Photoresist conveying device

Abstract

The utility model relates to the technical field of photoresist, in particular to a photoresist conveying device which comprises a base, a storage tank is fixedly mounted on the base, a conveying pipe is fixedly mounted on the side face of the storage tank and communicated with the storage tank, a stirring mechanism is mounted in the storage tank, a thermodetector is fixedly mounted on the surface of the storage tank, and the thermodetector is communicated with the storage tank. A temperature monitoring probe of the thermodetector is located in the storage tank, a heating mechanism is installed in the storage tank, a pump body is fixedly installed on the storage tank, and an air outlet pipe of the pump body is communicated with the storage tank. According to the photoresist storage device, the stirring mechanism is arranged, so that the photoresist is effectively prevented from being crystallized in the storage process, the uniformity and the stability of photoresist conveying are ensured, the heating mechanism is arranged and is matched with the thermodetector 7, the temperature of the photoresist is conveniently kept, the photoresist is prevented from being crystallized in the storage process, and the stability of photoresist conveying is ensured. And the conveying uniformity and stability of the photoresist are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist, in particular to a photoresist conveying device. Background Art

[0002] Photoresist, also known as photoresist, is a light-sensitive mixed liquid. In photolithography, photoresist is a key component, mainly used to transfer the pattern on the mask to a substrate such as a wafer. It changes the solubility of the photoresist through irradiation or radiation of ultraviolet light, electron beam, ion beam, X-ray, etc. In the photolithography process, the photoresist is applied to the substrate, and after exposure, development and other processes, a pattern exactly the same as that on the mask is formed, and then the pattern transfer is completed on the substrate by etching.

[0003] At present, in the semiconductor manufacturing process, the transportation of photoresist plays a vital role in ensuring the quality of wafer processing. However, the existing photoresist transportation device does not have a heating and stirring mechanism during the transportation process, which causes the photoresist to easily crystallize during the transportation process. Utility Model Content

[0004] The utility model aims to solve the above-mentioned shortcomings in the prior art and proposes a photoresist conveying device.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A photoresist delivery device is designed, comprising a base, a storage tank is fixedly mounted on the base, a delivery pipe is fixedly mounted on the side of the storage tank, the delivery pipe is connected to the storage tank, a stirring mechanism is installed in the storage tank, a thermometer is fixedly mounted on the surface of the storage tank, a temperature monitoring probe of the thermometer is in the storage tank, a heating mechanism is installed in the storage tank, a pump body is fixedly mounted on the storage tank, and an air outlet pipe of the pump body is connected to the storage tank.

[0007] Furthermore, the stirring mechanism includes a motor, and the motor is fixedly installed on the top of the storage tank.

[0008] Furthermore, the rotating shaft of the motor rotates and passes through the storage tank, and a rotating rod is fixedly installed at the rotating shaft end of the motor, and the rotating rod is cylindrical in shape.

[0009] Furthermore, a stirring rod is fixedly mounted on the rotating rod, the stirring rod is cylindrical in shape, and there are sixteen stirring rods.

[0010] Furthermore, the heating mechanism includes a spiral tube, which is fixedly installed in the storage tank, and both ends of the spiral tube pass through the storage tank.

[0011] Furthermore, a water tank is fixedly installed on the base, and the water tank is in the shape of a square box. A heater is fixedly installed in the water tank. A conduit is fixedly installed on the side of the water tank. One end of the conduit is connected to the water tank, and the other end of the conduit is fixedly connected to one end of the spiral tube.

[0012] Furthermore, a water pump is fixedly installed on the base, a water inlet pipe of the water pump is connected to a water tank, and a water outlet pipe of the water pump is fixedly connected to the other end of the spiral tube.

[0013] The utility model proposes a photoresist conveying device, which has the beneficial effects of: the utility model is provided with a stirring mechanism, which effectively prevents the photoresist from crystallizing during the storage process, thereby ensuring the uniformity and stability of the photoresist conveying; and by providing a heating mechanism, in conjunction with a thermometer 7, it is convenient to maintain the temperature of the photoresist, prevent the photoresist from crystallizing during the storage process, and ensure the uniformity and stability of the photoresist conveying. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 This is a side view of a new overall structure;

[0016] Figure 3 It is a cross-sectional view of the water tank of the utility model;

[0017] Figure 4 It is a cross-sectional view of the storage tank of the present utility model.

[0018] In the figure: 1. base; 21. conduit; 22. spiral tube; 23. water tank; 24. heater; 25. water pump; 31. motor; 32. rotating rod; 33. stirring rod; 4. delivery pipe; 5. pump body; 6. storage tank; 7. thermometer. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0020] Reference Figure 1-4A photoresist conveying device comprises a base 1, characterized in that: the base 1 is in the shape of a square plate, a storage tank 6 is fixedly mounted on the base 1, the storage tank 6 is in the shape of a cylindrical tank, a conveying pipe 4 is fixedly mounted on the side of the storage tank 6, the conveying pipe 4 is provided to facilitate the conveying of photoresist, the conveying pipe 4 is connected to the storage tank 6, a stirring mechanism is installed in the storage tank 6, the stirring mechanism is provided to effectively prevent the photoresist from crystallizing during the storage process, and the uniformity and stability of the photoresist conveying are ensured, and a temperature measuring device is fixedly mounted on the surface of the storage tank 6 Instrument 7, thermometer 7 is used to monitor the temperature of the photoresist, the temperature monitoring probe of thermometer 7 is in the storage tank 6, and a heating mechanism is installed in the storage tank 6. By providing the heating mechanism and cooperating with the thermometer 7, it is convenient to maintain the temperature of the photoresist, prevent the photoresist from crystallizing during the storage process, and ensure the uniformity and stability of the photoresist transportation. A pump body 5 is fixedly installed on the storage tank 6, and an air outlet pipe of the pump body 5 is connected to the storage tank 6. The pump body 5 is an air pump, which can form a certain pressure in the storage tank 6, thereby pushing the photoresist to be transported through the delivery pipe 4.

[0021] In detail, the stirring mechanism includes a motor 31, which is fixedly installed at the top of the storage tank 6. The motor 31 drives the rotating rod 32 to rotate. The rotating shaft of the motor 31 rotates and passes through the storage tank 6. The rotating rod 32 is fixedly installed at the rotating shaft end of the motor 31. The rotating rod 32 is cylindrical in shape. A stirring rod 33 is fixedly installed on the rotating rod 32. The setting of the stirring rod 33 is convenient for stirring the photoresist. The stirring rod 33 is cylindrical in shape. There are sixteen stirring rods 33. When the photoresist needs to be stirred, start the motor 31, the motor 31 drives the rotating rod 32 to rotate, the rotating rod 32 drives the stirring rod 33 to perform a circular motion, and the stirring rod 33 will stir the photoresist, thereby ensuring the uniformity and stability of the photoresist delivery.

[0022] In more detail, the heating mechanism includes a spiral tube 22, which is fixedly installed in the storage tank 6. Both ends of the spiral tube 22 penetrate the storage tank 6. The setting of the spiral tube 22 is convenient for increasing the flow time of the heated water in the storage tank 6, so as to facilitate heating the photoresist. A water tank 23 is fixedly installed on the base 1. The water tank 23 is in the shape of a square box. Water is set in the water tank 23. A heater 24 is fixedly installed in the water tank 23. By setting the heater 24, the water in the water tank 23 can be heated. A conduit 21 is fixedly installed on the side of the water tank 23. One end of the conduit 21 is connected to the water tank 23, and the other end of the conduit 21 is fixedly connected to one end of the spiral tube 22. By providing a conduit 21, it is convenient for water to return to the water tank 23, so as to achieve the purpose of circulation. A water pump 25 is fixedly installed on the base 1. The water inlet pipe of the water pump 25 is connected to the water tank 23, and the water outlet pipe of the water pump 25 is fixedly connected to the other end of the spiral tube 22. When the photoresist in the storage tank 6 needs to be heated, the heater 24 is turned on, and the heater 24 will heat the water in the water tank 23. After heating for a period of time, the water pump 25 is started, and the water pump 25 transports the heated water to the spiral tube 22. The heated water will flow along the spiral tube 22, and then return to the water tank 23 through the conduit 21 for heating. In this process, the water will heat the photoresist through the spiral tube 22.

[0023] Working mode: When working, a certain pressure can be formed in the storage tank 6 through the pump body 5, thereby pushing the photoresist to be transported through the delivery pipe 4, and in the process of transportation, the motor 31 is started, the motor 31 drives the rotating rod 32 to rotate, and the rotating rod 32 drives the stirring rod 33 to perform a circular motion. The stirring rod 33 will stir the photoresist, thereby ensuring the uniformity and stability of the photoresist transportation. In this process, the thermometer 7 is observed. When the temperature is low, the heater 24 is turned on. The heater 24 will heat the water in the water tank 23. After heating for a period of time, the water pump 25 is started. The water pump 25 transports the heated water to the spiral tube 22. The heated water will flow along the spiral tube 22, and then return to the water tank 23 through the conduit 21 for heating. In this process, the water will heat the photoresist through the spiral tube 22, which is convenient for maintaining the temperature of the photoresist and preventing the photoresist from crystallizing, thereby ensuring the uniformity and stability of the photoresist transportation.

[0024] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A photoresist delivery device, comprising a base (1), characterized in that: A storage tank (6) is fixedly mounted on the base (1), a delivery pipe (4) is fixedly mounted on the side of the storage tank (6), the delivery pipe (4) is connected to the storage tank (6), a stirring mechanism is installed in the storage tank (6), a thermometer (7) is fixedly mounted on the surface of the storage tank (6), a temperature monitoring probe of the thermometer (7) is located in the storage tank (6), a heating mechanism is installed in the storage tank (6), a pump body (5) is fixedly mounted on the storage tank (6), and an air outlet pipe of the pump body (5) is connected to the storage tank (6).

2. A photoresist delivery device according to claim 1, characterized in that: The stirring mechanism comprises a motor (31), and the motor (31) is fixedly mounted on the top of the storage tank (6).

3. A photoresist delivery device according to claim 2, characterized in that: The rotating shaft of the motor (31) rotates and passes through the storage tank (6). A rotating rod (32) is fixedly mounted on the rotating shaft end of the motor (31). The rotating rod (32) is cylindrical in shape.

4. A photoresist delivery device according to claim 3, characterized in that: A stirring rod (33) is fixedly mounted on the rotating rod (32), the stirring rod (33) is cylindrical in shape, and there are sixteen stirring rods (33).

5. A photoresist delivery device according to claim 1, characterized in that: The heating mechanism comprises a spiral tube (22), wherein the spiral tube (22) is fixedly installed in the storage tank (6), and both ends of the spiral tube (22) penetrate the storage tank (6).

6. A photoresist delivery device according to claim 5, characterized in that: A water tank (23) is fixedly mounted on the base (1), the water tank (23) being in the shape of a square box, a heater (24) being fixedly mounted inside the water tank (23), a conduit (21) being fixedly mounted on the side of the water tank (23), one end of the conduit (21) being connected to the water tank (23), and the other end of the conduit (21) being fixedly connected to one end of a spiral tube (22).

7. A photoresist delivery device according to claim 6, characterized in that: A water pump (25) is fixedly mounted on the base (1); a water inlet pipe of the water pump (25) is connected to a water tank (23); and a water outlet pipe of the water pump (25) is fixedly connected to the other end of the spiral tube (22).

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