving block is threadedly connected to a lead screw, and the lead screw fixes the output shaft of the motor, and the motor fixes the fixed plate.

[0008] As a further limitation of the technical solution, four corners of the fixing plate are respectively provided with mounting holes.

[0009] As a further limitation of the present technical solution, each group of the LED lamps is connected in series, and the LED lamps are electrically connected to a power supply and a switch.

[0010] Compared with the prior art, the advantages and positive effects of the utility model are:

[0011] By using a stepper motor to drive the lead screw, precise control of the LED light group is achieved, improving exposure efficiency;

[0012] The coordinated design of the slide bar and the limit slot bar ensures the stability and accuracy of the LED light group during movement, thereby improving the exposure quality;

[0013] The design of the support rod and the extension arm allows the LED light group to flexibly adjust the position and distance to adapt to the exposure requirements of different sizes and shapes. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. Obviously, the drawings described below are only some embodiments of the present utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0015] Figure 1 The three-dimensional structure of the utility model is shown in FIG. Figure 1 ;

[0016] Figure 2 The three-dimensional structure of the utility model is shown in FIG. Figure 2 ;

[0017] Figure 3 The three-dimensional structure of the utility model is shown in FIG. Figure 3 ;

[0018] Figure 4 The three-dimensional structure of the utility model is shown in FIG. Figure 4 .

[0019] 1. Fixed plate, 2. Mounting hole, 3. Support rod, 4. LED light, 5. Limiting slot rod, 6. Sliding rod, 7. Connecting rod, 8. U-shaped plate, 9. Moving block, 10. Lead screw, 11. Extending arm, 14. Motor. DETAILED DESCRIPTION

[0020] The following is combined with Figure 1-Figure 4 The utility model is further described with implementation modes.

[0021] The utility model provides a one-way movable exposure mechanism of a double-sided exposure machine, comprising a fixed plate 1, wherein the upper end and the lower end of the front side of the fixed plate 1 are respectively fixedly connected to a limit groove rod 5, wherein one end of a slide rod 6 is arranged in the slide groove of the limit groove rod 5, and each of the slide rods 6 is respectively matched with the slide groove of the limit groove rod 5, and the matching design of the slide rod 6 and the limit groove rod 5 ensures the accuracy and stability of the movement;

[0022] The outer end of each of the slide bars 6 is respectively fixedly connected to one end of the extension arm 11, and the other end of each of the extension arms 11 is respectively fixedly connected to the center of one side of the support bar 3;

[0023] A group of evenly arranged LED lights 4 are fixed to the center of the other side of the support rod 3 .

[0024] In this embodiment, exposure is performed through LED lights 4. Two groups of LED lights 4 are provided and can move along with the movement of the support rod 3. The support rod 3 can move along with the extension arm 11. The extension arm 11 moves along with the slide rod 6 in the slide groove of the limit groove rod 5, thereby realizing the distance adjustment of the LED lights 4.

[0025] One side of each of the support rods 3 is hinged to one end of a symmetrical connecting rod 7, and the other end of each pair of connecting rods 7 is hinged to two sides of a U-shaped plate 8. A moving block 9 is fixed to one side of the U-shaped plate 8, and the moving block 9 is threadedly connected to a lead screw 10. The lead screw 10 fixes the output shaft of a motor 14, and the motor 14 fixes the fixed plate 1.

[0026] In this embodiment, the lead screw 10 is driven to rotate by the motor 14, the motor 14 is a stepping motor, the lead screw 10 drives the moving block 9 to move, the moving block 9 drives the U-shaped plate 8 to move, the U-shaped plate 8 drives the connecting rod 7 to swing, the connecting rod 7 drives the extending arm 11 to move, and the extending arm 11 drives the sliding rod 6 to move in the sliding groove of the limiting groove rod 5.

[0027] The four corners of the fixing plate 1 are respectively provided with mounting holes 2 .

[0028] Each group of LED lights 4 is connected in series, and the LED lights 4 are electrically connected to a power supply and a switch, thereby ensuring a smooth exposure process.

[0029] The usage of this embodiment is: place the workpiece to be exposed at the appropriate position of the equipment, drive the motor 14 to drive the lead screw 10 to move, and finally drive the LED lamp 4 to adjust to the appropriate position to ensure that the distance between the workpiece and the LED lamp group is appropriate for effective exposure.

[0030] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A unidirectional movable exposure mechanism of a double-sided exposure machine, comprising a fixed plate (1), characterized in that: The upper end and the lower end of the front side of the fixing plate (1) are respectively fixedly connected to the limit slot rod (5), and one end of a slide rod (6) is arranged in the slide groove of the limit slot rod (5), and each slide rod (6) matches the slide groove of the limit slot rod (5); The outer end of each of the sliding rods (6) is respectively fixedly connected to one end of the extending arm (11), and the other end of each of the extending arms (11) is respectively fixedly connected to the center of one side of the supporting rod (3); A group of evenly arranged LED lights (4) is fixed to the center of the other side of the support rod (3).

2. The one-way moving exposure mechanism of a double-sided exposure machine according to claim 1, characterized in that: One side of each support rod (3) is hinged to one end of a symmetrical connecting rod (7), and the other end of each pair of connecting rods (7) is hinged to two sides of a U-shaped plate (8). A moving block (9) is fixed to one side of the U-shaped plate (8), and the moving block (9) is threadedly connected to a lead screw (10). The lead screw (10) fixes the output shaft of the motor (14), and the motor (14) fixes the fixed plate (1).

3. The one-way moving exposure mechanism of a double-sided exposure machine according to claim 1, characterized in that: The four corners of the fixing plate (1) are respectively provided with mounting holes (2).

4. The one-way moving exposure mechanism of a double-sided exposure machine according to claim 1, characterized in that: Each group of LED lamps (4) is connected in series, and the LED lamps (4) are electrically connected to a power source and a switch.

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