Scanning electron microscope carrier

Abstract

The utility model discloses a scanning electron microscope stage, which comprises a working table, slots arranged on two sides of the working table and clamping assemblies arranged on two sides of the working table, each clamping assembly comprises a positioning strip and two guide rods fixed on the side wall of the positioning strip, the other ends of the guide rods are inserted into the slots, and the clamping assemblies are arranged on the two sides of the working table. The end portion of the guide rod is fixedly connected with a blocking piece, the blocking piece is located in the inserting groove, a spring is fixedly connected between the blocking piece and the inserting groove, the diameter of the blocking piece is larger than that of the guide rod, and the guide rod is sleeved with the spring. According to the utility model, a plastic film can be arranged at the top of the workbench, then the two sides of the protective film are pressed and fixed through the clamping assemblies, then a detected object is placed above the workbench, and the detected object is separated from the surface of the workbench through the plastic film, so that the detected object is prevented from polluting the surface of the workbench; the service life of the workbench is prolonged, and the cleaning and maintenance frequency is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of microscopes, in particular to a scanning electron microscope carrier. Background Art

[0002] Scanning electron microscopy is an observation method between transmission electron microscopy and optical microscopy. It uses a narrow focused high-energy electron beam to scan samples, and stimulates various physical information through the interaction between the beam and the material. This information is collected, amplified, and re-imaged to achieve the purpose of characterizing the microscopic morphology of the material.

[0003] The stage is a component of the electron microscope. If some objects to be inspected are placed directly on the stage, it will cause contamination to the stage of the microscope, so it is urgently necessary to change it. Utility Model Content

[0004] 1. Technical issues to be resolved

[0005] In view of the deficiencies in the prior art, the utility model provides a scanning electron microscope stage, which solves the problems raised in the above-mentioned background technology.

[0006] (II) Technical solution

[0007] To achieve the above objectives, the utility model is implemented through the following technical solutions: a scanning electron microscope carrier, including a workbench, slots opened on both sides of the workbench and clamping components arranged on both sides of the workbench, the clamping components including a positioning bar, two guide rods fixed to the side walls of the positioning bar, the other end of the guide rod is inserted into the slot, the end of the guide rod is fixedly connected to a baffle, the baffle is located in the slot, and a spring is fixedly connected between the baffle and the slot.

[0008] Preferably, the diameter of the baffle is larger than the diameter of the guide rod, and the spring is sleeved on the guide rod.

[0009] Preferably, a handle is fixedly connected to the side wall of the positioning bar.

[0010] Preferably, it also includes a base located below the workbench, wherein the base has a cavity inside, a rotating rod is rotatably inserted into the bottom wall of the cavity, and the upper end of the rotating rod passes through the outside of the base and is fixedly connected to the bottom wall of the workbench.

[0011] Preferably, a worm wheel is coaxially fixedly connected to the rotating rod, a motor is fixedly mounted on the front side wall of the base, an output end of the motor passes through the cavity and is fixedly connected to a worm, and the worm is meshed with the worm wheel.

[0012] Preferably, the other end of the worm is rotatably inserted on the inner wall of the cavity.

[0013] (III) Beneficial effects

[0014] The utility model provides a scanning electron microscope stage, which has the following beneficial effects:

[0015] 1. In the utility model, a plastic film can be set on the top of the workbench, and then the two sides of the protective film are pressed and fixed by a clamping assembly, and then the object to be detected is placed on the workbench. The plastic film separates the object to be detected from the surface of the workbench to prevent the object from contaminating the surface of the workbench, thereby extending the service life of the workbench and reducing the frequency of cleaning and maintenance.

[0016] 2. In the utility model, by starting the motor, the worm is driven to rotate, the worm drives the worm wheel to rotate, and the worm wheel drives the workbench to rotate through the rotating rod, so as to adjust the angle of the object to be inspected, which is convenient for observation by the electronic lens of the microscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a front-view stereoscopic structural diagram of a scanning electron microscope stage proposed by the utility model;

[0018] Figure 2 This is a front cross-sectional structural diagram of a scanning electron microscope stage proposed by the utility model;

[0019] Figure 3 for Figure 2 A magnified structural diagram;

[0020] Figure 4 This is a front cross-sectional structural diagram of a scanning electron microscope carrier proposed in the utility model.

[0021] In the figure: 1, base; 101, cavity; 2, workbench; 201, slot; 3, clamping assembly; 301, guide rod; 302, baffle; 303, positioning strip; 304, spring; 305, handle; 4, worm gear; 5, rotating rod; 6, worm; 7, motor. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0023] See also Figures 1 to 4The utility model provides a technical solution: a scanning electron microscope stage, including a workbench 2, slots 201 opened on both sides of the workbench 2 and clamping components 3 arranged on both sides of the workbench 2, the clamping components 3 including a positioning bar 303, two guide rods 301 fixed to the side walls of the positioning bar 303, the other end of the guide rod 301 is inserted into the slot 201, the end of the guide rod 301 is fixedly connected with a baffle 302, the baffle 302 is located in the slot 201, and a spring 304 is fixedly connected between the baffle 302 and the slot 201.

[0024] A plastic film can be set on the top of the workbench 2, and then the two sides of the protective film are pressed and fixed by the clamping component 3, and then the object to be detected is placed on the workbench 2. The plastic film separates the object to be detected from the surface of the workbench 2 to prevent the object from contaminating the surface of the workbench 2, thereby extending the service life of the workbench 2 and reducing the frequency of cleaning and maintenance.

[0025] When the clamping assembly 3 is used to fix the plastic film, the positioning bar 303 is pulled to separate the positioning bar 303 from the end of the workbench 2, and then the plastic film is inserted into the gap between the positioning bar 303 and the workbench 2. Then, the positioning bar 303 is released, and the spring 304 releases its elastic force, pushing the baffle 302 and the guide rod 301 to move toward the depth of the slot 201. The positioning bar 303 is close to the end of the workbench 2 to press the plastic film.

[0026] In this solution, the diameter of the blocking piece 302 is larger than the diameter of the guide rod 301 , and the spring 304 is sleeved on the guide rod 301 .

[0027] In order to facilitate pulling the positioning bar 303 , a pull handle 305 is fixedly connected to the side wall of the positioning bar 303 .

[0028] In addition, the present solution also includes a base 1 located below the workbench 2, with a cavity 101 inside the base 1, a rotating rod 5 rotatably inserted into the bottom wall of the cavity 101, and the upper end of the rotating rod 5 passes through the outside of the base 1 and is fixedly connected to the bottom wall of the workbench 2.

[0029] The rotating rod 5 is coaxially fixedly connected with a worm wheel 4 , a motor 7 is fixedly installed on the front side wall of the base 1 , an output end of the motor 7 passes through the cavity 101 and is fixedly connected with a worm 6 , and the worm 6 is meshed with the worm wheel 4 .

[0030] The other end of the worm 6 is rotatably inserted into the inner wall of the cavity 101 , thereby increasing the stability of the worm 6 during rotation.

[0031] The motor 7 is started to drive the worm 6 to rotate, the worm 6 drives the worm wheel 4 to rotate, and the worm wheel 4 drives the workbench 2 to rotate through the rotating rod 5 to adjust the angle of the object to be inspected, so as to facilitate observation by the electron lens of the microscope.

[0032] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A scanning electron microscope stage, characterized in that: The invention comprises a workbench (2), slots (201) opened on both sides of the workbench (2), and a clamping assembly (3) arranged on both sides of the workbench (2); the clamping assembly (3) comprises a positioning bar (303), two guide rods (301) fixed to the side walls of the positioning bar (303), the other ends of the guide rods (301) are inserted into the slots (201), the ends of the guide rods (301) are fixedly connected with a blocking piece (302), the blocking piece (302) is located in the slot (201), and a spring (304) is fixedly connected between the blocking piece (302) and the slot (201).

2. A scanning electron microscope stage according to claim 1, characterized in that: The diameter of the blocking piece (302) is greater than the diameter of the guide rod (301), and the spring (304) is sleeved on the guide rod (301).

3. A scanning electron microscope stage according to claim 1, characterized in that: A handle (305) is fixedly connected to the side wall of the positioning strip (303).

4. A scanning electron microscope stage according to claim 1, characterized in that: It also comprises a base (1) located below the workbench (2), the base (1) having a cavity (101) inside, a rotating rod (5) rotatably inserted into the bottom wall of the cavity (101), the upper end of the rotating rod (5) passing through the outside of the base (1) and fixedly connected to the bottom wall of the workbench (2).

5. A scanning electron microscope stage according to claim 4, characterized in that: A worm wheel (4) is coaxially fixedly connected to the rotating rod (5), a motor (7) is fixedly mounted on the front side wall of the base (1), an output end of the motor (7) passes through the interior of the cavity (101) and is fixedly connected to a worm (6), and the worm (6) is meshed with the worm wheel (4).

6. A scanning electron microscope stage according to claim 5, characterized in that: The other end of the worm (6) is rotatably inserted on the inner wall of the cavity (101).

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