Target material mechanism and magnetron sputtering coating machine

Abstract

The utility model discloses a target material mechanism and a magnetron sputtering coating machine, the target material mechanism comprises a moving frame and a supporting frame used for installing a target material, one end of the supporting frame is arranged on the moving frame, and the other end of the supporting frame is suspended and used for being opposite to a through hole in the closed end of a vacuum bin. The movable frame can move in the direction close to or away from the vacuum bin, so that the supporting frame can be driven to move in the direction close to or away from the vacuum bin, the supporting frame is partially moved into or out of the vacuum bin through the through hole, the waist wheel assembly is arranged at the other end of the supporting frame, and the waist rail is used for being arranged in the vacuum bin. When the waist rail is arranged in the vacuum bin, the waist rail part can stretch out of the bottom end of the through hole, the waist rail is located below the other end of the supporting frame and is in rolling fit with the waist wheel assembly, and when the supporting frame moves in the direction close to or away from the vacuum bin, the supporting frame can drive the waist wheel assembly to roll along the waist rail. According to the utility model, the coating quality can be ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of conductive film production, in particular to a target material mechanism and a magnetron sputtering coating machine. Background Art

[0002] Conductive film is a polymer material with metal coated on the surface. It is widely used in lithium-ion batteries, and is mainly used as a battery collector in lithium-ion batteries. Conductive film can be produced by magnetron sputtering coating. Magnetron sputtering is a type of physical vapor deposition (PVD). Magnetron sputtering coating technology is an important thin film preparation method. It can prepare thin films of multiple materials such as metals, semiconductors, and insulators on a carrier. It has the advantages of simple equipment, easy control, large coating area, and strong adhesion. Magnetron sputtering introduces a magnetic field on the surface of the target (cathode) and uses the magnetic field to confine charged particles to increase the plasma density and increase the sputtering rate.

[0003] The target material mechanism of the existing magnetron sputtering coating machine generally includes a moving frame and a support frame for mounting the target material, one end of the support frame is arranged on the moving frame, and the other end of the support frame is suspended and used to face the through hole of the closed end of the vacuum chamber of the magnetron sputtering coating machine, and the moving frame can move in the direction close to or away from the vacuum chamber, thereby driving the support frame to move in the direction close to or away from the vacuum chamber, so that the support frame part moves into or out of the interior of the vacuum chamber through the through hole. In actual application, after the target material is mounted on the support frame, the movement of the support frame can drive the target material to move synchronously, so that the target material can be moved into or out of the interior of the vacuum chamber through the through hole of the vacuum chamber, and after the target material is moved into the interior of the vacuum chamber through the through hole, the magnetron sputtering coating operation can be performed in the vacuum chamber. After the coating is completed, the movable frame is moved in the direction away from the vacuum chamber, thereby driving the support frame to move in the direction away from the vacuum chamber, so that the support frame is partially moved out of the vacuum chamber through the through hole. The movement of the support frame can drive the target material to move synchronously, thereby moving the target material out of the vacuum chamber through the through hole. After the target material is moved out of the vacuum chamber, the target material can be replaced, for example.

[0004] In the above structure, since the other end of the support frame is suspended and the target is generally heavy, the support frame is easily tilted downward. After the target is moved into the vacuum chamber, the position of the target is easily changed, thereby affecting the coating quality. Utility Model Content

[0005] In order to overcome the deficiencies of the prior art, the utility model provides a target material mechanism and a magnetron sputtering coating machine, which can ensure the quality of coating.

[0006] The technical solution adopted by the utility model to solve its technical problems is:

[0007] The first aspect of the utility model provides a target material mechanism, including a movable frame and a support frame for installing the target material, one end of the support frame is arranged on the movable frame, and the other end of the support frame is suspended and used to be opposite to the through hole at the closed end of the vacuum chamber, and the movable frame can move in the direction close to or away from the vacuum chamber, thereby driving the support frame to move in the direction close to or away from the vacuum chamber, so that the support frame part moves into or out of the interior of the vacuum chamber through the through hole, and also includes a waist wheel assembly and a waist rail, the waist wheel assembly is arranged at the other end of the support frame, and the waist rail is used to be arranged in the interior of the vacuum chamber, when the waist rail is arranged in the interior of the vacuum chamber, the waist rail part can extend from the bottom end of the through hole, the waist rail is located below the other end of the support frame and rolls with the waist wheel assembly, when the support frame moves in the direction close to or away from the vacuum chamber, the support frame can drive the waist wheel assembly to roll along the waist rail.

[0008] As a preferred technical solution, it also includes a roller assembly and a ceiling rail, wherein the roller assembly is arranged at the other end of the support frame, and the ceiling rail is used to be arranged inside the vacuum bin. When the ceiling rail is arranged inside the vacuum bin, the ceiling rail portion can extend from the top of the through hole, and the ceiling rail is located above the other end of the support frame and rollingly cooperates with the roller assembly. When the support frame moves toward or away from the vacuum bin, the support frame can drive the roller assembly to roll along the ceiling rail.

[0009] As a preferred technical solution, the waist wheel assembly includes a waist wheel arranged at the other end of the support frame, the waist wheel rollingly cooperates with the waist rail and can roll along the waist rail, the roller assembly includes two roller seats arranged at the other end of the support frame and are opposite to each other, two rollers are respectively provided on the adjacent sides of the two roller seats, two ceiling rail grooves are respectively provided on both sides of the ceiling rail, the length direction of the ceiling rail groove is the same as the length direction of the ceiling rail, the two ceiling rail grooves correspond to the two rollers respectively, and the rollers rollingly cooperate with the corresponding ceiling rail grooves and can roll along the corresponding ceiling rail grooves.

[0010] As a preferred technical solution, the support frame includes a large wall panel, a small wall panel and a sealing plate, the large wall panel is arranged on the movable frame, the small wall panel is used to be opposite to the through hole at the closed end of the vacuum chamber, the sealing plate is arranged on the side of the large wall panel close to the small wall panel and is arranged parallel to the small wall panel, a connecting column is horizontally arranged between the sealing plate and the small wall panel, a first positioning piece is provided on the side of the small wall panel close to the large wall panel, a second positioning piece corresponding to the first positioning piece is provided on the side of the sealing plate close to the small wall panel, and the second positioning piece is close to the small wall panel. An installation space is formed between one end of the wall panel and one end of the first positioning member close to the large wall panel. The shapes of the sealing plate and the small wall panel are adapted to the shape of the through hole. The size of the sealing plate is larger than the size of the through hole. The sealing plate is used to close or open the through hole. The size of the small wall panel is smaller than the size of the through hole. The roller assembly is provided at the top of the small wall panel, and the waist wheel assembly is provided on the side of the small wall panel away from the large wall panel. The waist wheel assembly is close to the bottom end of the small wall panel. The waist rail is located below the small wall panel, and the ceiling rail is located above the small wall panel.

[0011] As a preferred technical solution, a sealing ring is provided on one side of the sealing plate close to the small wall panel, the shape of the sealing ring is adapted to the shape of the through hole, the size of the sealing ring is larger than the size of the through hole, and the projection of the through hole on the sealing plate is located on the inner side of the sealing ring.

[0012] As a preferred technical solution, the movable frame is configured to be rollingly arranged on the machine base, and further comprises a driving assembly, wherein the driving assembly is configured to drive the movable frame to move toward or away from the vacuum chamber.

[0013] As a preferred technical solution, the mobile frame includes a mobile frame body and two oppositely arranged support members, one end of the two support members is respectively connected to one side of the mobile frame body, one end of the support frame is arranged on one side of the mobile frame body and is located above the two support members, the bottom end of the mobile frame body is provided with two oppositely arranged driving wheels and two oppositely arranged first guide wheels, the bottom end of the support member is provided with a second guide wheel, the two driving wheels, the two first guide wheels and the second guide wheels of the two supports are respectively used to roll with the two ground rails of the machine base and can roll along the corresponding ground rails respectively.

[0014] As a preferred technical solution, the driving assembly includes a driving motor and a chain sprocket module, the driving motor is arranged at the bottom of the mobile frame body, the bottom of the mobile frame body is provided with a through hole penetrating the bottom end of the mobile frame body, the chain sprocket module is arranged through the through hole, a transmission shaft is connected between the two driving wheels, the chain sprocket module is respectively connected to the driving motor and the transmission shaft, and the driving motor is used to drive the transmission shaft to rotate through the chain sprocket module.

[0015] The second aspect of the utility model provides a magnetron sputtering coating machine, including the aforementioned target material mechanism, a machine base and a vacuum chamber, wherein the vacuum chamber is a structure with one end open and the other end closed, and the vacuum chamber and a movable frame are arranged on the machine base at intervals along the length direction of the machine base, and the closed end of the vacuum chamber is close to the movable frame, and the outer wall of the closed end of the vacuum chamber is provided with a through hole connected to the interior of the vacuum chamber.

[0016] As a preferred technical solution, the axial length of the vacuum chamber is greater than 1800 mm.

[0017] The beneficial effect of the utility model is that the target material mechanism of the utility model is provided with a waist rail and a waist wheel assembly. In actual application, the waist wheel assembly can roll with the waist rail, and the waist wheel assembly can roll along the waist rail. On the one hand, it can support the suspended end of the support frame, thereby avoiding the support frame from tilting downward. After the target material is moved into the interior of the vacuum chamber, the position of the target material inside the vacuum chamber will not change, thereby ensuring the quality of the coating. On the other hand, it can guide the movement of the support frame, thereby improving the stability of the movement of the support frame, thereby improving the stability of the movement of the moving frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0019] Figure 1 This is a schematic structural diagram of a magnetron sputtering coating machine provided by an embodiment of the utility model at a first angle;

[0020] Figure 2 yes Figure 1 A schematic structural diagram of a second angle of the magnetron sputtering coating machine shown;

[0021] Figure 3 yes Figure 1 A schematic structural diagram of a base and a vacuum chamber of a magnetron sputtering coating machine at a first angle is shown;

[0022] Figure 4 yes Figure 1 A schematic structural diagram of a base and a vacuum chamber of a magnetron sputtering coating machine at a second angle is shown;

[0023] Figure 5 yes Figure 1 A schematic cross-sectional view of a base and a vacuum chamber of a magnetron sputtering coating machine is shown;

[0024] Figure 6 yes Figure 1 A schematic structural diagram of a target material mechanism of a magnetron sputtering coating machine at a first angle;

[0025] Figure 7 yes Figure 1 A schematic structural diagram of a target material mechanism of a magnetron sputtering coating machine at a second angle;

[0026] Figure 8 yes Figure 1 A schematic structural diagram of a target material mechanism of a magnetron sputtering coating machine at a third angle;

[0027] Fig. 9 yes Figure 1 A schematic structural diagram of a target material mechanism support frame, a ceiling rail and a waist rail of a magnetron sputtering coating machine at a first angle;

[0028] Fig.10 yes Figure 1 A schematic structural diagram of a target material mechanism support frame, a ceiling rail and a waist rail of a magnetron sputtering coating machine at a second angle;

[0029] Fig.11 yes Figure 1 A schematic structural diagram of a support frame of a target material mechanism of a magnetron sputtering coating machine is shown.

[0030] Reference numerals:

[0031] 10. Machine base; 11. Ground rail;

[0032] 20. Vacuum chamber; 21. Mounting piece; 22. Through hole; 23. Upper mounting platform; 24. Lower mounting platform; 25. Ceiling rail; 251. Ceiling rail groove; 26. Waist rail; 27. Support part;

[0033] 30. Mobile frame; 31. Mobile frame body; 312. Driving wheel; 313. First guide wheel; 314. Through hole; 315. Transmission shaft; 32. Support member; 321. Second guide wheel;

[0034] 40. Support frame; 41. Large wall panel; 411. Waist rail through hole; 412. Ceiling rail through hole; 413. Waist rail protrusion; 4131. Waist rail groove; 414. Ceiling rail protrusion; 4141. Ceiling rail groove; 42. Small wall panel; 42a. Concave hole; 421. First positioning member; 4211. Limiting member; 422. Roller seat; 423. Roller; 424. Waist wheel; 4241. Waist wheel seat; 43. Sealing plate; 431. Second positioning member; 432. Sealing ring; 44. Connecting column;

[0035] 50. driving assembly; 51. driving motor; 521. driving sprocket; 522. driven sprocket; 523. chain;

[0036] 100. Target material. DETAILED DESCRIPTION

[0037] The following will clearly and completely describe the concept, specific structure and technical effects of the utility model in combination with the embodiments and drawings, so as to fully understand the purpose, characteristics and effects of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the utility model. In addition, all the connection / connection relationships involved in the patent do not refer to the direct connection of components, but refer to the formation of a better connection structure by adding or reducing connection accessories according to the specific implementation situation. The various technical features in the creation of the utility model can be combined interchangeably without conflicting with each other.

[0038] Please refer to Figure 1 and Figure 2 A magnetron sputtering coating machine provided by an embodiment of the utility model includes a machine base 10, a vacuum chamber 20 and a target mechanism. The target mechanism includes a moving frame 30, a support frame 40 for mounting a target 100, a roller assembly, a waist wheel assembly, a ceiling rail 25, a waist rail 26 and a driving assembly 50.

[0039] The vacuum chamber 20 and the moving frame 30 are arranged on the base 10 at intervals along the length direction of the base 10. Preferably, the moving frame 30 is arranged on the base in a rolling manner. The vacuum chamber 20 is a structure with one end open and the other end closed, and the closed end of the vacuum chamber 20 is close to the moving frame 30.

[0040] Combination Figures 3 to 5As shown, the vacuum chamber 20 is arranged on the machine base 10 through a plurality of, for example, three, mounting structures, which are arranged in sequence from front to back along the width direction of the machine base 10. In this embodiment, the mounting structure includes a plurality of, for example, three mounting members 21, which are arranged in sequence from left to right along the length direction of the machine base 10, one end of the three mounting members 21 is respectively connected to the outer peripheral surface of the vacuum chamber 20, and the other ends of the three mounting members 21 are respectively arranged on the machine base 10. It can be understood that the number of mounting structures and mounting members 21 can be set according to actual conditions.

[0041] The open end of the vacuum chamber 20 is connected with a chamber door, and the opening of the vacuum chamber 20 can be opened or closed by opening or closing the chamber door. The outer wall of the closed end of the vacuum chamber 20 is provided with a through hole 22 that communicates with the interior of the vacuum chamber 20. The front inner wall of the through hole 22 is an arc surface, and the top inner wall, the bottom inner wall and the rear inner wall of the through hole 22 are all straight surfaces.

[0042] The inner circumference of the vacuum chamber 20 is provided with an upper mounting platform 23 and a lower mounting platform 24 which are arranged in an upper and lower direction. The length direction of the upper mounting platform 23 and the lower mounting platform 24 is the same as the length direction of the vacuum chamber 20. One end of the upper mounting platform 23 is connected to the inner wall of the closed end of the vacuum chamber 20, and the other end of the upper mounting platform 23 is close to the open end of the vacuum chamber 20. The bottom end of the upper mounting platform 23 is flush with the top inner wall of the through hole 22. One end of the lower mounting platform 24 is connected to the inner wall of the closed end of the vacuum chamber 20, and the other end of the lower mounting platform 24 is close to the open end of the vacuum chamber 20. The top end of the lower mounting platform 24 is flush with the bottom inner wall of the through hole 22.

[0043] The ceiling rail 25 and the waist rail 26 are both arranged inside the vacuum chamber 20. Specifically, the ceiling rail 25 is arranged at the bottom end of the upper mounting platform 23, so that the upper mounting platform 23 can provide installation support for the ceiling rail 25, the length direction of the ceiling rail 25 is the same as the length direction of the upper mounting platform 23, the ceiling rail 25 partially extends from the top of the through hole 22, the ceiling rail 25 contacts the top inner wall of the through hole 22, one end of the ceiling rail 25 extends in a direction close to the moving frame 30, and the other end of the ceiling rail 25 extends in a direction close to the opening end of the vacuum chamber 20. The waist rail 26 is arranged at the top of the lower mounting platform 24, so that the waist rail 26 can be provided with installation support by the lower mounting platform 24, the length direction of the waist rail 26 is the same as the length direction of the lower mounting platform 24, the waist rail 26 partially extends from the bottom end of the through hole 22, the waist rail 26 contacts the bottom inner wall of the through hole 22, one end of the waist rail 26 extends in a direction close to the moving frame 30, and the other end of the waist rail 26 extends in a direction close to the opening end of the vacuum chamber 20.

[0044] In this embodiment, a support portion 27 for supporting the waist rail 26 is formed on the outer wall of the closed end of the vacuum chamber 20 at a position corresponding to the lower mounting platform 24. The support portion 27 is close to the front inner wall of the through hole 22, the top of the support portion 27 is flush with the bottom inner wall of the through hole 22, the waist rail 26 is in contact with the top of the support portion 27, and the end of the support portion 27 away from the vacuum chamber 20 is flush with the end of the waist rail 26 extending in the direction close to the moving frame 30. By supporting the waist rail 26 with the support portion 27, deformation of the part of the waist rail 26 located outside the vacuum chamber 20 can be avoided.

[0045] The support frame 40 corresponds to the through hole 22. One end of the support frame 40 is arranged on the mobile frame 30, and the other end of the support frame 40 is suspended and opposite to the through hole 22. The other end of the support frame 40 is provided with a roller assembly and a waist wheel assembly, the ceiling rail 25 is located above the other end of the support frame 40 and rolls with the roller assembly, and the waist rail 26 is located below the other end of the support frame 40 and rolls with the waist wheel assembly. The driving assembly 50 is used to drive the mobile frame 30 to move toward or away from the vacuum chamber 20 relative to the base 10, thereby driving the support frame 40 to move toward or away from the vacuum chamber 20, so that the support frame 20 partially moves into or out of the interior of the vacuum chamber 20 through the through hole 22. After the target material 100 is installed on the support frame 20, the target material 100 can be driven to move into or out of the interior of the vacuum chamber 20 through the support frame 20. When the support frame 40 moves toward or away from the vacuum chamber 20, the support frame 40 can drive the roller assembly and the waist wheel assembly to roll along the ceiling rail 25 and the waist rail 26 respectively. In actual application, after the target 100 is mounted on the support frame 40, when the driving assembly 50 drives the moving frame 30 to move toward the direction close to the vacuum chamber 20, the moving frame 30 can drive the supporting frame 40 to move toward the direction close to the vacuum chamber, so that the supporting frame 40 partially moves into the interior of the vacuum chamber 20 through the through hole 22. The movement of the supporting frame 40 can drive the target 100 to move synchronously, so that the target 100 can be moved into the interior of the vacuum chamber 20 through the through hole 22. At the same time, the movement of the supporting frame 40 can drive the roller assembly and the waist wheel assembly to roll along the corresponding ceiling rail 25 and waist rail 26 respectively, and when the target 100 moves into After the target material 100 is inside the vacuum chamber 20, the magnetron sputtering coating operation can be performed inside the vacuum chamber 20. After the coating is completed, the moving frame 30 is driven by the driving assembly 50 to move in the direction away from the vacuum chamber 20, thereby driving the support frame 40 to move in the direction away from the vacuum chamber 20, so that the support frame 20 is partially moved out of the vacuum chamber 20 through the through hole 22. The movement of the support frame 40 can drive the target material 100 to move synchronously, thereby realizing the target material 100 being moved out of the vacuum chamber 20 through the through hole 22. At the same time, the movement of the support frame 40 can drive the roller assembly and the waist wheel assembly to roll along the corresponding ceiling rail 25 and waist rail 26 respectively.

[0046] The target mechanism of the utility model is provided with a ceiling rail 25, a waist rail 26, a roller assembly and a waist wheel assembly. The roller assembly and the ceiling rail 25 roll in cooperation with each other, and the waist wheel assembly and the waist rail 26 roll in cooperation with each other, and the roller assembly and the waist wheel assembly can roll along the ceiling rail 25 and the waist rail 26 respectively. On the one hand, it can support the suspended end of the support frame 40, thereby preventing the support frame 40 from tilting downward. After the target 100 is moved into the interior of the vacuum chamber 20, the position of the target 100 inside the vacuum chamber 20 will not change, thereby ensuring the quality of the coating. Moreover, by supporting the suspended end of the support frame 40, it can ensure that the force at various locations of the movable frame 30 is uniform, and no jamming or damage will occur during the movement of the movable frame 30, thereby extending the service life of the movable frame 30. On the other hand, it can guide the movement of the support frame 40, thereby improving the stability of the movement of the support frame 40, thereby improving the stability of the movement of the movable frame 30.

[0047] Combination Figures 6 to 11 As shown, the mobile frame 30 includes a mobile frame body 31 and two support members 32 arranged in a front-to-back manner. The two support members 32 are located between the mobile frame body 31 and the closed end of the vacuum chamber 20, one end of the two support members 32 is respectively connected to the side of the mobile frame body 31 close to the vacuum chamber 20, and the other ends of the two support members 32 are respectively close to the closed end of the vacuum chamber 20. The bottom ends of the two support members 32 are respectively flush with the bottom ends of the mobile frame body 31. One end of the support frame 40 is arranged on the side of the mobile frame body 31 close to the vacuum chamber 20. The support frame 40 is located above the two support members 32.

[0048] The bottom end of the mobile frame body 31 is provided with two driving wheels 312 arranged front to back and opposite to each other and two first guide wheels 313 arranged front to back and opposite to each other. The two first guide wheels 313 correspond to the two driving wheels 312 and are respectively located to the right of the two driving wheels 312. The bottom end of the support member 32 is provided with a second guide wheel 321. The base 10 is provided with two ground rails 11 arranged front to back and opposite to each other. The length direction of the ground rails 11 is the same as the length direction of the base 10. The two ground rails 11 correspond to the two support members 32 respectively. The two driving wheels 312, the two first guide wheels 313 and the second guide wheels 321 of the two support members 32 are respectively in rolling cooperation with the two ground rails 11 and can respectively roll along the corresponding ground rails 11.

[0049] The movable frame body 31 and the two supporting members 32 are preferably integrally formed to facilitate manufacturing.

[0050] In this embodiment, the two driving wheels 312 are respectively arranged at the bottom end of the mobile frame body 31 through a driving wheel seat. The two first guide wheels 313 are respectively arranged at the bottom end of the mobile frame body 31 through a first guide wheel seat. The second guide wheel 321 is respectively arranged at the bottom end of the corresponding support member 32 through a second guide wheel seat.

[0051] In this embodiment, the second guide wheels 321 of each support member 32 are respectively multiple, for example, three, and the three second guide wheels 321 are sequentially arranged at intervals from left to right at the bottom end of the corresponding support member 32. It can be understood that the number of the second guide wheels 321 can be set according to actual conditions. The number of the second guide wheel seats corresponds to the number of the second guide wheels 321.

[0052] The driving assembly 50 includes a driving motor 51 and a chain sprocket module. The driving motor 51 is arranged at the bottom of the mobile frame body 31 through a motor seat. The bottom of the mobile frame body 31 is provided with a through hole 314 that penetrates the bottom end of the mobile frame body 31, and the chain sprocket module is arranged through the through hole 314. A transmission shaft 315 is connected between the two driving wheels 312, and the chain sprocket module is connected to the driving motor 51 and the transmission shaft 315 respectively. The driving motor 51 is used to drive the transmission shaft 315 to rotate through the chain sprocket module, thereby driving the two driving wheels 312 to rotate. While the two driving wheels 312 rotate, they can respectively roll along the corresponding ground rails 11 in the direction of approaching or moving away from the vacuum chamber 20, thereby driving the mobile frame body 31 to move in the direction of approaching or moving away from the vacuum chamber 20, and the movement of the mobile frame body 31 can drive the support frame 40 and the two support members 32 to move in the direction of approaching or moving away from the vacuum chamber 20. At the same time, the movement of the mobile frame body 31 can drive the two first guide wheels 32 to roll along the corresponding ground rails 11 toward or away from the vacuum chamber 20, and the movement of the two support members 32 can drive the corresponding second guide wheels 321 to roll along the corresponding ground rails 11 toward or away from the vacuum chamber 20.

[0053] In this embodiment, the chain sprocket module includes a driving sprocket 521, a driven sprocket 522 and a chain 523. The driving sprocket 521 is sleeved on the outer periphery of the end of the output shaft of the driving motor 51, the driven sprocket 522 is sleeved on the outer periphery of the transmission shaft 315, and the chain 523 is sleeved on the outer periphery of the driving sprocket 521 and the driven sprocket 522 and penetrates the through hole 314. The driving motor 51 is used to drive the driving sprocket 521 to rotate, so that the transmission shaft 315 can be driven to rotate through the driven sprocket 522 and the chain 523. It can be understood that the chain sprocket module can also be replaced by other modules such as a synchronous belt drive module.

[0054] The support frame 40 includes a large wall panel 41 , a small wall panel 42 and a sealing panel 43 .

[0055] The large wall panel 41 is arranged on the mobile frame 30, specifically, on a side of the mobile frame body 31 close to the vacuum chamber 20. The small wall panel 42 is located between the large wall panel 41 and the closed end of the vacuum chamber 20 and is opposite to the through hole 22. The sealing plate 43 is arranged on a side of the large wall panel 41 close to the small wall panel 42 and is arranged parallel to the small wall panel 42. The shapes of the sealing plate 43 and the small wall panel 42 are adapted to the shape of the through hole 22. An arc-shaped concave hole 42a is provided on one side of the small wall panel 42, for example, the rear side. A connecting column 44 is horizontally arranged between the sealing plate 43 and the small wall panel 42. In this embodiment, there are four connecting columns 44, and the four connecting columns 44 are spaced apart around the concave hole 42a. It can be understood that the number of connecting columns 44 can be set according to actual conditions.

[0056] The size of the large wall panel 41 is larger than that of the sealing panel 43, and the size of the sealing panel 43 is larger than that of the through hole 22. The sealing panel 43 is used to close or open the through hole 22. The size of the small wall panel 42 is smaller than that of the through hole 22. The top of the small wall panel 42 is provided with the above-mentioned roller assembly, and the side of the small wall panel 42 away from the large wall panel 41 is provided with the above-mentioned waist wheel assembly, and the waist wheel assembly is close to the bottom of the small wall panel 42. The ceiling rail 25 is located above the small wall panel 42, and the waist rail 26 is located below the small wall panel 42. In actual application, when the moving frame body 31 is driven by the driving motor 51 to move toward the direction close to the vacuum chamber 20, the movement of the moving frame body 31 can drive the large wall panel 41 to move toward the direction close to the vacuum chamber 20, thereby driving the sealing plate 43, the connecting column 44, and the small wall panel 42 to move in the direction close to the vacuum chamber 20. When the sealing plate 43 abuts against the outer wall of the closed end of the vacuum chamber 20, the driving motor 51 stops driving the moving frame body 31 to move, thereby the large wall panel 41, the sealing plate 43, the small wall panel 42, and the connecting column 44 stop moving. At this time, the sealing plate 43 can be used to close the through hole 22 to ensure the sealing inside the vacuum chamber 20. The small wall panel 42 is located inside the vacuum chamber 20, the connecting column 44 is located inside the vacuum chamber 20, and the end of the connecting column 44 close to the sealing plate 43 is located in the through hole 22. During the movement of the small wall panel 42 and the connecting column 44, the small wall panel 42 can be moved into the interior of the vacuum chamber 20 through the through hole 22, and the connecting column 44, except for one end close to the sealing plate 43, can be moved into the interior of the vacuum chamber 20 through the through hole 22.

[0057] When the driving motor 51 drives the moving frame body 31 to move in a direction away from the vacuum chamber 20, the movement of the moving frame body 31 can drive the large wall panel 41 to move in a direction away from the vacuum chamber 20, thereby driving the sealing plate 43, the connecting column 44, and the small wall panel 42 to move in a direction away from the vacuum chamber 20. When the sealing plate 43 returns to the initial position, the driving motor 51 stops driving the moving frame body 31, thereby the large wall panel 41, the sealing plate 43, the small wall panel 42, and the connecting column 44 stop moving. At this time, the through hole 22 can be opened through the sealing plate 43, and the small wall panel 42 and the connecting column 44 are both located in the initial position, that is, outside the vacuum chamber 20. In the process of the small wall panel 42 and the connecting column 44 moving, the small wall panel 42 can be moved out of the interior of the vacuum chamber 20 through the through hole 22, and the part of the connecting column 44 located inside the vacuum chamber 20 can be moved out of the interior of the vacuum chamber 20 through the through hole 22. The small wall panel 42 can be supported and the movement of the small wall panel 42 can be guided by the roller assembly, the waist wheel assembly, the ceiling rail 25 and the waist rail 26.

[0058] A first positioning member 421 is provided on one side of the small wall plate 42 close to the large wall plate 41. Specifically, a first hole is provided on one side of the small wall plate 42 close to the large wall plate 41. One end of the first positioning member 421 is arranged in the first hole and connected to a limiting member 4211. The limiting member 4211 abuts against a side of the small wall plate 42 away from the large wall plate 41. The other end of the first positioning member 421 is opposite to the sealing plate 43. A second positioning member 431 corresponding to the first positioning member 421 is provided on one side of the sealing plate 43 close to the small wall plate 42. Specifically, a second hole is provided on one side of the sealing plate 43 close to the small wall plate 42. One end of the second positioning member 431 is arranged in the second hole. The other end of the second positioning member 431 is opposite to the small wall plate 42. An installation space for installing the target material 100 is formed between one end of the second positioning member 431 close to the small wall plate 42 and one end of the first positioning member 421 close to the large wall plate 41. The length of the connecting column 44 is greater than the length of the installation space, and the length of the installation space is slightly smaller than the length of the target 100. When actually installing the target 100, the target 100 is first placed in the installation space and one end of the target 100 is abutted against one end of the first positioning member 421 close to the large wall panel 41, and the second end of the target 100 is abutted against one end of the second positioning member 431 close to the small wall panel 42. Then, one end of the target 100 is fixed to one end of the first positioning member 421 close to the large wall panel 41, and the other end of the target 100 is fixed to one end of the second positioning member 431 close to the small wall panel 42 respectively through a tightening member (not shown in the figure). In this way, the target 100 is installed. The clamp is an existing structure, and the clamp includes an upper clamp body and a lower clamp body in a semicircular shape. Two upper locking holes are respectively provided at both ends of the upper clamp body, and two lower locking holes are respectively provided at both ends of the lower clamp body. The two lower locking holes correspond to the two upper locking holes. For example, when one end of the target 100 is fixed to the end of the first positioning member 421 close to the large wallboard 41 through the clamp, the upper clamp body and the lower clamp body of the clamp are respectively sleeved on the outer periphery of one end of the target 100 and the end of the first positioning member 421 close to the large wallboard 41, and then fasteners such as bolts are installed in the upper locking hole and the corresponding lower locking hole. The operation steps of fixing the other end of the target 100 to the end of the second positioning member 431 close to the small wallboard 42 through the clamp are the same as the operation steps of fixing one end of the target 100 to the end of the first positioning member 421 close to the large wallboard 41 through the clamp, and will not be repeated here. When the sealing plate 43 , the connecting column 44 and the small wall plate 42 move in a direction close to the vacuum chamber 20 , the target 100 can be driven to move synchronously through the first positioning member 421 and the second positioning member 431 , so that the target 100 can be moved into the interior of the vacuum chamber 20 .After coating is completed, when the sealing plate 43 , the connecting column 44 and the small wall plate 42 move in a direction away from the vacuum chamber 20 , the sealing plate 43 and the small wall plate 42 can drive the target material 100 to move synchronously, thereby moving the target material 100 out of the vacuum chamber 20 .

[0059] In this embodiment, there are six first positioning members 421, and the six first positioning members 421 are distributed in an arc shape around the concave hole 42a. Among the four connecting columns 44, two connecting columns 44 are distributed alternately with three of the first positioning members 421, and the remaining two connecting columns 44 are distributed alternately with the remaining three first positioning members 421. The number of second positioning members 431 and stoppers 4211 corresponds to the number of first positioning members 421, and is also six respectively, so the support frame 40 of the utility model can simultaneously install six targets 100. It can be understood that the number of first positioning members 421, stoppers 4211, and second positioning members 431 can be set according to actual conditions.

[0060] A sealing ring 432 is provided on one side of the sealing plate 43 close to the small wall panel 42. The shape of the sealing ring 432 is adapted to the shape of the through hole 22. The size of the sealing ring 432 is larger than the size of the through hole 22. The projection of the through hole 22 on the sealing plate 431 is located on the inner side of the sealing ring 432. When the sealing plate 43 abuts against the outer wall of the closed end of the vacuum chamber 20, the sealing ring 432 abuts against the outer wall of the closed end of the vacuum chamber 20. At this time, the through hole 22 is located on the inner side of the sealing ring 432. The provided sealing ring 432 plays a sealing role, thereby ensuring the sealing of the inside of the vacuum chamber 20 during the coating process.

[0061] The side of the large wall panel 41 close to the small wall panel 42 is provided with a waist rail through hole 411 corresponding to the waist rail 26 and a ceiling rail through hole 412 corresponding to the ceiling rail 25. The waist rail through hole 411 and the ceiling rail through hole 412 are both located on the inner side of the sealing ring 432. The side of the large wall panel 41 away from the small wall panel 42 is provided with a waist rail protrusion 413 corresponding to the waist rail through hole 411 and a ceiling rail protrusion 414 corresponding to the ceiling rail through hole 412. The end of the waist rail protrusion 413 close to the large wall panel 41 is provided with a waist rail through hole corresponding to the waist rail through hole The waist rail groove 4131 connected to the waist rail through hole 411 forms a first space, the support portion 27 and the waist rail 26 extending from the bottom end of the through hole 22 are used to cooperate with the first space, the end of the ceiling rail protrusion 414 close to the large wall panel 41 is provided with a ceiling rail groove 4141 connected to the ceiling rail through hole 412, the ceiling rail groove 4141 and the ceiling rail through hole 412 form a second space, and the portion of the ceiling rail 25 extending from the top end of the through hole 22 is used to cooperate with the second space. When the sealing plate 43 abuts against the outer wall of the closed end of the vacuum chamber 20, the support portion 27 and the waist rail 26 extending from the bottom end of the through hole 22 cooperate with the first space, and the portion of the ceiling rail 25 extending from the top end of the through hole 22 cooperates with the second space.

[0062] The roller assembly includes two roller seats 422 arranged at the top of the small wallboard 42 of the support frame 40 and arranged in a front-to-back manner. Two rollers 423 are respectively arranged on the adjacent sides of the two roller seats 422. The two rollers 423 are respectively close to the top of the corresponding roller seats 422. Two ceiling rail grooves 251 are respectively arranged on both sides of the ceiling rail 25. The length direction of the ceiling rail groove 251 is the same as the length direction of the ceiling rail 25. The two ceiling rail grooves 251 correspond to the two rollers 423 respectively. The rollers 423 roll with the corresponding ceiling rail grooves 251 and can roll along the corresponding ceiling rail grooves 251. The waist wheel assembly includes a waist wheel 424. The waist wheel 424 is arranged on the side of the small wallboard 42 of the support frame 40 away from the large wallboard 41 through the waist wheel seat 4241. The waist wheel 424 is close to the bottom end of the small wallboard 42. The waist wheel 424 rolls with the waist rail 26 and can roll along the waist rail 26. When the sealing plate 43 , the connecting column 44 and the small wall plate 42 move in a direction close to or away from the vacuum chamber 20 , the two rollers 423 can roll along the corresponding ceiling rail grooves 251 , and the waist wheel 424 can roll along the waist rail 26 .

[0063] In this embodiment, there are two mobile racks 30, which are symmetrically arranged front and back about the axis of the vacuum chamber 20. Correspondingly, there are two support racks 40, drive components 50, through holes 22, upper mounting platforms 23, lower mounting platforms 24, ceiling rails 25, and waist rails 26. Two support racks 40, two drive components 50, two through holes 22, two upper mounting platforms 23, two lower mounting platforms 24, two ceiling rails 25, and two waist rails 25 are symmetrically arranged front and back about the axis of the vacuum chamber 20. There are four ground rails 11, and a mounting structure is provided between two adjacent ground rails 11.

[0064] The axial length of the vacuum chamber 20 is greater than 1800 mm, which corresponds to the width of the composite current collector film roll (i.e., the conductive film roll). Currently, the maximum width of the composite current collector film roll is more than 1700 mm. The axial length of the vacuum chamber 20 is set in this way to ensure that there is sufficient space to accommodate the composite current collector film roll.

[0065] The above is a specific description of the preferred implementation of the utility model, but the invention of the utility model is not limited to the described embodiments. Technical personnel familiar with the field can also make various equivalent deformations or substitutions without violating the spirit of the utility model. These equivalent deformations or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A target material mechanism, comprising a movable frame and a support frame for mounting a target material, wherein one end of the support frame is arranged on the movable frame, and the other end of the support frame is suspended and used to face the through hole at the closed end of the vacuum chamber, and the movable frame can move toward or away from the vacuum chamber, thereby driving the support frame to move toward or away from the vacuum chamber, so that the support frame partly moves into or out of the interior of the vacuum chamber through the through hole, characterized in that: It also includes a waist wheel assembly and a waist rail, wherein the waist wheel assembly is arranged at the other end of the support frame, and the waist rail is used to be arranged inside the vacuum chamber. When the waist rail is arranged inside the vacuum chamber, the waist rail portion can extend from the bottom end of the through hole, and the waist rail is located below the other end of the support frame and rolls with the waist wheel assembly. When the support frame moves toward or away from the vacuum chamber, the support frame can drive the waist wheel assembly to roll along the waist rail.

2. The target mechanism according to claim 1, characterized in that: It also includes a roller assembly and a ceiling rail, wherein the roller assembly is arranged at the other end of the support frame, and the ceiling rail is used to be arranged inside the vacuum bin. When the ceiling rail is arranged inside the vacuum bin, the ceiling rail portion can extend from the top of the through hole, and the ceiling rail is located above the other end of the support frame and rolls with the roller assembly. When the support frame moves toward or away from the vacuum bin, the support frame can drive the roller assembly to roll along the ceiling rail.

3. The target mechanism according to claim 2, characterized in that: The waist wheel assembly includes a waist wheel arranged at the other end of the support frame, and the waist wheel is in rolling cooperation with the waist rail and can roll along the waist rail. The roller assembly includes two roller seats arranged at the other end of the support frame and are opposite to each other. Two rollers are respectively arranged on the adjacent sides of the two roller seats. Two ceiling rail grooves are respectively provided on both sides of the ceiling rail. The length direction of the ceiling rail groove is the same as the length direction of the ceiling rail. The two ceiling rail grooves correspond to the two rollers respectively. The rollers are in rolling cooperation with the corresponding ceiling rail grooves and can roll along the corresponding ceiling rail grooves.

4. The target mechanism according to claim 2, characterized in that: The support frame includes a large wall panel, a small wall panel and a sealing plate, wherein the large wall panel is arranged on the movable frame, the small wall panel is used to be opposite to the through hole at the closed end of the vacuum chamber, the sealing plate is arranged on a side of the large wall panel close to the small wall panel and is arranged parallel to the small wall panel, a connecting column is horizontally arranged between the sealing plate and the small wall panel, a first positioning piece is arranged on a side of the small wall panel close to the large wall panel, a second positioning piece corresponding to the first positioning piece is arranged on a side of the sealing plate close to the small wall panel, and an end of the second positioning piece close to the small wall panel An installation space is formed between the end of the first positioning member close to the large wall panel, the shapes of the sealing plate and the small wall panel are adapted to the shape of the through hole, the size of the sealing plate is larger than the size of the through hole, the sealing plate is used to close or open the through hole, the size of the small wall panel is smaller than the size of the through hole, the roller assembly is provided at the top of the small wall panel, the waist wheel assembly is provided on the side of the small wall panel away from the large wall panel, the waist wheel assembly is close to the bottom end of the small wall panel, the waist rail is located below the small wall panel, and the ceiling rail is located above the small wall panel.

5. The target mechanism according to claim 4, characterized in that: A sealing ring is provided on one side of the sealing plate close to the small wall plate. The shape of the sealing ring matches the shape of the through hole. The size of the sealing ring is larger than the size of the through hole. The projection of the through hole on the sealing plate is located on the inner side of the sealing ring.

6. The target material structure according to any one of claims 1 to 5, characterized in that: The movable frame is used for rolling arrangement on the machine base, and further comprises a driving assembly, wherein the driving assembly is used for driving the movable frame to move toward or away from the vacuum chamber.

7. The target mechanism according to claim 6, characterized in that: The mobile frame includes a mobile frame body and two oppositely arranged support members, one end of the two support members is respectively connected to one side of the mobile frame body, one end of the support frame is arranged on one side of the mobile frame body and is located above the two support members, the bottom end of the mobile frame body is provided with two oppositely arranged driving wheels and two oppositely arranged first guide wheels, the bottom end of the support member is provided with a second guide wheel, the two driving wheels, the two first guide wheels and the second guide wheels of the two support members are respectively used for rolling cooperation with the two ground rails of the machine base and can respectively roll along the corresponding ground rails.

8. The target mechanism according to claim 7, characterized in that: The driving assembly includes a driving motor and a chain sprocket module. The driving motor is arranged at the bottom of the mobile frame body. The bottom of the mobile frame body is provided with a through hole that penetrates the bottom end of the mobile frame body. The chain sprocket module is arranged through the through hole. A transmission shaft is connected between the two driving wheels. The chain sprocket module is respectively connected to the driving motor and the transmission shaft. The driving motor is used to drive the transmission shaft to rotate through the chain sprocket module.

9. A magnetron sputtering coating machine, characterized in that: It comprises a target material mechanism, a machine base and a vacuum chamber as claimed in any one of claims 1 to 8, wherein the vacuum chamber is a structure with one end open and the other end closed, the vacuum chamber and the movable frame are arranged on the machine base at intervals along the length direction of the machine base, the closed end of the vacuum chamber is close to the movable frame, and the outer wall of the closed end of the vacuum chamber is provided with a through hole connected to the interior of the vacuum chamber.

10. The magnetron sputtering coating machine according to claim 9, characterized in that: The axial length of the vacuum chamber is greater than 1800 mm.

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