Film material evaporation structure for vacuum evaporation

Abstract

The utility model discloses a vacuum evaporation membrane material evaporation structure, which is fixed on an evaporation tank and comprises an evaporation boat, a positive pole seat, a negative pole seat and an evaporation boat fixing mechanism, the evaporation boat fixing mechanism is fixed outside the evaporation tank, and a pole seat hole is arranged on the side wall of the evaporation tank. One end of the positive electrode seat is connected with the evaporation boat fixing mechanism, the other end of the positive electrode seat penetrates through the electrode seat hole to be arranged in the evaporation tank, the negative electrode seat is fixed above a bottom plate of the evaporation tank, a first mounting groove is formed in the top of the positive electrode seat and the top of the negative electrode seat, a second mounting groove is formed in the negative electrode seat, and the two ends of the evaporation boat are arranged in the first mounting groove and the second mounting groove respectively; under the condition of no external force, the evaporation boat fixing mechanism pushes the positive electrode seat to move towards the negative electrode seat, so that the evaporation boat is clamped and fixed between the positive electrode seat and the negative electrode seat, and the positive electrode seat can move away from the negative electrode seat and can move left and right along the electrode seat hole under the external force. And the evaporation boat is fixed in a crimping manner, so that the evaporation boat is convenient to disassemble and replace, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of conductive film production and relates to a vacuum evaporated film material evaporation structure. Background Art

[0002] Conductive film is a polymer material with metal coated on the surface. It is widely used in lithium-ion batteries, and is mainly used as a battery current collector in lithium-ion batteries. Vacuum coating is a common method for preparing conductive films. The vacuum coating method is to first place the film material in a vacuum coating chamber, heat and evaporate the film material through an evaporation source, and the evaporated film material particles escape from the surface of the evaporation source and condense on the surface of the substrate to form a film. Vacuum coating is usually resistive heating. The evaporation boat is clamped between the positive and negative electrodes, and the material to be evaporated is placed in the evaporation boat. After the electrodes are connected to the current, the current flows through the evaporation boat to heat the evaporation boat to evaporate the material to be evaporated.

[0003] In the existing vacuum evaporation device, the evaporation boat provides high-temperature heating. The long-term high temperature makes the service life of the evaporation boat significantly lower than that of the electrode. In order to maintain the normal evaporation of the film material, the evaporation boat needs to be replaced frequently. However, the installation and disassembly of the evaporation boat in the existing evaporation boat clamping device is inconvenient, which will waste a lot of time in the process and reduce production efficiency. On the other hand, the evaporation boat working at high voltage and current has poor contact with the electrode, which will easily damage the evaporation boat, thereby shortening the life of the evaporation boat. If the existing evaporation electrode is installed on the electrode hole of the cooling plate, a gap is likely to be left between the evaporation electrode and the electrode hole. During the evaporation process, part of the evaporation material will condense in the gap. For example, during the evaporation of aluminum, aluminum slag will be deposited in the gap between the evaporation electrode and the electrode hole of the cooling plate. If it is not cleaned in time, the deposited aluminum slag will cause conductivity between the electrode and the cooling plate, thereby causing holes to appear on the evaporated aluminum film, affecting product quality.

[0004] The above problems need to be solved urgently. Utility Model Content

[0005] In order to overcome the disadvantages of the inconvenient installation and disassembly of the evaporation boat in the prior art, the utility model provides a vacuum evaporation film material evaporation structure.

[0006] The technical solution of the utility model is as follows:

[0007] A film material evaporation structure for vacuum evaporation, the film material evaporation structure for vacuum evaporation is fixed on an evaporation tank of a vacuum evaporation device, comprising an evaporation boat, a positive electrode seat, a negative electrode seat and an evaporation boat fixing mechanism, the evaporation boat fixing mechanism is fixed outside the evaporation tank, a pole seat hole is provided on the side wall of the evaporation tank, one end of the positive electrode seat is connected to the evaporation boat fixing mechanism, and the other end passes through the pole seat hole and is arranged in the evaporation tank, the negative electrode seat is fixed above the bottom plate of the evaporation tank and is located in the evaporation tank, a first mounting groove is provided on the positive electrode seat on the side opposite to the top of the positive electrode seat and the top of the negative electrode seat, a second mounting groove is provided on the negative electrode seat, and two ends of the evaporation boat are respectively placed in the first mounting groove and the second mounting groove;

[0008] In the absence of external force, the evaporation boat fixing mechanism pushes the positive electrode seat to move toward the negative electrode seat, so that the evaporation boat is clamped and fixed between the positive electrode seat and the negative electrode seat. Under the action of external force, the positive electrode seat can move away from the negative electrode seat, and the positive electrode seat can move left and right along the electrode seat hole.

[0009] Further, in one embodiment, the evaporation boat fixing mechanism includes a base, a support shaft, a movable plate and a tightening assembly, the base is fixedly mounted on the lower end of the bottom plate of the evaporation tank, one end of the support shaft is fixedly mounted on the base, and the other end is slidably plugged into the lower end of the movable plate, and the positive electrode seat is fixedly mounted on the upper end of the movable plate;

[0010] The tightening assembly includes a compression spring and a fixed column, one end of the fixed column is fixedly connected to the evaporation tank, and the other end is provided with a first limit block, the movable plate is slidably inserted on the fixed column, the compression spring is sleeved on the fixed column and is located between the first limit block and the movable plate, and the central axis of the fixed column is parallel to the central axis of the positive electrode seat.

[0011] Furthermore, in one embodiment, spring sleeves are respectively provided at both ends of the compression spring, and the spring sleeves are sleeved on the fixing column and respectively abut against the first limiting block or the movable plate.

[0012] Furthermore, in one embodiment, the positive electrode seat is a columnar body with a stepped boss on the top, and a mica insulating sleeve is provided on the side wall of the positive electrode seat, and the outer diameter of the mica insulating sleeve is smaller than the inner diameter of the electrode seat hole;

[0013] In the evaporation tank, a mica insulating pad is provided at the top of the pole seat hole, and the diameter of the central through hole of the mica insulating pad is larger than the outer diameter of the mica insulating sleeve and smaller than the inner diameter of the pole seat hole.

[0014] Furthermore, in one embodiment, a first protrusion is provided in the first mounting groove, a second protrusion is provided in the second mounting groove, and a first limiting groove and a second limiting groove are provided at both ends of the bottom surface of the evaporation boat respectively, the first protrusion is inserted into the first limiting groove, and the second protrusion is inserted into the second limiting groove.

[0015] Furthermore, in one embodiment, the fixed column and the movable plate are connected via a linear bearing.

[0016] Furthermore, in one embodiment, the support shaft and the movable plate are connected via a linear bearing.

[0017] Furthermore, in one embodiment, a second limit block is provided on the fixed column between the movable plate and the evaporation tank, and the second limit block is used to limit the movable distance of the movable plate toward the negative electrode seat.

[0018] Furthermore, in one embodiment, the negative electrode seat includes an upper electrode seat and a lower electrode seat, the lower electrode seat is fixed to the bottom plate of the evaporation tank, and the upper electrode seat is bolted to the lower electrode seat.

[0019] Furthermore, in one embodiment, a cooling water channel is provided in the positive electrode seat.

[0020] The utility model according to the above scheme has the beneficial effect that the positive electrode seat and the negative electrode seat are vertically arranged, the evaporation boat fixing structure is designed to make the positive electrode seat movable, the evaporation boat is clamped between the electrode seats, and the evaporation boat is clamped and fixed by crimping, thereby facilitating the disassembly and replacement of the evaporation boat and improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the utility model;

[0022] Figure 2 for Figure 1 The main exploded view of

[0023] Figure 3 for Figure 2 A schematic diagram of the structure of the evaporation boat from above;

[0024] Figure 4 for Figure 1 Schematic diagram of the top view of the structure without evaporation boat.

[0025] In the figure, 100, evaporation tank; 110, bottom plate of evaporation tank; 120, side wall of evaporation tank; 200, positive electrode seat; 210, first protrusion; 220, first mounting groove; 300, negative electrode seat; 310, upper electrode seat; 3101, second protrusion; 3102, second mounting groove; 320, lower electrode seat; 400, evaporation boat; 410, first limiting groove; 420, second limiting groove; 500, evaporation boat fixing mechanism; 510, base; 520, movable plate; 5301, fixing column; 5302, first limiting block; 5303, compression spring; 5304, second limiting block; 5305, spring sleeve; 540, support shaft; 600, mica insulating sleeve; 700, mica insulating pad; 800 cooling water circuit. DETAILED DESCRIPTION

[0026] The utility model is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on another element or there can be one or more centered elements therebetween. When an element is described as "connected" to another element, it can be directly connected to another element or there can be one or more centered elements therebetween. The terms "vertical", "horizontal", "left", "right", "inside", "outside" and similar expressions used in this specification are for illustrative purposes only. In the description of the utility model, the terms "first" and "second" are used only for descriptive purposes and cannot be understood as indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, unless otherwise specified, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features; the meaning of "multiple" is two or more. The term "include" and any variation thereof means non-exclusive inclusion, and one or more other features, integers, steps, operations, units, components and / or combinations thereof may be present or added.

[0027] In addition, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediate medium, or a connection between two components. All technical and scientific terms used in this specification have the same meaning as those generally understood by technicians in the technical field of the present utility model. The terms used in the specification of the present utility model are only for the purpose of describing specific embodiments and are not used to limit the present utility model. The term "and / or" used in this specification includes any and all combinations of one or more related listed items.

[0028] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0029] like Figure 1 and Figure 4 As shown, the present application provides a vacuum-evaporated film evaporation structure, which is fixed on an evaporation tank 100 of a vacuum evaporation device, and includes an evaporation boat 400, a positive electrode seat 200, a negative electrode seat 300 and an evaporation boat fixing mechanism 500, wherein the evaporation boat fixing mechanism 500 is fixed to the outside of the evaporation tank 100, and a pole seat hole (not shown in the figure) is provided on the side wall 120 of the evaporation tank, one end of the positive electrode seat 200 is connected to the evaporation boat fixing mechanism 500, and the other end passes through the pole seat hole and is arranged in the evaporation tank 100, and the negative electrode seat 300 is fixed above the bottom plate 110 of the evaporation tank and is located in the evaporation tank 100, and the positive electrode seat 200 is connected to the positive electrode seat 200. The bottom plate 110 of the evaporation tank is provided with a positive electrode seat 300, and the positive electrode seat 300 is provided with a positive electrode seat 300. On the side opposite to the top of the seat 200 and the top of the negative electrode seat 300, a first mounting groove 220 is provided on the positive electrode seat 200, and a second mounting groove 3102 is provided on the negative electrode seat 300. Both ends of the evaporation boat 400 are respectively placed in the first mounting groove 220 and the second mounting groove 3102; the positive electrode seat 200 can move left and right along the electrode seat hole, and in the absence of external force, the evaporation boat fixing mechanism 500 pushes the positive electrode seat 200 to move toward the negative electrode seat 300, so that the evaporation boat 400 is clamped and fixed between the positive electrode seat 200 and the negative electrode seat 300. Under the action of external force, the positive electrode seat 200 can move away from the negative electrode seat 300 to remove the evaporation boat 400. The design of this embodiment sets the positive electrode seat 200 and the negative electrode seat 300 vertically, and the fixing structure of the evaporation boat 400 enables the positive electrode seat 200 to move left and right. A first mounting groove 220 and a second mounting groove 3102 are set on the top of the positive electrode seat 200 and the negative electrode seat 300 to clamp the evaporation boat 400 between the electrode seats, and the evaporation boat 400 is clamped and fixed by crimping, thereby facilitating the disassembly and replacement of the evaporation boat 400 and improving work efficiency.

[0030] like Figure 2As shown, in this embodiment, the evaporation boat fixing mechanism 500 includes a base 510, a support shaft 540, a movable plate 520 and a tightening assembly, the base 510 is fixedly installed at the lower end of the bottom plate 110 of the evaporation tank, one end of the support shaft 540 is fixedly installed on the base 510, and the other end is slidably inserted into the lower end of the movable plate 520, and the positive electrode seat 200 is fixedly installed at the upper end of the movable plate 520; the tightening assembly 530 includes a compression spring 5303 and a fixed column 5301, one end of the fixed column 5301 is fixedly connected to the evaporation tank 100, and the other end is provided with a first limit block 5302, the movable plate 520 is slidably inserted into the fixed column 5301, the compression spring 5303 is sleeved on the fixed column 5301 and is located between the first limit block 5302 and the movable plate 520, and the central axis of the fixed column 5301 is parallel to the central axis of the positive electrode seat 200. The base 510 provides a support point for the support shaft 540, so that the movable plate 520 has a fixed connection structure, ensuring that the positive electrode seat 200 connected to the movable plate 520 can only move left and right along the electrode seat hole, ensuring that the relative position of the positive electrode seat 200 and the negative electrode seat 300 does not change. The two ends of the compression spring 5303 on the fixed column 5301 are respectively in contact with the first limit block 5302 and the movable plate 520, and the movable plate 520 pushes the positive electrode seat 200 to move toward the negative electrode seat 300 under the pressure of the spring, thereby clamping the evaporation boat 400, or can be pressed by the external force, The compression spring 5303, so that the movable plate 520 drives the positive electrode seat 200 away from the negative electrode seat 300, so that the removal of the evaporation boat 400 is simple and convenient.

[0031] In other embodiments, the specific structure of the evaporation boat fixing mechanism 500 can be changed to ensure that the positive electrode seat 200 moves toward the negative electrode seat 300 in the electrode seat hole when no external force is applied.

[0032] In this embodiment, spring sleeves 5305 are respectively provided at both ends of the compression spring 5303, and the spring sleeves 5305 are sleeved on the fixed column 5301 and respectively abut against the first limit block 5302 or the movable plate 520. The spring sleeves 5305 provide a buffer for the contact between the compression spring 5303 and the movable plate 520 or the first limit block 5302, and prevent the compression spring 5303 from sliding on the movable plate 520 or the first limit block 5302, resulting in a change in the direction or size of the elastic force of the compression spring 5303, and ensure that the movable plate 520 has a sufficient set displacement, so as to facilitate the normal clamping and fixing of the evaporation boat 400, so as to facilitate the replacement of the evaporation boat 400.

[0033] like Figure 4 and Figure 2As shown, in this embodiment, the positive electrode seat 200 is a columnar body with a stepped boss on the top, and a mica insulating sleeve 600 is provided on the side wall of the positive electrode seat 200, and the outer diameter of the mica insulating sleeve 600 is smaller than the inner diameter of the electrode seat hole; in the evaporation tank 100, a mica insulating pad 700 is provided on the top of the electrode seat hole, and the diameter of the central through hole of the mica insulating pad 700 is larger than the outer diameter of the mica insulating sleeve 600 and smaller than the inner diameter of the electrode seat hole. The mica insulating sleeve 600 and the mica insulating pad 700 form an insulating layer to prevent the evaporation material from conducting the positive electrode seat 200 and the evaporation tank 100, thereby ensuring the normal evaporation and the quality of the evaporation film.

[0034] like Figure 2-Figure 4 As shown, in this embodiment, the first mounting groove 220 is provided with a first protrusion 210, the second mounting groove 3102 is provided with a second protrusion 3101, and the two ends of the bottom surface of the evaporation boat 400 are respectively provided with a first limiting groove 410 and a second limiting groove 420, the first protrusion 210 is inserted into the first limiting groove 410, and the second protrusion 3101 is inserted into the second limiting groove 420. The contact area between the pole seat and the evaporation boat 400 is increased by using the protrusion and the limiting groove, so that the current transmission is more stable, and the evaporation boat 400 is convenient for heating.

[0035] In one embodiment, the fixed column 5301 is connected to the movable plate 520 via a linear bearing. The support shaft 540 is also connected to the movable plate 520 via a linear bearing. The central axis of the fixed column 5301 and the support shaft 540 are parallel to the moving line of the positive electrode seat 200. The use of a linear bearing to sleeve the movable plate 520 on the fixed column and the support shaft 540 is conducive to reducing the friction between the movable plate 520 and the fixed column and the support shaft 540, so that the position movement of the movable plate 520 depends largely on the deformation of the compression spring 5303, reducing structural losses, and helping to extend the service life of the compression spring 5303.

[0036] In one embodiment, a second limit block 5304 is provided on the fixed column 5301 between the movable plate 520 and the evaporation tank 100, and the second limit block 5304 is used to limit the movable distance of the movable plate 520 toward the negative electrode holder 300, so as to prevent the external force from pushing the movable plate 520 to damage the negative electrode holder 300.

[0037] In one embodiment, the negative electrode holder 300 includes an upper electrode holder 310 and a lower electrode holder 320. The lower electrode holder 320 is fixed to the bottom plate 110 of the evaporation tank, and the upper electrode holder 310 is bolted to the lower electrode holder 320. The negative electrode holder 300 is arranged in a split type, which is convenient for replacement and maintenance, and helps to improve work efficiency.

[0038] like Figure 2As shown, in this embodiment, a cooling water channel 800 is provided in the positive electrode seat 200. The cooling water channel 800 reduces the temperature of the electrode seat and increases the service life of the electrode seat.

[0039] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0040] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A vacuum evaporation film material evaporation structure, wherein the vacuum evaporation film material evaporation structure is fixed on an evaporation tank of a vacuum evaporation device, characterized in that: It comprises an evaporation boat, a positive electrode seat, a negative electrode seat and an evaporation boat fixing mechanism, wherein the evaporation boat fixing mechanism is fixed outside the evaporation tank, a pole seat hole is provided on the side wall of the evaporation tank, one end of the positive electrode seat is connected to the evaporation boat fixing mechanism, and the other end passes through the pole seat hole and is arranged in the evaporation tank, the negative electrode seat is fixed above the bottom plate of the evaporation tank and is located in the evaporation tank, a first mounting groove is provided on the positive electrode seat on the side opposite to the top of the positive electrode seat and the top of the negative electrode seat, a second mounting groove is provided on the negative electrode seat, and two ends of the evaporation boat are respectively placed in the first mounting groove and the second mounting groove; In the absence of external force, the evaporation boat fixing mechanism pushes the positive electrode seat to move toward the negative electrode seat, so that the evaporation boat is clamped and fixed between the positive electrode seat and the negative electrode seat. Under the action of external force, the positive electrode seat can move away from the negative electrode seat, and the positive electrode seat can move left and right along the electrode seat hole.

2. The vacuum evaporation film evaporation structure according to claim 1, characterized in that: The evaporation boat fixing mechanism comprises a base, a support shaft, a movable plate and a tightening assembly, wherein the base is fixedly mounted on the lower end of the bottom plate of the evaporation tank, one end of the support shaft is fixedly mounted on the base, and the other end is slidably plugged into the lower end of the movable plate, and the positive electrode seat is fixedly mounted on the upper end of the movable plate; The tightening assembly includes a compression spring and a fixed column, one end of the fixed column is fixedly connected to the evaporation tank, and the other end is provided with a first limit block, the movable plate is slidably inserted on the fixed column, the compression spring is sleeved on the fixed column and is located between the first limit block and the movable plate, and the central axis of the fixed column is parallel to the central axis of the positive electrode seat.

3. The vacuum evaporation film evaporation structure according to claim 2, characterized in that: Spring sleeves are respectively provided at both ends of the compression spring. The spring sleeves are sleeved on the fixing column and respectively abut against the first limiting block or the movable plate.

4. The vacuum evaporation film evaporation structure according to claim 1, characterized in that: The positive electrode seat is a columnar body with a stepped boss on the top, and a mica insulating sleeve is provided on the side wall of the positive electrode seat, and the outer diameter of the mica insulating sleeve is smaller than the inner diameter of the electrode seat hole; In the evaporation tank, a mica insulating pad is provided at the top of the pole seat hole, and the diameter of the central through hole of the mica insulating pad is larger than the outer diameter of the mica insulating sleeve and smaller than the inner diameter of the pole seat hole.

5. The vacuum evaporation film evaporation structure according to claim 1, characterized in that: A first protrusion is provided in the first installation groove, a second protrusion is provided in the second installation groove, and first and second limiting grooves are provided at both ends of the bottom surface of the evaporation boat respectively. The first protrusion is inserted into the first limiting groove, and the second protrusion is inserted into the second limiting groove.

6. The vacuum evaporation film evaporation structure according to claim 2, characterized in that: The fixed column and the movable plate are connected via a linear bearing.

7. The vacuum evaporation film evaporation structure according to claim 2, characterized in that: The support shaft and the movable plate are connected via a linear bearing.

8. The vacuum evaporation film evaporation structure according to claim 2, characterized in that: A second limit block is provided on the fixed column between the movable plate and the evaporation tank, and the second limit block is used to limit the movable distance of the movable plate toward the negative electrode seat.

9. The vacuum evaporation film evaporation structure according to claim 1, characterized in that: The negative electrode seat comprises an upper electrode seat and a lower electrode seat, wherein the lower electrode seat is fixed on the bottom plate of the evaporation tank, and the upper electrode seat is bolted to the lower electrode seat.

10. The vacuum evaporation film evaporation structure according to claim 1, characterized in that: A cooling water channel is arranged in the positive electrode seat.

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