Automatic film changing device for integrated circuit

Abstract

The utility model relates to an automatic integrated circuit film changing device in the technical field of integrated circuit film changing, which comprises a bottom plate, a film changing platform track is fixedly mounted on the bottom plate, a locking buckle assembly is fixedly mounted on the bottom plate, a film changing support is slidably connected onto the film changing platform track, the film changing platform track comprises an outer layer track, and the outer layer track comprises an inner layer track and an outer layer track. The outer-layer rail is fixedly connected to the bottom plate, the bottom plate is fixedly connected with an inner rail, one side of the outer-layer rail and one side of the inner rail are fixedly connected with limiting blocks, the locking buckle assembly comprises an installation part, and the installation part is fixedly installed on the bottom plate. The design of a positioning column is replaced by the design of the automatic locking buckle, the phenomenon that the positioning column is forgotten to be inserted due to negligence of personnel is avoided, the risk that the mold changing support slides off due to the fact that the mold changing support is not positioned is avoided, the safety of the personnel and the mold is improved on the operation face, and therefore the mold changing support is suitable for being popularized and used in workshops, and the production efficiency is improved. And therefore, the convenience of film changing operation is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit film replacement, in particular to an integrated circuit automatic film replacement device. Background Art

[0002] IC film replacement generally refers to the replacement or movement of films or molds used in specific process steps during the IC manufacturing process. These films or molds can be photomasks used in the photolithography process, or molds used in other process steps such as etching, deposition, etc. The film replacement process is critical to maintaining production efficiency and product quality, because different process steps may require different films or molds. However, current technology requires operators to manually insert positioning pins to fix the mold changer. This manual operation relies on the operator's attention and accuracy and is prone to errors. If the operator forgets to insert the positioning pins, the mold changer may slip or fall during transportation, which will not only cause mold damage, but also pose a threat to personnel safety. The process of manually inserting positioning pins will reduce the efficiency of film replacement, especially in a high-volume production environment. This inefficiency may cause production delays. Manual operation may also involve safety issues, especially in large-scale production environments where molds need to be changed frequently. Frequent manual operations increase the risk of accidents. Utility Model Content

[0003] The utility model aims to solve the shortcomings in the prior art and proposes an integrated circuit automatic film changing device.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an integrated circuit automatic film changing device, comprising a base plate, a film changing platform track is fixedly installed on the base plate, a locking buckle assembly is fixedly installed on the base plate, a film changing bracket is slidably connected to the film changing platform track, the film changing platform track comprises an outer track, the outer track is fixedly connected to the base plate, the base plate is fixedly connected to an inner track, one side of the outer track and the inner track is fixedly connected to a limiting block, the locking buckle assembly comprises a mounting piece, the mounting piece is fixedly installed on the base plate, a locking buckle is rotatably connected to the mounting piece, the locking buckle is L-shaped, an arc segment is provided on the locking buckle, a right-angle hook is provided on the locking buckle, and a lifting block is fixedly connected above the locking buckle.

[0005] As a further description of the above technical solution:

[0006] The film-changing bracket includes a bracket mounting plate which slides on an outer track and an inner track. A bracket side plate is fixedly connected to the bracket mounting plate. There are two bracket side plates. A handle is fixedly connected to the bracket side plate. An observation window is formed in the bracket side plate. A lower bracket is fixedly connected between the bracket side plates. An upper bracket is fixedly connected between the bracket side plates. A snap ring is fixedly connected to one end of the bracket mounting plate, and the snap ring is fixedly connected to the bracket side plate.

[0007] As a further description of the above technical solution:

[0008] The width of the locking buckle matches the width of the notch of the snap ring, and the locking buckle is snap-connected with the snap ring when it abuts against the snap ring.

[0009] As a further description of the above technical solution:

[0010] The shape of the mounting member is "U"-shaped, and the locking buckle rotates at the middle notch of the mounting member.

[0011] As a further description of the above technical solution:

[0012] There are two parallel lower brackets and two parallel upper brackets. The upper brackets are arranged directly above the lower brackets, and the lower brackets and the upper brackets are parallel to each other.

[0013] As a further description of the above technical solution:

[0014] There are two parallel outer tracks and two parallel inner tracks. The inner tracks are arranged in the middle of the outer tracks, and the outer tracks and the inner tracks are parallel to each other.

[0015] As a further description of the above technical solution:

[0016] Two handles are provided on each bracket side plate, and two observation windows are provided on each bracket side plate.

[0017] The utility model has the following beneficial effects: In the utility model, through the design of the automatic locking buckle, the design of the positioning column is replaced, the phenomenon that the positioning column is forgotten to be inserted due to human negligence is avoided, and the risk of slipping due to the non-positioning of the film-changing bracket is avoided. The utility model improves the safety of personnel and molds on the operation surface, so it is suitable for popularization and use in the workshop, thereby effectively improving the convenience of film-changing operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic structural diagram of an integrated circuit automatic film-changing device proposed by the utility model;

[0019] Figure 2 This is a structural schematic diagram of the locking buckle assembly of the integrated circuit automatic film changing device proposed by the utility model.

[0020] Legend:

[0021] 1. Bottom plate; 2. Membrane changing platform track; 3. Locking buckle assembly; 4. Membrane changing bracket; 21. Outer track; 22. Inner track; 23. Limit block; 31. Mounting piece; 32. Locking buckle; 33. Arc segment; 34. Right-angle hook; 35. Pulling block; 41. Bracket mounting plate; 42. Bracket side panel; 43. Handle; 44. Observation window; 45. Lower bracket; 46. Upper bracket; 47. Snap ring. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Reference Figure 1-2 The utility model provides an embodiment: an integrated circuit automatic film changing device, comprising a bottom plate 1, the bottom plate 1 is used as the basis of the whole device for supporting other components, a film changing platform track 2 is fixedly installed on the bottom plate 1, the film changing platform track 2 allows the film changing bracket 4 to slide thereon to adjust the film changing position, the film changing platform track 2 is used to store and move the mold changing bracket, and move the mold changing bracket from the mold changing vehicle to the machine platform, a locking buckle assembly 3 is fixedly installed on the bottom plate 1, the locking buckle assembly 3 is used to lock the mold changing bracket on the mold changing platform track to prevent the mold from slipping, and the film changing bracket 4 is slidably connected to the film changing platform track 2, The film changing platform track 2 includes an outer track 21, which is fixedly connected to the base plate 1, and an inner track 22 is fixedly connected to the base plate 1. A limiting block 23 is fixedly connected to one side of the outer track 21 and the inner track 22. The limiting block 23 limits the movement of the mold changing bracket. The locking buckle assembly 3 includes a mounting member 31, which is fixedly mounted on the base plate 1. A locking buckle 32 is rotatably connected to the mounting member 31. The locking buckle 32 is L-shaped, and an arc segment 33 is provided on the locking buckle 32. A right-angle hook 34 is provided on the locking buckle 32, and a lifting block 35 is fixedly connected above the locking buckle 32.

[0024] The membrane replacement bracket 4 includes a bracket mounting plate 41 which slides on the outer track 21 and the inner track 22. A bracket side plate 42 is fixedly connected to the bracket mounting plate 41. There are two bracket side plates 42. A handle 43 is fixedly connected to the bracket side plates 42. An observation window 44 is formed on the bracket side plates 42. A lower bracket 45 is fixedly connected between the bracket side plates 42. An upper bracket 46 is fixedly connected between the bracket side plates 42. The upper bracket 46 and the lower bracket 45 are respectively used to store the upper die and the lower die and install the die into the chase hold. One end of the bracket mounting plate 41 is fixedly connected with a snap ring 47, and the snap ring 47 is fixedly connected with the bracket side plate 42.

[0025] The width of the locking buckle 32 matches the width of the notch of the snap ring 47, and the locking buckle 32 is clamped with the snap ring 47 when it abuts against the snap ring 47.

[0026] The shape of the mounting member 31 is "U"-shaped, and the locking buckle 32 rotates at the middle notch of the mounting member 31.

[0027] There are two mutually parallel lower brackets 45, and there are two mutually parallel upper brackets 46. The upper bracket 46 is arranged directly above the lower bracket 45, and the lower bracket 45 and the upper bracket 46 are parallel to each other.

[0028] There are two mutually parallel outer tracks 21, and there are two mutually parallel inner tracks 22. The inner track 22 is arranged in the middle of the outer track 21, and the outer track 21 and the inner track 22 are parallel to each other.

[0029] There are two handles 43 on each bracket side plate 42, and there are two observation windows 44 on each bracket side plate 42. The handle 43 facilitates the operator to pull the membrane replacement bracket 4, and the observation window 44 facilitates the operator to observe the die on the membrane replacement bracket 4.

[0030] Working principle: The operator places the upper die and the lower die on the upper bracket 46 and the lower bracket 45 of the membrane replacement bracket 4 respectively. Since the lower bracket 45 and the upper bracket 46 are parallel to each other and the upper bracket 46 is located directly above the lower bracket 45, the die can be stably placed;

[0031] The film-changing bracket 4 slides on the outer rail 21 and the inner rail 22 through the bracket mounting plate 41, so as to move the mold from the mold-changing vehicle to a predetermined position on the machine platform. When the film-changing bracket 4 slides to the correct position, the arc section 33 of the locking buckle 32 contacts the snap ring 47, so that the locking buckle 32 is lifted, and the film-changing bracket 4 is continuously pushed, so that the right-angle hook 34 of the locking buckle 32 can hook the notch of the snap ring 47. As the film-changing bracket 4 slides further, the locking buckle 32 and the snap ring 47 are connected, ensuring that the film-changing bracket 4 is stably locked on the mold-changing platform track to prevent the mold from slipping. After the connection is completed, the mold is fixed on the film-changing bracket 4, and the subsequent integrated circuit manufacturing process can be carried out.

[0032] When the mold needs to be removed from the film changing bracket 4, the operator lifts the lifting block 35 to disengage the locking buckle 32 from the clamping state of the clamping ring 47. When the locking buckle 32 is no longer clamped with the clamping ring 47, the operator can push the film changing bracket 4 to slide along the track to move the mold to a safe position. After the mold is safely moved out, the operator can remove the upper mold and the lower mold from the bracket to prepare for the next film changing operation or cleaning and maintenance of the mold.

[0033] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An integrated circuit automatic film replacement device, comprising a base plate (1), characterized in that: A film-changing platform track (2) is fixedly installed on the bottom plate (1), a locking buckle assembly (3) is fixedly installed on the bottom plate (1), a film-changing bracket (4) is slidably connected to the film-changing platform track (2), the film-changing platform track (2) includes an outer track (21), the outer track (21) is fixedly connected to the bottom plate (1), an inner track (22) is fixedly connected to the bottom plate (1), a limiting block (23) is fixedly connected to one side of the outer track (21) and the inner track (22), the locking buckle assembly (3) includes a mounting member (31), the mounting member (31) is fixedly installed on the bottom plate (1), a locking buckle (32) is rotatably connected in the mounting member (31), the locking buckle (32) is L-shaped, an arc section (33) is arranged on the locking buckle (32), a right-angle hook (34) is arranged on the locking buckle (32), and a lifting block (35) is fixedly connected above the locking buckle (32).

2. The integrated circuit automatic film replacement device according to claim 1, characterized in that: The film-changing bracket (4) includes a bracket mounting plate (41), the bracket mounting plate (41) slides on the outer track (21) and the inner track (22), a bracket side plate (42) is fixedly connected to the bracket mounting plate (41), there are two bracket side plates (42), a handle (43) is fixedly connected to the bracket side plate (42), an observation window (44) is opened on the bracket side plate (42), a lower bracket (45) is fixedly connected between the bracket side plates (42), an upper bracket (46) is fixedly connected between the bracket side plates (42), a clamping ring (47) is fixedly connected to one end of the bracket mounting plate (41), and the clamping ring (47) is fixedly connected to the bracket side plate (42).

3. The integrated circuit automatic film replacement device according to claim 1, characterized in that: The width of the locking buckle (32) matches the width of the notch of the clamping ring (47), and the locking buckle (32) is clamped with the clamping ring (47) when it abuts against the clamping ring (47).

4. The integrated circuit automatic film replacement device according to claim 1, characterized in that: The shape of the mounting member (31) is "U"-shaped, and the locking buckle (32) rotates at the middle notch of the mounting member (31).

5. The integrated circuit automatic film replacement device according to claim 2, characterized in that: There are two parallel lower brackets (45), there are two parallel upper brackets (46), the upper brackets (46) are arranged directly above the lower brackets (45), and the lower brackets (45) are parallel to the upper brackets (46).

6. The integrated circuit automatic film replacement device according to claim 1, characterized in that: There are two parallel outer tracks (21), there are two parallel inner tracks (22), the inner tracks (22) are arranged in the middle of the outer tracks (21), and the outer tracks (21) are parallel to the inner tracks (22).

7. The integrated circuit automatic film replacement device according to claim 2, characterized in that: There are two handles (43) on each bracket side plate (42), and there are two observation windows (44) on each bracket side plate (42).

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